Semiconductor cleaning apparatus nozzle angle adjustment bracket structure

Abstract

This utility model relates to the field of semiconductor technology and discloses a nozzle angle adjustment bracket structure for semiconductor cleaning equipment. The structure includes an adjustment frame and a mounting base. A servo motor is fixedly connected to the left side of the adjustment frame, and the output end of the servo motor passes through the left side of the adjustment frame and is fixedly connected to a spray nozzle. A chuck is rotatably connected to the right side of the adjustment frame, and the left end of the chuck passes through the right side of the adjustment frame and is fixedly connected to the right side of the outer wall of the spray nozzle. Multiple slots are provided on the outer wall of the chuck. A fixing frame is fixedly connected to the right side of the adjustment frame, and an air rod is fixedly connected to the inner side of the fixing frame. In this utility model, after the spray nozzle angle is adjusted, the air rod drives the locking component to insert into the corresponding slot, thereby locking the spray nozzle. When rinsing the semiconductor, the locking support of the chuck prevents impact sliding between the adjustment frame and the spray nozzle, improving the stability of the spray nozzle.

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