A continuous conveyor UV curing machine

Abstract

This utility model relates to a continuous conveyor UV curing machine, comprising: a lifting box, a glass plate, a lifting device, a UV lamp, and a casing. The casing is fixedly connected to the frame of a belt conveyor. Access openings are formed on the front and rear sides of the casing. The lifting device is installed inside the casing and drives the lifting box to move up and down. A through opening is formed on the top surface of the lifting box. The glass plate seals the opening and is fixedly connected to the lifting box. The UV lamp is located above the glass plate. The lifting box has an air inlet and an air outlet. In this utility model, the semiconductor continuously enters the casing via the belt conveyor, and the UV adhesive coated on it is irradiated by the UV lamp. Manual movement and installation of the semiconductor to a designated position are not required, thus improving the curing efficiency of the UV adhesive on the semiconductor. After sealing, the lifting box or fixed plate extracts air and fills it with nitrogen, thereby reducing the oxygen content around the UV adhesive on the semiconductor, ensuring the quality of UV adhesive curing, and preventing the oxygen-sensitive material from yellowing and failing to polymerize.

Description

Technical Field

[0001] This utility model relates to the field of UV curing, and in particular to a continuous conveying UV curing machine. Background Technology

[0002] In semiconductor manufacturing, it's necessary to shield certain areas of the semiconductor to prevent damage to these non-processed areas during subsequent processing. Currently, this is done by covering the non-processed areas with UV adhesive before processing and then curing the adhesive. After processing, the cured UV adhesive is peeled off from the non-processed areas. However, the current curing process relies on manual loading and unloading, resulting in low efficiency.

[0003] Meanwhile, UV adhesive curing can cause problems such as yellowing and failure to polymerize in oxygen-sensitive materials. Utility Model Content

[0004] The present invention aims to solve the above problems by providing a continuous conveying UV curing machine, which solves the problem of low efficiency in UV curing of UV adhesives.

[0005] A continuous conveyor UV curing machine includes: a lifting box, a glass plate, a lifting device, a UV lamp, and a casing. The casing is fixedly connected to the frame of a belt conveyor. The front and rear sides of the casing have access openings. The lifting device is installed inside the casing and drives the lifting box to move up and down. The top surface of the lifting box has a vertically penetrating opening. The glass plate seals the opening and is fixedly connected to the lifting box. The UV lamp is located above the glass plate. The lifting box has an air inlet and an air outlet.

[0006] Preferably, the belt conveyor further includes a conveyor belt and a support plate, the support plate being located below the lifting box, the support plate being fixedly connected to the frame, and the conveyor belt being in contact with the support plate.

[0007] Preferably, it further includes a fixing plate, which is annular around the opening of the lifting box body. The fixing plate is located below the top surface of the lifting box body and is fixedly connected to the top surface of the lifting box body. The fixing plate is fixedly connected to an elastic sealing element, which is annular.

[0008] Preferably, the elastic seal is located between the side of the lifting box and the fixed plate, and the elastic seal is made of foam plastic.

[0009] Preferably, the side of the lifting box has a first bending plate formed inward, and the fixing plate has a second bending plate formed outward, and the first bending plate and the second bending plate are fixedly connected to the elastic sealing element.

[0010] Preferably, it also includes an oxygen sensor, an inlet pipe, and an outlet pipe. The fixing plate has an inlet hole and an outlet hole. The inlet pipe passes through the inlet pipe hole and is fixedly connected to the inlet hole. The inlet pipe is connected to a nitrogen cylinder. The outlet pipe passes through the outlet pipe hole and is fixedly connected to the outlet hole. The outlet pipe is connected to an air pump and an oxygen sensor.

[0011] Preferably, the system further includes a control device and a solenoid valve. The solenoid valve is provided between the air inlet pipe and the nitrogen cylinder. The control device is electrically connected to the solenoid valve, the air pump, and the oxygen sensor, respectively.

[0012] Preferably, the lifting device is an electric push rod, and the lifting box is fixedly connected to the push rods of the two lifting devices.

[0013] Preferably, it also includes a light box and a mounting bracket. The UV lamp is fixedly connected to the light box, and the mounting bracket is fixedly connected to the housing. The mounting bracket has multiple fixing grooves formed in the vertical direction. Screws pass through the fixing grooves and are threadedly connected to the light box to fix the mounting bracket and the light box.

[0014] Preferably, the frame also includes a guide plate and a stop block. The inlet and outlet ends of the frame are fixedly connected to the guide plate and the stop block, respectively. The guide plates arranged on the left and right sides have a guide surface on their opposite sides.

[0015] Preferably, photoelectric sensors are installed at the inlet and outlet ends and the middle part of the frame.

[0016] This invention has the following advantages: the semiconductors are continuously fed into the housing by the belt conveyor, and the UV adhesive coated on them is irradiated by UV lamps. There is no need for manual movement and installation of the semiconductors to the designated positions, which improves the curing efficiency of the UV adhesive on the semiconductors; the lifting box or fixing plate is filled with nitrogen while the air is extracted after sealing, thereby reducing the oxygen content around the UV adhesive on the semiconductors, ensuring the quality of UV adhesive curing, and avoiding yellowing and non-polymerization of oxygen-sensitive materials in the UV adhesive. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0018] Figure 1 : A three-dimensional structural schematic diagram of this utility model;

[0019] Figure 2 : A three-dimensional structural diagram of the present invention with the chassis removed;

[0020] Figure 3 : A top view of the structure of this utility model;

[0021] Figure 4 :exist Figure 3 Schematic diagram of the cross-sectional structure at point AA;

[0022] Figure 5 :exist Figure 4 A magnified schematic diagram of the local structure at point B;

[0023] Figure 6 :exist Figure 4 A schematic diagram of the cross-sectional structure at the CC section;

[0024] Figure 7 :exist Figure 6 A magnified schematic diagram of the structure at point D. Detailed Implementation

[0025] The present invention will be further described below with reference to the accompanying drawings and examples:

[0026] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0027] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0028] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0029] like Figures 1 to 7As shown, a continuous conveying UV curing machine includes: a lifting box 1, a glass plate 2, a lifting device 4, a UV lamp 5, and a casing 6. The casing 6 is fixedly connected to the frame 85 of a belt conveyor 8. The casing 6 has passage openings 61 on its front and rear sides. The lifting device 4 is installed inside the casing 6 and drives the lifting box 1 to move up and down. The top surface of the lifting box 1 has a vertically penetrating opening. The glass plate 2 seals the opening and is fixedly connected to the lifting box 1. The UV lamp 5 is located above the glass plate 2. The lifting box 1 has an air inlet 12 and an air outlet 11.

[0030] Preferably, the belt conveyor 8 further includes a conveyor belt 81 and a support plate 83. The support plate 83 is located below the lifting box 1 and is fixedly connected to the frame 85. The conveyor belt 81 is in contact with the support plate 83 and supports the support plate 83. When the conveyor belt 81 is subjected to downward pressure, it prevents the conveyor belt 8 from bending excessively downward.

[0031] Preferably, the system further includes a fixing plate 3, which is annular around the opening of the lifting housing 1. The fixing plate 3 is located below the top surface of the lifting housing 1 and is fixedly connected to the top surface of the lifting housing 1. The fixing plate 3 is fixedly connected to an elastic sealing element 9, which is annular. It should be noted that the annular shape is a closed structure with its ends connected, and is not limited to a circular ring. For example, it can be... Figure 6 The image shows a rectangular ring.

[0032] Optionally, the elastic seal 9 is a silicone or rubber gasket, and the elastic seal 9 is located below the fixing plate 3 and is fixedly connected to the fixing plate 3.

[0033] Optionally, the elastic seal 9 is made of foam plastic. The elastic seal 9 is located between the side of the lifting box 1 and the fixing plate 3. When making the elastic seal 9, the foam plastic is filled between the fixing plate 3 of the lifting box 1 and then cured, and then shaped.

[0034] Preferably, the lifting box 1 has a first bending plate 13 formed inward on its side, and the fixing plate 3 has a second bending plate 34 formed outward. The first bending plate 13 and the second bending plate 34 are fixedly connected to the elastic sealing element 9. The first bending plate 13 and the second bending plate 34 can be embedded in the elastic sealing element 9 to improve the reliability of the fixed connection.

[0035] Preferably, it also includes an oxygen sensor 7, an inlet pipe and an outlet pipe. The fixing plate 3 has an inlet hole 32 and an outlet hole 31. The inlet pipe passes through the inlet pipe hole 12 and is fixedly connected to the inlet hole 32. The inlet pipe is connected to a nitrogen cylinder. The outlet pipe passes through the outlet pipe hole 11 and is fixedly connected to the outlet hole 31. The outlet pipe is connected to an air pump and to the oxygen sensor 7.

[0036] Preferably, it also includes a control device and a solenoid valve. A solenoid valve is provided between the air inlet pipe and the nitrogen cylinder. The control device is electrically connected to the solenoid valve, the air pump, and the oxygen sensor 7, respectively.

[0037] Preferably, the lifting device 4 is an electric push rod, and the lifting box 1 is fixedly connected to the push rods 41 of the two lifting devices 4.

[0038] Preferably, the system further includes a light box 51 and a mounting bracket 52. The UV lamp 5 is fixedly connected to the light box 51, and the mounting bracket 52 is fixedly connected to the housing 6. The mounting bracket 52 has multiple mounting slots 521 formed along the vertical direction. Screws pass through the mounting slots 521 and are threadedly connected to the light box 51 to fix the mounting bracket 52 and the light box 51. The height of the light box 51 from the lifting housing 1 can be adjusted by passing screws through different mounting slots 521.

[0039] Preferably, the frame 85 also includes a guide plate 82 and a stop block 84. The inlet and outlet ends of the frame 85 are fixedly connected to the guide plate 82 and the stop block 84, respectively. The guide plates 82, which are arranged opposite to each other on the left and right sides, have a guide surface 821 formed on the opposite side.

[0040] Preferably, photoelectric sensors are installed at the inlet and outlet ends and in the middle of the frame 85. The photoelectric sensor at the inlet end detects whether the semiconductor has entered the belt conveyor 8, the photoelectric sensor at the outlet end detects whether the semiconductor has reached the outlet end of the belt conveyor 8, and the photoelectric sensor in the middle is used to detect whether the semiconductor is located at the processing position below the lifting box 1. The next operation can only be carried out after the semiconductor is in the designated position.

[0041] During operation, the semiconductor enters the belt conveyor 8 and comes into contact with the conveyor belt 81. The conveyor belt 81 drives the semiconductor to move synchronously. After entering the two guide plates 82, the semiconductor moves to the designated position on the conveyor belt 81 under the guidance of the guide surface 821.

[0042] The semiconductor enters the housing 6 through port 61. When the semiconductor moves to below the glass plate 2, the conveyor belt 81 stops moving. The push rod 41 of the lifting device 4 moves downward, driving the lifting box 1 downward until the bottom of the elastic seal 9 contacts the conveyor belt 81. The elastic seal 9 undergoes elastic deformation, sealing the space inside the fixed plate 3 together with the conveyor belt 81.

[0043] The air pump operates by drawing air out of the fixed plate 3 through the outlet pipe. Simultaneously, the solenoid valve opens, allowing nitrogen from the nitrogen cylinder to enter the fixed plate 3 through the inlet pipe. The oxygen sensor 7 monitors the oxygen content inside the fixed plate 3 in real time. When the oxygen content falls below a set value, the UV lamp 5 activates. The ultraviolet light emitted by the UV lamp 5 passes through the glass plate 2 and irradiates the UV adhesive coated on the semiconductor until the UV adhesive cures. During the UV adhesive curing process, if the oxygen sensor 7 detects that the oxygen content is higher than the set value, air is drawn out again and nitrogen is added.

[0044] After a set time, the UV adhesive is cured. Then, the lifting device 4 drives the lifting box 1 to move upward and reset, and the conveyor belt 81 moves to carry the semiconductor out of the machine box 6 through another port 61.

[0045] The semiconductor is finally blocked and positioned by stop 84, making it easier for the robotic arm to remove it from the belt conveyor 8.

[0046] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A continuous conveyor UV curing machine characterized by, include: The lifting box (1), glass plate (2), lifting device (4), UV lamp (5) and chassis (6) are fixedly connected to the frame (85) of the belt conveyor (8). The front and rear sides of the chassis (6) are respectively formed with passage openings (61). The lifting device (4) is installed inside the chassis (6) and drives the lifting box (1) to move up and down. The top surface of the lifting box (1) is formed with an opening that runs through it. The glass plate (2) seals the opening and is fixedly connected to the lifting box (1). The UV lamp (5) is located above the glass plate (2). The lifting box (1) is respectively formed with an air inlet hole (12) and an air outlet hole (11).

2. A continuous conveyor UV curing machine according to claim 1, wherein: The belt conveyor (8) also includes a conveyor belt (81) and a support plate (83). The support plate (83) is located below the lifting box (1). The support plate (83) is fixedly connected to the frame (85). The conveyor belt (81) is in contact with the support plate (83).

3. A continuous conveyor UV curing machine according to claim 1, wherein: It also includes a fixing plate (3), which is annular around the opening of the lifting box (1). The fixing plate (3) is located below the top surface of the lifting box (1) and is fixedly connected to the top surface of the lifting box (1). The fixing plate (3) is fixedly connected to the elastic seal (9), which is annular.

4. A continuous conveyor UV curing machine according to claim 3, wherein: The elastic seal (9) is located between the side of the lifting box (1) and the fixing plate (3), and the elastic seal (9) is made of foam plastic.

5. A continuous conveyor UV curing machine according to claim 4 wherein: The lifting box (1) has a first bending plate (13) formed inward on its side, and the fixing plate (3) has a second bending plate (34) formed outward. The first bending plate (13) and the second bending plate (34) are fixedly connected to the elastic sealing element (9).

6. A continuous conveyor UV curing machine according to claim 3, wherein: It also includes an oxygen sensor (7), an inlet pipe and an outlet pipe. The fixing plate (3) has an inlet hole (32) and an outlet hole (31). The inlet pipe passes through the inlet pipe hole (12) and is fixedly connected to the inlet hole (32). The inlet pipe is connected to a nitrogen cylinder. The outlet pipe passes through the outlet pipe hole (11) and is fixedly connected to the outlet hole (31). The outlet pipe is connected to an air pump and the outlet pipe is connected to the oxygen sensor (7).

7. A continuous conveyor UV curing machine according to claim 6 wherein: It also includes a control device and a solenoid valve. A solenoid valve is provided between the air inlet pipe and the nitrogen cylinder. The control device is electrically connected to the solenoid valve, the air pump and the oxygen sensor (7) respectively.

8. The continuous conveyor UV curing machine of claim 1, wherein: The lifting device (4) is an electric push rod, and the lifting box (1) is fixedly connected to the push rods (41) of the two lifting devices (4).

9. The continuous conveyor UV curing machine of claim 1, wherein: It also includes a light box (51) and a mounting bracket (52). The UV lamp (5) is fixedly connected to the light box (51), and the mounting bracket (52) is fixedly connected to the chassis (6). The mounting bracket (52) has multiple mounting grooves (521) formed in the vertical direction. Screws pass through the mounting grooves (521) and are threadedly connected to the light box (51) to fix the mounting bracket (52) and the light box (51).

10. The continuous conveyor UV curing machine of claim 1, wherein: It also includes guide plates (82) and stops (84). The inlet and outlet ends of the frame (85) are fixedly connected to the guide plates (82) and stops (84) respectively. The guide plates (82) arranged opposite to each other on the left and right sides have a guide surface (821) on the opposite side. Photoelectric sensors are installed at the inlet and outlet ends and the middle part of the frame (85).

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