An atmospheric pressure microwave jet plasma device

Abstract

This utility model relates to the field of plasma device technology, and more particularly to an atmospheric pressure microwave jet plasma device. It primarily addresses the problems of mainstream vacuum plasma cleaners, which rely on low-pressure environments, resulting in high equipment costs, complex vacuum environment setup and maintenance, and potential impacts on processing efficiency, thus hindering the widespread application of low-temperature plasma technology. The proposed technical solution includes a controller for outputting microwave signals and process gases; a nozzle module connected to the controller for generating plasma to clean objects; and a fixing plate fixedly connected to the side of the nozzle module, on which a mounting bracket is installed for fixing the nozzle module to the production line frame. This utility model can operate at atmospheric pressure, avoiding the problems associated with vacuum environments, thus reducing costs and operational difficulty, while ensuring stable and efficient operation, facilitating the widespread application of plasma technology.

Description

Technical Field

[0001] This utility model relates to the field of plasma device technology, and in particular to an atmospheric pressure microwave jet plasma device. Background Technology

[0002] In the field of microelectronics, low-temperature plasma cleaners have gained widespread application due to their unique performance. However, in most application scenarios, plasma generation often relies on a low-pressure environment. This characteristic results in significant shortcomings for current mainstream vacuum plasma cleaners: on the one hand, the manufacturing and purchase costs of such equipment are high, significantly increasing the entry barrier for related applications; on the other hand, the setup and maintenance of a vacuum environment are cumbersome and complex, requiring high levels of professional skills from operators, and in actual operation, unstable vacuum levels can easily affect the processing results. These factors collectively restrict the further promotion and application of low-temperature plasma technology in industries and scenarios outside of microelectronics, making it difficult to meet the broader demand for efficient and convenient plasma processing technology. Therefore, this invention proposes an atmospheric pressure microwave jet plasma device. Utility Model Content

[0003] The purpose of this invention is to address the problems in the background technology where mainstream vacuum plasma cleaners rely on low-pressure environments, resulting in high equipment costs, complex vacuum environment setup and maintenance, and issues that can affect processing performance, thus hindering the widespread application of low-temperature plasma technology. This invention proposes an atmospheric pressure microwave jet plasma device.

[0004] The technical solution of this utility model is as follows: an atmospheric pressure microwave jet plasma device, including a controller for outputting microwave signals and process gases; a nozzle module connected to the controller for generating plasma to clean objects; and a fixing plate fixedly connected to the side of the nozzle module, on which a mounting bracket is installed for fixing the nozzle module to the production line frame.

[0005] Optionally, the controller includes a housing in which a solid-state microwave source is installed, and a microwave output interface is installed on one side of the solid-state microwave source.

[0006] Optionally, the solid-state microwave source is provided with a power interface and a power output interface on its side.

[0007] Optionally, a first gas input interface and a flow meter and pressure regulating valve connected thereto are also installed on the side of the solid-state microwave source, and a gas output interface is installed on the other side of the solid-state microwave source.

[0008] Optionally, the solid-state microwave source is provided with an I / O interface and a touch screen on its side.

[0009] Optionally, the nozzle module includes a nozzle resonant cavity. A microwave input interface, a second gas input interface, and a power input interface are mounted on the top of the nozzle resonant cavity. The microwave output interface is connected to the microwave input interface via a coaxial cable, and the microwave signal is transmitted to the inside of the nozzle resonant cavity through the coaxial cable. The gas output interface is connected to the second gas input interface via a PU tube, delivering the process gas to be excited into the nozzle resonant cavity. The power output interface is connected to the power input interface via a three-core cable, and the nozzle module is powered by a controller.

[0010] Optionally, a recovery hopper is connected below the nozzle resonant cavity.

[0011] Optionally, the mounting bracket includes a mounting plate, a first fixing column fixedly connected to the side of the mounting plate, a first rotating disk rotatably connected to the first fixing column, two sets of fixing blocks fixedly connected to the side of the first rotating disk away from the mounting plate, fixing rods fixedly connected to the fixing blocks, a connecting plate fixedly connected to the ends of the two sets of fixing rods away from the fixing blocks, a second fixing column fixedly connected to the side of the connecting plate, a second rotating disk rotatably connected to the second fixing column, a connecting frame fixedly connected to the side of the second rotating disk, the connecting frame being L-shaped, the connecting frame being fixedly connected to the fixing plate, and the fixing plate being fixedly connected to the nozzle resonant cavity.

[0012] Optionally, both the first and second rotating disks are provided with positioning components, which are used to fix the positions of the first and second rotating disks.

[0013] Optionally, the positioning component includes an arc-shaped groove. Two sets of arc-shaped grooves are provided on both the first rotating disk and the second rotating disk. A bolt is slidably disposed in the arc-shaped groove. A washer is sleeved on the bolt. The bolt is threadedly connected to the mounting plate or connecting plate.

[0014] In summary, this application includes at least one of the following beneficial technical effects:

[0015] This invention allows operators to easily set cleaning parameters such as power, gas flow rate, and cleaning time via a touchscreen, while also enabling real-time monitoring of equipment operation status and related data. The flow meter and pressure regulating valve precisely control the flow rate and pressure of the process gas, ensuring stable and uniform gas entry into the plasma excitation region. Combined with the stable high-frequency energy output of the solid-state microwave source, the stability of plasma generation is ensured, thereby guaranteeing the consistency of the cleaning process and excellent cleaning results. Furthermore, the I / O interface enables communication and collaboration with external devices, facilitating automated control or integration with production lines, improving operational convenience, eliminating dependence on a vacuum environment, and allowing plasma cleaning to be performed under atmospheric pressure.

[0016] Furthermore, the first rotating disk in the mounting bracket can rotate around the first fixed column, and the second rotating disk can rotate around the second fixed column. By adjusting the angle of these two rotating disks, the mounting plate can be adapted to production line frames of various angles, while keeping the nozzle module vertical for stable operation. The bolts and washers of the positioning components ensure that the adjusted position is stable. This flexible mounting structure allows the device to adapt to different production scenarios, expanding its application range. It eliminates the need for special customization due to frame angle issues, lowering the barrier to entry. At the same time, the equipment has a simplified structure, small size, low maintenance cost, and is easy to integrate into the production line. It can achieve material surface activation, cleaning, and coating under normal pressure, avoiding the high cost of vacuum equipment.

[0017] In summary, this invention can operate under normal atmospheric pressure, avoiding problems associated with vacuum environments. It reduces costs and operational difficulties while ensuring stable and efficient operation, thus facilitating the promotion and application of plasma technology. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the controller structure. Figure 1 ;

[0019] Figure 2 This is a schematic diagram of the controller structure. Figure 2 ;

[0020] Figure 3 This is a structural diagram of the nozzle module;

[0021] Figure 4 This is a structural diagram of the mounting bracket;

[0022] Figure 5 yes Figure 4 A schematic diagram of the cross-sectional structure.

[0023] Figure label:

[0024] 1. Controller; 11. Housing; 12. Solid-state microwave source; 13. Microwave output interface; 14. Power interface; 15. Power supply output interface; 16. First gas input interface; 17. Flow meter; 18. Pressure regulating valve; 19. Gas output interface; 110. I / O interface; 111. Touch screen;

[0025] 2. Nozzle module; 21. Nozzle resonant cavity; 22. Microwave input interface; 23. Second gas input interface; 24. Power input interface; 25. Recovery hopper;

[0026] 3. Fixing plate; 4. Mounting bracket; 41. Mounting plate; 42. First fixing column; 43. First rotating disk; 44. Fixing block; 45. Fixing rod; 46. Connecting plate; 47. Second fixing column; 48. Second rotating disk; 49. Connecting frame;

[0027] 5. Positioning component; 51. Arc groove; 52. Bolt; 53. Washer. Detailed Implementation

[0028] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of this utility model, but not all embodiments.

[0029] The components of the present invention embodiments described and shown in the accompanying drawings can typically be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention.

[0030] Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0031] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0032] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0033] Example

[0034] like Figure 1 and Figure 2As shown, this utility model proposes an atmospheric pressure microwave jet plasma device, including a controller 1. The controller 1 is used to output microwave signals and process gases. The controller 1 includes a housing 11, in which a solid-state microwave source 12 is installed. The solid-state microwave source 12 provides the necessary electrical energy for plasma generation, generating high-frequency energy. The solid-state microwave source 12 has high stability and a long service life. A microwave output interface 13 is installed on one side of the solid-state microwave source 12, and a power interface 14 and a power output interface 15 are provided on the side of the solid-state microwave source 12. The power interface 14 is connected to an external 220V power supply to provide the necessary electrical energy to the controller 1. A first gas input interface 16 is also installed on the side of the solid-state microwave source 12, along with a flow meter 17 and a pressure regulating valve 18 connected to it. The flow meter 17 is used to monitor the flow rate of the process gas in real time, and the pressure regulating valve 18 is used to adjust the process gas pressure, enabling operators to accurately grasp and control the gas flow rate and pressure, ensuring the stability and consistency of the cleaning process. On the other side of the solid-state microwave source 12, a gas output interface 19 is installed. The first gas input interface 16 connects to external process gas, which passes through a flow meter 17 and a pressure regulating valve 18 before connecting to the gas output interface 19. The solid-state microwave source 12 also has an I / O interface 110 and a touch screen 111 on its side. The I / O interface 110 connects to external devices, enabling signal input and output, and allowing communication and collaborative work with other devices, facilitating automated control or integration with production lines. The touch screen 111 is used for human-machine interaction; operators can set cleaning parameters such as power, gas flow rate, and cleaning time through the touch screen, and can also view the equipment's operating status and related data in real time.

[0035] For further details, please refer to Figure 3The aforementioned plasma device also includes a nozzle module 2 connected to the controller 1. The nozzle module 2 is used to generate plasma to clean objects. The nozzle module 2 includes a nozzle resonant cavity 21, on the top of which are mounted a microwave input interface 22, a second gas input interface 23, and a power input interface 24. The microwave output interface 13 is connected to the microwave input interface 22 via a coaxial cable, and the microwave signal is transmitted to the inside of the nozzle resonant cavity 21 via the coaxial cable. The gas output interface 19 is connected to the second gas input interface 23 via a PU tube, delivering the process gas to be excited into the nozzle resonant cavity 21. After passing through the flow meter 17 and the pressure regulating valve 18, the process gas can enter the plasma excitation region stably and uniformly after pressure and flow regulation. The power output interface 15 is connected to the power input interface 24 via a three-core cable, and the controller 1 supplies power to the nozzle module 2. The solid-state microwave source 12 releases energy and conducts it through the coaxial cable to the electrodes inside the nozzle resonant cavity 21, where energy release and tuning occur, forming a high-frequency magnetic field. A high-frequency magnetic field can ionize the gas inside the nozzle resonant cavity 21, causing the atoms or molecules in the gas to lose electrons, thereby generating plasma. A recovery hopper 25 is connected below the nozzle resonant cavity 21. The recovery hopper 25 is used to recover contaminants after plasma cleaning, and its bottom end is connected to a filter screen and an exhaust fan.

[0036] Furthermore, such as Figures 3 to 5 As shown, the plasma device includes a fixing plate 3 fixedly connected to the side of the nozzle module 2. A mounting bracket 4 is installed on the fixing plate 3 to fix the nozzle module 2 to the production line frame. The mounting bracket 4 includes a mounting plate 41, which is fixed to the frame. A first fixing post 42 is fixedly connected to the side of the mounting plate 41. A first rotating disk 43 is rotatably connected to the first fixing post 42, and the first rotating disk 43 is rotatably connected to the side of the mounting plate 41 via the first fixing post 42. Two sets of fixing blocks 44 are fixedly connected to the side of the first rotating disk 43 away from the mounting plate 41. Fixing rods 45 are fixedly connected to the fixing blocks 44. A connecting plate 46 is fixedly connected to the ends of the two sets of fixing rods 45 away from the fixing blocks 44. The connecting plate 46 is fixedly connected to the first rotating disk 43 via the fixing blocks 44 and the fixing rods 45. A second fixing post 47 is fixedly connected to the side of the connecting plate 46. A second rotating disk 48 is rotatably connected to the second fixing post 47, and the second rotating disk 48 is rotatably connected to the side of the connecting plate 46 via the second fixing post 47. A connecting bracket 49 is fixedly connected to the side of the second rotating disk 48. The connecting bracket 49 is L-shaped and is fixedly connected to the fixing plate 3. The fixing plate 3 is fixedly connected to the nozzle resonant cavity 21. The nozzle module 2 is fixed on the frame by the mounting bracket 4. By rotating the first rotating disk 43 and the second rotating disk 48, the mounting plate 41 can be installed on the frame at various angles, while keeping the nozzle module 2 in a vertical position to ensure stable cleaning operation.

[0037] Specifically, both the first rotating disk 43 and the second rotating disk 48 are equipped with positioning components 5, which are used to fix the positions of the first rotating disk 43 and the second rotating disk 48. The positioning component 5 includes an arc-shaped groove 51. Two sets of arc-shaped grooves 51 are opened on both the first rotating disk 43 and the second rotating disk 48. A bolt 52 is slidably disposed in the arc-shaped groove 51. A washer 53 is sleeved on the bolt 52. The bolt 52 is threadedly connected to the mounting plate 41 or the connecting plate 46. After the bolt 52 is tightened, it drives the washer 53 to press against the arc-shaped groove 51, thereby fixing the positions of the first rotating disk 43 and the second rotating disk 48 and ensuring the stability of the nozzle module 2.

[0038] In this embodiment, firstly, an external 220V power supply is connected to the controller 1 through the power interface 14 to provide power to the entire device. The solid-state microwave source 12 generates high-frequency energy under the power supply, which is transmitted through the microwave output interface 13. Simultaneously, external process gas enters the controller 1 through the first gas input interface 16. After the flow rate is monitored in real time by the flow meter 17 and the gas pressure is adjusted by the pressure regulating valve 18, the gas is delivered through the gas output interface 19. Operators can set cleaning parameters such as power, gas flow rate, and cleaning time via the touch screen 111. The I / O interface 110 enables signal interaction with external devices, facilitating automated control or production line integration.

[0039] Next, the microwave signal output by controller 1 is transmitted from microwave output interface 13 to microwave input interface 22 of nozzle module 2 via coaxial cable. Process gas is delivered from gas output interface 19 to second gas input interface 23 via PU tube, while power output interface 15 is connected to power input interface 24 via three-core cable to power nozzle module 2. The energy released by solid-state microwave source 12 is conducted to electrodes in nozzle resonant cavity 21 via coaxial cable. Energy release and tuning in the resonant cavity form a high-frequency magnetic field. This high-frequency magnetic field ionizes the process gas in nozzle resonant cavity 21, causing atoms or molecules in the gas to lose electrons, thereby generating plasma. The plasma acts on the object to achieve cleaning. The contaminants generated during the cleaning process are collected by recovery hopper 25 and treated by filter screen and exhaust fan at the bottom. Utilizing microwave energy to efficiently ionize working gas under normal pressure conditions, highly active particle plasma is generated and constrained and directionally sprayed into a jet by high-speed airflow. This jet acts on the material surface, and through the synergistic effect of physical bombardment and chemical reaction, efficiently, low-temperature, and non-destructively removes surface contaminants and improves surface properties.

[0040] Furthermore, the mounting bracket 4 is fixed to the production line frame via the mounting plate 41, and the nozzle module 2 is connected to the connecting frame 49 via the fixing plate 3. The first rotating disk 43 can rotate around the first fixed column 42, and the second rotating disk 48 can rotate around the second fixed column 47. By adjusting the angles of these two rotating disks, the nozzle module 2 can remain vertical while the mounting plate 41 adapts to various angles of the frame. After adjustment, the bolts 52 of the positioning component 5 slide and tighten within the arc-shaped groove 51, causing the shim 53 to press against the arc-shaped groove 51, fixing the positions of the first rotating disk 43 and the second rotating disk 48, and ensuring the stable operation of the nozzle module 2.

[0041] The above specific embodiments are merely optional embodiments of this utility model. Based on the technical solution of this utility model and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. An atmospheric pressure microwave jet plasma device, characterized in that, include: Controller (1), the controller (1) is used to output microwave signals and process gases; A nozzle module (2) connected to the controller (1) is used to generate plasma to clean objects; A fixing plate (3) is fixedly connected to the side of the nozzle module (2), and a mounting bracket (4) is installed on the fixing plate (3). The mounting bracket (4) is used to fix the nozzle module (2) on the production line frame.

2. The atmospheric pressure microwave jet plasma device according to claim 1, characterized in that, The controller (1) includes a housing (11), in which a solid-state microwave source (12) is installed, and a microwave output interface (13) is installed on one side of the solid-state microwave source (12).

3. The atmospheric pressure microwave jet plasma device according to claim 2, characterized in that, The solid-state microwave source (12) is provided with a power interface (14) and a power output interface (15) on its side.

4. The atmospheric pressure microwave jet plasma device according to claim 3, characterized in that, The solid-state microwave source (12) is also equipped with a first gas input interface (16) and a flow meter (17) and a pressure regulating valve (18) connected thereto. The solid-state microwave source (12) is equipped with a gas output interface (19) on the other side.

5. The atmospheric pressure microwave jet plasma device according to claim 4, characterized in that, The solid-state microwave source (12) is provided with an I / O interface (110) and a touch screen (111) on its side.

6. The atmospheric pressure microwave jet plasma device according to claim 5, characterized in that, The nozzle module (2) includes a nozzle resonant cavity (21). The top of the nozzle resonant cavity (21) is equipped with a microwave input interface (22), a second gas input interface (23), and a power input interface (24). The microwave output interface (13) is connected to the microwave input interface (22) via a coaxial cable, and the microwave signal is transmitted to the inside of the nozzle resonant cavity (21) via the coaxial cable. The gas output interface (19) is connected to the second gas input interface (23) via a PU tube, and the process gas to be excited is delivered to the nozzle resonant cavity (21). The power output interface (15) is connected to the power input interface (24) via a three-core cable, and the nozzle module (2) is powered by the controller (1).

7. An atmospheric pressure microwave jet plasma device according to claim 6, characterized in that, A recovery hopper (25) is connected below the nozzle resonant cavity (21).

8. The atmospheric pressure microwave jet plasma device according to claim 7, characterized in that, The mounting bracket (4) includes a mounting plate (41), a first fixing column (42) is fixedly connected to the side of the mounting plate (41), a first rotating disk (43) is rotatably connected to the first fixing column (42), two sets of fixing blocks (44) are fixedly connected to the side of the first rotating disk (43) away from the mounting plate (41), a fixing rod (45) is fixedly connected to the fixing block (44), a connecting plate (46) is fixedly connected to the end of the two sets of fixing rods (45) away from the fixing block (44), a second fixing column (47) is fixedly connected to the side of the connecting plate (46), a second rotating disk (48) is rotatably connected to the second fixing column (47), a connecting frame (49) is fixedly connected to the side of the second rotating disk (48), the connecting frame (49) is L-shaped, the connecting frame (49) is fixedly connected to the fixing plate (3), and the fixing plate (3) is fixedly connected to the nozzle resonant cavity (21).

9. An atmospheric pressure microwave jet plasma device according to claim 8, characterized in that, Both the first rotating disk (43) and the second rotating disk (48) are provided with positioning components (5), which are used to fix the positions of the first rotating disk (43) and the second rotating disk (48).

10. An atmospheric pressure microwave jet plasma device according to claim 9, characterized in that, The positioning component (5) includes an arc groove (51). Two sets of arc grooves (51) are provided on the first rotating disk (43) and the second rotating disk (48). A bolt (52) is slidably arranged in the arc groove (51). A washer (53) is sleeved on the bolt (52). The bolt (52) is threadedly connected to the mounting plate (41) or the connecting plate (46).

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