A screw positioning semi-lunar ring structure for semiconductor CMP cleaning equipment

Abstract

This utility model discloses a screw positioning crescent ring structure for semiconductor CMP cleaning equipment, comprising two crescent ring components that are radially spliced ​​together to form a ring structure. The splicing surfaces of the two crescent ring components are provided with a splicing mating structure. This improves the original circular ring structure into a combination of two crescent ring components, resulting in a simple structure, convenient assembly and disassembly, and maintenance without disassembling the intermediate screw. It improves equipment maintenance efficiency, reduces the risk of component misalignment due to misoperation, lowers maintenance difficulty, increases efficiency, adapts to acid and alkali corrosive environments, and extends service life.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, specifically to a screw positioning semi-lunar ring structure for semiconductor CMP cleaning equipment. Background Technology

[0002] In current semiconductor wafer manufacturing processes, CMP (Chemical Mechanical Polishing) cleaning equipment commonly employs enclosed screw locating rings to fix and position the internal structure of the equipment. These locating rings are typically made of acid and alkali-resistant materials and are installed inside the equipment cavity for long-term stable operation in acidic or alkaline environments. However, existing enclosed-ring screw locating rings present the following problems during replacement and maintenance:

[0003] The positioning ring can only be removed by disassembling the middle screw, making the disassembly and assembly process cumbersome.

[0004] The equipment has a small internal space, making disassembly and assembly difficult.

[0005] After the screw is disassembled, the position of the moving parts is prone to shift, and recalibration is time-consuming and laborious.

[0006] In view of this, the present invention proposes a screw positioning semi-lunar ring structure for semiconductor CMP cleaning equipment. Utility Model Content

[0007] The purpose of this invention is to provide a screw positioning crescent ring structure for semiconductor CMP cleaning equipment, which solves the problems of inconvenient disassembly and low maintenance efficiency of existing closed positioning rings.

[0008] This utility model provides a screw positioning semi-lunar ring structure for semiconductor CMP cleaning equipment, comprising:

[0009] Two crescent ring components are joined together radially to form a ring structure;

[0010] The splicing surfaces of the two semi-circular components are equipped with splicing mating structures.

[0011] As a preferred embodiment of the present invention, the splicing and mating structure includes a first connecting part and a second connecting part.

[0012] As a preferred technical solution of this utility model, the splicing surface of the first connecting part and the second connecting part is a stepped, right-angled or inclined surface spliced ​​together.

[0013] As a preferred embodiment of this utility model, the first connecting part and the second connecting part are made of acid and alkali resistant materials.

[0014] As a preferred embodiment of this utility model, each of the crescent ring components is provided with a positioning hole, and the screw is fixedly connected to the connector through the positioning hole.

[0015] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0016] This invention improves the original circular ring structure into a combination of two crescent ring components, which is simple in structure, easy to assemble and disassemble, and can be maintained without removing the middle screw; it improves equipment maintenance efficiency, reduces the risk of component displacement due to misoperation, reduces maintenance difficulty, improves efficiency, is adaptable to acid and alkali corrosive environments, and extends service life. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0018] Figure 1 This is a schematic diagram of the screw positioning semi-circular ring of this utility model;

[0019] In the figure: 1. Half-moon ring assembly; 2. First connecting part; 3. Second connecting part; 4. Positioning hole. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments of this application will be described in more detail below with reference to the accompanying drawings.

[0021] Throughout the accompanying drawings, the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions. The described embodiments are only a part of the embodiments of this application, not all of them. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this application, and should not be construed as limiting this application. All other embodiments obtained by those skilled in the art based on the embodiments in this application without inventive effort are within the scope of protection of this application. The embodiments of this application will be described in detail below with reference to the accompanying drawings.

[0022] Example 1

[0023] Please see Figure 1As shown, this embodiment provides a screw positioning crescent ring structure for a semiconductor CMP cleaning equipment, including two interlocking crescent ring assemblies 1. The two crescent ring assemblies 1 are radially spliced ​​together to form a ring structure. They are detachably fitted and respectively located on both sides of the central screw, allowing for installation and removal without disassembling the central screw. The original closed-loop structure of the screw positioning ring is improved by using two crescent ring assemblies 1. When replacing a new screw positioning crescent ring, it is possible to directly disassemble and install without disassembling the central screw. This greatly improves efficiency, solves the problem of difficult replacement due to limited space, and resolves a series of problems caused by changes in screw position.

[0024] The two ends of the crescent ring assembly 1 are respectively provided with a first connecting part 2 and a second connecting part 3 that cooperate with each other. The first connecting part 2 and the second connecting part 3 cooperate at the ends to realize the assembly closure and stable connection of the ring structure, which facilitates the quick assembly and disassembly of the two crescent ring assemblies and helps to improve maintenance convenience and operation efficiency.

[0025] The first connecting part 2 and the second connecting part 3 are formed by radial cutting along the crescent ring assembly; thus forming a splicing and mating structure. The splicing and mating structure consists of splicing surfaces that are spliced ​​together. The splicing surfaces include stepped, right-angled, or inclined surfaces to enhance the connection stability after assembly, realize the closure of the ring structure, improve splicing strength and splicing accuracy, and facilitate quick assembly and disassembly without the need for screw interference.

[0026] Each of the crescent ring components 1 is provided with a positioning hole 4. Screws are fixedly connected to the connector through the positioning holes 4, engaging with the inner wall of the equipment cavity to ensure accurate positioning of the assembled ring structure and prevent misalignment. During disassembly, only the screws need to be loosened to remove the two crescent ring components 1 from the connector; there is no need to remove the intermediate screw 3. The operation is simple and suitable for confined spaces inside the cavity.

[0027] The crescent ring assembly is made of polytetrafluoroethylene or other acid and alkali resistant materials to adapt to acid and alkali cleaning environments and ensure long-term stable operation.

[0028] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A screw positioning half moon ring structure for semiconductor CMP cleaning equipment, characterized in that, include: Two crescent ring components (1) are joined together radially to form a ring structure; The splicing surfaces of the two semi-lunar ring components (1) are provided with splicing mating structures.

2. The screw positioning half moon ring structure for semiconductor CMP cleaning equipment according to claim 1, wherein, The splicing and mating structure includes a first connecting part (2) and a second connecting part (3).

3. The screw positioning half moon ring structure for semiconductor CMP cleaning equipment according to claim 2, characterized in that, The splicing surfaces of the first connecting part (2) and the second connecting part (3) are stepped, right-angled or inclined surfaces that are spliced ​​together.

4. The screw positioning half moon ring structure for semiconductor CMP cleaning equipment according to claim 2, wherein, The first connecting part (2) and the second connecting part (3) are made of acid and alkali resistant materials.

5. The screw positioning half moon ring structure for semiconductor CMP cleaning equipment according to claim 1, characterized in that: Each of the crescent ring components (1) is provided with a positioning hole (4), and screws are fixedly connected to the connector through the positioning hole (4).

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