A liquid blasting device for diffuser blasting stripping

Abstract

A liquid blasting device for diffuser blasting includes: an abrasive tank for storing abrasive; a water tank for storing water; a mixing tank for homogenizing and mixing the abrasive and water to form a slurry; a metering feeder for metering the abrasive from the abrasive tank and the water from the water tank to the mixing tank according to a preset volume ratio; a spray gun for spraying the slurry onto the workpiece surface; a slurry pump for stably supplying the slurry from the mixing tank to the spray gun; and a recycling device for recycling the sprayed slurry. Compared to dry blasting equipment, this liquid blasting device for diffuser blasting effectively controls dust generation, improves the working environment, protects the health of operators, and improves the processing quality of diffuser blasting. Furthermore, the recycling device enables the recycling of abrasive and water, reducing resource waste and lowering production costs.

Description

Technical Field

[0001] This utility model relates to the field of sandblasting technology, specifically to a liquid sandblasting device for Diffuser sandblasting and stripping. Background Technology

[0002] In the field of chemical vapor deposition (CVD), the surface quality of the diffuser plays a crucial role in the uniformity of gas diffusion and the quality of thin film deposition. However, with prolonged use, residual film gradually forms on the diffuser surface, which severely affects the coating quality, thus requiring effective stripping treatment.

[0003] like Figure 2 As shown, traditional dry blasting technology has significant limitations in the process of removing Diffuser film:

[0004] Severe dust pollution: Dry sandblasting operations generate large amounts of inhalable dust, which seriously harms the working environment and the health of personnel. Prolonged exposure to such an environment greatly increases the risk of respiratory illnesses for workers.

[0005] Non-uniform surface roughness: Dust generated by dry blasting partially falls back onto the workpiece surface, forming secondary contamination points. These secondary contamination points alter the impact effect of the abrasive in different areas, leading to abnormal fluctuations in the surface roughness Ra value. Furthermore, as the abrasive moves through the air, differences in air resistance result in significant variations in the abrasive micro-cutting depth in different regions, further exacerbating the non-uniformity of surface roughness. This makes the diffuser surface quality unacceptable for CVD processes, affecting gas diffusion uniformity and thin film deposition quality.

[0006] High risk of aperture expansion: Dry blasting directly accelerates abrasive particles to impact the workpiece surface using compressed air. Due to the lack of kinetic energy buffering from a water film, the peak kinetic energy of a single abrasive particle is high, resulting in concentrated impact stress on the hole wall. Simultaneously, the heat generated by friction between the abrasive and the hole wall cannot be quickly dissipated, leading to a localized increase in hole wall temperature and exacerbated thermal expansion, thus increasing the risk of aperture deformation. Once aperture expansion occurs, the diffuser's performance will be severely affected, potentially requiring replacement of components and increasing production costs.

[0007] While some existing sandblasting equipment has made some innovations in areas such as abrasive and dust separation—for example, using cyclone separation technology to effectively separate abrasive and dust—it still cannot solve the problems associated with dry sandblasting technology for components like diffusers, which have extremely high surface quality requirements. Therefore, developing a liquid sandblasting equipment that can effectively solve these problems is of significant practical importance. Utility Model Content

[0008] Purpose of the utility model: In order to overcome the above shortcomings, the purpose of this utility model is to provide a liquid sandblasting equipment for Diffuser film stripping. It is reasonably designed and aims to solve the problems of serious dust pollution, uneven roughness, and high risk of pore expansion in the process of traditional dry sandblasting equipment during Diffuser film stripping. At the same time, it reduces resource waste, lowers production costs, and has broad application prospects.

[0009] Technical solution: A liquid blasting device for diffuser blasting and stripping, comprising:

[0010] Abrasive jar, used to store abrasives;

[0011] Water tanks are used to store water;

[0012] A mixing tank is used to homogenize and mix abrasives and water to form a grinding fluid;

[0013] A quantitative feeder is used to quantitatively transport abrasive from the abrasive tank and water from the water tank to the mixing tank according to a preset volume ratio.

[0014] A spray gun is used to spray abrasive slurry onto the surface of a workpiece.

[0015] A slurry pump is used to stably deliver slurry from the mixing tank to the spray gun;

[0016] The recycling device recycles the sprayed grinding fluid.

[0017] The liquid blasting equipment for diffuser sandblasting described in this invention is rationally designed, encompassing key aspects such as abrasive storage, water storage, slurry mixing, conveying, spraying, and slurry recycling, forming a complete liquid blasting operation system. This systematic design enables the equipment to systematically complete the entire process from abrasive and water preparation to workpiece sandblasting and slurry recycling, improving the efficiency and standardization of blasting operations and ensuring stable equipment operation.

[0018] Specifically, the abrasive tank stores abrasive and the water tank stores water, providing a basis for subsequent mixing of the grinding fluid; the mixing tank homogenizes and mixes the two to form the grinding fluid; the grinding fluid pump stably delivers the grinding fluid to the spray gun for spraying; the sprayed grinding fluid can be recycled through a recycling device, realizing the recycling of resources and reducing production costs.

[0019] Furthermore, in the aforementioned liquid blasting equipment for diffuser sandblasting and stripping, the abrasive in the abrasive tank includes, but is not limited to, glass beads and alumina; the volume of the abrasive tank is 0.3~1.5m³; the abrasive tank is equipped with a vibrating screen, and the aperture of the vibrating screen is 0.4~0.8mm, for filtering large particulate impurities.

[0020] The abrasive types in the abrasive jar include glass beads and alumina, which have different properties to meet the sandblasting requirements of various workpieces. The abrasive jar has a volume of 0.3~1.5m³, allowing for the storage of appropriate amounts of abrasive based on actual production scale. The abrasive jar is equipped with a vibrating screen with an aperture of 0.4~0.8mm, which effectively filters large particles and prevents them from entering subsequent systems, avoiding clogging of the spray gun and ensuring the uniformity and stability of the sandblasting effect. When larger particles are mixed in with the abrasive, the vibrating screen will intercept them, ensuring that the abrasive particle size entering the mixing tank meets the requirements.

[0021] Furthermore, in the aforementioned liquid sandblasting equipment for diffuser sandblasting and stripping, the water tank is used to store pure water with a conductivity of <10μS / cm; the water tank is equipped with a liquid level sensor with an accuracy of ±2mm; the water tank is equipped with a pH monitoring module with a pH monitoring range of 6.5~7.5.

[0022] The water tank stores pure water with a conductivity of <10μS / cm. This low conductivity effectively prevents metal oxidation and protects workpieces and equipment from water corrosion. The level sensor, with an accuracy of ±2mm, precisely monitors the water level in the tank, promptly reminding users to replenish water and ensuring normal equipment operation. The pH monitoring module has a pH monitoring range of 6.5~7.5, maintaining the water's acidity / alkalinity within a suitable range to further prevent metal oxidation and extend the equipment's lifespan. During long-term use, changes in the water's pH value may cause metal parts to rust; the pH monitoring module can detect this promptly and take appropriate adjustments.

[0023] Furthermore, in the aforementioned liquid blasting equipment for diffuser sandblasting and stripping, the mixing tank is equipped with a stirrer with a rotation speed of 30~60 rpm, which is used to force homogenize the abrasive and water to form a slurry, so that the density of the slurry is controlled at 1.2~1.8 g / cm³.

[0024] An agitator rotating at 30-60 rpm is installed inside the mixing tank to forcibly homogenize the abrasive and water to form a slurry, maintaining its density at 1.2-1.8 g / cm³. This uniform slurry density is crucial for ensuring effective sandblasting. Uneven slurry density can lead to varying impact forces at different points during sandblasting, resulting in inconsistent workpiece surface roughness. The agitator ensures the abrasive is evenly dispersed in the water, guaranteeing stable slurry properties for each application to the workpiece surface and improving the consistency of sandblasting quality.

[0025] Furthermore, in the aforementioned liquid sandblasting equipment for Diffuser sandblasting and stripping, the quantitative feeder is a screw quantitative feeder with an accuracy of ±0.5%.

[0026] The quantitative feeder is a screw-type quantitative feeder with an accuracy of ±0.5%, which can accurately deliver the abrasive from the grinding tank and the water from the water tank to the mixing tank according to a preset volume ratio. This high-precision quantitative delivery ensures the accurate ratio of abrasive to water in the grinding fluid, thereby guaranteeing the stable quality and performance of the grinding fluid.

[0027] Furthermore, in the aforementioned liquid blasting equipment for Diffuser sandblasting and stripping, the spray gun is a Venturi spray gun made of boron carbide material with a lifespan of ≥800h. It is used to accelerate the abrasive slurry to 60~120m / s under the action of compressed air to form a uniform abrasive cloud, so that the Ra value of the workpiece surface fluctuates ≤±1μm.

[0028] The spray gun is a Venturi spray gun made of boron carbide, with a lifespan of ≥800 hours, reducing the frequency of spray gun replacement and lowering equipment maintenance costs. The Venturi spray gun can accelerate the abrasive slurry to 60-120 m / s under compressed air, forming a uniform abrasive cloud, ensuring that the Ra value fluctuation of the workpiece surface is ≤±1μm. This high-speed and uniform abrasive cloud can more effectively treat the workpiece surface, guaranteeing the consistency and stability of the workpiece surface roughness.

[0029] Furthermore, in the aforementioned liquid blasting equipment for diffuser blasting and stripping, the slurry pump is a corrosion-resistant centrifugal pump with a power of 4~11kW and a pressure range of 0.3~0.8Mpa.

[0030] Corrosion-resistant centrifugal pumps can withstand the corrosiveness of grinding fluids, extending the pump's service life. Appropriate power and pressure ranges ensure a stable delivery of grinding fluid to the spray gun, guaranteeing consistent pressure and flow rate for the spray, thus ensuring the normal operation of the sandblasting process.

[0031] Furthermore, in the aforementioned liquid blasting equipment for diffuser blasting and stripping, the recycling device includes a recycling chamber through which the blasted slurry is collected.

[0032] The inclusion of a recovery bin allows for the centralized collection of the sprayed grinding fluid, facilitating subsequent recycling and processing. This avoids environmental pollution and resource waste caused by the indiscriminate spillage of the grinding fluid, while also enabling unified treatment and reuse of the fluid.

[0033] Furthermore, in the aforementioned liquid blasting equipment for diffuser blasting and stripping, the recycling device further includes a multi-stage separation module, and the recycling bin is connected to the multi-stage separation module. The multi-stage separation module includes a primary centrifugal separator and a secondary sedimentation tank. The grinding liquid collected in the recycling bin first enters the primary centrifugal separator, where the abrasive and water are initially separated under centrifugal force. The abrasive then enters the secondary sedimentation tank for further sedimentation.

[0034] Specifically, the primary centrifugal separator uses centrifugal force to initially separate the grinding fluid mixture. Heavier abrasive particles are thrown against the separator wall and slide down to the bottom, entering the secondary separation stage. Lighter water and fine impurities flow out from the top overflow outlet and enter the next module. The secondary sedimentation tank contains the abrasive particles and some residual water from the primary separation. A flow-damping plate can be installed inside the tank to slow the flow and accelerate abrasive particle sedimentation. The settled abrasive particles are discharged from the bottom and stored, while the upper layer of low-concentration grinding fluid can be returned to the mixing tank.

[0035] This multi-stage separation design can more effectively separate abrasive and water, improving the purity of recovered abrasive and the separation effect of water.

[0036] Furthermore, in the aforementioned liquid sandblasting equipment for diffuser sandblasting and stripping, the recycling device further includes a purification module. The primary centrifugal separator is connected to the purification module, and the water separated by the primary centrifugal separator is purified by the purification module and then returned to the water tank.

[0037] The purification module may include a filtration device (to filter water and fine impurities flowing from the overflow of the primary centrifuge, removing larger particles) and an activated carbon adsorption tank (to remove organic matter, odors, and pigments from the filtered water). The purified water meets the water quality requirements of the water tank, ensuring the normal operation of the equipment and the sandblasting effect. Without purification, the separated water may contain impurities and contaminants, which could affect the quality of the grinding fluid and the performance of the equipment if reused.

[0038] The beneficial effects of this utility model are as follows:

[0039] (1) The liquid sandblasting equipment for diffuser sandblasting described in this utility model mixes abrasive with water to form a slurry for sandblasting operations, which can effectively control dust generation, greatly improve the working environment, and protect the health of operators; equipped with a recycling device, it realizes the recycling of abrasive and water, reduces resource waste, and lowers production costs;

[0040] (2) The liquid blasting equipment for Diffuser sandblasting described in this utility model uses a stirrer in the mixing tank to force homogenize the abrasive and water, so that the density of the slurry is controlled at 1.2~1.8g / cm³, ensuring the stability of the slurry properties sprayed onto the workpiece surface each time; the Venturi spray gun can accelerate the slurry to 60~120m / s under the action of compressed air to form a uniform abrasive cloud, so that the Ra value of the workpiece surface fluctuates ≤±1μm, ensuring the consistency and stability of the workpiece surface roughness, improving the surface quality of the Diffuser, and thus ensuring the uniformity of gas diffusion and the quality of film deposition; the water film of the slurry can play a kinetic energy buffering role, reducing the impact stress of a single abrasive on the hole wall, and at the same time, the water can also carry away the heat generated by friction in time, effectively avoiding the local temperature rise and thermal expansion effect of the hole wall, reducing the possibility of hole diameter expansion, ensuring the performance of the Diffuser, and reducing the cost of replacing parts due to hole diameter expansion;

[0041] (3) The liquid blasting equipment for diffuser sandblasting described in this utility model uses a screw feeder with a precision of ±0.5%, which can accurately deliver the abrasive from the abrasive tank and the water from the water tank to the mixing tank according to the preset volume ratio, ensuring the accurate ratio of abrasive to water in the slurry, thereby ensuring the stable quality and performance of the slurry and providing a foundation for stable sandblasting operations; the abrasive tank is equipped with a vibrating screen with an aperture of 0.4~0.8mm, which can effectively filter large particle impurities and prevent them from entering the subsequent system and clogging the spray gun, ensuring the uniformity and stability of the sandblasting effect; the water tank stores pure water with a conductivity of <10μS / cm and is equipped with a precision of The ±2mm liquid level sensor and pH monitoring module with a pH range of 6.5~7.5 prevent metal oxidation, protect workpieces and equipment from water corrosion, accurately monitor water level, and maintain water pH within a suitable range, extending equipment lifespan. The spray gun uses a boron carbide venturi nozzle with a lifespan of ≥800 hours, reducing the frequency of nozzle replacement and lowering equipment maintenance costs. The grinding slurry pump is a corrosion-resistant centrifugal pump with a power of 4~11kW and a pressure range of 0.3~0.8Mpa. It can adapt to the corrosiveness of the grinding slurry, stably deliver the slurry to the spray gun, ensure stable pressure and flow of the grinding slurry, and ensure normal sandblasting operation. Attached Figure Description

[0042] Figure 1 This is a simplified diagram of the liquid sandblasting equipment for Diffuser sandblasting stripping described in this utility model (without a recycling device);

[0043] Figure 2 This is a schematic diagram of traditional dry sandblasting.

[0044] Figure 3This is a schematic diagram of the liquid sandblasting process in the liquid sandblasting equipment for Diffuser sandblasting and stripping described in this utility model.

[0045] In the diagram: 1. Grinding tank; 2. Water tank; 3. Mixing tank; 4. Quantitative feeder; 5. Spray gun; 6. Grinding liquid pump; 7. Recycling device; 71. Recycling bin; 72. Multi-stage separation module; 73. Purification module. Detailed Implementation

[0046] The following is in conjunction with the appendix Figure 1 , 2 Examples 1, 2, and 3 further illustrate this utility model.

[0047] Example 1

[0048] The liquid blasting equipment for Diffuser blasting and stripping described in this utility model includes an abrasive tank 1, a water tank 2, a mixing tank 3, a metering feeder 4, a spray gun 5, a slurry pump 6, and a recycling device 7.

[0049] like Figure 1 , 3 As shown, the installation and commissioning process of the liquid sandblasting equipment for Diffuser sandblasting and stripping described in this utility model is as follows:

[0050] 1. Equipment Layout

[0051] Choose a suitable work site, ensuring the ground is level, well-ventilated, and has sufficient space to house the equipment. For example... Figure 1 As shown, the following components are arranged in sequence: abrasive tank 1, water tank 2, mixing tank 3, quantitative feeder 4, grinding fluid pump 6, spray gun 5, and recycling device 7.

[0052] 2. Connect the pipes and circuits

[0053] Connect the abrasive tank 1, water tank 2, and metering feeder 4 using pipes, ensuring a secure and well-sealed connection to prevent abrasive and water leakage. Then connect the metering feeder 4 to the mixing tank 3 to accurately deliver the abrasive and water. Connect the mixing tank 3 to the grinding slurry pump 6 and the grinding slurry pump 6 to the spray gun 5 using pipes to form a grinding slurry delivery channel. Simultaneously, connect the equipment's electrical system to ensure all components can operate normally with power.

[0054] 3. Equipment debugging

[0055] First, the quantitative feeder 3 is debugged. According to the preset volume ratio, such as the volume ratio of abrasive to water is 1:3, the abrasive in the abrasive tank 1 and the water in the water tank 2 are transported to the mixing tank 3. Check whether the conveying volume is accurate and whether the error is within ±0.5%.

[0056] Then, start the agitator in mixing tank 3, set the agitator speed to 30~60 rpm, and observe whether the abrasive and water can be fully mixed to form a uniform grinding fluid, and whether the density of the grinding fluid is controlled at 1.2~1.8 g / cm³.

[0057] Next, start the grinding slurry pump 6 and check whether the pressure and flow rate of the grinding slurry pump 6 are stable, and whether the pressure range is between 0.3 and 0.8 MPa. At the same time, observe whether the spray gun 5 can spray the grinding slurry evenly, and whether the spray speed is between 60 and 120 m / s.

[0058] Finally, the recycling device 7 was debugged to observe whether the separated abrasive and water could be recycled separately.

[0059] Example 2

[0060] Based on the structural foundation of Embodiment 1 above, the liquid sandblasting equipment for diffuser blasting described in this utility model contains abrasives in the abrasive tank 1, including but not limited to glass beads and alumina. The volume of the abrasive tank 1 is 0.3~1.5m³. The abrasive tank 1 is equipped with a vibrating screen with an aperture of 0.4~0.8mm for filtering large particles of impurities. Abrasives such as glass beads and alumina are suitable for diffuser blasting operations. The volume of 0.3~1.5m³ can meet the production needs of different scales. The vibrating screen can filter large particles of impurities, preventing them from entering subsequent systems and ensuring the stability and consistency of the sandblasting effect.

[0061] Furthermore, water tank 2 is used to store pure water with a conductivity of <10μS / cm. Water tank 2 is equipped with a level sensor with an accuracy of ±2mm and a pH monitoring module with a pH monitoring range of 6.5~7.5. The low conductivity of pure water prevents metal oxidation, the level sensor accurately monitors the water level to ensure normal equipment operation, and the pH monitoring module ensures the water quality remains within a suitable range, further protecting the equipment and workpiece.

[0062] Furthermore, the quantitative feeder 4 is a screw quantitative feeder with an accuracy of ±0.5%. The high-precision screw quantitative feeder can accurately deliver abrasive and water according to the preset volume ratio, ensuring the accuracy of the grinding fluid ratio and thus improving the sandblasting effect.

[0063] Furthermore, spray gun 5 is a Venturi spray gun made of boron carbide with a lifespan of ≥800 hours. It is used to secondary accelerate the abrasive slurry to 60~120 m / s under compressed air to form a uniform abrasive cloud, ensuring that the Ra value fluctuation of the workpiece surface is ≤±1μm. Spray gun 5, being a Venturi spray gun made of boron carbide, features a long lifespan and the function of secondary abrasive slurry acceleration. The long lifespan of the boron carbide material reduces the frequency and cost of replacing spray gun 5, while the secondary acceleration of the abrasive slurry to form a uniform abrasive cloud improves the surface roughness uniformity of the workpiece by ensuring that the Ra value fluctuation is ≤±1μm.

[0064] Furthermore, the grinding fluid pump 6 is a corrosion-resistant centrifugal pump with a power of 4~11kW and a pressure range of 0.3~0.8Mpa.

[0065] Furthermore, the recycling device 7 includes a recycling bin 71, a multi-stage separation module 72, and a purification module 73. The sprayed grinding fluid is collected in the recycling bin 71 located below the spray gun. The recycling bin 71 centrally transports the grinding fluid to the multi-stage separation module 72. The grinding fluid first enters the primary centrifugal separator 711, where the abrasive and water are initially separated under centrifugal force. The heavier abrasive is thrown against the wall of the primary centrifugal separator and slides down to the bottom, entering the secondary sedimentation tank. The lighter water and fine impurities flow out from the overflow port at the top of the primary centrifugal separator and enter the purification module 73. A flow-damping plate is installed in the secondary sedimentation tank to allow the abrasive and some residual water to flow slowly, accelerating the sedimentation of the abrasive. The settled abrasive is discharged from the bottom of the secondary sedimentation tank and stored for reuse in the preparation of grinding fluid. The upper layer of low-concentration grinding fluid can be returned to the mixing tank 3 to continue participating in the mixing of the grinding fluid. The water separated by the first-stage centrifugal separator enters the purification module 73, which includes a filtration device and an activated carbon adsorption tank. The filtration device filters the water and fine impurities, removing larger impurity particles. The filtered water enters the activated carbon adsorption tank to remove organic matter, odors, and pigments from the water. The purified water can be returned to the water tank 2 to meet the water quality requirements of the water tank 2, thus realizing the recycling of water.

[0066] Example 3

[0067] like Figure 1 , 3 As shown, based on the structural foundation of Embodiment 1 or Embodiment 2, the working process of the liquid sandblasting equipment for diffuser sandblasting and stripping described in this utility model is as follows:

[0068] I. Grinding Fluid Preparation Stage

[0069] 1. Preparation of abrasive jar 1

[0070] Add an appropriate amount of abrasive to abrasive jar 1. Glass beads, alumina, white corundum, etc., can be selected. The volume of abrasive jar 1 is 0.3~1.5m³, and the appropriate volume should be selected according to actual production needs.

[0071] The abrasive tank 2 is equipped with a vibrating screen with an aperture of 0.4~0.8mm. When abrasive is added, the vibrating screen will automatically filter out large particles of impurities to prevent them from entering the subsequent system.

[0072] When the amount of abrasive is insufficient, the recycled abrasive is recovered and replenished through the recycling device 7.

[0073] 2. Preparation of water tank 2

[0074] Add pure water to water tank 2. The conductivity of pure water is <10μS / cm. Water tank 2 is equipped with a liquid level sensor and a pH monitoring module. The liquid level sensor has an accuracy of ±2mm and can monitor the water level in water tank 2 in real time, reminding you to add water when the water level is too low. The pH monitoring module has a pH monitoring range of 6.5-7.5, which can maintain the acidity or alkalinity of the water within a suitable range to prevent metal oxidation.

[0075] 3. Quantitative delivery and mixing

[0076] Start the quantitative feeder 4 to quantitatively deliver the abrasive in the abrasive tank 1 and the water in the water tank 2 to the mixing tank 3 according to the preset volume ratio.

[0077] The agitator inside mixing tank 3 starts working at a speed of 30-60 rpm, homogenizing and mixing the abrasive and water to form a grinding fluid, maintaining the density of the grinding fluid at 1.2-1.8 g / cm³. During this process, the density of the grinding fluid can be monitored in real time using a densitometer; if the deviation is >5%, sand or water will be automatically added.

[0078] II. Equipment Commissioning Phase

[0079] 1. No-load operation

[0080] Run the equipment unloaded for 2-3 minutes to confirm that the pressure is stable at 0.1-1.5MPa and the grinding fluid flow rate is normal.

[0081] 2. Sample block test spraying

[0082] Spray the sample for 30 seconds and check the surface roughness Ra value fluctuation ≤ ±1μm and cleanliness. Adjust the ratio of abrasive to water or pressure according to the actual condition.

[0083] III. Sandblasting Operation Stage

[0084] 1. Workpiece placement and parameter adjustment

[0085] Place the diffuser workpiece that needs to be sandblasted in a suitable position, and adjust the distance and angle between the spray gun 5 and the workpiece surface to ensure that the abrasive slurry can be accurately sprayed onto the workpiece surface.

[0086] 2. Grinding fluid delivery and injection

[0087] Start the slurry pump 6, which stably delivers the slurry from the mixing tank 3 to the spray gun 5 (Venturi spray gun). Under the action of compressed air, the slurry is accelerated a second time to 60-120 m / s to form a uniform abrasive cloud, which is sprayed onto the surface of the workpiece to peel off the residual film on the diffuser surface.

[0088] The pressure is controlled at 0.2~0.7MPa. In actual operation, coarse abrasive can be used first to remove heavy contaminants such as oxide scale and carbon deposits on the surface, and then switch to fine abrasive to reduce the pressure and optimize the surface roughness.

[0089] 3. Dynamic parameter adjustment

[0090] During the sandblasting process, by observing the sandblasting effect on the workpiece surface, parameters such as the pressure and flow rate of the slurry pump 6, and the spray speed and angle of the spray gun 5 can be adjusted appropriately to ensure that the Ra value fluctuation of the workpiece surface is ≤±1μm, which meets the requirements of the CVD process for the surface quality of the diffuser.

[0091] Visually inspect the uniformity of the jet. If sand splashing or water separation occurs, stop the machine, adjust the agitator speed, or replace the abrasive.

[0092] IV. Final Stage

[0093] 1. Abrasive recycling and waste treatment

[0094] The recycling device 7 has a recycling efficiency of ≥95% for abrasive materials.

[0095] 2. Equipment cleaning and maintenance

[0096] 5. After shutting down the equipment, clean the spray gun and drain any residual slurry from the pipeline.

[0097] As can be seen from the above embodiments, the liquid sandblasting equipment for diffuser blasting described in this invention effectively solves the problems of severe dust pollution, uneven roughness, and high risk of pore expansion inherent in traditional dry sandblasting technology through the coordinated operation of its components. The equipment can precisely control the ratio of the abrasive slurry and the spraying parameters, improving the sandblasting quality of the diffuser surface and ensuring uniform gas diffusion and film deposition quality. Simultaneously, the abrasive and water recycling system achieves resource recycling, reduces production costs, and minimizes environmental pollution, resulting in significant economic and environmental benefits.

[0098] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements can be made without departing from the principle of the present utility model, and these improvements should also be considered within the protection scope of the present utility model.

Claims

1. A liquid blasting apparatus for Diffuser blast stripping, characterized in that, include: Abrasive container (1), used for storing abrasives; Water tank (2), used for storing water; Mixing tank (3) is used to homogenize and mix abrasive and water to form a grinding fluid; A quantitative feeder (4) is used to quantitatively transport the abrasive in the abrasive tank (1) and the water in the water tank (2) to the mixing tank (3) according to a preset volume ratio. Spray gun (5) is used to spray abrasive slurry onto the surface of the workpiece; The grinding fluid pump (6) is used to stably deliver the grinding fluid from the mixing tank (3) to the spray gun (5); The grinding fluid after spraying is recycled through the recycling device (7).

2. A liquid blasting apparatus for Diffuser blast stripping according to claim 1, wherein, The abrasive in the abrasive jar (1) includes glass beads and alumina; the volume of the abrasive jar (1) is 0.3~1.5m³; the abrasive jar (1) is equipped with a vibrating screen, and the aperture of the vibrating screen is 0.4~0.8mm, which is used to filter large particulate impurities.

3. A liquid blasting apparatus for Diffuser blast stripping according to claim 1, wherein, The water tank (2) is used to store pure water with a conductivity of <10μS / cm; the water tank (2) is equipped with a liquid level sensor with an accuracy of ±2mm; the water tank (2) is equipped with a pH monitoring module with a pH monitoring range of 6.5~7.

5.

4. The liquid blasting apparatus for Diffuser blast stripping of claim 1, wherein, The mixing tank (3) is equipped with a stirrer with a rotation speed of 30~60 rpm, which is used to force homogenize the abrasive and water to form a grinding fluid, so that the density of the grinding fluid is controlled at 1.2~1.8 g / cm³.

5. The liquid blasting apparatus for Diffuser blast stripping of claim 1, wherein, The quantitative feeder (4) is a screw quantitative feeder with an accuracy of ±0.5%.

6. The liquid blasting apparatus for Diffuser blast stripping of claim 1, wherein, The spray gun (5) is a Venturi spray gun. The spray gun (5) is made of boron carbide material with a life of ≥800h. It is used to accelerate the grinding fluid to 60~120m / s under the action of compressed air to form a uniform abrasive cloud, so that the Ra value of the workpiece surface fluctuates ≤±1μm.

7. A liquid blasting apparatus for Diffuser blast stripping according to claim 1, wherein, The grinding fluid pump (6) is a corrosion-resistant centrifugal pump with a power of 4~11kW and a pressure range of 0.3~0.8MPa.

8. The liquid blasting apparatus for Diffuser blast stripping of claim 1, wherein, The recycling device (7) includes a recycling chamber (71) through which the sprayed grinding fluid is collected.

9. The liquid blasting equipment for Diffuser blasting and stripping according to claim 8, characterized in that, The recycling device (7) also includes a multi-stage separation module (72), and the recycling bin (71) is connected to the multi-stage separation module (72). The multi-stage separation module (72) includes a primary centrifugal separator and a secondary sedimentation separation tank. The grinding liquid collected in the recycling bin (71) first enters the primary centrifugal separator. Under the action of centrifugal force, the grinding material and water are initially separated, and the grinding material enters the secondary sedimentation separation tank for further sedimentation.

10. A liquid blasting apparatus for Diffuser blast stripping according to claim 9, wherein, The recycling device (7) also includes a purification module (73). The primary centrifugal separator is connected to the purification module (73). The water separated by the primary centrifugal separator is purified by the purification module (73) and then returned to the water tank (2).

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