A quick dismounting tool for a sealing ring of a semiconductor equipment chamber

Abstract

This utility model discloses a quick-release tool for semiconductor device chamber sealing rings, specifically relating to the technical field of sealing ring removal and installation tools. It includes a retractable handle, movable sliding columns, and manual adjustment plates. The retractable handle has an adjustment groove at its front end. The movable sliding columns are respectively embedded at both ends of the inner wall of the sliding cavity, and the manual adjustment plates are respectively disposed within the inner cavity of the sliding block. The movable sliding columns drive the shovel and prying claws to slide and retract into the handle's inner cavity, significantly reducing the overall size of the tool. This makes it easy to carry or store in small spaces such as tool bags. When retracted, the tool is encased in the handle, preventing scratches to the user or damage to other items when exposed. It also reduces friction between the tool surface and the external environment, extending its service life. The tool's length can be adjusted by inserting limiting pins into different limiting holes. Once slid into position, releasing the pin locks the tool, preventing loosening due to force during use. The length can be quickly switched in a single step, enabling rapid installation and removal of the sealing ring.

Description

Technical Field

[0001] This utility model relates to the technical field of sealing ring disassembly and assembly tools, and more specifically, to a quick disassembly and assembly tool for semiconductor equipment chamber sealing rings. Background Technology

[0002] As semiconductor technology continues to advance towards higher precision and performance, the environmental requirements for semiconductor manufacturing processes are becoming increasingly stringent. Sealing rings are crucial components for ensuring the sealing performance of semiconductor equipment chambers.

[0003] A search revealed that patent publication number CN217966800U discloses a sealing ring installation and removal tool, aiming to solve the problem that existing tools easily damage sealing rings during installation and removal. The tool includes: a handle; an external installation and removal mechanism comprising: a first connecting rod, one end of which is connected to one end of the handle; a hook-shaped first installation and removal component, one end of which is connected to the other end of the first connecting rod, the other end of which is flat; and an inner ring installation and removal mechanism comprising: a second connecting rod, one end of which is connected to the other end of the handle; a hook-shaped connecting component, one end of which is connected to the other end of the second connecting rod; and a hook-shaped second installation and removal component, one end of which is smoothly connected to the other end of the connecting component, the openings of the connecting component and the second installation and removal component facing opposite directions, the second installation and removal component being flat. By employing a specific structural design, and ensuring that the end in contact with the sealing ring is flat, damage to the sealing ring is avoided, while simultaneously facilitating the removal of the sealing ring from the sealing groove. The inventors discovered the following problems with the existing technology during the development of this utility model:

[0004] Existing assembly and disassembly tools, due to the exposed parts such as shovels and pry bars, require more space to carry and are difficult to fit into regular tool bags or small storage areas. In addition, the exposed parts are made of metal and have sharp edges. If they collide with other items during carrying, the sharp edges are easily deformed due to the force, affecting the function of the tool. If they accidentally come into contact with the operator, they can easily cause scratches. Furthermore, when removing and removing the sealing ring, the tool needs to withstand frequent prying and plugging loads. The threaded connection is prone to loosening due to repeated force, which affects the use of the tool.

[0005] Therefore, a quick disassembly and assembly tool for semiconductor device chamber seals is proposed to address the above problems. Utility Model Content

[0006] In order to overcome the above-mentioned defects of the prior art, the present invention provides a quick disassembly and assembly tool for the chamber sealing ring of semiconductor equipment, so as to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a quick disassembly and assembly tool for a semiconductor device chamber sealing ring, comprising a retractable handle, a movable slide column, and a manual adjustment plate. The retractable handle has a sliding cavity in its inner cavity, and both ends of the retractable handle are equipped with mounting covers. The front end of the retractable handle has an adjustment slide groove, and the upper and lower ends of the inner cavity of the adjustment slide groove are provided with limit holes.

[0008] The movable sliding columns are respectively embedded at both ends of the inner wall of the sliding cavity. The front ends of the opposite surfaces of the two sets of movable sliding columns are welded with sliders. The manual adjustment plates are respectively set in the inner cavity of the sliders. There are four sets of manual adjustment plates. One set of movable sliding columns has a shovel claw embedded on the right side, and the other set of movable sliding columns has a pry claw embedded on the left side.

[0009] Preferably, every two sets of the manual adjustment plates are mirror images of each other, and a limit post is welded to the outer side of every two sets of the manual adjustment plates.

[0010] Preferably, each pair of limiting holes corresponds to each other in the same vertical direction, and both sets of sliders abut against the inner surface of the adjusting groove to achieve limiting. Each pair of manual adjusting plates is provided with a spring on their opposite surfaces.

[0011] Preferably, the two ends of each set of springs are fixedly connected to one side of the opposite face of two sets of manual adjustment plates, and the limiting pins of each pair of sets are inserted into the inner cavity of two sets of limiting holes and then limited by the springs.

[0012] Preferably, when the two sets of manual adjustment plates approach each other and drive the two sets of limiting pins to compress the spring, the movable slide pin slides linearly along the inner wall of the slide cavity.

[0013] Preferably, the two ends of the retractable handle are respectively engaged with two sets of mounting covers, and the inner cavity of the mounting cover has space for the movable sliding column to be embedded.

[0014] Preferably, the shovel claw is fixedly connected to the left side of one set of movable sliding columns by bolts, and the pry claw is fixedly connected to the right side of the other set of movable sliding columns by bolts.

[0015] Preferably, the shovel claw has a tooth-like shape, and the pry claw has a hook-like shape.

[0016] The technical effects and advantages of this utility model are as follows:

[0017] 1. Compared with the existing technology, the quick-release tool for the semiconductor device chamber seal ring uses a movable slide column to drive the shovel and pry claws to slide and be stored in the inner cavity of the handle, which greatly reduces the overall size of the tool. This makes it easy to carry or store in small spaces such as tool bags. When stored, it is wrapped in the handle to prevent scratching the user or damaging other items when exposed. At the same time, it reduces the friction between the tool surface and the outside world and extends its service life.

[0018] 2. Compared with the existing technology, the quick-release tool for the semiconductor device chamber seal ring can adjust the length of the tool by inserting the limiting post into different limiting holes. After sliding into the position, it can be locked by releasing, which avoids loosening due to sliding under force during use. Moreover, the length can be quickly switched in a single step, which is convenient for adjustment and thus allows for quick removal and installation of the seal ring in the chamber. It is suitable for scenarios where the tool length needs to be frequently adjusted to remove and install the chamber seal ring. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall three-dimensional structure of this utility model.

[0020] Figure 2 This is a schematic diagram of the three-dimensional structure of the slider of this utility model.

[0021] Figure 3 This is a schematic diagram of the three-dimensional structure of the mounting cover assembly of this utility model.

[0022] Figure 4 This utility model Figure 1 A magnified schematic diagram of the structure at point A in the diagram.

[0023] The attached diagram is labeled as follows: 1. Retractable handle; 101. Slide cavity; 2. Mounting cover; 3. Adjustable slide groove; 4. Limiting hole; 5. Movable slide column; 6. Sliding block; 7. Manual adjustment plate; 71. Limiting post; 8. Spring; 9. Shovel claw; 10. Pry claw. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Example 1

[0026] As attached Figures 1 to 4The tool shown is a quick-release tool for a semiconductor device chamber seal ring, including a retractable handle 1, a movable slide column 5, and a manual adjustment plate 7. The retractable handle 1 has a sliding cavity 101 in its inner cavity. The retractable handle 1 serves as the main body of the tool, providing a gripping base and internal storage space. The inner cavity 101 can completely retract the movable slide column 5, the spade claw 9, and the pry claw 10, forming a columnar structure. Both ends of the retractable handle 1 are equipped with mounting covers 2, which can be removed to facilitate the removal of internal parts. The front end of the retractable handle 1 has an adjustment groove 3, which provides a sliding track for the slider 6. Limiting holes 4 are opened at the upper and lower ends of the inner cavity of the adjustment groove 3. The limiting holes 4 cooperate with the limiting post 71 to achieve a gear-type locking of the tool length.

[0027] Movable slide columns 5 are respectively embedded at both ends of the inner wall of the slide cavity 101, connecting the slider 6 with the scraper 9 and the pry bar 10 to realize telescopic movement. The front ends of the opposite faces of the two sets of movable slide columns 5 are welded with sliders 6. The slider 6 provides installation space for the manual adjustment plate 7, the limiting post 71 and the spring 8, and slides along the inner cavity of the adjustment groove 3. The manual adjustment plate 7 is respectively set in the inner cavity of the slider 6. There are four sets of manual adjustment plates 7. Every two sets of manual adjustment plates 7 control the insertion and removal of two sets of limiting posts 71 and the telescopic movement of one set of movable slide columns 5. The right side of one set of movable slide columns 5 is embedded with a scraper 9. The scraper 9 has a toothed shape and is used to separate and scrape the adhesive parts between the sealing ring and the semiconductor cavity. The left side of the other set of movable slide columns 5 is embedded with a pry bar 10. The pry bar 10 has a hook shape and is used to pry and hook up the sealing ring of the deeper cavity.

[0028] Example 2

[0029] Based on Example 1, the solution in Example 1 will be further described in detail below with reference to the specific working method, such as... Figures 1 to 4 As shown below, see details:

[0030] In a preferred embodiment, every two sets of manual adjustment plates 7 are mirror images of each other, ensuring even force distribution on both sides during pressing. Each pair of manual adjustment plates 7 has a limit post 71 welded to its outer side. Each pair of limit holes 4 are aligned vertically and form a pair, facilitating locking of the slider 6. Both sets of sliders 6 abut against the inner surface of the adjusting groove 3 for limiting. The sliders 6 move linearly within the adjusting groove 3. A spring 8 is provided on the opposite surface of each pair of manual adjustment plates 7, providing preload to keep the limit post 71 in place. The springs remain inserted. The two ends of each set of springs 8 are fixedly connected to one side of the opposite face of two sets of manual adjustment plates 7. After each pair of limiting pins 71 are inserted into the inner cavity of two sets of limiting holes 4, they are limited by springs 8. When the two sets of manual adjustment plates 7 approach each other and drive the two sets of limiting pins 71 to compress the springs 8, the movable slide 5 slides linearly along the inner wall of the slide cavity 101. When the two sets of manual adjustment plates 7 are squeezed, the springs 8 are compressed, so that the two sets of limiting pins 71 are pulled out from the inner cavity of the two sets of limiting holes 4, thereby allowing the slider 6 to reciprocate in the inner cavity of the adjustment groove 3.

[0031] In a preferred embodiment, the two ends of the retractable handle 1 are respectively engaged with two sets of mounting covers 2. The inner cavity of the mounting cover 2 has space for the movable slide column 5 to be embedded. After the mounting cover 2 is rotated and disassembled, the internal parts can be taken out for maintenance. The shovel claw 9 is embedded in the left side of one set of movable slide columns 5 and then fixedly connected by bolts. The pry claw 10 is embedded in the right side of another set of movable slide columns 5 and then fixedly connected by bolts. The shovel claw 9 and the pry claw 10 are prone to wear after frequent use. The bolt connection allows for the individual replacement of damaged parts.

[0032] The working process of this utility model is as follows: In the initial state, the movable slide column 5 is completely retracted into the slide cavity 101 of the retractable handle 1, and the tool as a whole is compactly cylindrical for easy carrying and storage. When needed, the user presses the two sets of manual adjustment plates 7 mirrored at the adjustment groove 3 at the front end of the handle. Each set of sliders 6 controls one side of the movable slide column 5. Because the manual adjustment plates 7 are mirror symmetrical, the force on both sides is even when pressed, pushing them closer to each other and compressing the internal spring 8. At this time, the limiting post 71 moves inward with the manual adjustment plate 7 and is pulled out from the limiting hole 4, releasing the pressure. Locking the slider 6: Since the slider 6 is welded to the front end of the movable slide column 5 and abuts against the inner surface of the adjusting slide groove 3, the unlocked slider 6 can slide linearly along the track of the adjusting slide groove 3, causing the movable slide column 5 to extend and retract within the slide cavity 101, thereby adjusting the extension length of the shovel claw 9 or pry claw 10 to the required position. After adjustment, the user releases the manual adjustment plate 7, the preload of the spring 8 is released, and the manual adjustment plate 7 is pushed outward to reset, causing the limit pin 71 to re-insert into the limit hole 4 at the corresponding position, locking the slider 6 and the movable slide column 5 to ensure the tool length is stable.

[0033] After adjustment, the toothed claw 9 can cut into the interface between the sealing ring and the semiconductor chamber, and achieve gradual separation through multi-point force application of the teeth. The hook-shaped pry claw 10 can penetrate deep into the chamber groove and use the lever principle to hook the sealing ring to complete the disassembly. After use, press the manual adjustment plate 7 again to pull out the limit post 71 and return the movable slide 5 to the slide cavity 101. After the claw 9 and the pry claw 10 are fully retracted into the handle, the mounting cover 2 is closed by meshing and the storage state is restored. If maintenance is required, the movable slide 5 can be removed by rotating and disassembling the mounting cover 2. Since the claw 9 and the pry claw 10 are connected to the movable slide 5 by bolts, worn parts can be directly disassembled and replaced. The above is the working principle of this quick disassembly and assembly tool for semiconductor equipment chamber sealing rings.

Claims

1. A quick dismounting tool for semiconductor equipment chamber sealing ring, comprising a storable handle (1), a movable slide column (5) and a manual adjusting plate (7), characterized in that: The retractable handle (1) has a sliding cavity (101) in its inner cavity. Both ends of the retractable handle (1) are equipped with mounting covers (2). The front end of the retractable handle (1) has an adjustment groove (3). Limiting holes (4) are opened at the upper and lower ends of the inner cavity of the adjustment groove (3). The movable slides (5) are respectively embedded at both ends of the inner wall of the slide cavity (101). The front ends of the opposite surfaces of the two sets of movable slides (5) are welded with sliders (6). The manual adjustment plates (7) are respectively set in the inner cavity of the sliders (6). There are four sets of manual adjustment plates (7). One set of movable slides (5) has a shovel claw (9) embedded on the right side and another set of movable slides (5) has a pry claw (10) embedded on the left side.

2. The quick release tool for semiconductor equipment chamber seal ring of claim 1, wherein: The manual adjustment plates (7) of each pair are mirror images of each other, and a limit post (71) is welded to the outside of each pair of manual adjustment plates (7).

3. The tool of claim 2, wherein: Each pair of limiting holes (4) are aligned vertically and correspond to each other. Both sets of sliders (6) abut against the inner surface of the adjusting groove (3) to achieve limiting. Each pair of manual adjusting plates (7) is provided with springs (8) on their opposite sides.

4. The tool of claim 3, wherein: The two ends of each set of springs (8) are fixedly connected to one side of the opposite face of two sets of manual adjustment plates (7). Each two sets of limiting posts (71) are inserted into the inner cavity of two sets of limiting holes (4) and then limited by the springs (8).

5. The tool of claim 4, wherein: When the two sets of manual adjustment plates (7) approach each other and drive the two sets of limiting pins (71) to compress the spring (8), the movable slide (5) slides linearly along the inner wall of the slide cavity (101).

6. The tool of claim 1, wherein: The two ends of the retractable handle (1) are respectively engaged with the two sets of mounting covers (2), and the inner cavity of the mounting cover (2) has space for the movable slide (5) to be embedded.

7. The quick-release tool for semiconductor device chamber seals according to claim 1, characterized in that: The shovel claw (9) is embedded in the left side of one set of movable slide columns (5) and then fixedly connected by bolts. The pry claw (10) is embedded in the right side of another set of movable slide columns (5) and then fixedly connected by bolts.

8. The tool of claim 7, wherein: The shape of the shovel claw (9) is tooth-like, and the shape of the pry claw (10) is hook-like.

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