A semiconductor test probe pre-assembly jig plate vibration table

By designing a vibration table for pre-assembling semiconductor test probes using a fixture plate, and by utilizing a swing plate and shunt block structure to automatically disperse probe parts, the problem of high labor intensity and low efficiency caused by manual shaking is solved, and the uniform dispersion and efficient loading of probe parts on the fixture plate are achieved.

CN224445817UActive Publication Date: 2026-07-03SUZHOU DICK MICROELECTRONICS CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SUZHOU DICK MICROELECTRONICS CO LTD
Filing Date
2025-07-29
Publication Date
2026-07-03

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Abstract

The utility model relates to test probe preassembling technical field, and disclose a kind of jig plate vibration table for semiconductor test probe preassembling, including base, swing seat is provided on the base, swing shaft is rotatably arranged on the upper end of swing seat, swing plate is provided on the swing shaft, part groove is provided on the swing plate, jig plate groove is provided at the bottom of part groove, first shunt block is provided at both ends of swing plate in the swing direction of part groove, one bevel edge is provided on the part groove of the two sides of first shunt block, each bevel edge is with the side surface of first shunt block and forms a part containing groove, second shunt block is provided at the opening of each part containing groove, need not be manually shaken by operating personnel, reduce labor intensity, and make probe part be shunted and scattered, uniformly dispersed on the surface of jig plate, improve filling efficiency.
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Description

Technical Field

[0001] This utility model relates to the field of test probe pre-assembly technology, specifically to a vibration table for a semiconductor test probe pre-assembly fixture. Background Technology

[0002] Semiconductor testing equipment combines software and hardware, typically consisting of a large number of testing functions controlled by a computer to test the functionality of semiconductor chips. The equipment requires a large number of test probes.

[0003] like Figure 7 As shown, the test probe mainly consists of four parts: syringe, needle head, spring, and needle tail. During the production process, these four parts need to be pre-assembled. The needle tail, spring, and needle head are inserted into the syringe in sequence. After the pre-assembly is completed, rivet holes are made on the outer wall of the syringe to complete the assembly.

[0004] To improve pre-assembly efficiency and achieve batch assembly, the following methods are currently widely used: Figure 8 The jig plate shown has multiple holes for accommodating probe components. The probe components are first loaded onto the jig plate, and then the jig plate containing the needle tail, spring and needle tip is sequentially fastened onto the jig plate containing the syringe, so that the needle tail, spring and needle tip fall into the syringe in sequence for pre-assembly.

[0005] When loading the probe parts into the fixture plate, multiple probe parts are first scattered into the fixture plate, and then shaken to make the probe parts fall into the holes on the fixture plate. Since this process requires the operator to shake manually, it not only increases the labor intensity, but also makes it easy for the probe parts to pile up together when shaken manually, and they cannot be evenly distributed on the surface of the fixture plate, resulting in low efficiency. Utility Model Content

[0006] To address the shortcomings of existing technologies, the purpose of this utility model is to provide a vibration table for a fixture plate for pre-assembling semiconductor test probes. This eliminates the need for manual shaking by operators, reducing labor intensity, and allows the probe parts to be diverted and dispersed evenly on the surface of the fixture plate, thereby improving loading efficiency.

[0007] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0008] A vibration table for a pre-assembly fixture plate for semiconductor test probes includes a base, a swing seat on the base, a swing shaft rotatably mounted on the upper end of the swing seat, a swing plate on the swing shaft, a part slot on the swing plate, a fixture plate slot at the bottom of the part slot, a first diverter block at both ends of the part slot in the swing direction of the swing plate, a bevel on both sides of the part slot on the first diverter block, each bevel forming a part receiving slot with the side of the first diverter block, and a second diverter block at the opening of each part receiving slot.

[0009] Preferably, the swing seat is slidably disposed on the base, and the sliding direction of the swing seat is perpendicular to the swing plane of the swing plate.

[0010] Preferably, the base is provided with a sliding groove perpendicular to the swing plane of the swing plate, the swing seat is slidably disposed in the sliding groove, a spring is provided between the swing seat and the side wall of the sliding groove, and a vibration motor is provided on the swing seat.

[0011] Preferably, the swing seat is provided with a swing motor, and the rotating shaft of the swing motor is connected to the swing shaft.

[0012] Preferably, the bottom of the fixture plate groove is provided with a through hole.

[0013] Compared with the prior art, the beneficial effects achieved by this utility model are:

[0014] In use, the fixture plate is placed in the fixture plate slot, and the probe parts are scattered into the slot. The oscillating plate drives the fixture plate to oscillate back and forth, causing the probe parts to slide back and forth at both ends inside the slot. When the probe parts slide to the surface of the fixture plate, they fall into the drain holes on the fixture plate. The probe parts that do not fall into the drain holes continue to slide back and forth until the fixture plate is full. This process does not require the operator to manually shake it, reducing labor intensity.

[0015] When the swing plate is oscillating, after the swing plate swings to one end, the probe parts inside the part slot slide to one end of the part slot and are divided into two parts by the first diverting block. When the swing plate swings to the other end, the parts in the two part receiving slots flow to a second diverting block, which then diverts the parts again. The probe parts, after being diverted twice, flow to the surface of the fixture plate, so that the probe parts are dispersed and evenly distributed on the surface of the fixture plate, thereby improving the filling efficiency. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 for Figure 1 Schematic diagram of section A in the diagram;

[0018] Figure 3 This is a schematic diagram of the external structure of this utility model;

[0019] Figure 4 The diversion process of this utility model Figure 1 ;

[0020] Figure 5 The diversion process of this utility model Figure 2 ;

[0021] Figure 6 The diversion process of this utility model Figure 3 ;

[0022] Figure 7 This is a schematic diagram of the test probe structure;

[0023] Figure 8 This is a structural schematic diagram of the fixture plate.

[0024] The components are: 1. base; 2. swing seat; 3. swing shaft; 4. swing plate; 5. part slot; 6. jig plate slot; 7. first diverter block; 8. bevel; 9. part receiving slot; 10. second diverter block; 11. slide; 12. spring; 13. vibration motor; 14. swing motor; 15. through hole. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] This utility model provides the following technical solution:

[0027] Combination Figures 1 to 3 As shown in the figure, this embodiment discloses a vibration table for a pre-assembly fixture plate for semiconductor test probes, including a base 1, a swing seat 2 on the base 1, a swing shaft 3 rotatably mounted on the upper end of the swing seat 2, a swing plate 4 on the swing shaft 3, a part slot 5 on the swing plate 4, a fixture plate slot 6 at the bottom of the part slot 5, a first diverter block 7 at both ends of the part slot 5 in the swing direction of the swing plate 4, a bevel 8 on both sides of the part slot 5, each bevel 8 forming a part receiving slot 9 with the side of the first diverter block 7, and a second diverter block 10 at the opening of each part receiving slot 9.

[0028] In use, the fixture plate is placed in the fixture plate groove 6, and the probe parts are scattered into the parts groove 5. The oscillating plate 4 drives the fixture plate to oscillate back and forth, so that the probe parts slide back and forth at both ends inside the parts groove 5. When the probe parts slide to the surface of the fixture plate, they fall into the drain hole on the fixture plate. The probe parts that do not fall into the drain hole continue to slide back and forth until the fixture plate is full. This process does not require the operator to manually shake it, which reduces the labor intensity.

[0029] Combination Figure 4 and Figure 5 As shown, when the swing plate 4 swings, after the swing plate 4 swings to one end, the probe parts inside the part slot 5 slide to one end of the part slot 5 and are divided into two parts by the first diverting block 7. The two parts of probe parts enter a part receiving slot 9 formed by the inclined side 8 and the side of the first diverting block 7. When the swing plate 4 swings to the other end, the parts in the two part receiving slots 9 flow to a second diverting block 10 respectively. The second diverting block 10 diverts the parts again. The probe parts after being diverted twice flow to the surface of the fixture plate, so that the probe parts are diverted and dispersed evenly on the surface of the fixture plate, thereby improving the filling efficiency.

[0030] Specifically, in combination Figure 6 As shown, the swing seat 2 is slidably disposed on the base 1, and the sliding direction of the swing seat 2 is perpendicular to the swing plane of the swing plate 4.

[0031] By reciprocating along the swing plane perpendicular to the swing plate 4, the probe parts that have been diverted twice are further broken up, making it easier for the probe parts to fall into the drain hole of the fixture plate.

[0032] Specifically, the base 1 is provided with a sliding groove 11 that is perpendicular to the swing plane of the swing plate 4, the swing seat 2 is slidably disposed in the sliding groove 11, a spring 12 is provided between the swing seat 2 and the side wall of the sliding groove 11, and a vibration motor 13 is provided on the swing seat 2.

[0033] Vibration is generated by the vibration motor 13, and the vibration is filtered by the slide groove 11, retaining the vibration perpendicular to the swing plane of the swing plate 4. The swing seat 2 is held in the middle of the slide groove 11 by the spring 12, so that the swing seat 2 reciprocates along the swing plane perpendicular to the swing plate 4.

[0034] Specifically, the swing seat 2 is provided with a swing motor 14, and the rotating shaft of the swing motor 14 is connected to the swing shaft 3.

[0035] The swing motor 14 drives the swing shaft 3 to rotate back and forth, thereby driving the swing plate 4 to swing back and forth.

[0036] Specifically, the bottom of the fixture plate groove 6 is provided with a through hole 15.

[0037] The through hole 15 facilitates the removal of the filled fixture plate.

[0038] This utility model discloses a vibration table for a pre-assembly fixture for semiconductor test probes, which is suitable for pre-assembly work in the probe production process. When the probe parts are loaded into the fixture, there is no need for operators to manually shake it, which reduces labor intensity and allows the probe parts to be diverted and dispersed evenly on the surface of the fixture, thereby improving loading efficiency.

[0039] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations may be made to these embodiments without departing from the principles and spirit, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A jig plate shaker for semiconductor test probe pre-assembly, comprising a base (1), characterized in that: A swing seat (2) is provided on the base (1). A swing shaft (3) is rotatably provided on the upper end of the swing seat (2). A swing plate (4) is provided on the swing shaft (3). A part slot (5) is provided on the swing plate (4). A fixture plate slot (6) is provided at the bottom of the part slot (5). A first diverting block (7) is provided at both ends of the part slot (5) in the swing direction of the swing plate (4). An inclined side (8) is provided on the part slot (5) on both sides of the first diverting block (7). Each inclined side (8) forms a part receiving slot (9) with the side of the first diverting block (7). A second diverting block (10) is provided at the opening of each part receiving slot (9).

2. The vibration table for a probe card of a semiconductor test probe pre-assembly according to claim 1, wherein: The swing seat (2) is slidably disposed on the base (1), and the sliding direction of the swing seat (2) is perpendicular to the swing plane of the swing plate (4).

3. The vibration table for a probe card of a semiconductor test probe pre-assembly according to claim 2, wherein: The base (1) is provided with a sliding groove (11) that is perpendicular to the swing plane of the swing plate (4). The swing seat (2) is slidably disposed in the sliding groove (11). A spring (12) is provided between the swing seat (2) and the side wall of the sliding groove (11). A vibration motor (13) is provided on the swing seat (2).

4. The vibration table for a probe card of claim 1, wherein: The swing seat (2) is provided with a swing motor (14), and the rotating shaft of the swing motor (14) is connected to the swing shaft (3).

5. The vibration table for a semiconductor test probe pre-assembly fixture as described in claim 1, characterized in that: The bottom of the fixture plate groove (6) is provided with a through hole (15).