A transfer device for a high-voltage insulating ring in an ion implanter

Abstract

This utility model discloses a transfer device for a high-voltage insulating ring in an ion implanter, relating to the field of ion implanter technology. It includes a lifting plate capable of lifting, with a square slot on the lifting plate for the through-hole placement of the outer edge of the insulating ring. Two sides perpendicular to the axis of the insulating ring on the slot are used as reference sides, and the remaining two sides are used as positioning sides. Each reference side has a recessed limiting groove for flange placement, and each positioning side has a movable wedge block capable of moving closer or further apart. This utility model adapts to different disassembly and assembly scenarios through the lifting function of the lifting plate, eliminating the need for manual operation during disassembly, assembly, and transfer. Furthermore, the cooperation between the slot and the limiting groove achieves precise positioning of the insulating ring flange, while the inclined surface of the wedge block clamps the outer edge of the insulating ring, thus fixing the entire insulating ring in a limited position.

Description

Technical Field

[0001] This utility model relates to the field of ion implanter technology, and specifically to a transfer device for a high-voltage insulating ring in an ion implanter. Background Technology

[0002] In the field of semiconductor process equipment technology, different doping elements are typically implanted into wafers using an ion implanter to alter their electrical properties. To ensure that the doping depth reaches a certain level, a high voltage of tens of kilovolts needs to be applied between the ion source module and the absorber module of the ion implanter. Voltage isolation between these two modules is achieved through a high-voltage insulating ring. This high-voltage insulating ring requires periodic disassembly and maintenance. Currently, the common method is for personnel to manually remove it from the machine and then manually transport it to the workbench for maintenance.

[0003] A schematic diagram of the insulating ring structure in the prior art is shown below. Figure 1 As shown, 101 represents the insulating ring, and 102 represents the annular flange located at the end of the insulating ring. Because the insulating ring itself is large and heavy (the smallest size can weigh up to 50 kg), and because it is installed inside the machine with limited lateral space, it can only be moved longitudinally. Therefore, the current method of manual disassembly and reassembly, and manual handling to the maintenance workbench, is not only labor-intensive but also extremely dangerous as it is prone to falling below. When the insulating ring is reinstalled after maintenance, it must be precisely aligned with the fixing screw holes. This requires not only manual support of the insulating ring but also precise tightening of the fixing screws, making the operation even more difficult.

[0004] To address this issue, we propose a transfer device for the high-voltage insulating ring of an ion implanter. Utility Model Content

[0005] The purpose of this invention is to solve the problems in the prior art by proposing a transfer device for the high-voltage insulating ring of an ion implanter. The device uses the design of slots and limiting grooves on the lifting plate to stably restrict each part of the flange, effectively ensuring the stability of disassembly, assembly and transfer.

[0006] To solve the above problems, this utility model provides the following technical solution:

[0007] A transfer device for a high-voltage insulating ring in an ion implanter includes a lifting plate capable of lifting. The lifting plate has a square slot for the outer edge of the insulating ring to be placed through it. The two sides of the slot perpendicular to the axis of the insulating ring are used as reference sides, and the other two sides are used as positioning sides. Each of the two reference sides has a limiting groove for placing a flange. Each of the two positioning sides has a movably arranged wedge block that can move close together or apart. The inclined surfaces of the two wedge blocks are arranged in an inverted V-shape above the slot, so that when the two flanges are placed on the two limiting grooves, the inclined surfaces of the two wedge blocks are in contact with the outer edge of the insulating ring.

[0008] As a further aspect of this utility model, the device also includes a limiting component disposed on the lifting plate and capable of moving toward or away from any limiting groove.

[0009] As a further embodiment of this utility model: the limiting component includes a first seat fixedly mounted on the lifting plate, and the first seat is located beside the limiting groove. A limiting pusher that can move toward the limiting groove is movably inserted on the first seat to apply a resisting action to the flange on the limiting groove.

[0010] As a further embodiment of this utility model: the moving direction of the limiting pusher is parallel to the axial direction of the flange, so that the direction of the abutment exerted by the limiting pusher on the flange is arranged along the axial direction of the flange.

[0011] As a further embodiment of this utility model: the first seat is provided with a first elastic element that is fixedly connected to the limiting pusher, and the first elastic element is used to make the limiting pusher have a tendency to move toward the limiting groove.

[0012] As a further embodiment of this utility model, the limiting component also includes a pin disposed on the limiting pusher, and the pin is detachably connected to the lifting plate.

[0013] As a further embodiment of this utility model: the direction of the line connecting the two limiting grooves is defined as the groove width direction, and the groove width of the limiting groove that cooperates with the limiting component is greater than the groove width of the other limiting groove.

[0014] As a further embodiment of this utility model: the lifting plate is provided with a second seat for the movable installation of the wedge block, and the second seat is provided with a second elastic element that is fixedly connected to the wedge block.

[0015] As a further embodiment of this utility model: the device also includes a frame on which a lifting plate is movably mounted, and the lifting plate is driven by a drive source on the frame to perform a vertical lifting action. The support plate is installed on the lifting plate by multiple evenly distributed support rods, and there is a space between the support plate and the lifting plate for accommodating the outer edge of the insulating ring.

[0016] As a further embodiment of this invention, the driving source is a worm gear structure.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. The lifting function of the lifting plate can adapt to different disassembly and assembly scenarios, so that the entire disassembly, assembly and transportation work does not require manual operation; and the precise positioning of the insulating ring flange is achieved by the cooperation of the slot and the limiting slot. At the same time, the inclined surface of the wedge block is used to clamp the outer edge of the insulating ring. The combination of the above two limiting methods makes the insulating ring as a whole limited and fixed.

[0019] 2. By adding a bidirectional limiting component, when one flange is in contact with the wall of the limiting groove, the limiting component can be used to adjust the constraint range of the limiting groove to limit the other flange, so that both flanges are restricted, ensuring the stability of the insulating ring on the lifting plate and facilitating subsequent transfer and other processes.

[0020] 3. The first seat is fixed to the support plate to ensure the stability of the movement trajectory of the limit pusher; the pusher's plug-in design avoids lateral swaying and ensures that the force applied to the flange is precise and controllable.

[0021] 4. The design of the limit pusher moving along the flange axis reflects engineering optimization: on the one hand, the direction of the force is consistent with the direction of the flange bearing force, avoiding the generation of harmful lateral force; on the other hand, it effectively protects brittle insulating materials from shear stress damage and extends the service life of components.

[0022] 5. The differentiated slot width design constructs an error prevention mechanism. On the one hand, it forces the insulating ring to be placed in the only correct direction, eliminating the risk of human error. On the other hand, the wide slot side works with the limiting component to form the main constraint area, improving the overall stability of the system. Attached Figure Description

[0023] The present invention will be further described below with reference to the accompanying drawings.

[0024] Figure 1 This is a schematic diagram of the three-dimensional structure of an insulating ring in the prior art;

[0025] Figure 2 This is a schematic diagram of the three-dimensional structure of this utility model. Figure 1 ;

[0026] Figure 3 This is a schematic diagram of the three-dimensional structure of this utility model. Figure 2 ;

[0027] Figure 4 This is a schematic diagram of the working structure of this utility model.

[0028] In the diagram: 101, insulating ring; 102, flange;

[0029] 1. Lifting plate; 2. Slot; 3. Limiting slot; 4. Wedge block; 5. First seat; 6. Limiting push frame; 7. First elastic element; 8. Pin; 9. Second seat; 10. Second elastic element; 11. Lifting plate; 12. Frame; 13. Drive source. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0031] like Figures 2-4 As shown, a transfer device for a high-voltage insulating ring in an ion implanter includes a frame 12. A lifting plate 11 is movably mounted on the frame 12, with the lifting plate 11 moving vertically. A drive source 13 is mounted on the frame 12 to drive the lifting plate 11 to perform lifting and lowering actions. The drive source 13 can be a worm gear structure or a scissor lift mechanism, etc. A support plate 1 is mounted on the lifting plate 11 by multiple evenly distributed support rods. There is a certain space between the support plate 1 and the lifting plate 11, which is used to accommodate the outer edge of the insulating ring 101.

[0032] The lifting plate 1 has a slot 2, which is rectangular. On one opposite side of the slot 2 (the two sides along its length, which can be defined as reference sides), there is a limiting groove 3. The limiting groove 3 is an open design and is used to support the flange 102 of the insulating ring 101. On the other opposite side of the slot 2 (the two sides along its width, which can be defined as positioning sides), there is a second seat 9. An inclined wedge 4 is movably arranged on the second seat 9. The two inclined wedges 4 can perform similar movements.

[0033] During assembly and disassembly, the drive source 13 is used to raise the slot 2 on the lifting plate 1 to the outside of the insulating ring 101. At this time, the flange 102 is supported by the limiting groove 3, and the outer edge of the insulating ring 101 is abutted by the two wedges 4. The insulating ring 101 is then fixed in place, and the corresponding disassembly work can be carried out. After disassembly, the lifting plate 1 drives the insulating ring 101 down to a relatively safe height. Then, the entire device can be moved to the designated maintenance workbench.

[0034] To ensure a more stable contact between the two wedges 4 and the outer edge of the insulating ring 101, inclined surfaces are provided on the sides of the two wedges 4 that are close to each other, and the two inclined surfaces are arranged in an inverted V-shape. Alternatively, the inclined surfaces can be designed as a concave structure to match the arc-shaped structure of the outer edge of the insulating ring 101.

[0035] Taking the direction of the line connecting the two limiting grooves 3 as the groove width direction, under normal circumstances, the groove width of the limiting groove 3 is greater than the length of the flange 102. Therefore, at this time, the two flanges 102 and the groove wall of the corresponding limiting groove 3 are at a certain distance, and the flange 102 is in a free state.

[0036] To ensure the stable placement of the free-state flange 102 on the limiting groove 3, this application provides a limiting component on the side of one of the limiting grooves 3. The limiting component can move towards or away from the limiting groove 3. Specifically, after the two flanges 102 are placed on the two limiting grooves 3 respectively, they can be manually positioned along the axial direction of the flange 102 (with... Figure 4 As shown, the insulating ring 101 is pushed to the right until one flange 102 abuts against the wall of the limiting groove 3. Then, it can be moved closer to the other flange 102 using the limiting component until the limiting component restricts the flange 102. This application uses the wall of the limiting groove 3 and the limiting component to restrict the positions of the two flanges 102, keeping their positions stable. Therefore, during subsequent transport, the insulating ring 101 will not shift or wobble on the lifting plate 1.

[0037] Preferably, to save labor by reducing the distance the flange 102 needs to move towards the wall of the limiting groove 3, the width of the limiting groove 3 that mates with the limiting component is greater than the width of the other limiting groove 3. With this layout design, during the upward movement of the lifting plate 1 to receive the insulating ring 101, the flange 102 can be positioned to contact the wall of the limiting groove 3 as closely as possible. Simultaneously, this design also provides a definite orientation for the placement of the insulating ring 101, eliminating the risk of subsequent human error during installation.

[0038] Specifically, the limiting component includes a first seat 5 fixedly mounted on the support plate 1, and the first seat 5 is located beside the limiting groove 3. A limiting pusher 6, which can move towards the limiting groove 3, is movably inserted into the first seat 5 to achieve an abutment against the flange 102 on the limiting groove 3. To automatically apply the abutment, a first elastic element 7 fixedly connected to the limiting pusher 6 can be provided on the first seat 5. The first elastic element 7 is used to give the limiting pusher 6 a tendency to move towards the limiting groove 3. At the same time, a pin 8 is provided on the limiting pusher 6, and the pin 8 is detachably mounted on the support plate 1.

[0039] Figure 4 In the indicated state, the pin 8 locks the limiting pusher 6 onto the lifting plate 1, and the first elastic element 7 is in a compressed and energy-storing state. When the insulating ring 101 is placed on the lifting plate 1 and the right flange 102 is pushed to the right along the axial direction of the flange 102 to make contact with the groove wall of the limiting groove 3, the pin 8 can be pulled out upwards. Under the restoring action of the first elastic element 7, the limiting pusher 6 can move toward the flange 102 to achieve automated contact.

[0040] The limiting pusher 6 can move in various directions, as long as it can achieve either approaching or separating movement from the flange 102. Preferably, for example... Figure 4 As shown, we set the direction of movement of the limiting pusher 6 to be parallel to the axial direction of the flange 102, so that the direction of the abutment force applied by the limiting pusher 6 to the flange 102 is arranged along the axial direction of the flange 102. This layout design can make the abutment force applied by the limiting pusher 6 to the flange 102 coaxial with the flange 102, thus improving the limiting effect.

[0041] In order for the two wedges 4 to apply a clamping effect to the outer edge of the insulating ring 101, a second elastic element 10 fixedly connected to the wedges 4 can be provided on the second base 9. Under normal circumstances, the second elastic element 10 is in the normal state, and the two wedges 4 are close to each other, with both wedges 4 located above the slot 2. When the lifting plate 1 is moved upward until both wedges 4 are in contact with the outer edge of the insulating ring 101, the two wedges 4 will move away from each other, and the second elastic element 10 will be compressed. When the lifting plate 1 moves upward to the designated position, the wedges 4 will be subjected to the stable elastic force of the second elastic element 10 and act on the outer edge of the insulating ring 101, thereby clamping the outer edge of the insulating ring 101 using the two wedges 4.

[0042] It should be noted that the first elastic element 7 and the second elastic element 10 mentioned above are both components with elastic energy storage in the prior art, such as springs.

[0043] The above description provides a detailed account of one embodiment of the present invention. However, this description is merely a preferred embodiment and should not be construed as limiting the scope of the present invention. All equivalent variations and improvements made within the scope of the claims of the present invention should still fall within the patent coverage of the present invention.

Claims

1. A transfer device for high voltage insulator rings of ion implanters, characterized in that The device includes a lifting plate (1) capable of lifting and lowering. The lifting plate (1) has a square slot (2) for the outer edge of the insulating ring (101) to be placed through it. The two sides of the slot (2) perpendicular to the axis of the insulating ring (101) are used as reference sides, and the other two sides are used as positioning sides. The two reference sides are recessed with limiting grooves (3) for the placement of flanges (102). The two positioning sides are movably provided with inclined wedges (4) that can move close to or away from each other. The inclined surfaces of the two inclined wedges (4) are arranged in an inverted V-shape above the slot (2) so that when the two flanges (102) are placed on the two limiting grooves (3), the inclined surfaces of the two inclined wedges (4) are in contact with the outer edge of the insulating ring (101).

2. A transfer device for high voltage insulator rings of ion implanters according to claim 1, characterized in that The device also includes a limiting component disposed on the lifting plate (1) and capable of moving toward or away from any limiting groove (3).

3. A transfer device for a high-voltage insulating ring in an ion implanter according to claim 2, characterized in that, The limiting component includes a first seat (5) fixedly mounted on the lifting plate (1), and the first seat (5) is located beside the limiting groove (3). A limiting pusher (6) that can move toward the limiting groove (3) is movably inserted on the first seat (5) to apply a resisting action to the flange (102) on the limiting groove (3).

4. A transfer device for a high voltage insulator ring of an ion implanter as defined in claim 3, wherein The direction of movement of the limiting pusher (6) is parallel to the axial direction of the flange (102), so that the direction of the abutment force exerted by the limiting pusher (6) on the flange (102) is arranged along the axial direction of the flange (102).

5. A transfer device for a high voltage insulator ring of an ion implanter according to claim 3 or 4, characterized in that The first seat (5) is provided with a first elastic element (7) that is fixedly connected to the limiting push frame (6). The first elastic element (7) is used to make the limiting push frame (6) have a tendency to move toward the limiting groove (3).

6. A transfer device for a high voltage insulator ring of an ion implanter according to claim 3 or 4, characterized in that The limiting component also includes a pin (8) disposed on the limiting pusher (6), and the pin (8) is detachably connected to the lifting plate (1).

7. A transfer device for high voltage insulator rings of ion implanters according to any one of claims 2-4, characterized in that, The direction of the line connecting the two limiting grooves (3) is defined as the groove width direction. The groove width of the limiting groove (3) that cooperates with the limiting component is greater than the groove width of the other limiting groove (3).

8. A transfer device for high voltage insulator rings of ion implanters according to any one of claims 1-4, characterized in that, The lifting plate (1) is provided with a second seat (9) for the movable installation of the wedge block (4), and the second seat (9) is provided with a second elastic element (10) that is fixedly connected to the wedge block (4).

9. A transfer device for a high-voltage insulating ring in an ion implanter according to any one of claims 1-4, characterized in that, The device also includes a frame (12) on which a lifting plate (11) is movably mounted, and the lifting plate (11) is driven by a drive source (13) on the frame (12) to perform a vertical lifting action. The lifting plate (1) is mounted on the lifting plate (11) by a plurality of evenly distributed support rods, and there is a space between the lifting plate (1) and the lifting plate (11) for accommodating the outer edge of the insulating ring (101).

10. A transfer device for a high voltage insulator ring of an ion implanter as defined in claim 9, wherein The drive source (13) is a worm gear structure.

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