Vertical hot filament CVD process chamber

Abstract

The utility model belongs to the field of coating technology, concretely relates to a vertical hot wire CVD process chamber, and the vertical hot wire CVD process chamber includes: the shell, the inside is the coating chamber, and the lateral wall is set up with the feed inlet, the upper cover is connected with the shell, the spray module is set up in the upper cover, the hot wire module includes: a plurality of short hot wire groups and a plurality of long hot wires, the short hot wire group sets up in the spray module, the long hot wire is vertically set up in the coating chamber, the transmission module is set up at the bottom of the coating chamber, the vacuumizing mouth is set up on the lateral wall of the shell, the vertical hot wire CVD process chamber carries out the preheating to the process gas through short hot wire group, when needing coating, the preheated process gas is sent to the coating chamber, then is heated to decomposition through the long hot wire, thereby reduces the heating time of process gas in the coating chamber, and then speeds up the coating efficiency.

Description

Technical Field

[0001] This utility model belongs to the field of coating technology, specifically relating to coating of silicon wafers, and particularly to a vertical hot-wire CVD process chamber. Background Technology

[0002] With the increasing global demand for renewable energy, the solar photovoltaic industry has developed rapidly. In the manufacturing process of solar cells, silicon wafers need to undergo processes such as cleaning, diffusion, annealing, coating, and screen printing. Hot-wire CVD (Chemical Vapor Deposition) is one of the commonly used coating equipment in solar cell production. In hot-wire CVD equipment, high voltage is applied to the hot-wire module, causing it to generate high temperatures.

[0003] In related technologies, the hot filament assembly of a hot filament CVD equipment is located inside the coating chamber, and the hot filament assembly decomposes the process gas entering the coating chamber at high temperature.

[0004] However, in the above-mentioned application scenarios, after the process gas enters the coating chamber, the time required for its temperature to rise to the point of decomposition is relatively long, resulting in low coating efficiency.

[0005] Therefore, how to solve the above problems is a problem that urgently needs to be solved by those skilled in the art.

[0006] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content

[0007] This disclosure provides at least one vertical hot-wire CVD process chamber, comprising: an outer shell containing a coating chamber with a feed inlet on the side wall; a top cover connected to the outer shell; a spray module disposed within the top cover; a hot-wire module comprising: a plurality of short hot-wire groups and a plurality of long hot-wires, wherein the short hot-wire groups are disposed within the spray module and the long hot-wires are vertically disposed within the coating chamber; a transmission module disposed at the bottom of the coating chamber; and a vacuum port disposed on the side wall of the outer shell; wherein the transmission module is adapted to receive a carrier plate through the feed inlet, the vacuum port is adapted to evacuate the coating chamber, and the hot-wire module is adapted to generate heat; the spray module is adapted to spray process gas, which, after being preheated by the short hot-wire groups, enters the coating chamber and is deposited on the silicon wafer of the carrier plate after being decomposed at high temperature by the long hot-wires.

[0008] In one optional embodiment, the spray module includes: a spray chamber and a diversion pipe assembly; wherein the outer side wall of the spray chamber is provided with a plurality of air inlets, and the inner side wall of the spray chamber is provided with a plurality of air outlets; the diversion pipe assembly is connected to each air inlet; and the short hot wire assembly is disposed in the spray chamber.

[0009] In one optional embodiment, the diversion pipe group includes: a plurality of air guide pipes arranged in parallel; each of the air guide pipes is connected to a corresponding air inlet.

[0010] In one optional embodiment, the short hot wire assembly includes: a plurality of fixing blocks, a plurality of short hot wires, and a plurality of conductive wires; wherein both ends of the short hot wires and the conductive wires are connected to corresponding fixing blocks, so that the short hot wires and the conductive wires are connected in series and spaced apart.

[0011] In one alternative implementation, the short hot wires in adjacent short hot wire groups are staggered.

[0012] In one optional embodiment, the long hot wire is U-shaped, and electrodes are connected to both ends of the long hot wire; the electrodes are fixed to the coating chamber by a support block.

[0013] In one alternative implementation, the vacuum port is located on the same side or opposite side of the spray module.

[0014] In one optional embodiment, the transmission module includes: a drive assembly and a plurality of transmission rollers; wherein the transmission rollers are rotatably disposed within the coating chamber; the drive assembly is disposed outside the housing and is connected to the rotating shaft of each transmission roller.

[0015] In one alternative embodiment, the drive assembly includes a drive motor; wherein the drive motor is connected to the shaft of each drive roller via a drive shaft.

[0016] In one optional embodiment, the diverter assembly further includes a main intake pipe; wherein each of the air guide pipes is connected to the main intake pipe.

[0017] The beneficial effect of this utility model is that the vertical hot-wire CVD process chamber preheats the process gas through a short hot-wire group. When coating is required, the preheated process gas is sent into the coating chamber and then heated to decomposition by a long hot-wire, thereby reducing the heating time of the process gas in the coating chamber and thus accelerating the coating efficiency.

[0018] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0019] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0020] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0021] Figure 1 A schematic diagram of the structure of a vertical hot-wire CVD process chamber provided in an embodiment of this disclosure;

[0022] Figure 2 This is a schematic diagram of a vacuum port and a spray module on opposite sides, provided by an embodiment of the present disclosure;

[0023] Figure 3 This is a schematic diagram of the location and structure of a spray chamber provided in an embodiment of the present disclosure;

[0024] Figure 4 This is a schematic diagram of the structure of a shunt tube assembly provided in an embodiment of the present disclosure;

[0025] Figure 5 This is a schematic diagram of the structure of a short hot wire assembly provided in an embodiment of the present disclosure;

[0026] Figure 6 This is a schematic diagram of the structure of a long hot wire provided in an embodiment of the present disclosure;

[0027] Figure 7 This is a schematic diagram of a structure in which the vacuum port and the spray module are on the same side, according to an embodiment of the present disclosure.

[0028] Figure 8 This is a schematic diagram of the structure of a transmission module provided in an embodiment of the present disclosure;

[0029] Figure 9 This is a schematic diagram of the position structure of a drive motor provided in an embodiment of the present disclosure;

[0030] Figure 10 This is a schematic diagram of the position and structure of a main intake pipe provided in an embodiment of the present disclosure;

[0031] Figure 11 This is a schematic diagram of the structure of a carrier plate provided in an embodiment of this disclosure.

[0032] In the picture:

[0033] Outer shell 1, coating chamber 11, feed inlet 12;

[0034] Top cover 2;

[0035] Spray module 3, spray chamber 31, air inlet 311, air outlet 312, diverter pipe group 32, air guide pipe 321, main air inlet pipe 322;

[0036] Hot wire module 4, short hot wire group 41, fixing block 411, short hot wire 412, conductive wire 413, connecting hole 414, long hot wire 42, electrode 421, support block 422;

[0037] Transmission module 5, carrier plate 50, transmission roller 51, transmission shaft 511, drive assembly 52, drive motor 521;

[0038] Vacuum port 6. Detailed Implementation

[0039] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0040] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the figures, the thickness of parts may be exaggerated or reduced for the purpose of effectively depicting the technical content.

[0041] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0042] At least one embodiment provides a vertical hot-wire CVD process chamber, including: a shell 1, a top cover 2, a spray module 3, a hot-wire module 4, a transmission module 5, and a vacuum port 6.

[0043] Specifically, such as Figure 1 As shown, the outer shell 1 contains a coating chamber 11, and the side wall of the outer shell 1 has a feed inlet 12. The feed inlet 12 is connected to the coating chamber 11, and the carrier plate 50 enters the coating chamber 11 through the feed inlet 12.

[0044] Specifically, such as Figure 1 As shown, the upper cover 2 is connected to the outer shell 1, and the above-mentioned coating chamber 11 is formed by closing the upper cover 2.

[0045] Specifically, such as Figure 1 As shown, the spray module 3 is installed inside the upper cover 2 and is used to spray process gas into the coating chamber 11.

[0046] Specifically, such as Figure 1 As shown, the hot wire module 4 includes: a plurality of short hot wire groups 41 and a plurality of long hot wires 42; wherein, the short hot wire groups 41 are disposed in the spray module 3 for preheating the process gas; the long hot wires 42 are vertically disposed in the coating chamber 11 for high-temperature decomposition of the process gas to deposit it on the silicon wafer of the carrier plate 50 to form a coating.

[0047] Specifically, such as Figure 1 As shown, the transmission module 5 is located at the bottom of the coating chamber 11 and is used to receive the carrier plate 50 entering from the feed port 12 and transport the carrier plate 50 to the coating position.

[0048] Specifically, such as Figure 2 As shown, the vacuum port 6 is located on the side wall of the outer shell 1 and communicates with the coating chamber 11. The vacuum port 6 is connected to the negative pressure generator and is used to evacuate the coating chamber 11.

[0049] In this embodiment, the process gas is preheated by the short hot wire assembly 41. When coating is required, the preheated process gas is sent into the coating chamber 11 and then heated to decompose by the long hot wire 42, thereby reducing the heating time of the process gas in the coating chamber 11 and thus accelerating the coating efficiency.

[0050] In some embodiments, the spray module 3 includes a spray chamber 31 and a diversion pipe group 32, with a short hot wire group 41 disposed in the spray chamber 31.

[0051] Specifically, such as Figure 3 As shown, the outer wall of the spray chamber 31 has several air inlets 311.

[0052] Specifically, such as Figure 1 As shown, the inner wall of the spray chamber 31 is provided with several air outlets 312;

[0053] Specifically, such as Figure 4 As shown, the diversion pipe group 32 includes: a plurality of air guide pipes 321 arranged in parallel, each air guide pipe 321 being connected to a corresponding air inlet 311.

[0054] In this embodiment, the process gas enters the spray chamber 31 through each gas guide pipe 321, and is then preheated by the short hot wire group 41 in the spray chamber 31 until the temperature of the process gas approaches the thermal decomposition threshold. The use of multiple gas guide pipes 321 is to ensure that the process gas is evenly distributed in the spray chamber 31, and to prevent the accumulation of process gas from affecting the preheating effect.

[0055] In some embodiments, the short hot wire assembly 41 includes: a plurality of fixing blocks 411, a plurality of short hot wires 412 and a plurality of conductive wires 413.

[0056] Specifically, such as Figure 1 As shown, the upper cover 2 has several connecting holes 414, and the fixing block 411 is set in the spray chamber 31 inside the upper cover 2. It is connected to the fixing block 411 by bolts extending into the spray chamber 31.

[0057] Specifically, such as Figure 5 As shown, the fixing blocks 411 are arranged in a row, and short hot wires 412 or conductive wires 413 are connected between adjacent fixing blocks 411; wherein, the short hot wires 412 and conductive wires 413 are connected in series and spaced apart.

[0058] In some embodiments, such as Figure 5 As shown, the short hot wires 412 in adjacent short hot wire groups 41 are staggered.

[0059] In some embodiments, such as Figure 6 As shown, the long hot wire 42 is U-shaped, and electrodes 421 are connected to both ends of the long hot wire 42; the electrodes 421 are fixed on the coating chamber 11 by the support block 422.

[0060] In some embodiments, the vacuum port 6 is located on the same side or opposite side of the spray module 3.

[0061] Specifically, such as Figure 2 As shown, the vacuum port 6 and the spray module 3 are on opposite sides.

[0062] Specifically, such as Figure 7 As shown, the vacuum port 6 and the spray module 3 are on the same side.

[0063] In some embodiments, the transmission module 5 includes a drive assembly 52 and a plurality of transmission rollers 51.

[0064] Specifically, such as Figure 8 As shown, each transmission roller 51 is rotatably disposed in the coating chamber 11 and arranged along the conveying direction of the carrier plate 50; wherein, the ends of the rotating shafts of the transmission rollers 51 are all connected to the transmission shaft 511.

[0065] Specifically, such as Figure 9 As shown, the drive assembly 52 includes a drive motor 521, which is located outside the housing 1. Its drive end extends into the coating chamber 11 and is connected to the transmission shaft 511, thereby driving the transmission shaft 511 to rotate.

[0066] In this embodiment, the drive motor 521 is connected to the transmission shaft 511 by a bevel gear, and the shaft of the transmission roller 51 is also connected to the transmission shaft 511 by a bevel gear.

[0067] In some embodiments, the diverter assembly 32 further includes a main intake pipe 322.

[0068] Specifically, such as Figure 4 , Figure 10 As shown, each air duct 321 is connected to the main air intake 322.

[0069] In summary, this vertical hot-wire CVD process chamber preheats the process gas using a short hot-wire assembly 41. When coating is required, the preheated process gas is sent into the coating chamber 11 and then heated to decomposition by a long hot-wire assembly 42, thereby reducing the heating time of the process gas in the coating chamber 11 and accelerating the coating efficiency.

[0070] In this document, when it is said that the first component is located on the second component, this can mean that the first component can be directly formed on the second component, or that the third component can be inserted between the first component and the second component.

[0071] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.

[0072] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0073] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0074] In the above discussion, unless otherwise stated, when used to describe numerical values, the terms “about,” “approximately,” “basically,” etc., indicate a change of + / - 10% in that value.

[0075] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A vertical hot filament CVD process chamber, characterized in that, include: The outer shell (1) has a coating chamber (11) inside and a feed inlet (12) on the side wall. The top cover (2) is connected to the outer shell (1); The spray module (3) is installed inside the upper cover (2); The hot wire module (4) includes: a plurality of short hot wire groups (41) and a plurality of long hot wires (42), wherein the short hot wire groups (41) are disposed in the spray module (3) and the long hot wires (42) are disposed vertically in the coating chamber (11); The transmission module (5) is located at the bottom of the coating chamber (11); A vacuum port (6) is located on the side wall of the outer casing (1); wherein The transmission module (5) is adapted to receive the carrier plate (50) through the feed port (12), the vacuum port (6) is adapted to evacuate the coating chamber (11), and the hot wire module (4) is adapted to generate heat. The spray module (3) is adapted to spray out process gas, so that the process gas enters the coating chamber (11) after being preheated by the short hot wire group (41), and is deposited on the silicon wafer of the carrier plate (50) after being decomposed by the high temperature of the long hot wire (42).

2. The vertical hot-wire CVD process chamber as described in claim 1, characterized in that, The spray module (3) includes: a spray chamber (31) and a diversion pipe assembly (32); wherein The outer side wall of the spray chamber (31) is provided with several air inlets (311), and the inner side wall of the spray chamber (31) is provided with several air outlets (312). The splitter assembly (32) is connected to each air inlet (311); The short hot wire assembly (41) is located inside the spray chamber (31).

3. The vertical hot-wire CVD process chamber as described in claim 2, characterized in that, The diversion tube group (32) includes: a plurality of air guide tubes (321) arranged in parallel; Each of the aforementioned air guide tubes (321) is connected to the corresponding air inlet (311).

4. The vertical hot-wire CVD process chamber as described in claim 2, characterized in that, The short hot wire assembly (41) includes: several fixing blocks (411), several short hot wires (412), and several conductive wires (413); wherein Both ends of the short hot wire (412) and the conductive wire (413) are connected to the corresponding fixing block (411) so that the short hot wire (412) and the conductive wire (413) are connected in series and spaced apart.

5. The vertical hot-wire CVD process chamber as described in claim 4, characterized in that, The short hot wires (412) in adjacent short hot wire groups (41) are staggered.

6. The vertical hot-wire CVD process chamber as described in claim 1, characterized in that, The long hot wire (42) is U-shaped, and electrodes (421) are connected to both ends of the long hot wire (42). The electrode (421) is fixed on the coating chamber (11) by a support block (422).

7. The vertical hot-wire CVD process chamber as described in claim 1, characterized in that, The vacuum port (6) is located on the same side or opposite side of the spray module (3).

8. The vertical hot-wire CVD process chamber as described in claim 1, characterized in that, The transmission module (5) includes: a drive assembly (52) and a plurality of transmission rollers (51); wherein The transmission roller (51) is rotatably disposed inside the coating chamber (11); The drive assembly (52) is located outside the housing (1) and is connected to the shaft of each drive roller (51).

9. The vertical hot-wire CVD process chamber as described in claim 8, characterized in that, The drive assembly (52) includes: a drive motor (521); wherein The drive motor (521) is connected to the rotating shaft of each transmission roller (51) via a transmission shaft (511).

10. The vertical hot-wire CVD process chamber as described in claim 3, characterized in that, The shunt assembly (32) further includes: a main intake pipe (322); wherein Each of the aforementioned air ducts (321) is connected to the main air intake pipe (322).

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