A controllable rate vacuum pumping and vacuum breaking device

Abstract

This utility model discloses a controllable-rate vacuum pumping and vacuum breaking device, relating to a vacuum generating device, including a vacuum pump, a cavity, a vacuum pumping module, and a vacuum breaking module; the vacuum pumping module includes a first angle valve, the vacuum breaking module includes a second angle valve, and the vacuum pumping module also includes a vacuum proportional valve; the two ends of the first angle valve are respectively connected to the vacuum pump and the cavity, forming a rapid vacuum pumping path; the two ends of the vacuum proportional valve are also connected to the vacuum pump and the cavity respectively through bypass pipes, forming a proportional vacuum pumping path; the vacuum breaking module also includes a proportional pressure regulating valve; one end of the second angle valve is connected to the cavity, and the other end of the second angle valve is connected to the proportional pressure regulating valve. This utility model can achieve both rapid vacuum pumping and rapid vacuum breaking, as well as controllable-rate vacuum pumping and vacuum breaking.

Description

Technical Field

[0001] This utility model relates to a vacuum generating device, and more specifically, to a vacuum pumping and breaking device with a controllable rate. Background Technology

[0002] like Figure 1 The diagram shows an existing vacuum pumping and breaking device, comprising a vacuum pump 1, a cavity 2, a vacuum pumping module 3, and a vacuum breaking module 4. The vacuum pump is a vacuum generating device used to evacuate the cavity. Angle valves in both modules control the opening and closing of the vacuum pipeline to enable vacuum pumping and breaking. In this structure, when one angle valve in the vacuum pumping module is open and the other is closed, it operates in rapid vacuum pumping mode; when one angle valve in the vacuum breaking module is open and the other is closed, it operates in rapid vacuum breaking mode. However, the vacuum pumping and breaking rates of this structure are not controllable; it can only perform rapid vacuum pumping and rapid vacuum breaking. This characteristic makes it unsuitable for some special applications, thus requiring improvement. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide a controllable rate vacuum pumping and vacuum breaking device that addresses the shortcomings of existing technologies, enabling both rapid vacuum pumping and rapid vacuum breaking, as well as controllable rate vacuum pumping and vacuum breaking.

[0004] The present invention discloses a controllable rate vacuum pumping and vacuum breaking device, comprising a vacuum pump, a cavity, a vacuum pumping module, and a vacuum breaking module; the vacuum pumping module includes a first angle valve, the vacuum breaking module includes a second angle valve, and the vacuum pumping module further includes a vacuum proportional valve; the two ends of the first angle valve are respectively connected to the vacuum pump and the cavity to form a rapid vacuum pumping path; the two ends of the vacuum proportional valve are also connected to the vacuum pump and the cavity respectively through bypass pipes to form a proportional vacuum pumping path;

[0005] The vacuum breaking module also includes a proportional pressure regulating valve; one end of the second angle valve is connected to the cavity, and the other end of the second angle valve is connected to the proportional pressure regulating valve.

[0006] Preferably, the vacuum module further includes a first tee connector and a second tee connector; one connector of the first tee connector is connected to the vacuum pump through a first air pipe, and the other two connectors of the first tee connector are respectively connected to one end of the first angle valve and one end of the bypass pipe; one connector of the second tee connector is connected to the cavity through a second air pipe, and the other two connectors of the second tee connector are respectively connected to one end of the first angle valve and one end of the vacuum proportional valve.

[0007] Preferably, a vacuum gauge is installed on the cavity.

[0008] Preferably, one end of the second angle valve is connected to the cavity via a third air pipe.

[0009] Beneficial effects

[0010] The advantages of this invention are as follows: by adding a proportional vacuum circuit consisting of a bypass pipeline and a vacuum proportional valve in parallel with the rapid vacuum circuit to the vacuum module, and by adding a proportional pressure regulating valve on the second angle valve, this device can not only rapidly vacuum and rapidly break the vacuum, but also achieve vacuuming and breaking the vacuum at a controllable rate, thus greatly improving its adaptability. Attached Figure Description

[0011] Figure 1 A schematic diagram of an existing vacuum pumping and vacuum breaking device;

[0012] Figure 2 This is a schematic diagram of the vacuum pumping and vacuum breaking device of this utility model.

[0013] Among them: 1-vacuum pump, 2-cavity, 3-vacuum pumping module, 4-vacuum breaking module, 5-first angle valve, 6-second angle valve, 7-vacuum gauge, 8-vacuum proportional valve, 9-bypass pipeline, 10-first tee connector, 11-second tee connector, 12-first gas pipe, 13-second gas pipe, 14-proportional pressure regulating valve, 15-third gas pipe. Detailed Implementation

[0014] The present invention will be further described below with reference to embodiments, but this does not constitute any limitation on the present invention. Any limited modifications made by any person within the scope of the claims of the present invention are still within the scope of the claims of the present invention.

[0015] See Figures 1-2 The present invention provides a controllable rate vacuum pumping and vacuum breaking device, comprising a vacuum pump 1, a cavity 2, a vacuum pumping module 3, and a vacuum breaking module 4.

[0016] In this embodiment, the vacuum module 3 includes a first angle valve 5, a vacuum proportional valve 8, a first three-way connector 10, and a second three-way connector 11. The two ends of the first angle valve 5 are connected to the vacuum pump 1 and the cavity 2 respectively, forming a rapid vacuum path. The two ends of the vacuum proportional valve 8 are also connected to the vacuum pump 1 and the cavity 2 respectively via bypass pipes 9, forming a proportional vacuum path. Specifically, one connector of the first three-way connector 10 is connected to the vacuum pump 1 via a first air pipe 12, and the other two connectors of the first three-way connector 10 are connected to one end of the first angle valve 5 and one end of the bypass pipe 9 respectively. One connector of the second three-way connector 11 is connected to the cavity 2 via a second air pipe 13, and the other two connectors of the second three-way connector 11 are connected to one end of the first angle valve 5 and one end of the vacuum proportional valve 8 respectively, thereby realizing the setting of two functionally different air paths between the vacuum pump 1 and the cavity 2.

[0017] The vacuum breaking module 4 includes a second angle valve 6 and a proportional pressure regulating valve 14. One end of the second angle valve 6 is connected to the cavity 2 through a third air pipe 15, and the other end of the second angle valve 6 is connected to the proportional pressure regulating valve 14.

[0018] In this example, a vacuum gauge 7 is installed on the cavity 2 to detect the pressure signal inside the cavity 2.

[0019] When cavity 2 is rapidly evacuated, vacuum proportional valve 8 is closed, first angle valve 5 is opened, proportional pressure regulating valve 14 and second angle valve 6 are closed. At this time, the rapid evacuation vacuum path is formed, and vacuum pump 1 starts to evacuate until the target vacuum value is reached.

[0020] When chamber 2 is evacuated proportionally, the first angle valve 5, the second angle valve 6, and the proportional pressure regulating valve are closed, while the vacuum proportional valve 8 is opened. At this time, a proportional evacuation air path is formed between vacuum pump 1 and chamber 2. Vacuum pump 1 starts to evacuate, and the controller controls the opening degree of vacuum proportional valve 8 through the chamber pressure signal transmitted from vacuum gauge 7, thereby realizing automatic control of the evacuation rate.

[0021] When the cavity 2 is rapidly ruptured, the first angle valve 5, the vacuum proportional valve 8 and the vacuum pump 1 are all closed, the second angle valve 6 is opened, and the opening of the proportional pressure regulating valve 14 is adjusted to the maximum to achieve rapid rupture of the vacuum in the cavity 2.

[0022] When chamber 2 performs proportional vacuum breaking, vacuum pump 1 is turned on, first angle valve 5 is closed, and vacuum proportional valve 8, second angle valve 6 and proportional pressure regulating valve 14 are opened. The controller controls the opening degree of vacuum proportional valve 8 to control the pumping volume through the chamber pressure signal transmitted from vacuum gauge 7. At the same time, the controller also controls the opening degree of proportional pressure regulating valve 14 to control the intake volume, thereby realizing automatic control of the vacuum breaking rate.

[0023] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the structure of the present utility model, and these will not affect the implementation effect of the present utility model or the practicality of the patent.

Claims

1. A controllable-rate vacuum pumping and vacuum breaking device, comprising a vacuum pump (1), a cavity (2), a vacuum pumping module (3), and a vacuum breaking module (4); wherein the vacuum pumping module (3) comprises a first angle valve (5), and the vacuum breaking module (4) comprises a second angle valve (6), characterized in that, The vacuum module (3) also includes a vacuum proportional valve (8); the two ends of the first angle valve (5) are respectively connected to the vacuum pump (1) and the cavity (2) to form a fast vacuum path; the two ends of the vacuum proportional valve (8) are also connected to the vacuum pump (1) and the cavity (2) respectively through a bypass pipe (9) to form a proportional vacuum path; The vacuum breaking module (4) also includes a proportional pressure regulating valve (14); one end of the second angle valve (6) is connected to the cavity (2), and the other end of the second angle valve (6) is connected to the proportional pressure regulating valve (14).

2. A controllable rate vacuum evacuation and break vacuum device according to claim 1, wherein, The vacuum module (3) further includes a first three-way connector (10) and a second three-way connector (11); one connector of the first three-way connector (10) is connected to the vacuum pump (1) through the first air pipe (12), and the other two connectors of the first three-way connector (10) are respectively connected to one end of the first angle valve (5) and one end of the bypass pipe (9); one connector of the second three-way connector (11) is connected to the cavity (2) through the second air pipe (13), and the other two connectors of the second three-way connector (11) are respectively connected to one end of the first angle valve (5) and one end of the vacuum proportional valve (8).

3. A controllable rate vacuum pump and vacuum breaker device according to claim 1, wherein, A vacuum gauge (7) is installed on the cavity (2).

4. A controllable rate vacuum pump and vacuum breaker device according to claim 1, wherein, One end of the second angle valve (6) is connected to the cavity (2) through the third air pipe (15).

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