Vacuum drying cabinet and vacuum drying cabinet drying method

Abstract

The application discloses a vacuum drying cabinet and a vacuum drying cabinet drying method, which comprises a vacuum cabin body, a vacuum pumping device connected with the vacuum cabin body and used for pumping the inside of the vacuum cabin body, and a hot air circulating device connected with the vacuum cabin body and used for supplementing heated air into the vacuum cabin body. The hot air circulating device is arranged to supplement heated air into the vacuum cabin body, so that the inside of the vacuum cabin body and the surface of instruments needing to be dried in the vacuum cabin body can be rapidly heated, the problem that the temperature of the surface of the instruments in the vacuum cabin body is reduced when the moisture on the surface of the instruments is vaporized can be effectively solved, the moisture vaporization speed after each vacuum pumping in the circulating drying process is improved, and the drying efficiency is improved. Moreover, the hot air circulating device is used for supplementing heated air into the vacuum cabin body, the heated air is supplemented into the vacuum cabin body when the pressure of the vacuum cabin body is released, the problem that the dried instruments are secondarily dampened or condensed due to the low temperature of the supplemented air is avoided, and the drying efficiency is further improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum drying technology, and more specifically, to a vacuum drying cabinet. Furthermore, this invention also relates to a vacuum drying method applied to the aforementioned vacuum drying cabinet. Background Technology

[0002] Vacuum drying cabinets have a wide range of applications in various fields. For example, in the field of medical device drying, vacuum drying cabinets are often used to dry medical devices.

[0003] In related technologies, a vacuum pump is used to evacuate the inside of a vacuum drying cabinet. As the air pressure inside the vacuum drying cabinet gradually decreases, the boiling point of the water inside the vacuum drying cabinet will also decrease, causing the water to boil and vaporize into water vapor at a low temperature, thereby achieving rapid drying of precision, heat-sensitive, and structurally complex instruments at a low temperature.

[0004] However, in related technologies, when moisture vaporizes under negative pressure, it carries away the heat from the surface of the instrument, which will affect the rate of moisture vaporization during the next vacuuming cycle. Furthermore, when replenishing the vacuum drying cabinet with gas, the low-temperature gas can easily cause the dried instruments to become damp or condense again, thus affecting the overall drying efficiency of the vacuum drying cabinet.

[0005] Therefore, how to improve the drying efficiency of vacuum drying cabinets is a problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0006] In view of this, the object of the present invention is to provide a vacuum drying cabinet to improve the drying efficiency of the vacuum drying cabinet.

[0007] Another object of the present invention is to provide a vacuum drying method for use in the above-mentioned vacuum drying cabinet, so as to improve the drying efficiency of the vacuum drying cabinet.

[0008] To achieve the above objectives, the present invention provides the following technical solution:

[0009] A vacuum drying cabinet, comprising:

[0010] Vacuum chamber;

[0011] A vacuum pumping device, connected to the vacuum chamber, is used to evacuate the interior of the vacuum chamber;

[0012] A hot air circulation device is connected to the vacuum chamber and is used to replenish the vacuum chamber with heated air.

[0013] Optionally, the hot air circulation device includes:

[0014] A blower is located at the top of the vacuum chamber;

[0015] A heating box is located at the top of the vacuum chamber and connected to the air outlet of the fan. The heating box is in communication with the vacuum chamber, and a first valve body is connected between the heating box and the vacuum chamber.

[0016] Optionally, the vacuum chamber is connected to the air inlet of the fan, and a second valve body is connected between the vacuum chamber and the fan.

[0017] Optionally, the air inlet of the fan is equipped with a filter.

[0018] Optionally, the outer wall of the vacuum chamber is equipped with a heating device.

[0019] Optionally, the vacuum pumping device includes:

[0020] Vacuum pump;

[0021] A heat exchanger is connected between the vacuum pump and the vacuum chamber, and a third valve body is provided between the heat exchanger and the vacuum chamber.

[0022] Optionally, the vacuum pump is a water ring vacuum pump, the vacuum pump is connected to a water tank, and the vacuum drying cabinet further includes:

[0023] The main water inlet pipe is connected to both the water tank and the heat exchanger.

[0024] The main drain pipe is connected to both the water tank and the heat exchanger.

[0025] Optionally, the vacuum chamber is provided with:

[0026] A temperature and humidity sensor is used to detect the temperature and humidity inside the vacuum chamber, so that the hot air circulation device stops working when the temperature and humidity inside the vacuum chamber reach a set value.

[0027] Optionally, the vacuum chamber is provided with:

[0028] A pressure sensor is used to detect the pressure inside the vacuum chamber so that the vacuum pumping device stops working when the pressure inside the vacuum chamber reaches a set value.

[0029] A vacuum drying cabinet drying method, applied to any of the above-mentioned vacuum drying cabinets, the vacuum drying cabinet drying method comprising:

[0030] S1: Using the hot air circulation device of the vacuum drying cabinet, hot air is input into the vacuum chamber of the vacuum drying cabinet to raise the temperature inside the vacuum chamber to a preset temperature.

[0031] S2: Use the vacuum drying cabinet's vacuum pumping device to evacuate the inside of the vacuum chamber, so that the vacuum chamber reaches a preset pressure.

[0032] S3: Maintain the vacuum chamber at the preset pressure for a preset time;

[0033] S4: Repeat steps S1, S2 and S3 until drying is complete.

[0034] The vacuum drying cabinet provided by this invention has at least the following beneficial effects:

[0035] In use, heated air (hot air) is first introduced into the vacuum chamber using a hot air circulation device to heat the interior of the chamber and raise the temperature of the interior and the surfaces of the instruments to be dried. Once the preset temperature is reached, the hot air circulation device is stopped. Then, a vacuum pump is used to create a negative pressure inside the chamber until the preset pressure is reached. Finally, the vacuum pump is stopped, and the chamber remains at the preset pressure for a period of time to allow the interior to dry. The surface moisture of the instrument vaporizes into water vapor. After a period of time, the hot air circulation device is activated again to send heated air into the vacuum chamber, replenishing the vacuum chamber and depressurizing it to normal pressure. This process continues until the temperature or humidity inside the vacuum chamber reaches the preset value. Then, the vacuum chamber is evacuated again, and the pressure inside is maintained at the preset pressure for a period of time. Then, the hot air circulation device is used again to send heated air into the vacuum chamber to replenish the vacuum chamber. This cycle is repeated until drying is complete, for example, stopping after the preset drying time is reached.

[0036] Therefore, this vacuum drying cabinet, by incorporating a hot air circulation device to replenish heated air into the vacuum chamber, can rapidly raise the temperature of the interior of the vacuum chamber and the surfaces of the instruments to be dried. This effectively solves the problem of the instrument surface temperature dropping during vaporization, thus improving the vaporization rate of moisture after each vacuuming process and increasing drying efficiency. Furthermore, by replenishing the vacuum chamber with heated air through the hot air circulation device, the air introduced during vacuum depressurization is heated, preventing secondary moisture absorption or condensation of the dried instruments due to low-temperature introduced air, further enhancing drying efficiency.

[0037] The vacuum drying cabinet drying method provided by the present invention, when applied to the aforementioned vacuum drying cabinet, has at least the beneficial effects of the aforementioned vacuum drying cabinet. Attached Figure Description

[0038] To more clearly illustrate the technical solutions in the embodiments of the present invention or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0039] Figure 1 This is a front view structural block diagram of a vacuum drying cabinet provided in a specific embodiment of the present invention;

[0040] Figure 2 This is a top view of the vacuum drying cabinet.

[0041] Figure label:

[0042] 1-Vacuum chamber; 2-Vacuum pumping device; 21-Vacuum pump; 22-Heat exchanger; 23-Third valve body; 31-Fan; 32-Heating box; 33-First valve body; 34-Second valve body; 35-Filter; 4-Heating device; 5-Temperature and humidity sensor; 6-Pressure sensor. Detailed Implementation

[0043] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0044] The core of this invention is to provide a vacuum drying cabinet to improve its drying efficiency. Another core aspect of this invention is to provide a vacuum drying method applied to the aforementioned vacuum drying cabinet, thereby improving its drying efficiency.

[0045] Please refer to Figure 1 and Figure 2 This invention provides a vacuum drying cabinet, including a vacuum chamber 1, a vacuum pumping device 2, and a hot air circulation device. The vacuum pumping device 2 is connected to the vacuum chamber 1 and is used to evacuate the interior of the vacuum chamber 1. The hot air circulation device is connected to the vacuum chamber 1 and is used to replenish the vacuum chamber 1 with heated air.

[0046] In use, heated air (hot air) is first introduced into the vacuum chamber 1 using a hot air circulation device to heat the interior of the vacuum chamber 1, raising the temperature of the interior and the surfaces of the instruments requiring drying. Once the temperature inside the vacuum chamber 1 reaches the preset temperature, the hot air circulation device stops operating. Then, a vacuum pump 2 is used to evacuate the interior of the vacuum chamber 1, creating a negative pressure environment until the pressure inside reaches the preset pressure. Finally, the vacuum pump 2 is stopped, and the vacuum chamber 1 is maintained at the preset pressure for a period of time to allow the necessary drying process to occur inside the vacuum chamber 1. The surface moisture of the dried instrument vaporizes into water vapor. After a period of time, the hot air circulation device is activated again to send heated air into the vacuum chamber 1, thereby replenishing the vacuum chamber 1 with gas and depressurizing it to normal pressure. This process continues until the temperature or humidity inside the vacuum chamber 1 reaches the preset value. Then, the vacuum chamber 1 is evacuated again, and the pressure inside the vacuum chamber 1 is maintained at the preset pressure for a period of time. Then, the hot air circulation device is used again to send heated air into the vacuum chamber 1 to replenish the vacuum chamber 1 with gas. This cycle is repeated until the drying process is complete, for example, stopping after the preset drying time has been reached.

[0047] Therefore, the vacuum drying cabinet provided in this embodiment of the invention, by setting up a hot air circulation device to supplement heated air into the vacuum chamber 1, can quickly raise the temperature of the inside of the vacuum chamber 1 and the surface of the instruments to be dried inside. This effectively solves the problem that the surface temperature of the instruments decreases when the moisture on the surface of the instruments inside the vacuum chamber 1 vaporizes, thereby improving the vaporization rate of moisture after each vacuuming process during the cyclic drying process and improving the drying efficiency. Moreover, by supplementing heated air into the vacuum chamber 1 through the hot air circulation device, the air introduced into the vacuum chamber 1 during depressurization is heated, avoiding secondary damping or condensation of the dried instruments due to the low temperature of the introduced air, further improving the drying efficiency.

[0048] It should be noted that this embodiment does not limit the specific structure of the hot air circulation device, as long as it can heat the air.

[0049] like Figure 1 As shown, in some embodiments, the hot air circulation device includes a fan 31 and a heating box 32. Both the fan 31 and the heating box 32 are located on the top of the vacuum chamber 1, and the air outlet of the fan 31 is connected to the heating box 32. The heating box 32 is connected to the vacuum chamber 1, and a first valve body 33 is connected between the heating box 32 and the vacuum chamber 1.

[0050] In other words, this embodiment utilizes a fan 31 to deliver air into the heating chamber 32. Exemplarily, the fan 31 has an open air inlet, pressurizing external air before delivering it into the heating chamber 32. The heating chamber 32 heats the air entering it and then delivers the heated air into the vacuum chamber 1. It is understood that when hot air needs to be delivered into the vacuum chamber 1, the first valve 33 opens, connecting the heating chamber 32 to the vacuum chamber 1, allowing hot air from the heating chamber 32 to enter the vacuum chamber 1. When hot air does not need to be delivered into the vacuum chamber 1, the first valve 33 closes, cutting off the passage between the heating chamber 32 and the vacuum chamber 1. It is understood that the air outlet of the fan 31 and the heating chamber 32, as well as the heating chamber 32 and the vacuum chamber 1, can be connected via pipes, and the first valve 33 can be located within the pipe path between the heating chamber 32 and the vacuum chamber 1.

[0051] It should be noted that this embodiment does not limit the specific type of the fan 31; the fan 31 can be a centrifugal fan 31 or other types of fans 31. Furthermore, this embodiment does not limit the specific structure of the heating box 32, as long as it can achieve the purpose of heating the air passing through it. For example, the heating box 32 includes a box body and an electric heating tube disposed inside the box body. Heating is achieved by using the electric heating tube; when air entering the heating box 32 flows through the electric heating tube, the air inside the heating box 32 is heated. Additionally, this embodiment does not limit the specific structure of the first valve body 33, as long as the first valve body 33 can function as an on / off switch. For example, the first valve body 33 is a pneumatic ball valve.

[0052] In addition, such as Figure 1 As shown, in order to further improve drying efficiency, in some embodiments, the vacuum chamber 1 is connected to the air inlet of the fan 31, and a second valve body 34 is connected between the vacuum chamber 1 and the fan 31.

[0053] In other words, in this embodiment, by connecting the vacuum chamber 1 to the air inlet of the fan 31, the hot air circulation device circulates air between the vacuum chamber 1, the fan 31, and the heating box 32 when it is working, thereby achieving the recycling of air within the vacuum chamber 1 and improving the air heating efficiency of the heating box 32, which in turn improves the drying efficiency. It is understood that a pipe can be installed between the vacuum chamber 1 and the air inlet of the fan 31, connecting the vacuum chamber 1 and the air inlet of the fan 31 via a pipe, and the second valve body 34 can be installed on the pipe. Furthermore, this embodiment does not limit the specific structure of the second valve body 34, as long as it functions as an on / off switch. For example, the second valve body 34 is a pneumatic ball valve.

[0054] Additionally, exemplarily, the heating box 32 is connected to the first side of the vacuum chamber 1 via a pipe, and the fan 31 is connected to the second side of the vacuum chamber 1 via a pipe, with the first side and the second side being opposite sides. For example, the first side and the second side are the left and right sides of the vacuum chamber 1, respectively.

[0055] In addition, to ensure the cleanliness of the heated air supplied by the heating box 32 to the vacuum chamber 1, in some embodiments, the air inlet of the fan 31 is provided with a filter 35.

[0056] In other words, this embodiment uses a filter 35 installed at the air inlet of the fan 31 to filter the air entering the fan 31, ensuring the cleanliness of the air entering the vacuum chamber 1 when it is depressurized. This embodiment does not limit the specific type of filter 35; for example, the filter 35 is a HEPA (High Efficiency Particulate Air) filter 35.

[0057] It should be noted that the air inlet of the blower 31 is an open structure connected to the outside, and the filter 35 is located at the air inlet to filter the air entering the blower 31 from the outside. In this case, when the vacuum chamber 1 is connected to the air inlet of the blower 31, the air in the vacuum chamber and the air entering the air inlet of the blower 31 through the filter 35 merge and enter the blower 31.

[0058] In addition, such as Figure 1 As shown, in some embodiments, the outer wall of the vacuum chamber 1 is provided with a heating device 4.

[0059] In other words, this embodiment uses a heating device 4 on the outer wall of the vacuum chamber 1 to heat the outer wall of the vacuum chamber 1, preheating it and maintaining its temperature during operation, thereby reducing heat loss from the vacuum chamber 1 due to a decrease in the temperature of its outer wall. It should be noted that this embodiment does not limit the specific structure of the heating device 4, as long as it can heat the outer wall of the vacuum chamber 1. For example, the heating device 4 is an electric heater. Further, the electric heater can be located on the four outer walls of the vacuum chamber 1.

[0060] In addition, the specific structure of the vacuum pumping device 2 is not limited in the above embodiments, as long as it can achieve the purpose of evacuating the interior of the vacuum chamber 1.

[0061] like Figure 1 As shown, in some embodiments, the vacuum pumping device 2 includes a vacuum pump 21 and a heat exchanger 22. The heat exchanger 22 is connected between the vacuum pump 21 and the vacuum chamber 1, and a third valve body 23 is provided between the heat exchanger 22 and the vacuum chamber 1.

[0062] In other words, this embodiment uses a heat exchanger 22 between the vacuum pump 21 and the vacuum chamber 1 to cool the gas extracted from the vacuum chamber 1 during vacuuming, ensuring that the temperature of the gas entering the vacuum pump 21 meets the requirements and reaches the operating temperature of the vacuum pump 21. This avoids the gas temperature entering the vacuum pump 21 being too high, which could affect the vacuum pump 21 and extend its service life.

[0063] It should be noted that this embodiment does not limit the specific type of heat exchanger 22, as long as it can cool the gas extracted from the vacuum chamber 1 during vacuuming. For example, the heat exchanger 22 is a plate heat exchanger 22. Furthermore, this embodiment does not limit the specific structure of the third valve body 23, as long as it can function as an on / off switch. For example, the third valve body 23 is a pneumatic ball valve.

[0064] Furthermore, this embodiment does not limit the specific location of the vacuum pumping device 2. For example, the vacuum pumping device 2 is located at the bottom of the vacuum chamber 1. Figure 1 As shown, in some embodiments, the hot air circulation device is located at the top of the vacuum chamber 1, and the vacuum pumping device 2 is located at the bottom of the vacuum chamber 1, so as to make full use of the space in the height direction and make the layout reasonable, resulting in a compact structure.

[0065] Furthermore, in some embodiments, the vacuum pump 21 is a water ring vacuum pump, the vacuum pump 21 is connected to a water tank, the vacuum drying cabinet also includes a main water inlet pipe and a main drain pipe, the water tank and the heat exchanger 22 are respectively connected to the main water inlet pipe, and the water tank and the heat exchanger 22 are respectively connected to the main drain pipe.

[0066] In other words, this embodiment uses a water tank to supply water to a ring-type vacuum pump for automatic water replenishment, reducing the need for manual periodic water replenishment of the vacuum pump 21; in addition, cold water is supplied to the water tank and heat exchanger 22 through the main water inlet pipe, and the drainage from the water tank and heat exchanger 22 is discharged through the main drain pipe.

[0067] In addition, such as Figure 1 and Figure 2 As shown, in some embodiments, the vacuum chamber 1 is equipped with a temperature and humidity sensor 5, which is used to detect the temperature and humidity inside the vacuum chamber 1 so that the hot air circulation device stops working when the temperature and humidity inside the vacuum chamber 1 reach a set value.

[0068] In other words, this embodiment uses a temperature and humidity sensor 5 to detect the temperature and humidity inside the vacuum chamber 1 in real time, so as to control the hot air circulation device according to the temperature and humidity inside the vacuum chamber 1, and ensure that the vacuum chamber 1 has a suitable temperature and humidity.

[0069] It should be noted that this embodiment does not limit the specific type of temperature and humidity sensor 5, as long as it can detect the temperature and humidity inside the vacuum chamber 1. Additionally, exemplarily, the temperature and humidity sensor 5 is disposed on the top of the vacuum chamber 1.

[0070] In addition, such as Figure 1 and Figure 2 As shown, in some embodiments, the vacuum chamber 1 is equipped with a pressure sensor 6, which is used to detect the pressure inside the vacuum chamber 1 so that the vacuum pumping device 2 stops working when the pressure inside the vacuum chamber 1 reaches a set value.

[0071] In other words, this embodiment uses a pressure sensor 6 to detect the pressure inside the vacuum chamber 1 in real time, so as to control the vacuum pumping device 2 according to the pressure inside the vacuum chamber 1 and ensure that the vacuum chamber 1 has a suitable pressure.

[0072] It should be noted that this embodiment does not limit the specific type of pressure sensor 6, as long as it can detect the pressure inside the vacuum chamber 1. Additionally, exemplarily, the pressure sensor 6 is disposed at the top of the vacuum chamber 1.

[0073] In some embodiments, the vacuum drying cabinet also includes a control system. For example, the control system is a PLC system. The aforementioned fan 31, heating chamber 32, heating device 4, vacuum pump 21, temperature and humidity sensor 5, pressure sensor 6, first valve body 33, second valve body 34, and third valve body 23 can all be connected to the control system for automatic control. Furthermore, the PLC system can also be connected to a touchscreen display. For example, the touchscreen display is located on the upper part of the vacuum chamber 1, allowing operators to operate the vacuum drying cabinet.

[0074] It should be noted that, apart from the structure described above, the structures of other parts of the vacuum drying cabinet disclosed in this embodiment of the invention can be found in related technologies and will not be repeated here.

[0075] In addition to the aforementioned vacuum drying cabinet, this embodiment of the invention also provides a vacuum drying cabinet drying method, which is applied to the vacuum drying cabinet disclosed in the above embodiments. The vacuum drying cabinet drying method includes:

[0076] S1: Use the hot air circulation device of the vacuum drying cabinet to input hot air into the vacuum chamber 1 of the vacuum drying cabinet, so that the inside of the vacuum chamber 1 is heated to the preset temperature.

[0077] S2: Use the vacuum drying cabinet's vacuum device 2 to evacuate the inside of the vacuum chamber 1, so that the vacuum chamber 1 reaches the preset pressure.

[0078] S3: Maintain the vacuum chamber 1 at a preset pressure for a preset time;

[0079] S4: Repeat steps S1, S2 and S3 until drying is complete.

[0080] In other words, during operation, heated air (hot air) is first introduced into the vacuum chamber 1 using a hot air circulation device to heat the interior of the vacuum chamber 1, raising the temperature of the interior and the surfaces of the instruments to be dried. When the temperature inside the vacuum chamber 1 reaches the preset temperature, the hot air circulation device stops operating. Then, the vacuum pumping device 2 is used to evacuate the interior of the vacuum chamber 1, creating a negative pressure state until the pressure inside the vacuum chamber 1 reaches the preset pressure. Finally, the vacuum pumping device 2 stops operating, maintaining the vacuum chamber 1 at the preset pressure for a period of time to allow the interior of the vacuum chamber 1 to dry. The surface moisture of the instruments that need to be dried is vaporized into water vapor. After a period of time, the hot air circulation device is activated again to send heated air into the vacuum chamber 1, thereby replenishing the vacuum chamber 1 and depressurizing it to normal pressure. This process continues until the temperature or humidity inside the vacuum chamber 1 reaches the preset value. Then, the vacuum chamber 1 is evacuated again, and the pressure inside the vacuum chamber 1 is maintained at the preset pressure for a period of time. Then, the hot air circulation device is used again to send heated air into the vacuum chamber 1 to replenish the vacuum chamber 1. This cycle is repeated until the drying process is complete, for example, stopping after the preset drying time has been reached.

[0081] It is evident that the vacuum drying method described above, when applied to the vacuum drying cabinet disclosed in the above embodiments, possesses at least the beneficial effects of the aforementioned vacuum drying cabinet, which will not be elaborated upon further here.

[0082] It should also be noted that, in this specification, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0083] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0084] The vacuum drying cabinet and vacuum drying method provided by this invention have been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this invention. It should be noted that those skilled in the art can make several improvements and modifications to this invention without departing from the principles of this invention, and these improvements and modifications also fall within the protection scope of this invention.

Claims

1. A vacuum drying cabinet, characterized in that, include: Vacuum chamber (1); A vacuum pumping device (2) is connected to the vacuum chamber (1) and is used to evacuate the interior of the vacuum chamber (1); A hot air circulation device is connected to the vacuum chamber (1) and is used to replenish heated air into the vacuum chamber (1).

2. The vacuum drying cabinet according to claim 1, characterized in that, The hot air circulation device includes: A blower (31) is located on top of the vacuum chamber (1); A heating box (32) is located on the top of the vacuum chamber (1) and connected to the air outlet of the fan (31). The heating box (32) is connected to the vacuum chamber (1), and a first valve body (33) is connected between the heating box (32) and the vacuum chamber (1).

3. The vacuum drying cabinet according to claim 2, characterized in that, The vacuum chamber (1) is connected to the air inlet of the fan (31), and a second valve body (34) is connected between the vacuum chamber (1) and the fan (31).

4. The vacuum drying cabinet according to claim 2, characterized in that, The air inlet of the fan (31) is equipped with a filter (35).

5. The vacuum drying cabinet according to claim 1, characterized in that, The outer wall of the vacuum chamber (1) is equipped with a heating device (4).

6. The vacuum drying cabinet according to any one of claims 1-5, characterized in that, The vacuum pumping device (2) includes: Vacuum pump (21); A heat exchanger (22) is connected between the vacuum pump (21) and the vacuum chamber (1), and a third valve body (23) is provided between the heat exchanger (22) and the vacuum chamber (1).

7. The vacuum drying cabinet according to claim 6, characterized in that, The vacuum pump (21) is a water ring vacuum pump, and the vacuum pump (21) is connected to a water tank. The vacuum drying cabinet also includes: The main water inlet pipe is connected to the water tank and the heat exchanger (22) respectively; The main drain pipe is connected to the water tank and the heat exchanger (22) respectively.

8. The vacuum drying cabinet according to any one of claims 1-5, characterized in that, The vacuum chamber (1) is equipped with: Temperature and humidity sensor (5) is used to detect the temperature and humidity inside the vacuum chamber (1) so that the hot air circulation device stops working when the temperature and humidity inside the vacuum chamber (1) reach the set value.

9. The vacuum drying cabinet according to any one of claims 1-5, characterized in that, The vacuum chamber (1) is equipped with: A pressure sensor (6) is used to detect the pressure inside the vacuum chamber (1) so that the vacuum pumping device (2) stops working when the pressure inside the vacuum chamber (1) reaches a set value.

10. A drying method in a vacuum drying cabinet, characterized in that, The vacuum drying cabinet described in any one of claims 1-9, wherein the drying method of the vacuum drying cabinet comprises: S1: Using the hot air circulation device of the vacuum drying cabinet, hot air is input into the vacuum chamber (1) of the vacuum drying cabinet to raise the temperature inside the vacuum chamber (1) to a preset temperature. S2: Use the vacuum drying cabinet's vacuum device (2) to evacuate the inside of the vacuum chamber (1) so that the vacuum chamber (1) reaches a preset pressure. S3: Maintain the vacuum chamber (1) at the preset pressure for a preset time; S4: Repeat steps S1, S2 and S3 until drying is complete.

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