A stable line width and spacing measuring instrument

Abstract

This utility model relates to the technical field of line width and spacing measuring instruments, and more particularly to a stable line width and spacing measuring instrument, comprising a work frame, an electric slide rail mounted on the upper end of the work frame, a lifting frame slidably connected to the upper end of the electric slide rail, a measuring probe mounted on the lower end of the lifting frame, a sleeve fixedly connected to the outer side of the measuring probe at the lower end of the lifting frame, a cleaning mechanism for cleaning the lens of the measuring probe mounted on the upper end of the work frame, and a worktable fixedly connected to the upper end of the work frame. A double adsorption fixation is formed by a suction cup on the worktable combined with a liftable air extraction head, which can effectively counteract the inherent warping stress of the flexible substrate and completely suppress its displacement, wrinkling, or deformation during the measurement process.

Description

Technical Field

[0001] This utility model relates to the technical field of line width and line spacing measuring instruments, and in particular to a line width and line spacing measuring instrument that can be placed stably. Background Technology

[0002] With the rapid development of the flexible electronics industry, the requirements for line accuracy of products such as flexible circuit boards and flexible display panels are becoming increasingly stringent. As the core equipment for detecting the line dimensions of such products, the line width and line spacing measuring instrument directly determines the product qualification rate through its measurement accuracy and operational stability.

[0003] Existing cleaning methods often create cleaning dead zones around the lens edges. If the compressed air is not purified, moisture and particulate impurities in the air can cause secondary contamination of the lens. In addition, flexible substrates are soft and easily warped, and relying solely on a single suction cup for adsorption can lead to wrinkling and displacement, resulting in measurement errors in line width and spacing. Existing equipment relies on an external vacuum cleaner for dust removal on the worktable. If the dust and impurities generated after vacuuming are not cleaned up in time, they can spread back into the measurement environment. Therefore, this invention proposes a stable line width and spacing measuring instrument. Utility Model Content

[0004] The main objective of this invention is to provide a stable line width and spacing measuring instrument that can effectively solve the problems in the background art.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] A stable line width and spacing measuring instrument includes a work frame, an electric slide rail mounted on the upper end of the work frame, a lifting frame slidably connected to the upper end of the electric slide rail, a measuring probe mounted on the lower end of the lifting frame, a sleeve fixedly connected to the outer side of the measuring probe at the lower end of the lifting frame, a cleaning mechanism for cleaning the lens of the measuring probe mounted on the upper end of the work frame, and a worktable fixedly connected to the upper end of the work frame.

[0007] Preferably, the cleaning mechanism includes a filter barrel fixedly connected to the work frame, a fixing rod fixedly connected to the inner side of the filter barrel, a first rotating shaft rotatably connected to the inner side of the fixing rod, blades fixedly connected to both ends of the first rotating shaft, and activated carbon adsorption sheets provided on the outer sides of both blades.

[0008] Preferably, a first corrugated pipe is fixedly connected to the outer side of the filter barrel. The outer side of the first corrugated pipe is fixedly connected to the working frame via a connecting rod. A first solenoid valve is provided on the outer side of the first corrugated pipe. The outer side of the first solenoid valve is fixedly connected to the sleeve via a connecting rod. An air jet head is fixedly connected to the other end of the first corrugated pipe. A fixing ring is fixedly connected to the lower end of the air jet head. The output shafts of two first electric telescopic rods are fixedly connected to the upper end of the fixing ring. The outer shells of the two first electric telescopic rods are fixedly connected to the sleeve via a connecting rod.

[0009] Preferably, the inner side of the fixed ring has a sliding groove, and the lower end of the fixed ring is fixedly connected to an external gear ring. The external gear ring is hollow, and the inner side of the external gear ring has multiple air vents. The outer side of the external gear ring is meshed with two symmetrical first gears. The outer side of each first gear is slidably connected to a mounting bracket. The outer side of the mounting bracket is slidably connected to the sliding groove on the inner side of the fixed ring via a slider. The upper end of the mounting bracket is equipped with a motor, and the output shaft of the motor is fixedly connected to the first gear via a rotating shaft.

[0010] Preferably, the output shaft of the motor is fixedly connected to a first bevel gear via a rotating shaft, the outer side of the first bevel gear is meshed with a second bevel gear, the inner side of the second bevel gear is fixedly connected to the housing of a second electric telescopic rod via a coupling, and a cleaning brush is provided on the outer side of the output shaft of the second electric telescopic rod.

[0011] Preferably, a second corrugated pipe is fixedly connected to the outer side of the filter barrel, a second solenoid valve is provided on the outer side of the second corrugated pipe, the outer side of the second corrugated pipe is slidably connected to the inner side of the work frame, an air supply pipe is fixedly connected to the other end of the second corrugated pipe, a plurality of suction heads are fixedly connected to the upper end of the air supply pipe, a suction cup is slidably connected to the outer side of the suction head, the outer side of the suction cup is fixedly connected to the worktable, two symmetrical clamps are fixedly connected to the lower end of the air supply pipe, the output shaft of a third electric telescopic rod is fixedly connected to the lower end of the two clamps, and the outer side of the third electric telescopic rod is fixedly connected to the work frame.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] This device utilizes a triple-action approach of rotating and directional airflow from the cleaning brush to thoroughly remove dust and impurities from the surface of the measuring probe lens, while preventing impurities from scratching the lens. Simultaneously, the gas purified by activated carbon adsorption in the filter can be recycled for airflow, ensuring the cleanliness of the cleaning gas and preventing secondary contamination of the lens. A suction cup on the worktable, combined with a liftable extraction head, forms a double adsorption fixation system, effectively counteracting the inherent warping stress of the flexible substrate and completely suppressing its displacement, wrinkling, or deformation during measurement. The cleaning airflow and the dust removal extraction airflow are connected to a filter can with activated carbon adsorption sheets via a corrugated pipe, allowing the purified gas to be reused for lens cleaning, while the extracted dust is collected and filtered, achieving self-cleaning of the equipment and improving its overall sustainability. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the overall structure of a stable line width and line spacing measuring instrument according to the present invention;

[0016] Figure 2 This is a cross-sectional schematic diagram of the overall structure of a stable line width and spacing measuring instrument according to the present invention;

[0017] Figure 3 This is a cross-sectional view of a cleaning mechanism for a stable line width and spacing measuring instrument according to this utility model. Figure 1 ;

[0018] Figure 4 This is an enlarged schematic diagram of a cleaning mechanism for a stable line width and spacing measuring instrument according to the present invention.

[0019] Figure 5 This is a cross-sectional view of a cleaning mechanism for a stable line width and spacing measuring instrument according to this utility model. Figure 2 .

[0020] In the diagram: 1. Work frame; 2. Electric slide rail; 3. Lifting frame; 4. Sleeve; 5. Cleaning mechanism; 51. Filter barrel; 52. Fixed rod; 53. First rotating shaft; 54. Blade; 55. First corrugated pipe; 56. First solenoid valve; 57. Jet nozzle; 58. Fixed ring; 59. First electric telescopic rod; 510. External gear ring; 511. First gear; 512. Mounting frame; 513. Motor; 514. First bevel gear; 515. Second bevel gear; 516. Second electric telescopic rod; 517. Cleaning brush; 518. Second corrugated pipe; 519. Second solenoid valve; 520. Air supply pipe; 521. Air extraction head; 522. Suction cup; 523. Clamping plate; 524. Third electric telescopic rod; 6. Workbench. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0022] This utility model provides, for example Figures 1-5 The illustrated line width and spacing measuring instrument includes a work frame 1, an electric slide rail 2 mounted on the upper end of the work frame 1, a lifting frame 3 slidably connected to the upper end of the electric slide rail 2, a measuring probe mounted on the lower end of the lifting frame 3, a sleeve 4 fixedly connected to the outer side of the measuring probe at the lower end of the lifting frame 3, a cleaning mechanism 5 for cleaning the lens of the measuring probe mounted on the upper end of the work frame 1, and a worktable 6 fixedly connected to the upper end of the work frame 1.

[0023] In this embodiment, the cleaning mechanism 5 includes a filter barrel 51 fixedly connected to the work frame 1. A fixing rod 52 is fixedly connected to the inner side of the filter barrel 51. A first rotating shaft 53 is rotatably connected to the inner side of the fixing rod 52. Both ends of the first rotating shaft 53 are fixedly connected to blades 54. Activated carbon adsorption sheets are provided on the outer sides of both blades 54.

[0024] Specifically, the filter canister 51 receives the dust-laden airflow from the second corrugated pipe 518 and stores the purified gas for use by the first corrugated pipe 55. The fixing rod 52 stably supports the first rotating shaft 53, preventing it from shifting under the impact of the airflow. The first rotating shaft 53 can rotate freely around the fixing rod 52, and through its fixed connection with the blades 54, it converts the airflow impact force into the rotational power of the blades 54. When the blades 54 rotate with the airflow, they can drive the outer activated carbon adsorption sheet to fully contact the dust-laden airflow, increasing the adsorption area. The activated carbon adsorption sheet is made of high-porosity activated carbon material, which can efficiently adsorb impurities such as dust and ink residue in the airflow, ensuring the cleanliness of the output gas and providing a pollution-free gas source for subsequent lens air jet cleaning.

[0025] In this embodiment, a first corrugated pipe 55 is fixedly connected to the outside of the filter barrel 51. The outside of the first corrugated pipe 55 is fixedly connected to the working frame 1 via a connecting rod. A first solenoid valve 56 is provided on the outside of the first corrugated pipe 55. The outside of the first solenoid valve 56 is fixedly connected to the sleeve 4 via a connecting rod. An air jet head 57 is fixedly connected to the other end of the first corrugated pipe 55. A fixing ring 58 is fixedly connected to the lower end of the air jet head 57. The output shafts of two first electric telescopic rods 59 are fixedly connected to the upper end of the fixing ring 58. The outer shells of the two first electric telescopic rods 59 are fixedly connected to the sleeve 4 via a connecting rod.

[0026] Specifically, the first bellows 55 is telescopic and bend-resistant, enabling gas transport between the filter barrel 51 and the jet head 57, while also accommodating displacement caused by the sliding of the lifting frame 3 and the lifting of the fixing ring 58. The outer connecting rod is used to fix the middle section of the first bellows 55 to the work frame 1 to prevent excessive shaking during airflow or equipment movement. The first solenoid valve 56 precisely controls the gas flow of the first bellows 55, opening only during lens cleaning. One end of the jet head 57 is connected to the first bellows 55, and the other end is connected to the fixing ring. The internal connection of ring 58 allows for the centralized delivery of purified gas to the outer toothed ring 510. The fixed ring 58 serves as both the connecting carrier between the jet head 57 and the outer toothed ring 510 and provides a sliding base for the subsequent mounting bracket 512. It also supports the lifting power of the first electric telescopic rod 59. The two first electric telescopic rods 59 are symmetrically distributed on both sides of the upper end of the fixed ring 58. The outer shell and sleeve 4 are fixed to ensure the stability of the power source. The extension and retraction of the output shaft can drive the fixed ring 58 and the auxiliary cleaning components to move up and down, thereby aligning or offsetting the cleaning brush 517 with the lens.

[0027] In this embodiment, a groove is provided on the inner side of the fixing ring 58, and an external gear ring 510 is fixedly connected to the lower end of the fixing ring 58. The external gear ring 510 is hollow and has multiple air vents on its inner side. Two symmetrical first gears 511 are meshed on the outer side of the external gear ring 510. Mounting brackets 512 are slidably connected to the outer side of each of the first gears 511. The outer side of the mounting brackets 512 is slidably connected to the groove on the inner side of the fixing ring 58 through a slider. A motor 513 is mounted on the upper end of the mounting brackets 512, and the output shaft of the motor 513 is fixedly connected to the first gears 511 through a rotating shaft.

[0028] Specifically, the inner groove of the fixed ring 58 is adapted to the outer slider of the mounting frame 512, providing a revolution track for the mounting frame 512; the outer toothed ring 510 is coaxially fixed with the fixed ring 58, and its hollow structure can accommodate the gas delivered by the jet head 57. The evenly distributed air outlets on the inner side face the measuring probe lens, which can directionally spray the gas onto the lens surface, working with the cleaning brush 517 to blow away impurities; the two first gears 511 respectively mesh with the teeth on the outer side of the outer toothed ring 510, and drive the mounting frame 512 to revolve along the groove through their own rotation; the upper end of the mounting frame 512 is equipped with a motor 513, and the lower end carries the second electric telescopic rod 516, which is the integrated carrier of the cleaning components; the slider slides in the groove, limiting the movement trajectory of the mounting frame 512 and ensuring smooth revolution; the motor 513 is a dual-output power source, and the output shaft drives the first gear 511 to rotate through the rotating shaft, providing power for the revolution of the mounting frame 512, and at the same time transmitting torque to the subsequent rotation of the cleaning brush 517.

[0029] In this embodiment, the output shaft of the motor 513 is fixedly connected to the first bevel gear 514 via a rotating shaft. The outer side of the first bevel gear 514 is meshed with the second bevel gear 515. The inner side of the second bevel gear 515 is fixedly connected to the housing of the second electric telescopic rod 516 via a coupling. A cleaning brush 517 is provided on the outer side of the output shaft of the second electric telescopic rod 516.

[0030] Specifically, the first bevel gear 514 is coaxially fixed with the output shaft of the motor 513 and can rotate synchronously with the output shaft of the motor 513, converting the horizontal rotation of the motor 513 into vertical rotation; the second bevel gear 515 meshes perpendicularly with the first bevel gear 514, receiving the power of the first bevel gear 514 and transmitting it to the second electric telescopic rod 516; the coupling is used to connect the housing of the second bevel gear 515 and the second electric telescopic rod 516, which can compensate for the coaxiality error between the two, ensure stable power transmission, and drive the second electric telescopic rod 516 to rotate as a whole as the second bevel gear 515 rotates; the second electric telescopic rod 516 can adjust the distance between the cleaning brush 517 and the lens by extending and retracting the output shaft, so that the cleaning brush 517 lightly touches the lens when extended, and the cleaning brush 517 is offset from the lens when retracted; the cleaning brush 517 is made of flexible carbon fiber bristles and is fixed to the end of the output shaft of the second electric telescopic rod 516. With the revolution of the mounting bracket 512 and its own rotation, it can achieve all-round cleaning of the lens and remove stubborn impurities from the surface.

[0031] In this embodiment, a second corrugated pipe 518 is fixedly connected to the outer side of the filter barrel 51, and a second solenoid valve 519 is provided on the outer side of the second corrugated pipe 518. The outer side of the second corrugated pipe 518 is slidably connected to the inner side of the work frame 1. An air supply pipe 520 is fixedly connected to the other end of the second corrugated pipe 518. A plurality of suction heads 521 are fixedly connected to the upper end of the air supply pipe 520. A suction cup 522 is slidably connected to the outer side of the suction head 521. The outer side of the suction cup 522 is fixedly connected to the worktable 6. Two symmetrical clamps 523 are fixedly connected to the lower end of the air supply pipe 520. The output shaft of a third electric telescopic rod 524 is fixedly connected to the lower end of the two clamps 523. The outer side of the third electric telescopic rod 524 is fixedly connected to the work frame 1.

[0032] Specifically, the second corrugated pipe 518 is made of the same material as the first corrugated pipe 55 and has flexible telescopic properties. It is used to connect the filter canister 51 and the air supply pipe 520 to transport the dust-laden airflow from the surface of the workbench 6. The sliding connection between the outer side and the inner side of the work frame 1 can prevent it from getting stuck when it rises and falls with the air supply pipe 520. The second solenoid valve 519 controls the airflow of the second corrugated pipe 518. It opens when vacuuming and closes after the base plate is fixed. At the same time, the valve opening can be adjusted to control the negative pressure. Multiple suction heads 521 are evenly distributed at the upper end of the air supply pipe 520, which can collect the scattered vacuuming points and deliver them to the second corrugated pipe 518. The outer side of the suction head 521 slides and adapts to the inner side of the suction cup 522. When flush with the suction cup 522, it can remove dust from the surface of the worktable 6. When moving downwards, it is hidden inside the suction cup 522 without affecting the placement of the substrate. At the same time, when the substrate is fixed, it can adsorb the area below the substrate to form a negative pressure and counteract warping stress. The suction cup 522 is made of rubber and is fixed to the worktable 6 for initial positioning of the flexible substrate. Two clamps 523 are symmetrically fixed to the lower end of the air supply pipe 520, which evenly transmits the lifting power of the third electric telescopic rod 524 to the air supply pipe 520 to ensure its horizontal lifting. The outer shell of the third electric telescopic rod 524 is fixed to the work frame 1. The extension and retraction of the output shaft drives the air supply pipe 520 and the suction head 521 to move up and down, so as to align with the suction cup 522 when vacuuming and reset and hide when measuring.

[0033] Working principle: When using this equipment, the two first electric telescopic rods 59 on the outer side of the sleeve 4 are activated. Their output shafts drive the fixed ring 58, external gear ring 510, and mounting bracket 512 to move downwards, aligning the cleaning brush 517 with the lens. Then, the second electric telescopic rod 516 is activated, extending its output shaft so that the cleaning brush 517 lightly touches the lens. Subsequently, the motor 513 is turned on. On one hand, the first gear 511 meshes with the external gear ring 510, driving the cleaning brush 517 to rotate around the lens. On the other hand, the first bevel gear 514 and the second bevel gear 515 drive the cleaning brush 517 to rotate, achieving all-round cleaning. At the same time, the first solenoid valve 56 is opened, and the purified gas in the filter tank 51 enters the external gear ring 510 through the first bellows 55 and the jet nozzle 57, and is sprayed out from the air outlet to blow away the dust. After cleaning, the second electric telescopic rod 516 retracts to offset the lens, and the first electric telescopic rod 59 drives the components to move upwards and reset. The third electric telescopic rod 524 on the work frame 1 is activated, and the clamping plate 523... The air supply pipe 520 and the suction head 521 are moved upwards to be flush with the suction cup 522. The second solenoid valve 519 is opened, and the suction head 521 sucks up the dust on the surface of the worktable 6. The impurities enter the filter canister 51 through the air supply pipe 520 and the second corrugated pipe 518. The airflow impacts the blades 54, causing them to rotate around the fixed rod 52. The activated carbon adsorption sheet on the outside of the blades 54 filters the impurities. The purified gas is retained in the filter canister 51 for subsequent lens air jet cleaning cycle. The second solenoid valve 519 is kept under slight negative pressure, and the flexible substrate is placed on the worktable 6. The edge of the substrate is adsorbed by the suction cup 522, while the suction head 521 continues to adsorb the bottom of the substrate to counteract the warping stress of the flexible substrate and prevent displacement and wrinkling. Then, the third electric telescopic rod 524 moves the suction head 521 downwards to reset, closes the second solenoid valve 519, and starts the electric slide rail 2 at the upper end of the work frame 1, which drives the lifting frame 3 to slide horizontally. The measuring probe at the lower end of the lifting frame 3 measures the line width and line spacing of the fixed flexible substrate.

[0034] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A line width and line space measuring instrument with stability of placement, comprising a work frame (1), characterized in that: An electric slide rail (2) is installed on the upper end of the work frame (1). A lifting frame (3) is slidably connected to the upper end of the electric slide rail (2). A measuring probe is installed on the lower end of the lifting frame (3). A sleeve (4) is fixedly connected to the outer side of the measuring probe at the lower end of the lifting frame (3). A cleaning mechanism (5) for cleaning the lens of the measuring probe is installed on the upper end of the work frame (1). A worktable (6) is fixedly connected to the upper end of the work frame (1).

2. The line width and pitch measurement instrument according to claim 1, wherein: The cleaning mechanism (5) includes a filter barrel (51) fixedly connected to the work frame (1). A fixing rod (52) is fixedly connected to the inner side of the filter barrel (51). A first rotating shaft (53) is rotatably connected to the inner side of the fixing rod (52). Blades (54) are fixedly connected to both ends of the first rotating shaft (53). Activated carbon adsorption sheets are provided on the outer sides of the two blades (54).

3. The line width and pitch measurement instrument of claim 2, wherein: The filter barrel (51) is fixedly connected to the outside of a first corrugated pipe (55). The outside of the first corrugated pipe (55) is fixedly connected to the working frame (1) via a connecting rod. The outside of the first corrugated pipe (55) is provided with a first solenoid valve (56). The outside of the first solenoid valve (56) is fixedly connected to the sleeve (4) via a connecting rod. The other end of the first corrugated pipe (55) is fixedly connected to a jet nozzle (57). The lower end of the jet nozzle (57) is fixedly connected to a fixing ring (58). The upper end of the fixing ring (58) is fixedly connected to the output shafts of two first electric telescopic rods (59). The outer shells of the two first electric telescopic rods (59) are fixedly connected to the sleeve (4) via a connecting rod.

4. The line width and pitch measurement instrument of claim 3, wherein: The inner side of the fixed ring (58) is provided with a sliding groove. The lower end of the fixed ring (58) is fixedly connected to an external gear ring (510). The external gear ring (510) is hollow. The inner side of the external gear ring (510) is provided with multiple air outlets. The outer side of the external gear ring (510) is meshed with two symmetrical first gears (511). The outer side of each of the first gears (511) is slidably connected to a mounting bracket (512). The outer side of the mounting bracket (512) is slidably connected to the sliding groove on the inner side of the fixed ring (58) through a slider. The upper end of the mounting bracket (512) is equipped with a motor (513). The output shaft of the motor (513) is fixedly connected to the first gear (511) through a rotating shaft.

5. The line width and pitch measurement instrument of claim 4, wherein: The output shaft of the motor (513) is fixedly connected to a first bevel gear (514) via a rotating shaft. The outer side of the first bevel gear (514) is meshed with a second bevel gear (515). The inner side of the second bevel gear (515) is fixedly connected to the housing of a second electric telescopic rod (516) via a coupling. A cleaning brush (517) is provided on the outer side of the output shaft of the second electric telescopic rod (516).

6. The line width and pitch measurement instrument of claim 2, wherein: The filter barrel (51) is fixedly connected to a second corrugated pipe (518) on the outside. A second solenoid valve (519) is provided on the outside of the second corrugated pipe (518). The outside of the second corrugated pipe (518) is slidably connected to the inside of the work frame (1). The other end of the second corrugated pipe (518) is fixedly connected to an air supply pipe (520). The upper end of the air supply pipe (520) is fixedly connected to multiple suction heads (521). The outside of the suction head (521) is slidably connected to a suction cup (522). The outside of the suction cup (522) is fixedly connected to the worktable (6). The lower end of the air supply pipe (520) is fixedly connected to two symmetrical clamps (523). The lower ends of the two clamps (523) are fixedly connected to the output shaft of a third electric telescopic rod (524). The outside of the third electric telescopic rod (524) is fixedly connected to the work frame (1).

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