A structure for improving the light collection efficiency of excitation light in photoluminescence measurement

By setting up light-emitting and light-receiving structures, fixing the measurement height, and using a convex lens and spherical optical cavity design, the problem of insufficient excitation light collection efficiency was solved, and the detection sensitivity and signal-to-noise ratio were improved.

CN224456550UActive Publication Date: 2026-07-03TRUSTEC SEMICON CO LTD (SUZHOU)

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
TRUSTEC SEMICON CO LTD (SUZHOU)
Filing Date
2025-05-16
Publication Date
2026-07-03

AI Technical Summary

Technical Problem

In existing photoluminescence measurement equipment, the efficiency of excitation light convergence and collection is insufficient, resulting in low detection sensitivity and signal-to-noise ratio, especially for weak signals or samples with low quantum yield.

Method used

By setting up light-emitting and light-receiving structures and fixing the measurement height, it is ensured that the excitation light enters the light outlet of the spherical optical cavity at a specific angle, maintaining the proportional relationship of light intensity, reducing mechanical errors, and using convex lenses and spherical optical cavity design to ensure stable transmission of the light source.

Benefits of technology

It improves the light collection efficiency of excitation light, reduces measurement errors, ensures stable transmission of light intensity, is unaffected by the spherical optical cavity, and enhances detection sensitivity and signal-to-noise ratio.

✦ Generated by Eureka AI based on patent content.

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Abstract

This utility model relates to the field of optical detection technology and discloses a structure for improving the excitation light collection efficiency in photoluminescence measurement. It includes a base plate, a test stage at the center of the upper surface of the base plate, and a fixed bracket fixedly connected to the center of the rear side wall of the base plate. It also includes a light-emitting structure for fixing the height of the emitting light source, comprising a retainer. Vertical plates are fixedly connected to the lower surfaces of the retainer on both sides. A light-incident tube is located at the center of the upper surface of the retainer, with its lower end penetrating the upper surface of the retainer and extending to the lower end. In this utility model, by setting the light-emitting structure and fixing the measurement height, measurement errors caused by the mechanism are reduced. Light entering at a specific angle will ultimately be transmitted through the light-emitting port of the spherical optical cavity. Thus, regardless of the height of the excitation light position, the intensity of the light entering the spherical optical cavity and the intensity of the transmitted light maintain the same proportional relationship.
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Description

Technical Field

[0001] This utility model relates to the field of optical detection technology, and in particular to a structure for improving the excitation light collection efficiency in photoluminescence measurement. Background Technology

[0002] Photoluminescence measurement is a spectroscopic analysis technique widely used in materials science, semiconductor detection, biosensing and other fields. Its principle is to excite the sample with a laser and measure the fluorescence or phosphorescence signal emitted by the sample after excitation. However, in the actual measurement process, the excitation efficiency of the laser and the collection efficiency of the fluorescence signal directly affect the detection sensitivity and signal-to-noise ratio. Especially for samples with weak signals or low quantum yield, how to improve the excitation efficiency of the laser and the collection efficiency of the fluorescence signal has become a key technical challenge.

[0003] Traditional optical measurement equipment for epitaxial products (PL) typically uses a convex lens to collect light over a wide area in its light-collecting system. This light is then focused by another convex lens and transmitted through an optical fiber before being sent to a spectrometer or other detection instrument for analysis. Finally, the detection results are output. Traditional PL measurements use a laser for excitation, and the excitation light needs to be focused by a lens and transmitted to the optical fiber port. Because the diameter of the optical fiber port is small, the size and position of the focused light spot significantly affect the light collection efficiency. Therefore, those skilled in the art have provided a structure to improve the excitation light collection efficiency in photoluminescence measurements, in order to solve the problems mentioned in the background art. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a structure that improves the excitation light collection efficiency in photoluminescence measurement. By setting a light-emitting structure and fixing the measurement height, measurement errors caused by the mechanism are reduced. In the light-collecting structure, light entering at a specific angle will eventually be transmitted through the light-emitting port of the spherical optical cavity. In this way, regardless of the height of the excitation light position, the intensity of the light entering the spherical optical cavity and the intensity of the transmitted light maintain the same proportional relationship. The excitation light enters from the upper hole and exits from the lower hole, and is not affected by the spherical optical cavity.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a structure for improving the excitation and collection efficiency in photoluminescence measurement, comprising a base plate, a test stage disposed at the center of the upper end surface of the base plate, and a fixing bracket fixedly connected at the center of the rear side wall of the base plate, and further comprising:

[0006] A light-emitting structure for fixing the height of an emitting light source includes a retainer, on which vertical plates are fixedly connected to the lower end surfaces of both sides of the retainer, and a light-incident tube is provided at the center of the upper end surface of the retainer, with the lower end of the light-incident tube penetrating through the upper end surface of the retainer and extending to the lower end.

[0007] A light-collecting structure is used to collect light from a light source and fix the height of the light source. It includes a housing, in which a spherical optical cavity is provided. An upper hole and a lower hole are respectively provided at the center of the upper and lower end faces of the housing. The upper hole and the lower hole pass through the upper and lower end faces of the housing and lead to the interior of the spherical optical cavity. A light-emission port is provided through the center of one side wall of the housing. The light-emission port passes through the one side wall of the housing and leads to the interior of the spherical optical cavity.

[0008] By using the above technical solution, by setting up a light-emitting structure, fixing the measurement height, reducing measurement errors caused by the mechanism, and using a light-receiving structure, the light entering at a specific angle will eventually be transmitted through the light-emitting port of the spherical optical cavity. In this way, regardless of the height of the excitation light position, the intensity of the light entering the spherical optical cavity and the intensity of the transmitted light maintain the same proportional relationship. The excitation light enters from the upper hole and exits from the lower hole, and is not affected by the spherical optical cavity.

[0009] Furthermore, a convex lens is provided at the upper end of the hole between the two vertical plates, and the upper end face of the convex lens is fixedly connected to the lower end face of one side of the two vertical plates.

[0010] The above technical solution facilitates the focusing of the emitted light source, and the fixed connection method ensures the stability of the convex lens connection.

[0011] Furthermore, the other end of the fixing bracket is fixedly connected to the center of the rear side wall of the retainer;

[0012] The above technical solution achieves a fixed height between the test platform and the light-emitting structure.

[0013] Furthermore, the lower ends of the two vertical plates are respectively fixedly connected to the upper surface of the box body;

[0014] The above technical solution achieves a fixed height for the light source.

[0015] Furthermore, a metal aluminum foil is disposed on the inner wall of the spherical optical cavity;

[0016] The above technical solution is used to reflect and concentrate the light source.

[0017] Furthermore, the upper hole and the lower hole have the same size;

[0018] The above technical solution facilitates the transmission of vertical light.

[0019] This utility model has the following beneficial effects:

[0020] In this invention, by setting a light-emitting structure and fixing the measurement height, the measurement error caused by the mechanism is reduced.

[0021] In this invention, by setting a light-collecting structure, light entering at a specific angle will eventually be transmitted through the light-emitting port of the spherical optical cavity. In this way, regardless of the height of the excitation light position, the intensity of the light entering the spherical optical cavity and the intensity of the transmitted light maintain the same proportional relationship. The excitation light enters from the upper hole and exits from the lower hole, and is not affected by the spherical optical cavity. Attached Figure Description

[0022] Figure 1 An axonometric view of a structure for improving the excitation light collection efficiency in photoluminescence measurement proposed in this utility model;

[0023] Figure 2 Another perspective is shown in the axonometric view of a structure proposed in this utility model for improving the excitation light collection efficiency in photoluminescence measurement.

[0024] Figure 3 This is an axonometric sectional view of a structure for improving the excitation light collection efficiency in photoluminescence measurement proposed in this utility model;

[0025] Figure 4 This is a front view of a structure proposed in this utility model for improving the excitation light collection efficiency in photoluminescence measurement.

[0026] Legend:

[0027] 1. Fixed bracket; 2. Light-emitting structure; 201. Holder; 202. Vertical plate; 203. Convex lens; 204. Light inlet tube; 3. Light-receiving structure; 301. Upper hole; 302. Light outlet; 303. Box body; 304. Lower hole; 305. Spherical optical cavity; 4. Base plate; 5. Test stage. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] Reference Figure 1-4 The present invention provides an embodiment of a structure for improving the excitation light collection efficiency in photoluminescence measurement, comprising a base plate 4, a test stage 5 disposed at the center of the upper end surface of the base plate 4, and a fixing bracket 1 fixedly connected to the center of the rear side wall of the base plate 4, and further comprising:

[0030] The light-emitting structure 2 is used to fix the height of the emitting light source. It includes a holder 201. Vertical plates 202 are fixedly connected to the lower end surfaces of the holder 201 on both sides. A light-inlet tube 204 is provided at the center of the upper end surface of the holder 201. The lower end of the light-inlet tube 204 passes through the upper end surface of the holder 201 and leads to the lower end, thus fixing the measurement height and reducing measurement errors caused by the mechanism.

[0031] The light-collecting structure 3 is used to collect light from the light source and fix the height of the light source. It includes a housing 303, inside which is a spherical optical cavity 305. An upper hole 301 and a lower hole 304 are respectively provided at the center of the upper and lower end faces of the housing 303. The upper hole 301 and the lower hole 304 pass through the upper and lower end faces of the housing 303 and lead to the interior of the spherical optical cavity 305. A light-emission port 302 is provided through the center of one side wall of the housing 303. The light-emission port 302 passes through the one side wall of the housing 303 and leads to the interior of the spherical optical cavity 305. Light entering at a specific angle will eventually be transmitted through the light-emission port 302 of the spherical optical cavity 305. In this way, regardless of the height of the excitation light position, the intensity of the light entering the spherical optical cavity 305 and the intensity of the transmitted light maintain the same proportional relationship. The excitation light enters from the upper hole 301 and exits from the lower hole 304, and is not affected by the spherical optical cavity 305.

[0032] A convex lens 203 is provided at the upper end of the upper hole 301 between the two vertical plates 202. The upper end face of the convex lens 203 is fixedly connected to the lower end face of one side of the two vertical plates 202, which facilitates the focusing of the emitted light source. The fixed connection method ensures the stability of the connection of the convex lens 203. The other end of the fixed bracket 1 is fixedly connected to the center of the rear side wall of the retainer 201, so as to realize the height fixation between the test platform 5 and the light-emitting structure 2. The lower ends of the two vertical plates 202 are respectively fixedly connected to the upper end face of the box 303. Metal aluminum foil is provided on the inner side wall of the spherical optical cavity 305 for reflecting and focusing the light source. The upper hole 301 and the lower hole 304 have the same size, which facilitates the transmission of vertical light.

[0033] Working principle: This utility model is a structure for improving the excitation light collection efficiency in photoluminescence measurement. By setting a retainer 201 and two vertical plates 202, the height of the overall light-emitting structure 2 is kept fixed. By fixing the measurement height, the measurement error caused by the mechanism is reduced. At the same time, the light entering at a specific angle will eventually be transmitted through the light outlet 302 of the spherical optical cavity 305. In this way, no matter the height of the excitation light position, the intensity of the light entering the spherical optical cavity 305 and the intensity of the transmitted light are kept in the same proportional relationship. The excitation light enters from the upper hole 301 and exits from the lower hole 304, and is not affected by the spherical optical cavity 305.

[0034] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A structure for improving the excitation light collection efficiency in photoluminescence measurement, comprising a base plate (4), wherein a test stage (5) is disposed at the center of the upper end face of the base plate (4), and a fixing bracket (1) is fixedly connected to the center of the rear side wall of the base plate (4), characterized in that: It also includes: The light-emitting structure (2) is used to fix the height of the emitting light source, including a retainer (201). Vertical plates (202) are fixedly connected to the lower end surfaces of the retainer (201) on both sides. A light-inlet tube (204) is provided at the center of the upper end surface of the retainer (201). The lower end of the light-inlet tube (204) passes through the upper end surface of the retainer (201) and extends to the lower end. A light-collecting structure (3) is used to collect light from a light source and fix the height of the light source. It includes a housing (303) with a spherical optical cavity (305) inside. An upper hole (301) and a lower hole (304) are respectively provided at the center of the upper and lower end faces of the housing (303). The upper hole (301) and the lower hole (304) pass through the upper and lower end faces of the housing (303) and lead to the interior of the spherical optical cavity (305). A light-emitting port (302) is provided through the center of one side wall of the housing (303). The light-emitting port (302) passes through the one side wall of the housing (303) and leads to the interior of the spherical optical cavity (305).

2. The structure for improving the efficiency of collecting excitation light in photoluminescence measurement according to claim 1, wherein: A convex lens (203) is provided at the upper end of the upper hole (301) between the two vertical plates (202), and the upper end face of the convex lens (203) is fixedly connected to the lower end face of one side of the two vertical plates (202).

3. The structure for improving the efficiency of collecting excitation light in photoluminescence measurement according to claim 1, wherein: The other end of the fixed bracket (1) is fixedly connected to the center of the rear side wall of the retainer (201).

4. The structure for improving the excitation light collection efficiency in photoluminescence measurement according to claim 1, characterized in that: The lower ends of the two vertical plates (202) are respectively fixedly connected to the upper surface of the box (303).

5. The structure for improving the efficiency of collecting the excitation light in photoluminescence measurement according to claim 1, wherein: The inner wall of the spherical optical cavity (305) is provided with a metal aluminum foil.

6. The structure for improving the efficiency of collecting the excitation light in photoluminescence measurement according to claim 1, wherein: The upper hole (301) and the lower hole (304) have the same size.