A lifting and plugging mechanism for probe card testing

Abstract

This utility model discloses a lifting and plugging mechanism for probe card testing, including a probe card testing device body and a lifting and moving plugging structure provided on the probe card testing device body; an auxiliary connecting ruler is provided with a lifting and sliding adjustment plate, a scale strip is provided on the surface of the auxiliary connecting ruler, and a snap-fit ​​connecting post is provided on the side of the built-in connecting spring body. The auxiliary connecting ruler is connected to the probe card testing device body by plugging and snap-fitting the connecting post. When disassembly is required, simply press the button to retract the snap-fit ​​connecting post to pull out the auxiliary connecting ruler. After the improvement of this utility model, the lifting and plugging mechanism for probe card testing can be used for auxiliary calibration support, effectively avoiding the phenomenon that the structure may develop gaps due to long-term use or machine failure, resulting in excessive descent and damage to the product. Thus, the safety and practicality of the lifting and plugging mechanism for probe card testing are effectively improved.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, specifically relating to a lifting and plugging mechanism for probe card testing. Background Technology

[0002] Probe card testing primarily falls under the fields of semiconductor manufacturing and testing. In the semiconductor production process, probe cards are widely used for wafer-level testing, especially in the wafer-level testing stage of CMOS image sensor chip production. Probe cards are crucial components used in semiconductor wafer testing, often referred to as the "fingertips" of testing equipment. They enable electrical contact with the pads or bumps on the wafer, sending test signals to automated testing equipment for analysis and judgment, thereby obtaining the electrical characteristic test results for each die on the wafer.

[0003] A probe card testing lifting and insertion mechanism is a device used for testing probe cards. It mainly includes a lifting cylinder, a top plate, a pressure block, a heating element, and a heat-conducting plate. During testing, the lifting cylinder controls the raising and lowering of the top plate, thereby achieving contact and separation between the probe card and the testing equipment. This mechanism is typically used for testing wafer probe cards, where the probes on the wafer probe card contact the pads or bumps on the chip to receive chip signals and filter out defective products.

[0004] However, when using the probe card testing lifting and plugging mechanism, gaps can easily develop in some of its machine structures due to prolonged use. This can easily affect the accuracy of the test and cause excessive contact between the probe and the measured product, resulting in product damage.

[0005] This utility model addresses the above-mentioned problems by providing a lifting and plugging mechanism for probe card testing with auxiliary limiting support. Utility Model Content

[0006] The purpose of this utility model is to provide a lifting and plugging mechanism for probe card testing, so as to solve the problem mentioned in the background art that when the lifting and plugging mechanism for probe card testing is used, gaps may easily appear in some parts of its machine structure due to long-term use, which can easily affect the accuracy of testing and cause excessive contact between the probe and the measured product, resulting in product damage.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a lifting and plugging mechanism for probe card testing, comprising a probe card testing device body and a lifting and moving plugging structure disposed on the probe card testing device body;

[0008] An auxiliary connecting ruler is provided on the side of the probe card testing device body. A lifting and sliding adjustment plate is provided on the upper part of the auxiliary connecting ruler. A rotating and fixing squeezing knob is provided on the side of the lifting and sliding adjustment plate. A scale strip is provided on the surface of the auxiliary connecting ruler. An internal connecting spring is provided near the bottom of the lifting and sliding adjustment plate. A snap-fit ​​connecting post is provided on the side of the internal connecting spring. A press button is provided on the side of the snap-fit ​​connecting post. An insertion connecting groove is provided on the outer side of the side structure of the auxiliary connecting ruler. The auxiliary connecting ruler is connected to the probe card testing device body by insertion and snap-fit ​​by the snap-fit ​​connecting post. The lifting and sliding adjustment plate is adjusted to a specified height and the screw-fit squeezing knob is rotated to fix it. When disassembly is required, simply press the press button to retract the snap-fit ​​connecting post and pull out the auxiliary connecting ruler.

[0009] Preferably, a limiting connection groove is provided at the upper side of the press button, and the limiting connection groove is formed by the body structure of the probe card testing device.

[0010] Preferably, a limiting connecting moving block is provided at the middle position of the limiting connecting groove, and the limiting connecting moving block and the pressing button are an integral structure.

[0011] Preferably, a contact probe is provided at the bottom of the lifting and moving plug-in structure, and the contact probe is electrically connected to the probe card test device body.

[0012] Preferably, a test placement platform is provided at the bottom of the contact probe, and the test placement platform is limited by air pressure adsorption placement.

[0013] Preferably, a lifting connecting longitudinal frame is provided on the upper side of the probe card testing device body, and a lifting connecting cross frame is connected to the side of the lifting connecting longitudinal frame.

[0014] Preferably, a microscope device body is provided at the end of the lifting connecting crossbeam, a microscope adjustment device is provided at the bottom of the microscope device body, and a microscope head is provided at the bottom of the microscope adjustment device.

[0015] Preferably, the bottom of the probe card testing device is provided with a bottom connecting support foot near the corner, and the bottom side of the bottom connecting support foot is a rubber structure.

[0016] Compared with the prior art, this utility model provides a lifting and plugging mechanism for probe card testing, which has the following advantages:

[0017] In the lifting and plugging mechanism for probe card testing, an auxiliary connecting ruler is provided on the side of the probe card testing device body. A lifting and sliding adjustment plate is provided on the upper part of the auxiliary connecting ruler. A rotating and fixing compression knob is provided on the side of the lifting and sliding adjustment plate. A scale strip is provided on the surface of the auxiliary connecting ruler. An internal connecting spring is provided near the bottom of the lifting and sliding adjustment plate. A snap-fit ​​connecting post is provided on the side of the internal connecting spring. A press button is provided on the side of the snap-fit ​​connecting post. A plug-in connecting groove is provided on the outer side of the side structure of the auxiliary connecting ruler. The auxiliary connecting ruler is plugged in and... The auxiliary connecting ruler is connected to the probe card testing device body via a snap-fit ​​connection post. The lifting and sliding adjustment plate is moved to the designated height, and the locking knob is rotated to secure it. For disassembly, simply press the button to retract the snap-fit ​​connection post and pull out the auxiliary connecting ruler. This improved design allows for auxiliary calibration of the probe card testing lifting and plugging mechanism, effectively preventing damage to the product caused by excessive descent due to structural gaps or machine malfunctions from prolonged use. This significantly improves the safety and usability of the probe card testing lifting and plugging mechanism. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the probe card testing lifting and plugging mechanism of this utility model.

[0019] Figure 2 This is a schematic diagram of the lifting and plugging mechanism for probe card testing of this utility model without an auxiliary connecting ruler.

[0020] Figure 3 This is a right-side view of the lifting and moving insertion structure of the probe card testing mechanism of this utility model.

[0021] Figure 4 This is a schematic diagram of the bottom cross-sectional structure of the auxiliary connecting ruler of the probe card testing lifting and plugging mechanism of this utility model.

[0022] In the diagram: 1. Probe card testing device body; 2. Lifting connecting longitudinal frame; 3. Lifting connecting transverse frame; 4. Microscope device body; 5. Microscope adjustment device; 6. Microscope head; 7. Lifting and moving plug-in structure; 8. Contact probe; 9. Test placement stage; 10. Bottom connecting support foot; 11. Auxiliary connecting ruler; 12. Lifting sliding adjustment plate; 13. Scale strip; 14. Rotating fixed squeezing knob; 15. Press button; 16. Plug-in connecting slot; 17. Built-in connecting spring body; 18. Snap-in connecting post; 19. Limiting connecting slot; 20. Limiting connecting moving block. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] This utility model provides, for example Figure 1-4 As shown, a lifting and plugging mechanism for probe card testing includes a probe card testing device body 1 and a lifting and moving plugging structure 7 disposed on the probe card testing device body 1; an auxiliary connecting ruler 11 is disposed on the side of the probe card testing device body 1, a lifting and sliding adjustment plate 12 is disposed on the upper part of the auxiliary connecting ruler 11, a rotating and fixing pressing knob 14 is disposed on the side of the lifting and sliding adjustment plate 12, a scale bar 13 is disposed on the surface of the auxiliary connecting ruler 11, an internal connecting spring body 17 is disposed near the bottom end of the lifting and sliding adjustment plate 12, a snap-fit ​​connecting post 18 is disposed on the side of the internal connecting spring body 17, and a press button 15 is disposed on the side of the snap-fit ​​connecting post 18; the side structure of the auxiliary connecting ruler 11... An insertion slot 16 is provided on the outer side of the device. The auxiliary connecting ruler 11 is connected to the probe card testing device body 1 by insertion and snap-fit ​​connection post 18. The lifting sliding adjustment plate 12 is adjusted to the specified height and the locking and pressing knob 14 is rotated to fix it. When disassembly is required, simply press the pressing button 15 to retract the locking and pressing post 18 to pull out the auxiliary connecting ruler 11. After the improvement of this utility model, the lifting insertion mechanism for auxiliary calibration support probe card testing can be used to effectively avoid the phenomenon that the structure will develop gaps or the machine will malfunction and cause excessive descent to damage the product due to long-term use. Thus, the safety and practicality of the lifting insertion mechanism for probe card testing are effectively improved.

[0025] like Figure 4 As shown, a limiting connection groove 19 is provided on the upper side of the press button 15. The limiting connection groove 19 is formed by the structure of the probe card test device body 1. A limiting connection moving block 20 is provided in the middle of the limiting connection groove 19. The limiting connection moving block 20 and the press button 15 are an integral structure. The setting of the limiting connection groove 19 and the limiting connection moving block 20 can effectively prevent the press button 15 from detaching from the probe card test device body 1 and falling off.

[0026] like Figure 1As shown, a contact probe 8 is provided at the bottom of the lifting and moving plug-in structure 7. The contact probe 8 is electrically connected to the probe card test device body 1. A test placement stage 9 is provided at the bottom of the contact probe 8. The test placement stage 9 is limited by air pressure adsorption placement. The contact probe 8 on the wafer probe card contacts the chip pads or bumps on the test placement stage 9 to receive chip signals and screen out defective products.

[0027] like Figure 1 As shown, a lifting connecting frame 2 is provided on the upper side of the probe card testing device body 1, a lifting connecting cross frame 3 is connected to the side of the lifting connecting frame 2, a microscope device body 4 is provided at the end of the lifting connecting cross frame 3, a microscope adjustment device 5 is provided at the bottom of the microscope device body 4, and a microscope head 6 is provided at the bottom of the microscope adjustment device 5. The microscope head 6 can be used by staff to observe the test chip in detail.

[0028] like Figure 1 As shown, a bottom connecting support foot 10 is provided at the bottom of the probe card testing device body 1 near the corner. The bottom side of the bottom connecting support foot 10 is made of rubber. The bottom connecting support foot 10 can make the probe card testing device body 1 more stable and effectively prevent it from sliding and falling.

[0029] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A lifting and plugging mechanism for probe card testing, comprising a probe card testing device body (1) and a lifting and moving plugging structure (7) disposed on the probe card testing device body (1); characterized in that An auxiliary connecting ruler (11) is provided on the side of the probe card testing device body (1). A lifting and sliding adjustment plate (12) is provided on the upper part of the auxiliary connecting ruler (11). A rotating and fixing compression knob (14) is provided on the side of the lifting and sliding adjustment plate (12). A scale strip (13) is provided on the surface of the auxiliary connecting ruler (11). An internal connecting spring body (17) is provided near the bottom of the lifting and sliding adjustment plate (12). A snap-fit ​​connecting post (18) is provided on the side of the internal connecting spring body (17). A push button (15) is provided on the side of the connecting post (18), and a plug-in connection groove (16) is provided on the outer side of the side structure of the auxiliary connecting ruler (11). The auxiliary connecting ruler (11) is connected to the probe card test device body (1) by plugging and snapping the connecting post (18). The lifting sliding adjustment plate (12) is adjusted to the specified height and the pressing and squeezing knob (14) is rotated to press and fix it. When disassembly is required, the auxiliary connecting ruler (11) can be pulled out by pressing the push button (15) to make the snap-in connection post (18) retract.

2. The lift-and-plug mechanism for probe card testing according to claim 1, wherein: A limiting connection groove (19) is provided on the upper side of the press button (15), and the limiting connection groove (19) is formed by the structure of the probe card test device body (1).

3. The lift-and-plug mechanism for probe card testing according to claim 2, wherein: A limiting connection moving block (20) is provided at the middle position of the limiting connection groove (19), and the limiting connection moving block (20) and the pressing button (15) are an integral structure.

4. The pop-up connector of claim 1, wherein: A contact probe (8) is provided at the bottom of the lifting and moving plug-in structure (7), and the contact probe (8) is electrically connected to the probe card test device body (1).

5. The lift-and-plug interconnect mechanism for probe card testing of claim 4, wherein: A test placement platform (9) is provided at the bottom of the contact probe (8), and the test placement platform (9) is limited by air pressure adsorption placement.

6. The pop-on lifter of claim 1, wherein: A lifting connecting frame (2) is provided on the upper side of the probe card test device body (1), and a lifting connecting cross frame (3) is connected to the side of the lifting connecting frame (2).

7. The lifting and insertion mechanism for probe card testing according to claim 6, characterized in that: A microscope device body (4) is provided at the end of the lifting connecting crossbeam (3), a microscope adjustment device (5) is provided at the bottom of the microscope device body (4), and a microscope head (6) is provided at the bottom of the microscope adjustment device (5).

8. The pop-on lifter of claim 1, wherein: The probe card test device body (1) has a bottom connecting support foot (10) near the corner at the bottom, and the bottom side of the bottom connecting support foot (10) is a rubber structure.

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