Probe assembly suspension clamp and probe assembly system including same

Abstract

The utility model provides a kind of probe assembly suspension clamp and the probe assembly system comprising it, the mounting seat of the probe assembly suspension clamp is equipped with vertical installation surface of vertical arrangement;Vertical installation plate is fixed on the vertical installation surface of mounting seat;Vertical sliding assembly is installed on vertical installation plate, and can be vertically slid along vertical installation plate;The lower of vertical sliding assembly is equipped with horizontal installation surface of horizontal arrangement;Clamping piece is fixed on horizontal installation surface, and clamping piece is used to clamp probe, so that probe keeps vertical state;Vertical driving assembly is connected with vertical installation plate, vertical sliding assembly, and vertical driving assembly drives vertical sliding assembly to vertically slide relative to vertical installation plate.The clamping piece can keep vertical state when probe is hung, and vertical sliding assembly, vertical driving assembly ensure that probe can be vertically pressed during pressing process, so as to ensure the assembly precision of probe and suspension structure, to meet the requirement of micro-nano measurement technology to measuring probe.

Description

Technical Field

[0001] This utility model relates to a probe assembly suspension fixture and a probe assembly system including the same. Background Technology

[0002] Micro-nano measurement technology is a high-tech field that has emerged in recent years. It is one of the most forward-looking and driving key areas in basic research and high-tech development, and has become a strategic high ground in international technological competition. The probes required for measurement need to be vertically fixed in the center of the suspension structure, requiring extremely high assembly precision. If the probe assembly is inaccurate, such as tilting, offsetting, or loosening, it will lead to deviations in the measurement results and reduce measurement accuracy. Traditional probe assembly methods usually rely on manual trial and error or simple positioning devices, which suffer from inaccurate positioning, low efficiency, and susceptibility to environmental influences, resulting in large measurement errors and affecting production quality and efficiency. Utility Model Content

[0003] The technical problem to be solved by this utility model is to overcome the defect of low precision in the assembly of probes and suspension structures in the prior art, and to provide a probe assembly suspension fixture and a probe assembly system including the same.

[0004] This utility model solves the above-mentioned technical problems through the following technical solutions:

[0005] This utility model provides a probe assembly suspension fixture, including a mounting base, a vertical mounting plate, a vertical sliding assembly, a clamping member, and a vertical drive assembly. The mounting base is used to fix itself on a mounting platform and has a vertically arranged vertical mounting surface. The vertical mounting plate is fixed to the vertical mounting surface of the mounting base. The vertical sliding assembly is mounted on the vertical mounting plate and can slide vertically along the vertical mounting plate. A horizontally arranged horizontal mounting surface is provided below the vertical sliding assembly. The clamping member is fixed to the horizontal mounting surface and is used to clamp the probe, keeping the probe in a vertical state. The vertical drive assembly is connected to the vertical mounting plate and the vertical sliding assembly, and drives the vertical sliding assembly to slide vertically relative to the vertical mounting plate.

[0006] In this technical solution, the clamping component ensures that the probe remains vertical when suspended, and the vertical sliding component and the vertical driving component ensure that the probe can be pressed vertically during the pressing process, thereby ensuring the assembly accuracy of the probe and the suspension structure.

[0007] Preferably, the vertical sliding assembly includes a vertical sliding plate and at least one ball bearing guide rail, the vertical sliding plate cooperating with the vertical mounting plate; the ball bearing guide rail is vertically arranged and disposed between the vertical sliding plate and the vertical mounting plate, the inner rail and outer rail of the ball bearing guide rail being fixed to the vertical sliding plate and the vertical mounting plate respectively.

[0008] In this technical solution, the ball bearing guide rail creates a stable sliding guide structure between the vertical sliding plate and the vertical mounting plate, restricting the sliding direction of the vertical sliding plate and ensuring that the vertical sliding plate can only slide vertically.

[0009] Preferably, the vertical sliding assembly includes a vertical sliding plate that cooperates with the vertical mounting plate, and the vertical driving assembly is connected to the vertical mounting plate and the vertical sliding plate, and the vertical driving assembly drives the vertical sliding plate to slide vertically relative to the vertical mounting plate.

[0010] In this technical solution, the vertical drive assembly drives the vertical sliding plate to slide vertically relative to the vertical mounting plate, thereby driving the vertical sliding assembly and the clamping member to slide vertically as a whole, so that the probe fixed on the clamping member can be pressed vertically downward.

[0011] Preferably, the vertical drive assembly includes an extending protrusion, a pressing assembly, and a support assembly. The extending protrusion is fixed to the side of the vertical sliding plate. The pressing assembly is mounted on the side of the vertical mounting plate, located above the extending protrusion, with its end abutting against the extending protrusion. The pressing assembly can push the extending protrusion to move vertically downward. The support assembly is mounted on the side of the vertical mounting plate, located below the extending protrusion, with its end abutting against the extending protrusion. The support assembly always applies an upward thrust to the extending protrusion.

[0012] In this technical solution, when the pressing component is not in operation, the support component below the extension protrusion applies an upward thrust, and the extension protrusion is abutted by the pressing component and the support component, so that the position of the extension protrusion remains unchanged, and the position of the vertical sliding plate fixed to the extension protrusion also remains unchanged, that is, the overall position of the vertical sliding component, the clamping component, and the probe remains unchanged.

[0013] Preferably, the pressing assembly includes an upper support ring and a helical lever. The upper support ring is fixed to the side of the vertical mounting plate and is located above the extending protrusion. The central hole of the upper support ring is vertically oriented. The handle of the helical lever is fixed to the upper support ring, and the screw of the helical lever passes through the central hole of the upper support ring. The end of the screw abuts against the extending protrusion. When the handle of the helical lever is rotated, the screw can move axially along the central hole of the upper support ring.

[0014] In this technical solution, when it is necessary to press the extension protrusion vertically downward, the handle of the spiral lever is rotated to move the screw of the spiral lever downward, thereby pressing the extension protrusion downward, so that the position of the vertical sliding plate also slides downward vertically, that is, the overall position of the vertical sliding assembly, clamping part, and probe moves downward.

[0015] Preferably, the support assembly includes a lower support ring, a support rod, and an elastic element. The lower support ring is fixed to the side of the vertical mounting plate and is located below the extending protrusion. The central hole of the lower support ring is vertically oriented. The support rod passes through the central hole of the lower support ring and is movable along the axial direction of the lower support ring. The end of the support rod abuts against the extending protrusion. The elastic element connects the lower support ring and the support rod, and the elastic element always applies an upward thrust to the support rod.

[0016] In this technical solution, the elastic element always applies an upward thrust to the support rod, so that the support rod always presses against the extension protrusion, and the extension protrusion always remains in contact with the pressing component.

[0017] Preferably, the extended protrusion includes a protrusion body and a ball bearing. The protrusion body is fixed to the vertical sliding plate. The surface of the protrusion body facing the pressing component and / or the support component has a recess. The ball bearing is placed in the recess, and the highest point of the ball bearing protrudes to the surface of the protrusion body. The pressing component and / or the support component abuts against the ball bearing.

[0018] In this technical solution, the friction between the pressing component, the support component and the ball is greatly reduced, making the vertical force between the pressing component, the support component and the ball the main force, which ensures the accuracy of the vertical motion transmission between the pressing component, the support component and the extension protrusion, and prevents the phenomenon of motion jamming.

[0019] Preferably, the vertical sliding assembly includes a vertical sliding plate, a horizontal extension plate, and a transition plate. The vertical sliding plate cooperates with the vertical mounting plate and can slide vertically along the vertical mounting plate. The horizontal extension plate is horizontally arranged and fixed to the surface of the vertical sliding plate away from the vertical mounting plate. The upper end of the transition plate is fixed to the horizontal extension plate, and the horizontal mounting surface is formed on the lower surface of the transition plate.

[0020] In this technical solution, the combination of three components—the vertical sliding plate, the horizontal extension plate, and the adapter plate—enables three-directional conversion, allowing the assembled vertical sliding assembly to slide vertically along the vertical mounting plate while conveniently and quickly forming a horizontal mounting surface for fixing clamping components.

[0021] Preferably, the clamping member includes a clamping block and an elastic band. The clamping block is fixed to the horizontal mounting surface and has a vertically extending positioning groove. The bottom surface of the positioning groove can completely fit with the probe, allowing the probe to be placed vertically. The clamping block has a horizontally penetrating limiting through hole, one end of which extends into the positioning groove. The elastic band passes through the limiting through hole and can be fitted onto the probe located in the positioning groove. The elastic band tightens the probe, causing the probe to adhere tightly to the bottom surface of the positioning groove.

[0022] In this technical solution, the above-mentioned method of fixing the probe is simple, easy to disassemble, and accurate in positioning; the elastic band has appropriate elasticity and can apply appropriate pressure to the probe, which will not damage the probe and can ensure that the probe is firmly attached to the bottom surface of the positioning groove.

[0023] Preferably, the mounting base includes a support pad, a suspension merging plate, and at least two suspension arms. The support pad is used to fix the mounting platform. The suspension merging plate is vertically arranged. One end of each suspension arm is fixed to the support pad, and the other end of each suspension arm is fixed to the suspension merging plate. The side of the suspension merging plate away from the suspension arms forms the vertical mounting surface.

[0024] In this technical solution, the support pad serves as the base, ensuring the overall stability of the probe assembly suspension clamp; the vertical mounting surface of the suspension merging plate is used to fix the vertical mounting plate; and two suspension arms are used in the middle to connect the support pad and the suspension merging plate, forming a hollow space between the two suspension arms, which reduces the overall weight of the mounting base.

[0025] This utility model also provides a probe assembly system, including an installation platform, a probe assembly suspension fixture, and a three-axis displacement stage. The probe assembly suspension fixture is as described in the above technical solution, with its mounting base fixed on the installation platform. The three-axis displacement stage is located below the clamping member of the probe assembly suspension fixture, and the side of the three-axis displacement stage facing the clamping member is used to fix the suspension structure. The suspension structure is placed horizontally on the three-axis displacement stage. The three-axis displacement stage can move horizontally or vertically, so that the center point of the central circular surface of the suspension structure and the center point of the bottom end surface of the probe are aligned in the vertical direction and maintain a preset distance.

[0026] In this technical solution, the clamping component keeps the probe vertical when suspended, the vertical sliding component and the vertical driving component ensure that the probe is pressed vertically during the pressing process, and the position of the suspension structure is adjusted by the three-axis displacement stage, so as to achieve precise installation between the probe and the suspension structure to meet the requirements of micro and nano measurement technology for measurement probes.

[0027] Preferably, the probe assembly system further includes a vision acquisition device, which is signal-connected to the triaxial displacement stage; the vision acquisition device is used to acquire images of the relative positions of the central circular surface of the suspension structure and the bottom surface of the probe.

[0028] In this technical solution, the relative distance between the central circular surface of the suspension structure and the bottom surface of the probe is monitored and calculated in real time by a visual acquisition device, so that the alignment between the central circular surface of the suspension structure and the bottom surface of the probe can be achieved automatically, thereby improving the alignment accuracy and alignment speed.

[0029] Preferably, the visual acquisition device includes an X-axis visual acquisition component and a Y-axis visual acquisition component, wherein the lens shooting directions of the X-axis visual acquisition component and the Y-axis visual acquisition component are both horizontally set, and the lens shooting directions of the X-axis visual acquisition component and the Y-axis visual acquisition component are perpendicular to each other.

[0030] In this technical solution, by using the lenses of the horizontally perpendicular X-axis visual acquisition component and the Y-axis visual acquisition component, the relative position images of the central circular surface of the suspension structure and the bottom surface of the probe can be acquired from two angles, making the image acquisition more accurate.

[0031] Based on common knowledge in the field, the above-mentioned preferred conditions can be combined arbitrarily to obtain various preferred embodiments of this utility model.

[0032] The positive and progressive effects of this utility model are as follows:

[0033] The aforementioned probe assembly suspension fixture ensures that the probe remains vertical when suspended, while the vertical sliding component and vertical driving component guarantee that the probe is pressed vertically during the downward process, thereby ensuring the assembly accuracy between the probe and the suspension structure. By using this probe assembly suspension fixture in a probe assembly system and adjusting the position of the suspension structure with a three-axis displacement stage, precise installation between the probe and the suspension structure can be achieved, thus meeting the requirements of micro-nano measurement technology for measurement probes. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of the probe assembly system of this utility model.

[0035] Figure 2 for Figure 1 A magnified view of area A of the probe assembly system shown.

[0036] Figure 3 for Figure 1 The diagram shows the structure of the probe assembly suspension fixture of the probe assembly system.

[0037] Figure 4 for Figure 3 The diagram shows a partial structural schematic of the probe assembly suspension fixture.

[0038] Figure 5 for Figure 4 The diagram shows a partial cross-sectional view of the probe assembly suspension fixture.

[0039] Figure 6 for Figure 3 The diagram shows the structure of the clamping component of the probe assembly suspension fixture.

[0040] Figure 7 for Figure 6 The diagram shows the internal structure of the clamping component.

[0041] Explanation of reference numerals in the attached figures

[0042] Installation Platform 100

[0043] Probe assembly suspension clamp 200

[0044] Mounting base 1

[0045] Vertical mounting surface 11

[0046] Support plate 12

[0047] Suspension composite plate 13

[0048] 14 suspension arms

[0049] Vertical mounting plate 2

[0050] Vertical sliding component 3

[0051] Horizontal mounting surface 31

[0052] Vertical sliding plate 32

[0053] Horizontal extension plate 33

[0054] Adapter board 34

[0055] 35 ball guide rail

[0056] Clamping component 4

[0057] Clamping block 41

[0058] Positioning groove 411

[0059] Bottom 412

[0060] Limiting through hole 413

[0061] elastic band 42

[0062] Vertical drive component 5

[0063] Extended bump 51

[0064] 511 bump body

[0065] 512 ball bearings

[0066] 513 pits

[0067] Downward component 52

[0068] Upper support ring 521

[0069] 522 Spiral Handle

[0070] Controller 523

[0071] Screw 524

[0072] Support component 53

[0073] Lower support ring 531

[0074] Support rod 532

[0075] Elastic component 533

[0076] 300-axis displacement stage

[0077] Visual acquisition device 400

[0078] X-axis vision acquisition component 401

[0079] Y-direction visual acquisition component 402

[0080] Probe 500

[0081] Bottom surface 501

[0082] Suspension structure 600

[0083] Central circular surface 601 Detailed Implementation

[0084] The present invention will be further illustrated by way of embodiments below, but the present invention is not limited to the scope of the embodiments described herein.

[0085] Figure 1 and Figure 2 The diagram shows the structure of the probe assembly system of this utility model. The probe assembly system includes an installation platform 100, a probe assembly suspension clamp 200, and a three-axis displacement stage 300. The probe assembly suspension clamp 200 is fixed on the installation platform 100. The probe assembly suspension clamp 200 is used to vertically suspend the probe 500 and can press the probe 500 vertically downward. The three-axis displacement stage 300 is located below the probe assembly suspension clamp 200. The side of the three-axis displacement stage 300 facing the probe assembly suspension clamp 200 is used to fix the suspension structure 600. The suspension structure 600 is placed horizontally on the three-axis displacement stage 300.

[0086] The assembled probe 500 needs to be vertically fixed at the center of the suspension structure 600. When the probe 500 is suspended above the suspension structure 600, the probe assembly and suspension clamp 200 keeps the probe 500 vertical, while the three-axis displacement stage 300 moves so that the center point of the central circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 are vertically aligned and maintained at a preset distance. Finally, the probe assembly and suspension clamp 200 presses the probe 500 vertically downward, so that the bottom end surface 501 of the probe 500 contacts and adheres to the central circular surface 601 of the suspension structure 600, thus fixing the probe 500 and the suspension structure 600.

[0087] like Figures 3 to 7 As shown, the probe assembly suspension fixture 200 includes a mounting base 1, a vertical mounting plate 2, a vertical sliding assembly 3, a clamping member 4, and a vertical drive assembly 5. The mounting base 1 is fixed on the mounting platform 100 and has a vertically arranged vertical mounting surface 11. The vertical mounting plate 2 is fixed on the vertical mounting surface 11 of the mounting base 1. The vertical sliding assembly 3 is mounted on the vertical mounting plate 2 and can slide vertically along the vertical mounting plate 2. A horizontally arranged horizontal mounting surface 31 is provided below the vertical sliding assembly 3. The clamping member 4 is fixed on the horizontal mounting surface 31 and is used to clamp the probe 500, keeping the probe 500 in a vertical state. The vertical drive assembly 5 is connected to the vertical mounting plate 2 and the vertical sliding assembly 3, and drives the vertical sliding assembly 3 to slide vertically relative to the vertical mounting plate 2.

[0088] The clamping member 4 of the probe assembly suspension clamp 200 can clamp the probe 500, keeping it vertical during suspension. Meanwhile, the vertical drive assembly 5 can drive the vertical sliding assembly 3 to slide vertically relative to the vertical mounting plate 2, thereby pressing the probe 500 vertically downwards. This causes the bottom end face 501 of the probe 500 to contact and adhere to the central circular surface 601 of the suspension structure 600, thus fixing the probe 500 and the suspension structure 600. After assembly, the bottom end face 501 of the probe 500 coincides with and adheres to the central circular surface 601 of the suspension structure 600, and the probe 500 is perpendicular to the suspension structure 600.

[0089] The probe assembly suspension clamp 200 ensures that the probe 500 remains vertical when suspended and that the probe 500 is pressed vertically during the pressing process, thereby ensuring the assembly accuracy of the probe 500 and the suspension structure 600.

[0090] like Figure 4 As shown, the vertical sliding assembly 3 includes a vertical sliding plate 32, a horizontal extension plate 33, and a transition plate 34. The vertical sliding plate 32 cooperates with the vertical mounting plate 2 and can slide vertically along the vertical mounting plate 2. The horizontal extension plate 33 is horizontally arranged and fixed on the surface of the vertical sliding plate 32 away from the vertical mounting plate 2. The upper end of the transition plate 34 is fixed on the horizontal extension plate 33, and the horizontal mounting surface 31 is formed on the lower surface of the transition plate 34.

[0091] The combination of the vertical sliding plate 32, the horizontal extension plate 33, and the adapter plate 34 enables three-directional switching, allowing the assembled vertical sliding assembly 3 to slide vertically along the vertical mounting plate 2 while conveniently and quickly forming the horizontal mounting surface 31 for fixing the clamping component 4. The vertical sliding plate 32, the horizontal extension plate 33, and the adapter plate 34 are detachably connected, and components of different sizes can be replaced according to actual installation needs to adapt to different installation requirements.

[0092] like Figure 4 As shown, the vertical sliding assembly 3 also includes multiple ball bearing guides 35. The ball bearing guides 35 are vertically arranged and positioned between the vertical sliding plate 32 and the vertical mounting plate 2. The inner and outer rails of the ball bearing guides 35 are fixed to the vertical sliding plate 32 and the vertical mounting plate 2, respectively. The arrangement of the ball bearing guides 35 creates a stable sliding guide structure between the vertical sliding plate 32 and the vertical mounting plate 2, restricting the sliding direction of the vertical sliding plate 32 so that it can only slide vertically. In other embodiments, other sliding guide structures can also be provided to restrict the sliding direction of the vertical sliding plate 32.

[0093] like Figure 4As shown, the vertical drive assembly 5 is connected to the vertical mounting plate 2 and the vertical sliding plate 32. The vertical drive assembly 5 drives the vertical sliding plate 32 to slide vertically relative to the vertical mounting plate 2, thereby driving the vertical sliding assembly 3 and the clamping member 4 to slide vertically as a whole, so that the probe 500 fixed on the clamping member 4 can be pressed vertically downward.

[0094] Specifically, the vertical drive assembly 5 includes an extending protrusion 51, a pressing assembly 52, and a support assembly 53. The extending protrusion 51 is fixed to the side of the vertical sliding plate 32. The pressing assembly 52 is installed on the side of the vertical mounting plate 2, located above the extending protrusion 51, with its end abutting against the extending protrusion 51. The pressing assembly 52 can push the extending protrusion 51 to move vertically downward. The support assembly 53 is installed on the side of the vertical mounting plate 2, located below the extending protrusion 51, with its end abutting against the extending protrusion 51. The support assembly 53 always applies an upward thrust to the extending protrusion 51.

[0095] When the pressing component 52 is not in operation, the support component 53 below the extension protrusion 51 applies an upward pushing force. The extension protrusion 51 is pressed against the pressing component 52 and the support component 53 from above and below, so that the position of the extension protrusion 51 remains unchanged. The position of the vertical sliding plate 32 fixed to the extension protrusion 51 also remains unchanged. That is, the overall position of the vertical sliding component 3, the clamping component 4, and the probe 500 remains unchanged.

[0096] When the probe 500 needs to be pressed down, the pressing component 52 applies downward pressure to the extension protrusion 51, causing the extension protrusion 51 to move vertically downward. The support component 53 is compressed downward accordingly, so that the position of the vertical sliding plate 32 also slides vertically downward. That is, the vertical sliding component 3, the clamping member 4, and the probe 500 move downward as a whole.

[0097] A specific structure of the pressure-down assembly 52 is as follows: Figure 4 As shown. The pressing assembly 52 includes an upper support ring 521 and a screw rod 522. The upper support ring 521 is fixed to the side of the vertical mounting plate 2 and is located above the extension protrusion 51. The center hole of the upper support ring 521 is vertically arranged. The handle 523 of the screw rod 522 is fixed to the upper support ring 521. The screw 524 of the screw rod 522 passes through the center hole of the upper support ring 521, and the end of the screw 524 abuts against the extension protrusion 51. When the handle 523 of the screw rod 522 rotates, the screw 524 can move axially along the center hole of the upper support ring 521.

[0098] The handle 523 and upper support ring 521 of the spiral lever 522 are fixed to the side of the vertical mounting plate 2. When it is necessary to press the extension protrusion 51 vertically downward, rotate the handle 523 of the spiral lever 522 to move the screw 524 of the spiral lever 522 downward, so that the extension protrusion 51 can be pressed down, thereby causing the position of the vertical sliding plate 32 to slide vertically downward as well, that is, the overall position of the vertical sliding assembly 3, the clamping member 4, and the probe 500 moves downward.

[0099] In other embodiments, the pressing component 52 may also be other structures that can achieve the pressing down of the extended protrusion 51.

[0100] A specific structure of the support component 53 is as follows: Figure 4 As shown. The support assembly 53 includes a lower support ring 531, a support rod 532, and an elastic element 533. The lower support ring 531 is fixed to the side of the vertical mounting plate 2 and is located below the extension protrusion 51. The central hole of the lower support ring 531 is vertically arranged. The support rod 532 passes through the central hole of the lower support ring 531 and can move along the axial direction of the lower support ring 531. The end of the support rod 532 abuts against the extension protrusion 51. The elastic element 533 connects the lower support ring 531 and the support rod 532, and the elastic element 533 always applies an upward thrust to the support rod 532.

[0101] The elastic element 533 always applies an upward thrust to the support rod 532, so that the support rod 532 always presses against the extension protrusion 51, and the extension protrusion 51 can always remain in contact with the pressing component 52.

[0102] In other embodiments, the support component 53 may also be other structures that can support the extension protrusion 51.

[0103] like Figure 4 and Figure 5 As shown, the extended protrusion 51 includes a protrusion body 511 and two balls 512. The protrusion body 511 is fixed to the vertical sliding plate 32. The surface of the protrusion body 511 facing the pressing component 52 and the support component 53 is provided with a recess 513. The balls 512 are placed in the recess 513, and the highest point of the balls 512 protrudes to the surface of the protrusion body 511. The pressing component 52 and the support component 53 abut against the balls 512.

[0104] The shape and size of the recess 513 match the ball 512, ensuring that the ball 512 can be stably placed in the recess 513. The ball 512 is made of wear-resistant material with a smooth surface, which greatly reduces the friction between the pressing component 52, the supporting component 53 and the ball 512, making the vertical force between the pressing component 52, the supporting component 53 and the ball 512 the main force. This ensures the accuracy of the vertical movement transmission between the pressing component 52, the supporting component 53 and the extension protrusion 51, and prevents any jamming.

[0105] like Figure 4 , Figures 6 to 7 As shown, the clamping member 4 includes a clamping block 41 and an elastic band 42. The clamping block 41 is fixed on the horizontal mounting surface 31. The clamping block 41 has a vertically extending positioning groove 411. The bottom surface 412 of the positioning groove 411 can completely fit with the probe 500, so that the probe 500 is placed vertically. The clamping block 41 has a horizontally penetrating limiting through hole 413. One end of the limiting through hole 413 extends into the positioning groove 411. The elastic band 42 passes through the limiting through hole 413 and can be sleeved on the probe 500 located in the positioning groove 411. The elastic band 42 pulls the probe 500 tight, so that the probe 500 is close to the bottom surface 412 of the positioning groove 411.

[0106] When the elastic band 42 tightens the probe 500, the probe 500 adheres tightly to the bottom surface 412 of the positioning groove 411, and the probe 500 remains vertical. The above method of fixing the probe 500 is simple, easy to disassemble, and provides accurate positioning. The elastic band 42 has appropriate elasticity, which allows it to apply suitable pressure to the probe 500 without damaging it, while ensuring that the probe 500 is firmly attached to the bottom surface 412 of the positioning groove 411.

[0107] like Figure 3 As shown, the mounting base 1 includes a support pad 12, a suspension merging plate 13, and two suspension arms 14. The support pad 12 is used to fix it on the mounting platform 100. The suspension merging plate 13 is arranged vertically. One end of the suspension arm 14 is fixed to the support pad 12, and the other end of the suspension arm 14 is fixed to the suspension merging plate 13. The side of the suspension merging plate 13 away from the suspension arm 14 forms a vertical mounting surface 11.

[0108] The support pad 12 serves as a base, ensuring the overall stability of the probe assembly suspension clamp 200. The vertical mounting surface 11 of the suspension merging plate 13 is used to fix the vertical mounting plate 2. Two suspension arms 14 connect the support pad 12 and the suspension merging plate 13, forming a hollow space between them, reducing the overall weight of the mounting base 1. The support pad 12, suspension merging plate 13, and suspension arms 14 are detachably connected, allowing for the replacement of components of different sizes to meet various installation requirements.

[0109] like Figure 1 and Figure 2 As shown, when the probe assembly suspension fixture 200 is used in the probe assembly system, the mounting base 1 is fixed on the mounting platform 100; the three-axis displacement stage 300 is located below the clamping member 4, and the side of the three-axis displacement stage 300 facing the clamping member 4 is used to fix the suspension structure 600. The suspension structure 600 is placed horizontally on the three-axis displacement stage 300; the three-axis displacement stage 300 can move horizontally or vertically so that the center point of the central circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 are aligned in the vertical direction and maintain a preset distance.

[0110] During assembly, clamping member 4 clamps probe 500, keeping probe 500 in a vertical position; suspension structure 600 is placed horizontally on three-axis displacement stage 300, and three-axis displacement stage 300 moves horizontally or vertically, so that the center point of the central circular surface 601 of suspension structure 600 and the center point of the bottom end surface 501 of probe 500 are aligned in the vertical direction and maintained at a preset distance; vertical drive component 5 can drive vertical sliding component 3 to slide vertically relative to vertical mounting plate 2, thereby pressing probe 500 vertically downward, so that the bottom end surface 501 of probe 500 contacts and adheres to the central circular surface 601 of suspension structure 600, thereby fixing probe 500 and suspension structure 600.

[0111] When the probe assembly suspension fixture 200 is used in the probe assembly system, the clamping component 4 keeps the probe 500 in a vertical position when suspended. The vertical sliding component 3 and the vertical driving component 5 ensure that the probe 500 can be pressed vertically during the pressing process. In addition, the position of the suspension structure 600 can be adjusted by the three-axis displacement stage 300, so as to achieve precise installation between the probe 500 and the suspension structure 600, so as to meet the requirements of micro and nano measurement technology for measurement probes.

[0112] The probe assembly system also includes a control module, which is signal-connected to the three-axis displacement stage 300. The control module is used to control the horizontal or vertical movement of the three-axis displacement stage 300. Controlling the movement of the three-axis displacement stage 300 via the control module is more precise and faster than manual adjustment.

[0113] The probe assembly system also includes a vision acquisition device 400, which is signal-connected to the control module. The vision acquisition device 400 is used to acquire relative position images of the central circular surface 601 of the suspension structure 600 and the bottom end surface 501 of the probe 500. The vision acquisition device 400 is also used to calculate the relative distance between the center point of the central circular surface 601 of the suspension structure 600 and the center point of the bottom end surface 501 of the probe 500 based on the relative position images. The vision acquisition device 400 is also used to transmit the relative distance to the control module. The control module moves the three-axis displacement stage 300 according to the relative distance until the central circular surface 601 of the suspension structure 600 and the bottom end surface 501 of the probe 500 overlap in the vertical direction and maintain a preset distance.

[0114] The visual acquisition device 400 monitors and calculates in real time the relative distance between the central circular surface 601 of the suspension structure 600 and the bottom end surface 501 of the probe 500, and moves the three-axis displacement stage 300 according to the calculated relative distance, so that the alignment between the central circular surface 601 of the suspension structure 600 and the bottom end surface 501 of the probe 500 can be achieved automatically, improving the alignment accuracy and alignment speed.

[0115] The visual acquisition device 400 includes an X-axis visual acquisition component 401 and a Y-axis visual acquisition component 402. The lens shooting directions of the X-axis visual acquisition component 401 and the Y-axis visual acquisition component 402 are both set horizontally, and the lens shooting directions of the X-axis visual acquisition component 401 and the Y-axis visual acquisition component 402 are perpendicular to each other.

[0116] Through the lenses of the horizontally perpendicular X-axis visual acquisition component 401 and Y-axis visual acquisition component 402, the relative position images of the central circular surface 601 of the suspension structure 600 and the bottom surface 501 of the probe 500 can be acquired from two angles, making image acquisition more accurate.

[0117] This utility model is not limited to the above-described embodiments. Any changes in its shape or structure fall within the protection scope of this utility model. The protection scope of this utility model is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of this utility model, but all such changes and modifications fall within the protection scope of this utility model.

Claims

1. A probe assembly suspension fixture, characterized in that, include: Mounting base, the mounting base is used to fix it on the mounting platform, the mounting base is provided with a vertically arranged vertical mounting surface; A vertical mounting plate, which is fixed to the vertical mounting surface of the mounting base; A vertical sliding assembly is mounted on the vertical mounting plate and can slide vertically along the vertical mounting plate; a horizontally arranged horizontal mounting surface is provided below the vertical sliding assembly. A clamping member is fixed on the horizontal mounting surface and is used to clamp the probe to keep the probe in a vertical position. A vertical drive assembly is connected to the vertical mounting plate and the vertical sliding assembly, and the vertical drive assembly drives the vertical sliding assembly to slide vertically relative to the vertical mounting plate.

2. The probe assembly suspension clamp of claim 1, wherein: The vertical sliding component includes: A vertical sliding plate, which cooperates with the vertical mounting plate; At least one ball bearing guide rail is provided, the ball bearing guide rail is arranged vertically, the ball bearing guide rail is disposed between the vertical sliding plate and the vertical mounting plate, and the inner rail and outer rail of the ball bearing guide rail are respectively fixed between the vertical sliding plate and the vertical mounting plate.

3. The probe card assembly holding fixture according to claim 1 or 2, wherein: The vertical sliding assembly includes a vertical sliding plate that cooperates with the vertical mounting plate. The vertical driving assembly is connected to the vertical mounting plate and the vertical sliding plate, and the vertical driving assembly drives the vertical sliding plate to slide vertically relative to the vertical mounting plate.

4. The probe card assembly holding fixture of claim 3, wherein, The vertical drive component includes: An extension protrusion is fixed to the side of the vertical sliding plate; A pressing component is mounted on the side of the vertical mounting plate, located above the extending protrusion, with its end abutting against the extending protrusion, and capable of pushing the extending protrusion to move vertically downward. A support assembly is mounted on the side of the vertical mounting plate, located below the extension protrusion, with its end abutting against the extension protrusion, and the support assembly always applying an upward thrust to the extension protrusion.

5. The probe assembly suspension clamp of claim 4, wherein, The pressing component includes; An upper support ring is fixed to the side of the vertical mounting plate and is located above the extending protrusion. The center hole of the upper support ring is vertically arranged. A spiral lever, the handle of which is fixed to the upper support ring, the screw of which passes through the central hole of the upper support ring, and the end of the screw abuts against the extension protrusion; when the handle of the spiral lever is rotated, the screw can move axially along the central hole of the upper support ring.

6. The probe card assembly holding fixture of claim 4, wherein, The support components include: The lower support ring is fixed to the side of the vertical mounting plate and is located below the extending protrusion. The center hole of the lower support ring is vertically arranged. A support rod passes through the central hole of the lower support ring and is movable along the axial direction of the lower support ring, with the end of the support rod abutting against the extension protrusion; An elastic element is connected to the lower support ring and the support rod, and the elastic element always applies an upward thrust to the support rod.

7. The probe card assembly holding fixture of claim 4, wherein, The extended bump includes: The protrusion body is fixed to the vertical sliding plate, and the surface of the protrusion body facing the pressing component and / or the support component is provided with a recess; A ball bearing is placed in the recess, with the highest point of the ball bearing protruding to the surface of the protrusion body, and the pressing component and / or support component abutting against the ball bearing.

8. The probe assembly suspension fixture as described in claim 1, characterized in that, The vertical sliding component includes: A vertical sliding plate, which cooperates with the vertical mounting plate, and the vertical sliding plate can slide vertically along the vertical mounting plate; A horizontal extension plate, wherein the horizontal extension plate is horizontally arranged and fixed to the surface of the vertical sliding plate away from the vertical mounting plate; An adapter plate, the upper end of which is fixed to the horizontal extension plate, and the horizontal mounting surface is formed on the lower surface of the adapter plate.

9. The probe assembly suspension fixture as described in claim 1, characterized in that, The clamping element includes: A clamping block is fixed on the horizontal mounting surface and has a vertically extending positioning groove. The bottom surface of the positioning groove can completely fit with the probe, so that the probe is placed vertically. The clamping block has a horizontally penetrating limiting through hole, one end of which extends into the positioning groove. An elastic band passes through the limiting through hole and can be fitted onto the probe located in the positioning groove; the elastic band pulls the probe taut, so that the probe is pressed against the bottom surface of the positioning groove.

10. The probe card assembly holding fixture of claim 1, wherein, The mounting base includes: A support pad, which is used to fix the mounting platform; A suspension merging plate, wherein the suspension merging plate is vertically arranged; At least two suspension arms, one end of which is fixed to the support pad, and the other end of which is fixed to the suspension merging plate. The side of the suspension merging plate away from the suspension arm forms the vertical mounting surface.

11. A probe assembly system characterized by, include: Installation platform, A probe assembly suspension fixture, as described in any one of claims 1 to 10, wherein the mounting base of the probe assembly suspension fixture is fixed on the mounting platform; A three-axis displacement stage is located below the clamping member of the probe assembly suspension fixture. The side of the three-axis displacement stage facing the clamping member is used to fix the suspension structure, which is placed horizontally on the three-axis displacement stage. The three-axis displacement stage can move horizontally or vertically so that the center point of the central circular surface of the suspension structure and the center point of the bottom end surface of the probe are aligned in the vertical direction and maintained at a preset distance.

12. The probe assembly system of claim 11, wherein, The probe assembly system also includes a vision acquisition device, which is signal-connected to the triaxial displacement stage; the vision acquisition device is used to acquire images of the relative positions of the central circular surface of the suspension structure and the bottom surface of the probe.

13. The probe assembly system of claim 12, wherein, The visual acquisition device includes an X-axis visual acquisition component and a Y-axis visual acquisition component. The lens shooting directions of the X-axis visual acquisition component and the Y-axis visual acquisition component are both set horizontally, and the lens shooting directions of the X-axis visual acquisition component and the Y-axis visual acquisition component are perpendicular to each other.

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