A mask mounting auxiliary fixture

Abstract

This utility model relates to the field of semiconductor integrated circuit design and manufacturing, and discloses a mask mounting auxiliary fixture, including a first support plate and a second support plate. The first support plate and the second support plate are both placed on a marble platform on the highX side of a lithography machine. The first support plate and the second support plate are connected to each other and surround a metal clip on the marble platform to form a mounting groove for placing the mask. The outer end of the first support plate along the width direction is connected to a positioning plate with replaceable width through a connecting component. The positioning plate can be replaced according to the size of different masks to ensure that masks of different specifications can be accurately fitted with the fixture during placement, thereby achieving precise positioning of the mask on the marble platform on the highX side of the lithography machine. This solves the problem that small masks produced by the lithography machine cannot be mounted by the loader and are inaccurately positioned.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor integrated circuit design and manufacturing, and specifically to an auxiliary fixture for mask mounting. Background Technology

[0002] Photomasks are the core masking tools in the fabrication of microelectronic chips. They transfer chip design patterns onto semiconductor silicon wafers using photolithography technology, and are a crucial step in realizing chip patterning. Photolithography machines, as core manufacturing equipment in industries such as semiconductors and flat panel displays, primarily rely on high-precision optical imaging technology to accurately transfer patterns from photomasks to the surface of silicon wafers, ultimately forming microelectronic devices with specific functions. The processing precision directly determines the chip's performance and integration density.

[0003] In actual production, for small-sized photomasks ranging from 4 to 9 inches, the built-in automatic loader of existing lithography machines cannot achieve automatic loader loading due to compatibility limitations, requiring manual operation to complete the loading process. However, manual loading has significant technical drawbacks: due to the lack of precise positioning references, operators find it difficult to achieve high-precision alignment of the photomask on the lithography machine platform. This can easily lead to relative positional deviations between the photomask and the lithography machine platform exceeding the allowable range of the process, resulting in problems such as exposure pattern shift and abnormal linewidth accuracy. Ultimately, this causes significant fluctuations in various product parameters (such as overlay accuracy and pattern size deviation), severely affecting the chip processing quality and yield. Utility Model Content

[0004] The purpose of this invention is to provide an auxiliary fixture for mounting a photomask. This auxiliary fixture has a replaceable positioning plate connected to the outer end of the first support plate along the width direction via a connecting component. The positioning plate can be replaced according to the size of different photomasks, ensuring that photomasks of different specifications can be accurately fitted to the fixture during placement. This achieves precise positioning of the photomask on the marble platform on the highX side of the lithography machine, solving the problem that small photomasks cannot be mounted by the loader and are inaccurately positioned when the lithography machine is used.

[0005] This utility model is achieved through the following technical solution:

[0006] A mask mounting auxiliary fixture, comprising:

[0007] A first support plate and a second support plate are placed on a marble platform on the highX side of the lithography machine. The first support plate and the second support plate are connected to each other and enclosed by metal strips on the marble platform to form a placement groove for placing the mask.

[0008] The first support plate has a width-replaceable positioning plate connected to its outer end along the width direction via a connecting assembly.

[0009] In this solution, a placement slot for the photomask is formed by the first and second support plates and the metal clips on the marble platform of the lithography machine, providing a stable placement space for the photomask. Simultaneously, a width-replaceable positioning plate connected to the outer end of the first support plate via a connecting component allows for flexible replacement of the appropriate positioning plate according to different photomask sizes. This ensures that photomasks of different specifications can be precisely fitted to the fixture during placement, thereby achieving accurate positioning of the photomask on the highX side marble platform of the lithography machine. This solves the problem of inaccurate positioning caused by manual operation for small-sized photomasks that cannot be loaded via the lithography machine's built-in loader, ensuring the stability and accuracy of the photomask loading process and improving the product quality and yield of lithography processing.

[0010] As a further technical solution for the upper plate auxiliary fixture, the inner walls of the first support plate and the second support plate are connected with a plurality of evenly distributed arc-shaped support protrusions. When the mask is placed in the placement groove, the arc-shaped structure forms point contact with the surface of the mask, which can not only provide stable support for the mask and prevent the mask from deforming or being damaged due to uneven force, but also reduce the contact area between the support structure and the mask, thereby reducing the risk of obscuring or abrading the pattern on the surface of the mask.

[0011] As a further technical solution for the upper auxiliary fixture, the upper end face of the positioning plate is provided with a pair of auxiliary blocks, which can provide additional limits and guidance for the placement of the mask in the placement slot. When the mask is placed, the pair of auxiliary blocks can constrain the mask from the side to prevent the mask from shifting or shaking laterally during placement.

[0012] As a further technical solution for the upper auxiliary fixture, the connecting component includes a first positioning protrusion connected to the outer end of the positioning plate. A first positioning groove is provided on the wall surface of the first support plate opposite to the outer end of the positioning plate. The first positioning groove is matched and connected with the first positioning protrusion to provide a precise positioning reference for the assembly of the positioning plate and the first support plate, ensuring that the two can be quickly aligned and stably joined when connected.

[0013] As a further technical solution for the upper auxiliary fixture, the positioning plate is also connected to an adsorption assembly. The adsorption assembly includes a vacuum channel disposed inside the positioning plate and a second adsorption disk disposed on the first positioning protrusion. The vacuum channel communicates with the second adsorption disk and evacuates the second adsorption disk. By utilizing the vacuum channel inside the positioning plate to communicate with the second adsorption disk on the first positioning protrusion and evacuate the vacuum, the second adsorption disk can be tightly adsorbed at the corresponding position of the first support plate, further enhancing the stability of the connection between the positioning plate and the first support plate. This prevents relative displacement between the two due to external force or operational vibration after matching and connection, ensuring the accurate relative position of the positioning plate and the first support plate. At the same time, this vacuum adsorption method can improve the connection reliability without adding an additional rigid connection structure, and facilitates quick separation of the two by releasing the vacuum when the positioning plate needs to be replaced.

[0014] As a further technical solution for the upper plate auxiliary fixture, the positioning plate is also provided with a first adsorption plate for adsorbing with the marble platform. The vacuum channel is connected to the first adsorption plate and a vacuum is drawn on the first adsorption plate, so that the first adsorption plate can be tightly adsorbed on the marble platform on the highX side of the lithography machine, thereby fixing the positioning plate firmly on the platform and preventing the positioning plate from shifting or shaking due to external force interference during operation, ensuring the accurate relative position between the positioning plate and the marble platform.

[0015] As a further technical solution for the upper plate auxiliary fixture, the second support plate includes a plurality of first blocks and second blocks. The plurality of first blocks are connected in sequence to form a whole through a first connecting part. One end of the first block forming the whole is connected to the first support plate through a second connecting part, and the other end of the first block forming the whole is connected to the second block through a third connecting part. This allows the length of the second support plate to be flexibly adjusted according to the size requirements of the mask by increasing or decreasing the number of first blocks, thereby adapting to the placement requirements of maskes of different specifications. At the same time, this modular splicing structure facilitates production and assembly. When a certain block is damaged, it can be replaced individually, reducing maintenance costs.

[0016] As a further technical solution for the upper auxiliary fixture, the first connecting part includes a second positioning protrusion and a second positioning groove. The second positioning protrusion is connected to one side of the first segment, and the second positioning groove is opened on the other side of the first segment. The second positioning protrusion and the second positioning groove between adjacent first segments match each other to ensure that adjacent first segments can be quickly aligned and tightly connected during the splicing process.

[0017] As a further technical solution for the upper auxiliary fixture, the second connecting part includes a third positioning groove disposed on the first support plate, and a second positioning protrusion on the integral first segment is matched and connected with the third positioning groove to ensure that the two can be quickly aligned and tightly joined during assembly, avoiding relative displacement or gap between the first support plate and the second support plate due to connection deviation.

[0018] As a further technical solution for the upper auxiliary fixture, the third connecting part includes a third positioning protrusion disposed on the second section block, and the second positioning groove on the integral first section block is matched and connected with the third positioning protrusion to ensure that the two can be quickly aligned and tightly joined during assembly.

[0019] In summary, compared with the prior art, this utility model has the following advantages and beneficial effects: This utility model forms a placement groove by enclosing the first and second support plates with the metal strip on the marble platform. Combined with the replaceable width positioning plate on the outer end of the first support plate, it can flexibly adapt to small-sized photomasks of different sizes, solving the problem that the built-in loader of existing lithography machines cannot adapt to small-sized photomasks and that manual placement positioning is inaccurate. The arc-shaped support protrusions on the inner walls of the first and second support plates of this utility model support the photomask in a point-contact manner, reducing the contact area while ensuring stable support and preventing photomask deformation or surface damage. The matching structure of the positioning protrusions and positioning grooves of the connecting components, as well as the vacuum adsorption design of the adsorption components, enhance the stability and positioning accuracy of the connections between the components, prevent displacement during operation, and facilitate disassembly and assembly. The second support plate of this utility model adopts a modular splicing structure of the first and second sections, and the length can be adjusted by increasing or decreasing the number of first sections, further improving the adaptability to photomasks of different sizes and reducing maintenance costs. Attached Figure Description

[0020] The accompanying drawings, which are included to provide a further understanding of the embodiments of the present invention and form part of this application, do not constitute a limitation thereof. In the drawings:

[0021] Figure 1 This is a three-dimensional structural schematic diagram of Embodiment 1 of the present invention;

[0022] Figure 2 This is a top view of the structure provided in Embodiment 1 of the present utility model;

[0023] Figure 3 for Figure 2 A cross-sectional view of the structure marked AA.

[0024] Figure 4 This is a schematic diagram of the rear view structure provided in Embodiment 1 of the present utility model;

[0025] Figure 5 This is a schematic diagram of the structure of the first support plate and the second support plate provided in Embodiment 1;

[0026] Figure 6 This is a schematic diagram of the positioning plate provided in Example 1;

[0027] Figure 7 This is a three-dimensional structural schematic diagram of Embodiment 2 of the present invention;

[0028] Figure 8 This is a schematic diagram of the positioning plate provided in Example 2;

[0029] Figure 9 This is a schematic diagram of the other end face structure of the positioning plate provided in Embodiment 2;

[0030] Figure 10 This is a schematic diagram of the first support plate structure provided in Embodiment 2;

[0031] Figure 11 This is a schematic diagram of the first block structure provided in Example 2;

[0032] Figure 12 This is a schematic diagram of the second block structure provided in Example 2.

[0033] The attached diagram shows the markings and corresponding component names:

[0034] 1-First support plate, 2-Positioning plate, 3-Second support plate, 4-Supporting protrusion, 5-Threaded hole, 6-Auxiliary stop block, 7-Adsorption assembly, 8-Vacuum channel, 9-First adsorption plate, 10-First positioning protrusion, 11-Second adsorption plate, 12-First positioning groove, 14-First segment, 15-Second segment, 16-Second positioning protrusion, 17-Second positioning groove, 18-Third positioning groove, 19-Third positioning protrusion. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of this utility model are only used to explain this utility model and are not intended to limit this utility model.

[0036] Example 1

[0037] This embodiment 1 provides an auxiliary fixture for mounting a mask, such as... Figures 1-6 As shown, it includes a first support plate 1, a second support plate 3 and a positioning plate 2, all of which are made of 6061 aluminum alloy.

[0038] In this system, both the first support plate 1 and the second support plate 3 are placed on the marble platform on the highX side of the lithography machine. The first support plate 1 and the second support plate 3 are connected to each other and enclosed with the metal clips on the marble platform to form a placement groove for placing the photomask. The inner walls of the first support plate and the second support plate in the placement groove are connected with multiple evenly distributed arc-shaped support protrusions 4, which can reduce the contact area between the support structure and the photomask when the photomask is placed in the placement groove, thereby reducing the risk of obscuring or abrading the pattern on the surface of the photomask. In addition, in some other embodiments, three φ6mm threaded holes 5 are also opened above the first support plate 1 to make handles for convenient subsequent operations.

[0039] Meanwhile, a positioning plate 2 with a replaceable width is connected to the outer end of the first support plate 1 along the width direction via a connecting component. Specifically, the connecting component includes a first positioning protrusion 10, which is connected to the outer end of the positioning plate 2. A first positioning groove 12 is connected to the wall surface of the first support plate 1 opposite to the outer end of the positioning plate 2. The first positioning protrusion 10 and the first positioning groove 12 cooperate to achieve precise connection and installation positioning of the positioning plate 2 and the first support plate 1, and ensure that the two can be quickly aligned and stably joined when connected. In actual use, since the positioning plate 2 can be quickly replaced, a positioning plate 2 with a matching width can be replaced according to the size of different photomasks, so that the width of the upper plate auxiliary fixture can be adjusted, and production can be met by simply changing the product placement position.

[0040] In this embodiment, to prevent the mask from shifting or shaking during placement, the upper surface of the positioning plate 2 is provided with a pair of auxiliary blocks 6 to assist in positioning the mask and prevent shifting during placement. The positioning plate (2) is also provided with an adsorption component 7, which includes a vacuum channel 8 inside the positioning plate 2, a second adsorption disk 11 and a first adsorption disk 9 for adsorption with the marble platform respectively provided on the first positioning protrusion 10. The vacuum channel 8 is connected to the two adsorption disks. After vacuuming, the connection stability between the positioning plate 2 and the first support plate 1 and the marble platform can be enhanced. At the same time, this vacuum adsorption method can improve the connection reliability without adding an additional rigid connection structure, and it is convenient to quickly separate the two by releasing the vacuum when the positioning plate needs to be replaced.

[0041] Example 2

[0042] To better adapt to photomasks of different sizes, this embodiment 2 provides another photomask mounting auxiliary fixture based on embodiment 1, such as... Figures 7-12As shown, in this embodiment, the second support plate 3 includes a plurality of first blocks 14 and second blocks 15. The plurality of first blocks 14 are connected in sequence to form a whole through a first connecting part. One end of the first block 14 connected to the whole is connected to the first support plate 1 through the second connecting part, and the other end is connected to the second block 15 through the third connecting part. In this way, the length of the second support plate 3 can be adjusted to adapt to different sizes of mask plates.

[0043] Specifically, please refer to Figures 8-12 As shown, the first connecting part consists of a second positioning protrusion 16 and a second positioning groove 17. The second positioning protrusion 16 is connected to one side of the first segment 14, and the second positioning groove 17 is opened on the other side of the first segment 14. Adjacent first segments 14 are connected to each other through the second positioning protrusion 16 and the second positioning groove 17 to ensure the accuracy and stability of the splicing of the first segments.

[0044] The second connecting part includes a third positioning groove 18 disposed on the first support plate 1. The second positioning protrusion 16 on the first segment 14 forming the whole is matched and connected with the third positioning groove 18 to realize a stable connection between the first support plate 1 and the first segment 14 as a whole.

[0045] The third connecting part includes a third positioning protrusion 19 disposed on the second segment 15, and the second positioning groove 17 on the first segment 14 forming the whole is matched and connected with the third positioning protrusion 19 to complete the overall connection between the second segment 15 and the first segment 14.

[0046] Usage Procedure: First, select a positioning plate 2 with a suitable width according to the size of the mask to be applied. Connect the positioning plate 2 to the first support plate 1 using the connecting assembly, that is, let the first positioning protrusion 10 on the outer end of the positioning plate 2 embed into the first positioning groove 12 on the corresponding wall surface of the first support plate 1. Next, adjust the length of the second support plate 3 according to the size of the mask. Then, sequentially splice several first sections 14 through the first connecting part (the second positioning protrusion 16 of adjacent first sections 14 matches and connects with the second positioning groove 17). Then, connect one end of the spliced ​​first section 14 to the first support plate 1 through the second connecting part (the second positioning protrusion 16 of the first section 14 embeds into the third positioning groove 18 of the first support plate 1). Connect the other end of the first section 14 to the second section 15 through the third connecting part (the third positioning protrusion 16 of the second section 15 embeds into the third positioning groove 18 of the first support plate 1). 9. Embed the second positioning groove 17 of the first section block 14 to complete the assembly of the second support plate 3; then, place the assembled first support plate 1 and second support plate 3 on the marble platform on the highX side of the lithography machine, so that it surrounds the metal clips on the platform to form a placement groove. At the same time, activate the adsorption component 7 on the positioning plate 2, and draw a vacuum through the vacuum channel 8 to make it tightly adsorbed to the marble platform, ensuring that the overall positioning of the fixture is stable; then, put the mask into the placement groove, so that it contacts the arc-shaped support protrusions 4 on the inner wall of the first support plate 1 and the second support plate 3, and at the same time, use the paired auxiliary blocks 6 on the upper end face of the positioning plate 2 to limit the movement, ensuring that there is no gap between the mask and the fixture; finally, turn on the vacuum adsorption device of the lithography machine to adsorb the mask. After the adsorption is stable, release the vacuum adsorption of the positioning plate 2, remove the fixture, and complete the mask mounting operation.

[0047] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above description is only a specific embodiment of this utility model and is not intended to limit the scope of protection of this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A mask-on-wafer assist tool, comprising: include: The first support plate (1) and the second support plate (3) are both placed on the marble platform on the highX side of the lithography machine. The first support plate (1) and the second support plate (3) are connected to each other and enclosed with the metal strip on the marble platform to form a placement groove for placing the mask. The first support plate (1) is connected to a positioning plate (2) with replaceable width at its outer end along the width direction via a connecting component.

2. The mask-on mask auxiliary jig according to claim 1, wherein The inner walls of the first support plate (1) and the second support plate (3) are connected with a plurality of evenly distributed arc-shaped support protrusions (4).

3. The mask mounting auxiliary fixture according to claim 1, characterized in that, The upper surface of the positioning plate (2) is provided with a pair of auxiliary stops (6).

4. The mask-on mask auxiliary jig according to claim 1, wherein The connecting component includes a first positioning protrusion (10), which is connected to the outer end of the positioning plate (2). A first positioning groove (12) is provided on the wall surface of the first support plate (1) opposite to the outer end of the positioning plate (2), and the first positioning groove (12) is matched and connected to the first positioning protrusion (10).

5. The mask-on mask assist tool of claim 4, wherein, The positioning plate (2) is also connected to an adsorption assembly (7). The adsorption assembly (7) includes a vacuum channel (8) disposed inside the positioning plate (2) and a second adsorption disk (11) disposed on the first positioning protrusion (10). The vacuum channel (8) communicates with the second adsorption disk (11) and evacuates the second adsorption disk (11).

6. The mask-on mask assist tool of claim 5, wherein, The positioning plate (2) is also provided with a first adsorption plate (9) for adsorption with the marble platform. The vacuum channel (8) is connected to the first adsorption plate (9) and evacuates the first adsorption plate (9).

7. The mask-on mask auxiliary jig according to claim 4 or 5, wherein The second support plate (3) includes a plurality of first sections (14) and second sections (15). The plurality of first sections (14) are connected in sequence to form a whole through a first connecting part. One end of the first section (14) forming the whole is connected to the first support plate (1) through a second connecting part, and the other end of the first section (14) forming the whole is connected to the second section (15) through a third connecting part.

8. The mask-on mask assist tool of claim 7, wherein, The first connecting part includes a second positioning protrusion (16) and a second positioning groove (17). The second positioning protrusion (16) is connected to one side of the first segment (14), and the second positioning groove (17) is opened on the other side of the first segment (14). The second positioning protrusion (16) and the second positioning groove (17) between adjacent first segments (14) match each other.

9. The mask-on mask assist tool of claim 8, wherein, The second connecting part includes a third positioning groove (18) disposed on the first support plate (1), and a second positioning protrusion (16) on the integral first block (14) is matched and connected with the third positioning groove (18).

10. The mask-on mask assist tool of claim 9, wherein, The third connecting part includes a third positioning protrusion (19) disposed on the second section (15), and the second positioning groove (17) on the first section (14) forming the whole is matched and connected with the third positioning protrusion (19).

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