A positioning fixture for a coating and developing equipment

Abstract

This utility model discloses a positioning fixture for a coating and developing equipment, including a positioning chamber with four adjustable L-shaped positioning arc plates at its upper end. A support base is fixedly connected to the center of the upper surface of the positioning chamber. The fixture also includes a drive mechanism and a lifting mechanism. The drive mechanism includes a sliding opening, a sliding seat, a sliding handle, a drive shaft, a drive handle, and a sliding cavity. The sliding openings are evenly distributed at the upper end of the positioning chamber, and sliding seats are slidably connected inside each opening. The upper end of the side surface of the sliding seat closest to the center of the positioning chamber is fixedly connected to the end of the adjacent L-shaped positioning arc plate furthest from the center of the positioning chamber via a support column. The drive shaft is rotatably connected inside the positioning chamber. This positioning fixture for coating and developing equipment uses a single motor instead of four electric push rods to achieve the concentric movement of the four L-shaped positioning arc plates and can adjust the overall height of the positioning unit, meeting the wafer positioning and installation requirements of different coating and developing equipment.

Description

Technical Field

[0001] This utility model relates to the technical field of auxiliary equipment for coating and developing equipment, specifically a positioning fixture for coating and developing equipment. Background Technology

[0002] The photoresist coating and developing equipment (Track) is a core supporting equipment in the photolithography process of semiconductor manufacturing. It works closely with the photolithography machine to complete key steps such as photoresist coating, development and baking, which directly affects the accuracy and yield of the photolithography pattern. The positioning fixtures used in the photoresist coating and developing equipment are important equipment to ensure that the wafer can be accurately coated with photoresist.

[0003] In the prior art, patent CN217641263U discloses a positioning fixture for an automatic coating and developing equipment, including a main support, a positioning bracket mounted on the main support, and a positioning mechanism consisting of four push rods spaced at 90° circumferential angles mounted on the positioning bracket. The main support includes four vertical corner strips distributed at the four corner points of a square, with triangular support plates connected to the corners of the vertical corner strips. The positioning bracket includes a wafer outer ring, with support plates spaced at 90° circumferences around the wafer outer ring. The ends of the support plates are provided with triangular clips, and the upper surface of the support plates is provided with positioning upright plates. The wafer outer ring has four through holes along the radial direction of the support plates. The push rod positioning mechanism includes electric push rods, with the output shaft of the electric push rods connected to an L-shaped top plate. The top plate has an arc-shaped bottom plate and an arc-shaped upright plate perpendicular to the edge of the arc-shaped bottom plate. The top plate has a positioning hemisphere on the inner arc surface of the arc-shaped upright plate, and a positioning sensor is connected to the apex of the positioning hemisphere. The electric push rods are connected in parallel.

[0004] There are some problems with the positioning fixture used in this automatic coating and developing equipment. For example, the positioning of the wafer is completed by the cooperation of four electric push rods. The coordination efficiency of the four electric push rods is required to be high, the fault tolerance is low, and the different wear levels of the four electric push rods will increase the positioning error of the wafer, or even damage the wafer and affect the coating work. At the same time, the position of the positioning unit is fixed, which cannot be adapted to the installation requirements of different coating and developing equipment. Utility Model Content

[0005] The technical problem to be solved by this utility model is to overcome the existing defects and provide a positioning fixture for coating and developing equipment. It uses a single motor to replace four electric push rods to realize the centered movement of four L-shaped positioning arc plates and can adjust the overall height of the positioning unit to meet the wafer positioning and installation requirements of different coating and developing equipment. It can effectively solve the problems in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a positioning fixture for a coating and developing equipment, comprising a positioning chamber, four adjustable L-shaped positioning arc plates at the upper end of the positioning chamber, a support base fixedly connected to the center of the upper surface of the positioning chamber, and a driving mechanism and a lifting mechanism.

[0007] Drive mechanism: It includes a sliding opening, a sliding seat, a sliding handle, a drive shaft, a drive handle, and a sliding cavity. The sliding openings are evenly arranged at the upper end of the positioning chamber. The sliding seats are slidably connected inside the sliding openings. The upper end of the side surface of the sliding seat near the center of the positioning chamber is fixedly connected to the end of the adjacent L-shaped positioning arc plate away from the center of the positioning chamber through a support column. The drive shaft is rotatably connected to the inside of the positioning chamber. The upper end of the drive shaft is fixedly connected to the drive handle. The drive handle is provided with symmetrically distributed sliding cavities. The interior of each sliding cavity is slidably connected to the lower end of the vertically adjacent sliding handle. The lower end of each sliding seat is fixedly connected to a connecting column. The interior of each sliding handle is provided with symmetrically distributed sliding grooves. The interior of each sliding groove is slidably connected to the outer surface of the vertically adjacent connecting column.

[0008] Lifting mechanism: It is located at the lower end of the positioning chamber. A cross mounting plate is fixedly connected to the lower end of the lifting mechanism. The interior of the cross mounting plate is provided with evenly distributed mounting holes. A single motor replaces four electric push rods to realize the centered movement of the four L-shaped positioning arc plates. It can also adjust the overall height of the positioning unit to meet the wafer positioning and installation requirements of different coating and developing equipment.

[0009] Furthermore, the driving mechanism also includes a T-shaped groove and a T-shaped block. The T-shaped groove is disposed inside the top wall of the positioning chamber, and the T-shaped blocks are respectively fixedly connected to the middle of the upper surface of the sliding handle. The T-shaped blocks are slidably connected to the inside of the T-shaped groove to provide a limit for the sliding handle and prevent the sliding handle from rotating and causing displacement of the sliding seat.

[0010] Furthermore, a controller is provided on the left side of the positioning chamber. The input terminal of the controller is electrically connected to an external power source to control various electrical appliances.

[0011] Furthermore, the drive mechanism also includes a motor, which is located in the middle of the bottom wall of the positioning chamber. A worm gear is fixedly connected to the rear end of the motor output shaft, and a worm wheel is fixedly connected to the lower end of the outer surface of the drive shaft. The worm wheel meshes with the worm gear. The input end of the motor is electrically connected to the output end of the controller to provide driving force for the rotation of the drive shaft and to achieve self-locking of the drive shaft.

[0012] Furthermore, the lifting mechanism includes an internal threaded cylinder, a screw, a guide cylinder, and a guide rod. The internal threaded cylinder is rotatably connected to the center position of the lower surface of the positioning chamber. The screw is fixedly connected to the center position of the upper surface of the cross mounting plate. The outer surface of the screw is threadedly connected to the inner thread of the internal threaded cylinder. The guide cylinders are evenly fixedly connected to the lower surface of the positioning chamber. Guide rods are fixedly connected to the four corners of the upper surface of the cross mounting plate. The outer surface of each guide rod is slidably connected to the inner surface of the vertically adjacent guide cylinder, thereby realizing the height adjustment of the positioning chamber.

[0013] Furthermore, a rotating ring is rotatably connected to the lower end of the outer surface of the internally threaded cylinder, and a bellows is fixedly connected between the lower surface of the rotating ring and the upper surface of the cross mounting plate. The bellows is sleeved on the outer surface of the screw to protect the screw.

[0014] Furthermore, each of the L-shaped positioning arc plates has a positioning sensor installed in the middle of the side surface near the center of the positioning chamber. The positioning sensors are bidirectionally electrically connected to the controller to provide position information guidance and avoid damaging the wafer.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows: The positioning fixture used in this coating and developing equipment has the following advantages:

[0016] 1. The motor drives the worm gear mechanism to drive the linkage mechanism, thereby realizing the synchronous centering movement of the four L-shaped positioning arc plates. A single motor replaces four electric push rods to realize the centering movement of the four L-shaped positioning arc plates, avoiding the deviation in the synchronous operation of the L-shaped positioning arc plates caused by the different wear levels of the four electric push rods, which would affect the centering accuracy of the wafer.

[0017] 2. The rotation of the internal threaded cylinder, under the action of the fixed screw, allows for the vertical movement of the positioning chamber, thereby adjusting the overall height of the positioning unit to meet the wafer positioning and installation requirements of different coating and developing equipment. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the internal structure of this utility model;

[0020] Figure 3 This is a cross-sectional view of the front side of the positioning compartment of this utility model;

[0021] Figure 4 This is a cross-sectional view of the right side of the positioning compartment of this utility model;

[0022] Figure 5 This is an enlarged structural diagram of point A in this utility model.

[0023] In the diagram: 1. Positioning chamber, 2. Drive mechanism, 21. Slide opening, 22. Sliding seat, 23. Sliding handle, 24. T-shaped slide groove, 25. T-shaped block, 26. Drive shaft, 27. Drive handle, 28. Sliding cavity, 29. Motor, 3. Lifting mechanism, 31. Internal threaded cylinder, 32. Screw, 33. Guide cylinder, 34. Guide rod, 4. L-shaped positioning arc plate, 5. Position sensor, 6. Support seat, 7. Cross mounting plate, 8. Bellows, 9. Controller. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please see Figure 1-5 This embodiment provides a technical solution: a positioning fixture for a coating and developing equipment, including a positioning chamber 1, four adjustable L-shaped positioning arc plates 4 are provided at the upper end of the positioning chamber 1, a support base 6 is fixedly connected to the center position of the upper surface of the positioning chamber 1, a controller 9 is provided on the left side of the positioning chamber 1, the input end of the controller 9 is electrically connected to an external power supply, and also includes a drive mechanism 2 and a lifting mechanism 3.

[0026] Drive mechanism 2 includes a sliding opening 21, a sliding seat 22, a sliding handle 23, a drive shaft 26, a drive handle 27, and a sliding cavity 28. The sliding openings 21 are evenly distributed at the upper end of the positioning chamber 1. Sliding seats 22 are slidably connected inside each sliding opening 21. The upper end of the side surface of each sliding seat 22 closest to the center of the positioning chamber 1 is fixedly connected to the end of an adjacent L-shaped positioning arc plate 4 away from the center of the positioning chamber 1 via a support column. The drive shaft 26 is rotatably connected inside the positioning chamber 1. A drive handle 27 is fixedly connected to the upper end of the drive shaft 26. Symmetrically distributed sliding cavities 28 are arranged inside the drive handle 27. The interior of each sliding cavity 28 is connected to a vertically adjacent sliding seat 27. The lower end of the moving handle 23 is slidably connected, and the lower end of the sliding seat 22 is fixedly connected to a connecting post. Symmetrically distributed sliding grooves are provided inside the sliding handle 23, and the interior of each groove is slidably connected to the outer surface of the vertically adjacent connecting post. The drive mechanism 2 also includes a T-shaped sliding groove 24 and T-shaped blocks 25. The T-shaped sliding groove 24 is located inside the top wall of the positioning chamber 1, and the T-shaped blocks 25 are fixedly connected to the middle of the upper surface of the sliding handle 23, with each T-shaped block 25 slidably connected to the interior of the T-shaped sliding groove 24. The drive mechanism 2 also includes a motor 29, located in the middle of the bottom wall of the positioning chamber 1. A worm gear is fixedly connected to the rear end of the output shaft of the motor 29. A worm gear is fixedly connected to the lower end of the outer surface of shaft 26. The worm gear meshes with the worm. The input end of motor 29 is electrically connected to the output end of controller 9. Controller 9 enables motor 29 to operate. The rotation of the output shaft of motor 29 drives the worm to rotate, which in turn drives the worm gear to rotate. The rotation of the worm gear drives the drive shaft 26 to rotate. The rotation of drive shaft 26 drives the drive handle 27 to rotate. The rotation of drive handle 27 moves the two sliding handles 23 towards the center of positioning chamber 1. At the same time, the T-shaped blocks 25 at the upper end of the sliding handles 23 slide towards the center of positioning chamber 1 inside the T-shaped grooves 24. Meanwhile, the lower ends of the sliding handles 23 are in the corresponding sliding cavities. The sliding handle 23 moves radially inside the 28, and the movement of the sliding handle 23 moves the two adjacent connecting columns, thereby causing the sliding seat 22 to move towards the center of the positioning chamber 1 inside the corresponding sliding opening 21. At the same time, the connecting columns slide inside the corresponding sliding grooves. The movement of the sliding seat 22 drives the corresponding L-shaped positioning arc plate 4 to move towards the center of the positioning chamber 1 through the adjacent support columns. After the four L-shaped positioning arc plates 4 come into contact with the wafer, they push the wafer to move, so that the central axis of the wafer coincides with the central axis of the support seat 6. When the wafer is positioned, the controller 9 shuts down the motor 29, thereby completing the wafer positioning work.

[0027] Lifting mechanism 3: Located at the lower end of positioning chamber 1, the lower end of lifting mechanism 3 is fixedly connected to a cross mounting plate 7. The interior of the cross mounting plate 7 is provided with evenly distributed mounting holes. Lifting mechanism 3 includes an internal threaded cylinder 31, a screw 32, a guide cylinder 33, and guide rods 34. The internal threaded cylinder 31 is rotatably connected to the center position of the lower surface of positioning chamber 1. The screw 32 is fixedly connected to the center position of the upper surface of the cross mounting plate 7. The outer surface of the screw 32 is threadedly connected to the interior of the internal threaded cylinder 31. The guide cylinders 33 are evenly fixedly connected to the lower surface of positioning chamber 1. Guide rods 34 are fixedly connected to the four corners of the upper surface of the cross mounting plate 7. The outer surfaces of the guide rods 34 are slidably connected to the interior of the vertically adjacent guide cylinders 33. A rotating ring is rotatably connected to the lower end of the outer surface of the internal threaded cylinder 31. The lower surface of the rotating ring is connected to the cross mounting plate 7. A bellows 8 is fixedly connected between the upper surfaces of the plates 7. The bellows 8 is sleeved on the outer surface of the screw 32. (The bellows 8 provides sealing protection for the screw 32, preventing the connection between the screw 32 and the internal threaded cylinder 31 from being affected by the external environment.) According to the positioning and installation requirements of the coating and developing equipment, the internal threaded cylinder 31 is rotated. Under the action of the screw 32 in the fixed state, the internal threaded cylinder 31 moves vertically. At the same time, the guide rods 34 slide inside the corresponding guide cylinders 33, providing a limiting and guiding function for the vertical movement of the positioning chamber 1. With the assistance of external measuring tools, when the positioning chamber 1 reaches the required height, the rotation of the internal threaded cylinder 31 is stopped. Then, the mounting holes inside the cross mounting plate 7 are stably connected to the threaded holes on the working surface of the coating and developing equipment by bolts, thereby achieving the overall stable installation of the positioning fixture for the coating and developing equipment.

[0028] Among them, each of the L-shaped positioning arc plate 4 is equipped with a positioning sensor 5 in the middle of the side surface near the center of the positioning chamber 1. The positioning sensor 5 is bidirectionally electrically connected to the controller 9. The controller 9 enables the positioning sensor 5 to operate. The positioning sensor 5 detects the contact status between the wafer edge and the L-shaped positioning arc plate 4 in real time. When the L-shaped positioning arc plate 4 moves to the preset position, the positioning sensor 5 detects the pressure and displacement changes, provides real-time feedback on whether the wafer has accurately reached the target position, and sends the position information to the signal receiving end of the controller 9 in real time.

[0029] The working principle of the positioning fixture for a coating and developing equipment provided by this utility model is as follows: During operation, the operator rotates the internal threaded cylinder 31 according to the positioning and installation requirements of the coating and developing equipment. The internal threaded cylinder 31 moves vertically under the action of the fixed screw 32. At the same time, the guide rods 34 slide inside the corresponding guide cylinders 33, providing limiting and guiding functions for the vertical movement of the positioning chamber 1. With the assistance of external measuring tools, when the positioning chamber 1 reaches the required height, the rotation of the internal threaded cylinder 31 stops. Then, the mounting holes inside the cross mounting plate 7 are connected to the coating and developing equipment using bolts. The threaded holes on the working surface of the coating and developing equipment are stably connected, thereby achieving stable installation of the positioning fixture for the coating and developing equipment. During operation, the external electric robotic arm moves the wafer to the upper end of the support base 6. Then, the controller 9 activates the motor 29. The output shaft of the motor 29 rotates, driving the worm gear to rotate, which in turn drives the worm wheel. The worm wheel's rotation drives the drive shaft 26 to rotate, which in turn drives the drive handle 27 to rotate. The drive handle 27's rotation moves the two sliding handles 23 towards the center of the positioning chamber 1. Simultaneously, the T-shaped block at the upper end of the sliding handle 23... All 25 slide towards the center of the positioning chamber 1 inside the T-shaped slide groove 24. At the same time, the lower end of the sliding handle 23 slides radially inside the corresponding sliding cavity 28. The movement of the sliding handle 23 moves the two adjacent connecting columns, thereby causing the sliding seat 22 to move towards the center of the positioning chamber 1 inside the corresponding slide opening 21. Meanwhile, the connecting columns slide inside the corresponding slide groove. The movement of the sliding seat 22 drives the corresponding L-shaped positioning arc plate 4 to move towards the center of the positioning chamber 1 through the adjacent support column. After the four L-shaped positioning arc plates 4 contact the wafer, they push the wafer to move, so that the central axis of the wafer coincides with the central axis of the support seat 6. At the same time, the controller 9 activates the position sensor 5. The position sensor 5 detects the contact state between the edge of the wafer and the L-shaped positioning arc plate 4 in real time. When the L-shaped positioning arc plate 4 moves to the preset position, the position sensor 5 detects the pressure and displacement changes and provides real-time feedback on whether the wafer has accurately reached the target position. The position information is sent to the signal receiving end of the controller 9 in real time. After the wafer positioning is completed, the controller 9 shuts down the motor 29, thereby completing the wafer positioning work.

[0030] It is worth noting that the controller 9 disclosed in the above embodiments can be an S7-200, the position sensor 5 can be an LKG30, and the controller 9 controls the operation of the motor 29 and the position sensor 5 using methods commonly used in the prior art.

[0031] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A positioning fixture for a coating and developing equipment, comprising a positioning chamber (1), wherein four adjustable L-shaped positioning arc plates (4) are provided at the upper end of the positioning chamber (1), and a support base (6) is fixedly connected to the center position of the upper surface of the positioning chamber (1), characterized in that: It also includes a drive mechanism (2) and a lifting mechanism (3); Drive mechanism (2): It includes a sliding opening (21), a sliding seat (22), a sliding handle (23), a drive shaft (26), a drive handle (27), and a sliding cavity (28). The sliding openings (21) are evenly arranged at the upper end of the positioning chamber (1). The sliding seats (22) are slidably connected inside the sliding openings (21). The upper end of the side surface of the sliding seat (22) near the center of the positioning chamber (1) is fixedly connected to the end of the adjacent L-shaped positioning arc plate (4) away from the center of the positioning chamber (1) through a support column. The shaft (26) is rotatably connected to the inside of the positioning chamber (1). The upper end of the drive shaft (26) is fixedly connected to the drive handle (27). The drive handle (27) is provided with symmetrically distributed sliding cavities (28). The interior of each sliding cavity (28) is slidably connected to the lower end of the vertically adjacent sliding handle (23). The lower end of each sliding seat (22) is fixedly connected to a connecting post. The interior of each sliding handle (23) is provided with symmetrically distributed sliding grooves. The interior of each sliding groove is slidably connected to the outer surface of the vertically adjacent connecting post. Lifting mechanism (3): It is located at the lower end of the positioning chamber (1). The lower end of the lifting mechanism (3) is fixedly connected to a cross mounting plate (7). The interior of the cross mounting plate (7) is provided with evenly distributed mounting holes.

2. The positioning tool for a gluing and developing apparatus according to claim 1, characterized in that: The drive mechanism (2) further includes a T-shaped groove (24) and a T-shaped block (25). The T-shaped groove (24) is located inside the top wall of the positioning chamber (1), and the T-shaped blocks (25) are fixedly connected to the middle of the upper surface of the sliding handle (23). The T-shaped blocks (25) are all slidably connected to the inside of the T-shaped groove (24).

3. The positioning tool for a gluing and developing apparatus according to claim 1, characterized in that: A controller (9) is provided on the left side of the positioning chamber (1), and the input end of the controller (9) is electrically connected to an external power source.

4. The positioning tool for a coating and developing apparatus according to claim 3, wherein: The drive mechanism (2) also includes a motor (29), which is located in the middle of the bottom wall of the positioning chamber (1). A worm is fixedly connected to the rear end of the output shaft of the motor (29), and a worm wheel is fixedly connected to the lower end of the outer surface of the drive shaft (26). The worm wheel meshes with the worm. The input end of the motor (29) is electrically connected to the output end of the controller (9).

5. The positioning tool for a gluing and developing apparatus according to claim 1, characterized in that: The lifting mechanism (3) includes an internal threaded cylinder (31), a screw (32), a guide cylinder (33), and a guide rod (34). The internal threaded cylinder (31) is rotatably connected to the center of the lower surface of the positioning chamber (1). The screw (32) is fixedly connected to the center of the upper surface of the cross mounting plate (7). The outer surface of the screw (32) is threadedly connected to the inner thread of the internal threaded cylinder (31). The guide cylinder (33) is evenly fixedly connected to the lower surface of the positioning chamber (1). The four corners of the upper surface of the cross mounting plate (7) are fixedly connected to the guide rod (34). The outer surface of the guide rod (34) is slidably connected to the interior of the vertically adjacent guide cylinder (33).

6. The positioning tool for a gluing and developing apparatus according to claim 5, characterized in that: A rotating ring is rotatably connected to the lower end of the outer surface of the internally threaded cylinder (31). A bellows (8) is fixedly connected between the lower surface of the rotating ring and the upper surface of the cross mounting plate (7). The bellows (8) is sleeved on the outer surface of the screw (32).

7. The positioning tool for a gluing and developing apparatus according to claim 3, characterized in that: Each of the L-shaped positioning arc plate (4) has a positioning sensor (5) installed in the middle of the side surface near the center of the positioning chamber (1). The positioning sensors (5) are bidirectionally electrically connected to the controller (9).

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