A fire alarm detection and protection device for semiconductor CVD equipment
By integrating fire alarm detection and protection devices into CVD equipment, and using UV/IR fire alarm detectors and relays to control AC contactors, the power supply to high-risk equipment can be quickly cut off, solving the problem of insufficient safety in traditional CVD equipment and improving the safety and disaster prevention capabilities of equipment operation.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI YUEJIANG IND CO LTD
- Filing Date
- 2025-08-22
- Publication Date
- 2026-07-03
AI Technical Summary
Traditional CVD equipment lacks a dedicated fire detection and protection system, resulting in high safety risks in production.
Design a protection device that includes a fire detection module, a control module, and an alarm module. Utilize a UV/IR fire detector, a self-locking relay, and a time-delay relay to control an AC contactor, achieving millisecond-level response to cut off power to high-risk equipment and improving safety.
It effectively prevents equipment damage and production interruption caused by electrical cabinet fires, and improves the safety of semiconductor CVD equipment and personnel safety.
Smart Images
Figure CN224457448U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, and in particular relates to a fire alarm detection and protection device for semiconductor CVD equipment. Background Technology
[0002] In semiconductor manufacturing, CVD (Chemical Vapor Deposition) is one of the key processes. It involves the chemical reaction of gaseous reactants to form a solid thin film, which is then deposited on the substrate surface. CVD equipment is sophisticated and expensive, and utilizes various characteristic gases, making it prone to fires and explosions during production. Many older, less sophisticated CVD machines often lack dedicated, integrated fire detection and protection systems, posing a significant risk to safe production.
[0003] Therefore, it is necessary to provide a fire alarm detection and protection device for semiconductor CVD equipment. Utility Model Content
[0004] This invention provides a fire alarm detection and protection device for semiconductor CVD equipment, thereby improving the fire hazard prevention and control capabilities of semiconductor CVD equipment.
[0005] To achieve the above objectives, this utility model provides the following technical solution:
[0006] A fire alarm detection and protection device for a semiconductor CVD equipment is disclosed. The semiconductor CVD equipment includes a main body and a control cabinet. The fire alarm detection and protection device includes a housing, a fire alarm detection module, a control module, and an alarm module. The housing is installed on one side of the control cabinet. The fire alarm detection module includes a fire alarm detector. The control module includes a self-locking relay, a time-delay relay, and a reset button. The alarm module includes an audible and visual alarm. The fire alarm detector is disposed in the control cabinet. The self-locking relay and the time-delay relay are disposed in the housing. The reset button and the audible and visual alarm are disposed on the housing. An AC contactor is disposed in the control cabinet. The closing and opening of the normally open contacts of the AC contactor controls the start and stop of the main power supply of the control cabinet. The control module controls the energization and de-energization of the coil of the AC contactor according to the fire alarm detector, thereby controlling the start and stop of the main power supply of the control cabinet.
[0007] Preferably, the fire detector is a UV / IR fire detector, which includes a UV / IR alarm contact, a UV / IR auxiliary contact, and a UV / IR coil; the self-locking relay includes an LR6 normally closed contact, an LR6 normally open contact, an LR6 self-locking coil, and an LR6 reset coil; and the time delay relay includes a TDR5 normally closed contact and a TDR5 coil.
[0008] Preferably, the LR6 self-locking coil of the self-locking relay is connected in series with the UV / IR alarm contact of the UV / IR fire detector and then connected to the first 24V power supply; the TDR5 coil of the time delay relay is connected in series with the UV / IR auxiliary contact of the UV / IR fire detector and then connected to the first 24V power supply; the coil of the UV / IR fire detector is connected to the first 24V power supply; the audible and visual alarm is connected in series with the normally open contact of the LR6 self-locking relay and then connected to the first 24V power supply; the normally closed contact of the LR6 self-locking relay, the normally closed contact of the TDR5 time delay relay, and the coil of the AC contactor are connected in series and then connected to the second 24V power supply.
[0009] Preferably, the normally open RESET contact of the reset button is connected in series with the LR6 reset coil of the self-locking relay and then connected to the first 24V power supply.
[0010] Preferably, a power input interface is provided at the bottom of the housing, and the power input interface is connected to an external 24V power supply.
[0011] Preferably, the housing and the control cabinet are electrically connected via an aviation connector.
[0012] Preferably, the housing includes a main shell and a detachable panel, with the reset button and the audible and visual alarm located on the panel.
[0013] Compared with the prior art, the technical solution of this utility model has beneficial effects.
[0014] For example, a fire detection and protection device for semiconductor CVD equipment includes a housing, a fire detection module, a control module, and an alarm module. The housing is installed on one side of the control cabinet. The fire detection module includes a fire detector. The control module includes a self-locking relay, a time-delay relay, and a reset button. The alarm module includes an audible and visual alarm. The fire detector is located in the control cabinet, the self-locking relay and the time-delay relay are located in the housing, and the reset button and the audible and visual alarm are located on the housing. An AC contactor is installed in the control cabinet. The closing and opening of the normally open contacts of the AC contactor controls the start and stop of the main power supply of the control cabinet. The control module controls the energization and de-energization of the coil of the AC contactor based on the fire detector, thereby controlling the start and stop of the main power supply of the control cabinet. When the fire detection module detects a fire signal, the control module can immediately execute a millisecond-level response, cutting off the power and gas supply to the control cabinet and the critical high-risk equipment controlled by it (such as the reaction chamber heater and process gas supply unit). This improves the safety of CVD equipment operation and effectively prevents catastrophic equipment damage, production interruption, and personnel safety risks caused by a fire in the control cabinet. Attached Figure Description
[0015] Figure 1This is a schematic diagram of the fire alarm detection and protection device for semiconductor CVD equipment installed in the control cabinet according to an embodiment of this utility model;
[0016] Figure 2 This is a side perspective view of the fire alarm detection and protection device for semiconductor CVD equipment in an embodiment of this utility model;
[0017] Figure 3 This is a front perspective view of the fire alarm detection and protection device for semiconductor CVD equipment in an embodiment of this utility model;
[0018] Figure 4 This is a control circuit diagram of a fire alarm detection and protection device for semiconductor CVD equipment in an embodiment of this utility model.
[0019] Explanation of reference numerals in the attached figures:
[0020] 1-Housing; 11-Power input interface;
[0021] 2-Fire alarm detection module;
[0022] 3-Control module;
[0023] 4-Alarm module;
[0024] 100 - Control cabinet;
[0025] LR6 - Self-locking relay; TDR5 - Time delay relay; RESET - Reset button; H1 - Audible and visual alarm. Detailed Implementation
[0026] To make the objectives, features, and beneficial effects of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It is to be understood that the specific embodiments described below are merely for explaining this utility model and are not intended to limit it. Furthermore, the same or similar reference numerals may be used in the drawings to refer to the same or similar elements in different embodiments, and descriptions of the same or similar elements in different embodiments, as well as descriptions of prior art elements, features, effects, etc., may be omitted.
[0027] Figure 1 This is a schematic diagram of the fire alarm detection and protection device for semiconductor CVD equipment installed in the control cabinet according to an embodiment of this utility model; Figure 2 This is a side view of the fire alarm detection and protection device for semiconductor CVD equipment installed in the control cabinet in this embodiment of the utility model. Figure 3 This is a structural diagram of a fire alarm detection and protection device for semiconductor CVD equipment according to an embodiment of this utility model; Figure 4 This is a control circuit diagram of a fire alarm detection and protection device for semiconductor CVD equipment in an embodiment of this utility model.
[0028] Reference Figures 1-4 This utility model provides a fire alarm detection and protection device for semiconductor CVD equipment. Figure 1 The control cabinet door is open.
[0029] Specifically, the fire detection and protection device for semiconductor CVD equipment includes a main body and a control cabinet 100. The fire detection and protection device includes a housing 1, a fire detection module 2, a control module 3, and an alarm module 4. The housing 1 is installed on one side of the control cabinet 100. The fire detection module 2 includes a fire detector. The control module 3 includes a self-locking relay LR6, a time delay relay TDR5, and a reset button RESET. The alarm module 4 includes an audible and visual alarm H1. The fire detector is located in the control cabinet 100, the self-locking relay LR6 and the time delay relay TDR5 are located in the housing 1, and the reset button RESET and the audible and visual alarm H1 are located on the housing 1. An AC contactor KM1 is installed in the control cabinet 100. The closing and opening of the normally open contacts of the AC contactor KM1 controls the start and stop of the main power supply of the control cabinet 100. The control module 3 controls the energization and de-energization of the coil of the AC contactor KM1 according to the fire detector, thereby controlling the start and stop of the main power supply of the control cabinet 100.
[0030] Specifically, the fire alarm detection and protection device is installed independently, which facilitates maintenance and upgrades.
[0031] In some embodiments, the fire alarm detector is a UV / IR (ultraviolet / infrared) fire alarm detector, which includes a UV / IR alarm contact, a UV / IR auxiliary contact, and a UV / IR coil; the self-locking relay LR6 includes an LR6 normally closed contact, an LR6 normally open contact, an LR6 self-locking coil, and an LR6 reset coil; the time delay relay TDR5 includes a TDR5 normally closed contact and a TDR5 coil.
[0032] Specifically, ultraviolet / infrared flame detectors are used, which have a faster response speed to fires over a wider temperature range.
[0033] In some embodiments, the LR6 self-locking coil of the self-locking relay LR6 is connected in series with the UV / IR alarm contact of the UV / IR fire detector and then connected to the first 24V power supply; the TDR5 coil of the time delay relay TDR5 is connected in series with the UV / IR auxiliary contact of the UV / IR fire detector and then connected to the first 24V power supply; the coil of the UV / IR fire detector is connected to the first 24V power supply; the audible and visual alarm H1 is connected in series with the normally open contact of the self-locking relay LR6 and then connected to the first 24V power supply; the normally closed contact of the self-locking relay LR6, the normally closed contact of the time delay relay TDR5, and the coil of the AC contactor KM1 are connected in series and then connected to the second 24V power supply.
[0034] In some embodiments, the normally open contact of the reset button RESET is connected in series with the reset coil of the self-locking relay LR6 and then connected to the first 24V power supply.
[0035] Specifically, when the UV / IR fire detector detects a flame, the UV / IR alarm contact closes (UV / IR, 6 / 5), energizing the LR6 self-locking coil (LR6, 1 / 11) of the self-locking relay LR6; the normally closed contact (LR6, 7 / 9) of LR6 opens, de-energizing the coil (KM1, A1 / A2) of AC contactor KM1, opening the normally open contact of AC contactor KM1, and disconnecting the main power supply of control cabinet 100; the normally open contact (LR6, 9 / 8) of LR6 closes, energizing the audible and visual alarm H1 (H1, X1 / X2) and issuing an alarm notification.
[0036] Simultaneously, the UV / IR auxiliary contact closes (UV / IR, 3 / 2), the TDR5 coil (TDR5, 2 / 7) of the time delay relay TDR5 is energized, and conducts after a set delay time; the normally closed contact (TDR5, 5 / 8) of TDR5 opens, the coil (KM1, A1 / A2) of AC contactor KM1 is de-energized, the normally open contact of AC contactor KM1 opens, and the main power supply of control cabinet 100 is disconnected.
[0037] After the fault is cleared, press the reset button RESET (RESET, 14 / 13). The LR6 reset coil (LR6, 2 / 10) will be energized and conduct; the normally closed contact of LR6 (LR6, 7 / 9) will close, the coil of AC contactor KM1 (KM1, A1 / A2) will be energized, the normally open contact of AC contactor KM1 will close, and the main power supply of control cabinet 100 will start; the normally open contact of LR6 (LR6, 9 / 8) will open, the audible and visual alarm H1 (H1, X1 / X2) will be de-energized, and normal operation will resume.
[0038] The system integrates a fire alarm detection module 2 and a control module 3. When the fire alarm detection module 2 detects a fire signal, the control module 3 can immediately execute a millisecond-level response to cut off the main power supply to the control cabinet and the critical high-risk equipment controlled by it (such as the reaction chamber heater and the process gas supply unit).
[0039] In some embodiments, a power input interface 11 is provided at the bottom of the housing 1, and the power input interface 11 is connected to an external 24V power supply.
[0040] Specifically, the external 24V power supply includes a first 24V power supply and a second 24V power supply.
[0041] In some embodiments, the housing 1 and the control cabinet 100 are electrically connected via an aviation plug.
[0042] Specifically, the power supply and signal interfaces use aviation plugs for reliable connection, which can be flexibly adjusted according to needs, significantly improving the flexibility and maintainability of the control cabinet.
[0043] In some embodiments, housing 1 includes a main housing and a removable panel, with a reset button RESET and an audible and visual alarm H1 disposed on the panel.
[0044] In summary, the fire detection and protection device for semiconductor CVD equipment provided by this utility model includes a housing 1, a fire detection module 2, a control module 3, and an alarm module 4. The housing 1 is installed on one side of the control cabinet 100. The fire detection module 2 includes a fire detector. The control module 3 includes a self-locking relay LR6, a time delay relay TDR5, and a reset button RESET. The alarm module 4 includes an audible and visual alarm H1. The fire detector is located in the control cabinet 100, the self-locking relay LR6 and the time delay relay TDR5 are located in the housing 1, and the reset button RESET and the audible and visual alarm H1 are located on the housing 1. The control cabinet 100 is equipped with... AC contactor KM1 controls the opening and closing of its normally open contacts to control the main power supply of control cabinet 100. Control module 3 controls the energization and de-energization of the coil of AC contactor KM1 based on the fire alarm detector, thereby controlling the main power supply of control cabinet 100. When the fire alarm detection module 2 detects a fire signal, control module 3 can immediately execute a millisecond-level response to cut off the power and gas supply to control cabinet 100 and the key high-risk equipment controlled by it (such as reaction chamber heaters and process gas supply units). This improves the safety of CVD equipment operation and effectively prevents catastrophic equipment damage, production interruption, and personnel safety risks caused by electrical cabinet fires.
[0045] Although specific embodiments have been described above, these embodiments are not intended to limit the scope of this utility model disclosure, even when only a single embodiment is described with respect to a particular feature. The feature examples provided in this utility model disclosure are intended to be illustrative and not limiting, unless otherwise stated. In practice, one or more technical features of the dependent claims may be combined with the technical features of the independent claims as needed and where technically feasible, and may be derived from the technical features of the respective independent claims in any suitable manner rather than solely by the specific combinations listed in the claims.
[0046] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.
Claims
1. A fire alarm detection and protection device for a semiconductor CVD equipment, the semiconductor CVD equipment comprising a main body and a control cabinet, characterized in that, The fire detection and protection device includes a housing, a fire detection module, a control module, and an alarm module. The housing is installed on one side of the control cabinet. The fire detection module includes a fire detector. The control module includes a self-locking relay, a time-delay relay, and a reset button. The alarm module includes an audible and visual alarm. The fire detector is located in the control cabinet. The self-locking relay and the time-delay relay are located in the housing. The reset button and the audible and visual alarm are located on the housing. An AC contactor is installed in the control cabinet. The closing and opening of the normally open contacts of the AC contactor controls the start and stop of the main power supply of the control cabinet. The control module controls the energization and de-energization of the coil of the AC contactor based on the fire detector, thereby controlling the start and stop of the main power supply of the control cabinet.
2. The fire detection protection device for a semiconductor CVD apparatus according to claim 1, wherein The fire alarm detector is a UV / IR fire alarm detector, which includes a UV / IR alarm contact, a UV / IR auxiliary contact, and a UV / IR coil; the self-locking relay includes an LR6 normally closed contact, an LR6 normally open contact, an LR6 self-locking coil, and an LR6 reset coil; the time delay relay includes a TDR5 normally closed contact and a TDR5 coil.
3. The fire detection protection device for a semiconductor CVD apparatus according to claim 2, wherein The LR6 self-locking coil of the self-locking relay is connected in series with the UV / IR alarm contact of the UV / IR fire detector and then connected to the first 24V power supply; the TDR5 coil of the time delay relay is connected in series with the UV / IR auxiliary contact of the UV / IR fire detector and then connected to the first 24V power supply; the coil of the UV / IR fire detector is connected to the first 24V power supply; the audible and visual alarm is connected in series with the normally open contact of the LR6 self-locking relay and then connected to the first 24V power supply; the normally closed contact of the LR6 self-locking relay, the normally closed contact of the TDR5 time delay relay, and the coil of the AC contactor are connected in series and then connected to the second 24V power supply.
4. The fire detection protection device for a semiconductor CVD apparatus according to claim 2, wherein The normally open RESET contact of the reset button is connected in series with the LR6 reset coil of the self-locking relay and then connected to the first 24V power supply.
5. The fire detection protection device for a semiconductor CVD apparatus according to claim 1, wherein The bottom of the housing is provided with a power input interface, which is connected to an external 24V power supply.
6. The fire alarm detection and protection device for semiconductor CVD equipment according to claim 1, characterized in that, The housing and the control cabinet are electrically connected via an aviation connector.
7. The fire detection protection device for a semiconductor CVD apparatus according to claim 1, wherein The housing includes a main shell and a detachable panel, with the reset button and the audible and visual alarm located on the panel.