A crystal temperature control device
By setting an airflow correction structure in the crystal temperature control device and adjusting the airflow direction by utilizing the difference in the expansion coefficients of the bent plates, the problem of the inability to adjust the airflow purging angle was solved, and the optimal phase matching and efficient conversion of the crystal within a specific temperature range were achieved.
CN224458924UActive Publication Date: 2026-07-03SHUNYI TECHNOLOGY (SHANDONG) CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHUNYI TECHNOLOGY (SHANDONG) CO LTD
- Filing Date
- 2025-05-28
- Publication Date
- 2026-07-03
Smart Images
Figure CN224458924U_ABST
Abstract
This application discloses a crystal temperature control device, relating to the field of semiconductor technology. The crystal temperature control device includes a furnace body with a channel. A nonlinear crystal is placed in the middle of the channel. An inlet gas channel and an outlet gas channel, respectively connected to the channel, are provided at both ends of the furnace body. Purge gas flows through the channel from the inlet gas channel and exits from the outlet gas channel. An airflow correction structure is also provided within the channel, guiding the purge gas according to its temperature. This structure can adjust the purge angle of the purge gas based on its temperature to prevent cold air from directly blowing onto the crystal, thus ensuring the effective temperature control of the crystal.
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