Coupling, vacuum pump and vacuum working system

Abstract

The application provides a coupling, a vacuum pump and a vacuum working system. The coupling comprises a driving shaft and a driven shaft. The driving shaft has a torque output end, and the driven shaft has a torque receiving end. A first magnetic part is arranged on the torque output end. The first magnetic part is located in the circumferential direction of the torque output end, and the central angle of the circular arc corresponding to the first magnetic part in the circumferential direction of the torque output end is less than 180°. A second magnetic part is arranged on the torque receiving end. The second magnetic part is located in the circumferential direction of the torque receiving end, and the central angle of the circular arc corresponding to the second magnetic part in the circumferential direction of the torque receiving end is less than 180°. The torque output end and the torque receiving end transmit torque through magnetic coupling. The coupling transmits torque through magnetic coupling between the driving shaft and the driven shaft, and physical contact between the driving shaft and the driven shaft is not needed, so that the applicability of the equipment with sealing requirements is improved.

Description

Technical Field

[0001] This application relates to the field of vacuum technology, and more specifically, to a coupling, a vacuum pump, and a vacuum working system. Background Technology

[0002] Couplings are commonly used for torque transmission; for example, they are often used between the rotor of a motor and a vacuum pump to transmit torque.

[0003] In commonly used couplings, such as the swivel coupling and the star-type flexible coupling, the drive output shaft of the driving component and the drive receiving shaft of the driven component maintain direct or indirect physical contact during application. This increases the difficulty of sealing the connection for some equipment with sealing requirements. Taking a vacuum pump as an example, the motor is usually located outside the vacuum pump cylinder, while the rotor is usually located inside the vacuum pump cylinder, and the vacuum pump cylinder needs to be sealed. This means that if only a simple static seal is used at the connection between the motor and the rotor, the sealing performance of the cylinder will not meet the sealing requirements for the operation of the vacuum pump.

[0004] In other words, current couplings are not very suitable for equipment with sealing requirements. Utility Model Content

[0005] The purpose of this application is to provide a coupling, a vacuum pump, and a vacuum working system, wherein the driving shaft and the driven shaft of the coupling transmit torque through magnetic coupling, eliminating the need for physical contact between the driving shaft and the driven shaft, thereby improving the applicability to equipment with sealing requirements.

[0006] In a first aspect, this application provides a coupling, including a driving shaft and a driven shaft; the driving shaft has a torque output end, and the driven shaft has a torque receiving end; a first magnetic element is disposed on the torque output end; the first magnetic element is located in the circumference of the torque output end, and the central angle corresponding to the arc occupied by the first magnetic element in the circumference of the torque output end does not exceed 180°; a second magnetic element is disposed on the torque receiving end; the second magnetic element is located in the circumference of the torque receiving end, and the central angle corresponding to the arc occupied by the second magnetic element in the circumference of the torque receiving end does not exceed 180°; wherein, the torque output end and the torque receiving end transmit torque through magnetic coupling.

[0007] The aforementioned coupling transmits torque through magnetic coupling between the driving and driven shafts, eliminating the need for physical contact between them and thus improving its applicability to equipment requiring sealing. Furthermore, it avoids vibrations during transmission caused by gaps at the connection points of traditional physical contact couplings, thereby improving transmission smoothness. Additionally, it avoids the problem of coupling failure due to overload caused by impact loads during transmission, as well as the problem of damage to drive components such as motors due to excessive instantaneous current caused by excessive load.

[0008] In conjunction with the first aspect, the number of the first magnetic elements is not less than two; of the not less than two first magnetic elements, the first magnetic pole of a portion of the first magnetic elements is aligned with the orientation of the torque output end, and the second magnetic pole of another portion of the first magnetic elements is aligned with the orientation of the torque output end, and they are alternately arranged around the circumference of the torque output end; the number of the second magnetic elements is not less than two; of the not less than two second magnetic elements, the second magnetic pole of a portion of the second magnetic elements is aligned with the orientation of the torque receiving end, and the second magnetic pole of another portion of the second magnetic elements is aligned with the orientation of the torque receiving end, and they are alternately arranged around the circumference of the torque receiving end; wherein, the first magnetic pole and the second magnetic pole are opposite magnetic poles.

[0009] The aforementioned coupling, by setting multiple first magnetic elements and second magnetic elements at the torque output end and the torque receiving end respectively, and arranging them in an alternating manner with opposite magnetic poles, allows the normal magnetic force and tilted magnetic force between the torque output end and the torque receiving end to be alternately distributed in the circumferential direction of the torque output end and the torque receiving end, thereby reducing the central angle of the arc occupied by a single normal magnetic force, thus improving the efficiency and stability of torque transmission.

[0010] In conjunction with the first aspect, the number of the first magnetic elements is equal to the number of the second magnetic elements.

[0011] The aforementioned coupling, by designing that the number of the first magnetic components is equal to the number of the second magnetic components, allows the layout of the first magnetic components on the drive shaft to be mirrored with the layout of the second magnetic components on the driven shaft. This enables the magnetic pole interaction points on the drive shaft and the driven shaft to correspond one-to-one, thereby further improving the efficiency and smoothness of torque transmission.

[0012] In conjunction with the first aspect, the first magnetic element is uniformly arranged circumferentially at the torque output end; the second magnetic element is uniformly arranged circumferentially at the torque receiving end.

[0013] The aforementioned coupling, by having the first and second magnetic components evenly arranged in the circumferential directions of the torque output end and the torque output end, respectively, makes the distribution of magnetic lines of force between the torque output end and the torque output end more uniform, reducing fluctuations in the torque transmission process, thereby further improving the efficiency and stability of torque transmission.

[0014] In conjunction with the first aspect, the central angle corresponding to the arc of the circumference occupied by the gap between the first magnetic components at the torque output end is equal to the central angle corresponding to the arc of the circumference occupied by a single first magnetic component at the torque output end; the central angle corresponding to the arc of the circumference occupied by the gap between the second magnetic components at the torque receiving end is equal to the central angle corresponding to the arc of the circumference occupied by a single second magnetic component at the torque receiving end.

[0015] In the aforementioned coupling, the magnetic force between the first and second magnetic components is a normal magnetic force when a single first magnetic component is directly opposite the second magnetic component, making torque transmission impossible. Therefore, when the gaps between a single first magnetic component and a single second magnetic component are directly opposite each other, the tangential component of the magnetic force in the rotational direction is maximized, resulting in the maximum torque. By arranging the components with equal arc lengths and gaps, each first magnetic component can be directly opposite the gap between two second magnetic components, and vice versa, thereby further improving the efficiency and smoothness of torque transmission.

[0016] Secondly, this application provides a vacuum pump, including a rotary drive, a rotor, a cylinder, and a coupling described in the first aspect; the drive output shaft of the rotary drive is connected to the drive shaft of the coupling; the rotor is connected to the driven shaft of the coupling and is rotatably disposed within the cylinder; the torque output end of the coupling is coupled to the torque receiving end of the coupling.

[0017] The vacuum pump described above has the same beneficial effects as the coupling provided in the second aspect or any alternative embodiment of the second aspect, which will not be elaborated here.

[0018] In conjunction with the second aspect, the cylinder body includes a cylindrical body and an end cover; the cylindrical body has an open end, and an internal space is formed by the outer edge of the cylindrical body; the rotor and the driven shaft of the coupling are located in the internal space; the end cover is located between the driving shaft and the driven shaft of the coupling, and is sealed to the open end of the cylindrical body.

[0019] The aforementioned vacuum pump uses a static sealing method based on coupling transmission to seal the cylinder, which not only improves the sealing performance of the vacuum pump but also simplifies the sealing method.

[0020] In conjunction with the second aspect, the rotary drive component includes a permanent magnet motor.

[0021] The aforementioned vacuum pump uses a permanent magnet motor as its driving component. The permanent magnet can be coupled with the first and second magnetic components respectively, thereby enhancing the overall magnetic field strength, improving the torque transmission efficiency, and ultimately increasing the working efficiency of the vacuum pump.

[0022] In conjunction with the second aspect, the two ends of the rotor are rotatably connected to the cylinder body via bearings; wherein the bearings include non-magnetic bearings.

[0023] The aforementioned vacuum pump, by employing non-magnetic bearings, avoids interference from the magnetic components on the bearings with the magnetic fields generated by the first and second magnetic components in the coupling, thereby ensuring the efficiency of torque transmission in the coupling. This, in turn, improves the working efficiency of the vacuum pump.

[0024] Thirdly, this application provides a vacuum working system, including a target chamber and a vacuum pump as described in the second aspect; the target chamber is connected to the pumping end of the vacuum pump and is used to provide a vacuum working environment when a target vacuum level is achieved.

[0025] The vacuum working system described above has the same beneficial effects as the vacuum pump provided in the second aspect or any alternative embodiment of the second aspect, which will not be elaborated here.

[0026] In summary, the coupling, vacuum pump, and vacuum working system provided in this application transmit torque through magnetic coupling between the driving and driven shafts, eliminating the need for physical contact between them and improving applicability to equipment requiring sealing. By setting multiple first and second magnetic elements at the torque output and torque receiving ends, respectively, and arranging them in an alternating manner with opposite magnetic poles, the central angle of the arc occupied by a single normal magnetic force is reduced, thereby improving the efficiency and stability of torque transmission. The arrangement of equal arcs and gaps ensures that each first magnetic element aligns with the gap between the second magnetic elements, and vice versa, further improving the efficiency and stability of torque transmission. The vacuum pump uses static sealing based on the coupling's transmission to seal the cylinder, improving the vacuum pump's sealing performance and simplifying the sealing method. By using non-magnetic bearings as the specific type of bearing, interference from the magnetic components on the bearings with the magnetic fields generated by the first and second magnetic components in the coupling is avoided, thus ensuring the efficiency of torque transmission in the coupling. This, in turn, improves the working efficiency of the vacuum pump. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the structure of the coupling provided in the embodiments of this application;

[0029] Figure 2 This is a schematic diagram of the structure of a vacuum pump provided in an embodiment of this application.

[0030] Icons: 100, Coupling; 110, Drive shaft; 111, Torque output end; 112, First magnetic component; 120, Driven shaft; 121, Torque receiving end; 122, Second magnetic component; 10, Vacuum pump; 200, Rotary drive component; 300, Rotor; 400, Cylinder body; 410, Shell body; 420, End cover; 500, Bearing. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0032] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0033] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0034] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0035] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," not that the structure must be completely horizontal, but can be slightly tilted.

[0036] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0037] Please refer to Figure 1 , Figure 1 This is a schematic diagram of the coupling 100 provided in an embodiment of this application. The coupling 100 provided in this embodiment may include a driving shaft 110 and a driven shaft 120. The driving shaft 110 may have a torque output end 111, and the driven shaft 120 may have a torque receiving end 121. A first magnetic element 112 may be provided on the torque output end 111. The first magnetic element 112 may be located circumferentially on the torque output end 111, and the central angle corresponding to the arc occupied by the first magnetic element 112 in the circumferential direction of the torque output end 111 does not exceed 180°. A second magnetic element 122 may be provided on the torque receiving end 121. The second magnetic element 122 may be located circumferentially on the torque receiving end 121, and the central angle corresponding to the arc occupied by the second magnetic element 122 in the circumferential direction of the torque receiving end 121 does not exceed 180°. The torque output end 111 and the torque receiving end 121 can transmit torque through magnetic coupling.

[0038] The drive shaft 110 can be a cylindrical structure with a disk, where the disk can serve as the torque output end 111. The driven shaft 120 can also be a cylindrical structure with a disk, where the disk can serve as the torque receiving end 121.

[0039] The first magnetic element 112 can be a magnet, and there can be one or more of them. They can be located on the disk of the drive shaft 110 at any different circumferential radius. The central angle of the arc occupied by the first magnetic element 112 on the disk does not exceed 180°, meaning that at least 180° of the circumference of the disk has no magnetic field lines. Similarly, the second magnetic element 122 can also be a magnet, and there can be one or more of them. On the disk of the driven shaft 120, at least 180° of the circumference where the second magnetic element 122 is located also has no magnetic field lines.

[0040] The pole of the first magnetic element 112 that faces the torque output end 111 can be either the south pole (S pole) or the north pole (N pole). Similarly, the pole of the second magnetic element 122 that faces the torque receiving end 121 can also be either the south pole (S pole) or the north pole (N pole). It is worth noting that, in this embodiment, when the driving shaft 110 and driven shaft 120 are magnetically coupled (with the torque output end 111 and torque receiving end 121 facing each other), the poles of the first magnetic element 112 and the second magnetic element 122 that face each other can be either the same magnetic pole or opposite magnetic poles.

[0041] The specific working principle of the coupling 100 provided in this application embodiment is as follows: when the driving shaft 110 and the driven shaft 120 are coupled, a magnetic force (attractive or repulsive force) exists between the driving shaft 110 and the driven shaft 120. During the rotation of the driving shaft 110, when the first magnetic element 112 on the driving shaft 110 and the second magnetic element 122 on the driven shaft 120 are aligned, the magnetic force between them is a normal magnetic force. At this time, the torque of the driving shaft 110 will not be transmitted to the driven shaft 120. As the drive shaft 110 continues to rotate, when the first magnetic element 112 on the drive shaft 110 and the second magnetic element 122 on the driven shaft 120 are misaligned (for example, the arc on the circumference of the drive shaft 110 disk where there are no magnetic lines of force is opposite the arc on the circumference of the driven shaft 120 disk where there are magnetic lines of force), the magnetic force between them is tilted relative to the disk to which the torque output end 111 or the torque receiving end 121 belongs. Then, there is a component of the magnetic force in the tangential direction of the rotation direction. This component of the force can form the torque that drives the driven shaft 120 to rotate, thereby realizing the transmission of torque.

[0042] In the above implementation process, torque is transmitted through magnetic coupling between the drive shaft 110 and the driven shaft 120, eliminating the need for physical contact between them and thus improving applicability to equipment requiring sealing. Furthermore, it avoids vibrations during transmission caused by gaps at the connection point of the coupling 100, which involves traditional physical contact, thereby improving transmission smoothness. Additionally, it avoids the problem of overload and failure of the coupling 100 due to impact loads during transmission, as well as the problem of damage to drive components such as motors due to excessive instantaneous current caused by excessive load.

[0043] Please continue to refer to Figure 1 In some optional embodiments, the number of first magnetic elements 112 may be no less than two. Of the two or more first magnetic elements 112, the first magnetic poles of a portion of the first magnetic elements 112 may be aligned with the orientation of the torque output end 111, and the second magnetic poles of another portion of the first magnetic elements 112 may be aligned with the orientation of the torque output end 111, and they may be alternately arranged circumferentially around the torque output end 111. The number of second magnetic elements 122 may also be no less than two. Of the two or more second magnetic elements 122, the second magnetic poles of a portion of the second magnetic elements 122 may be aligned with the orientation of the torque receiving end 121, and the second magnetic poles of another portion of the second magnetic elements 122 may be aligned with the orientation of the torque receiving end 121, and they may be alternately arranged circumferentially around the torque receiving end 121.

[0044] The first magnetic pole can be an opposite magnetic pole to the second magnetic pole. That is, the first magnetic pole can be either the south pole (S pole) or the north pole (N pole), and the second magnetic pole can be either the south pole (S pole) or the north pole (N pole).

[0045] For example, there are four first magnetic elements 112, with two south poles (S poles) facing the torque receiving end 121 and the other two north poles (N poles) facing the torque receiving end 121, arranged in a square around the torque output end 111, with the diagonal poles being opposite poles. The number of second magnetic elements 122 can be four, six, or any other number. Here, six are used as an example. Three south poles (S poles) face the torque output end 111, and the other three north poles (N poles) face the torque output end 111, arranged in a hexagonal pattern around the torque receiving end 121, with the poles at adjacent vertices of the hexagon being opposite poles.

[0046] In the above implementation process, by setting multiple first magnetic elements 112 and second magnetic elements 122 at the torque output end 111 and the torque receiving end 121 respectively, and arranging them in an alternating manner with opposite magnetic poles, the normal magnetic force and tilted magnetic force between the torque output end 111 and the torque receiving end 121 are alternately distributed in the circumferential direction of the torque output end 111 and the circumferential direction of the torque receiving end 121, thereby reducing the central angle of the arc occupied by a single normal magnetic force, thereby improving the efficiency and stability of torque transmission.

[0047] Please continue to refer to Figure 1 In some alternative embodiments, the number of first magnetic elements 112 may be equal to the number of second magnetic elements 122.

[0048] In the above implementation process, by designing that the number of the first magnetic element 112 is equal to the number of the second magnetic element 122, the layout of the first magnetic element 112 on the drive shaft 110 and the layout of the second magnetic element 122 on the driven shaft 120 can be mirrored, so that the magnetic pole interaction points on the drive shaft 110 and the driven shaft 120 can correspond one-to-one, thereby further improving the efficiency and smoothness of torque transmission.

[0049] Please continue to refer to Figure 1 In some alternative embodiments, the first magnetic element 112 may be uniformly arranged circumferentially around the torque output end 111. The second magnetic element 122 may be uniformly arranged circumferentially around the torque receiving end 121.

[0050] In the above implementation process, the first magnetic element 112 and the second magnetic element 122 are evenly arranged in the circumferential direction of the torque output end 111, making the distribution of magnetic lines of force between the torque output end 111 more uniform, reducing fluctuations in the torque transmission process, thereby further improving the efficiency and stability of torque transmission.

[0051] In some optional embodiments, the central angle corresponding to the circumferential arc of the torque output end 111 where the gap between the first magnetic elements 112 is located can be equal to the central angle corresponding to the circumferential arc of a single first magnetic element 112 at the torque output end 111. Similarly, the central angle corresponding to the circumferential arc of the torque receiving end 121 where the gap between the second magnetic elements 122 is located can be equal to the central angle corresponding to the circumferential arc of a single second magnetic element 122 at the torque receiving end 121.

[0052] For example, there are four first magnetic elements 112, with two south poles (S poles) facing the torque receiving end 121 and the other two north poles (N poles) facing the torque receiving end 121, arranged in a square around the torque output end 111, with the diagonal poles being the same poles. The central angle of the arc occupied by a single first magnetic element 112 is 40°, and the central angle of the arc occupied by the gap between two adjacent magnetic poles is also 40°. The second magnetic element 122 is arranged in a mirror image of the first magnetic element 112.

[0053] In the above implementation process, due to the magnetic force between the first magnetic element 112 and the second magnetic element 122, when a single first magnetic element 112 and a single second magnetic element 122 are directly opposite each other, the magnetic force is a normal magnetic force and cannot transmit torque. Therefore, when the gaps between a single first magnetic element 112 and a single second magnetic element 122 are directly opposite each other, the component of the magnetic force in the tangential direction of the rotation direction is the largest, and the torque is also the largest. By arranging the occupied arcs and gaps equally, each first magnetic element 112 can be directly opposite the gap between a second magnetic element 122, and each second magnetic element 122 can also be directly opposite the gap between a first magnetic element 112, thereby further improving the efficiency and stability of torque transmission.

[0054] Please refer to Figure 2 , Figure 2 This is a schematic diagram of the structure of the vacuum pump 10 provided in an embodiment of this application. Based on the same concept, an embodiment of this application provides a vacuum pump 10, which may include a rotary drive 200, a rotor 300, a cylinder 400, and the coupling 100 described above. The drive output shaft of the rotary drive 200 can be connected to the drive shaft 110 of the coupling 100. The rotor 300 can be connected to the driven shaft 120 of the coupling 100, and can be rotatably disposed within the cylinder 400. The torque output end 111 of the coupling 100 can be coupled to the torque receiving end 121 of the coupling 100.

[0055] The above implementation process is the same as that of the coupling 100 described above, and will not be repeated here.

[0056] Please continue to refer to Figure 2 In some alternative embodiments, the cylinder body 400 may include a cylindrical body 410 and an end cap 420. The cylindrical body 410 may have an open end, and an internal space is formed around its outer edge. The rotor 300 and the driven shaft 120 of the coupling 100 may be located within the internal space. The end cap 420 may be located between the driving shaft 110 and the driven shaft 120 of the coupling 100, and may be sealingly connected to the open end of the cylindrical body 410.

[0057] In other words, the cylinder 410 and the end cap 420 can be sealed by static sealing.

[0058] In the above implementation process, the cylinder 400 is sealed by static sealing through the transmission based on the coupling 100, which not only improves the sealing performance of the vacuum pump 10, but also simplifies the sealing method of the vacuum pump 10.

[0059] Please continue to refer to Figure 2 In some alternative implementations, the rotary drive 200 may include a permanent magnet motor.

[0060] A permanent magnet motor is a type of motor that uses permanent magnets to generate a constant magnetic field, thereby converting electrical energy into mechanical energy.

[0061] In the above implementation process, by using a permanent magnet motor as the driving component of the vacuum pump 10, the permanent magnet can be coupled with the first magnetic component 112 and the second magnetic component 122 respectively, thereby enhancing the overall magnetic field strength, improving the torque transmission efficiency, and ultimately improving the working efficiency of the vacuum pump 10.

[0062] Please continue to refer to Figure 2 In some alternative implementations, the two ends of the rotor 300 can be rotatably connected to the cylinder 400 via bearings 500.

[0063] Bearing 500 may include non-magnetic bearings, such as ceramic ball bearings.

[0064] In the above implementation process, by using a non-magnetic bearing as the specific type of bearing 500, interference from the magnetic components on the bearing 500 with the magnetic field generated by the first magnetic component 112 and the second magnetic component 122 in the coupling 100 is avoided, thereby ensuring the efficiency of torque transmission by the coupling 100. This correspondingly improves the working efficiency of the vacuum pump 10.

[0065] Based on the same concept, embodiments of this application provide a vacuum working system, which may include a target chamber and the vacuum pump 10 described above. The target chamber may be connected to the pumping end of the vacuum pump 10 and may be used to provide a vacuum working environment when a target vacuum level is achieved.

[0066] When the target chamber is pumped to the target vacuum level by vacuum pump 10, photovoltaic, semiconductor, chemical, and pharmaceutical processes are carried out inside the target chamber.

[0067] The above implementation process is the same as that of the vacuum pump 10 described above, and will not be repeated here.

[0068] In summary, the coupling 100, vacuum pump 10, and vacuum working system provided in the various embodiments of this application transmit torque through magnetic coupling between the driving shaft 110 and the driven shaft 120, eliminating the need for physical contact between the driving shaft 110 and the driven shaft 120, thus improving applicability to equipment requiring sealing. By providing multiple first magnetic elements 112 and second magnetic elements 122 at the torque output end 111 and the torque receiving end 121 respectively, and arranging them in an alternating manner with opposite magnetic poles, the central angle of the arc occupied by a single normal magnetic force is reduced, thereby improving the efficiency and stability of torque transmission. Through an arrangement where the occupied arc and the gap are equal, each first magnetic element 112 can be directly aligned with the gap between the second magnetic elements 122, and each second magnetic element 122 can also be directly aligned with the gap between the first magnetic elements 112, further improving the efficiency and stability of torque transmission. The vacuum pump 10 uses a static seal to seal the cylinder 400 through transmission based on the coupling 100, which not only improves the sealing performance of the vacuum pump 10 but also simplifies the sealing method. By using a non-magnetic bearing as the specific type of bearing 500, interference from the magnetic components on the bearing 500 with the magnetic field generated by the first magnetic element 112 and the second magnetic element 122 in the coupling 100 is avoided, thereby ensuring the efficiency of torque transmission by the coupling 100. Consequently, the working efficiency of the vacuum pump 10 is improved.

[0069] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A coupling, characterized in that, Including the driving shaft and the driven shaft; The drive shaft has a torque output end, and the driven shaft has a torque receiving end; A first magnetic element is provided on the torque output end; The first magnetic element is located in the circumferential direction of the torque output end, and the central angle corresponding to the arc occupied by the first magnetic element in the circumferential direction of the torque output end does not exceed 180°. A second magnetic element is provided on the torque receiving end; The second magnetic element is located in the circumference of the torque receiving end, and the central angle corresponding to the arc occupied by the second magnetic element in the circumference of the torque receiving end does not exceed 180°. The torque output end and the torque receiving end transmit torque through magnetic coupling.

2. The coupling according to claim 1, characterized in that The number of the first magnetic components is not less than two; In at least two of the first magnetic elements, the first magnetic poles of a portion of the first magnetic elements are aligned with the orientation of the torque output end, and the second magnetic poles of another portion of the first magnetic elements are aligned with the orientation of the torque output end, and are alternately arranged around the circumference of the torque output end; The number of the second magnetic component shall not be less than two; In at least two second magnetic elements, the second magnetic poles of a portion of the second magnetic elements are aligned with the orientation of the torque receiving end, while the second magnetic poles of another portion of the second magnetic elements are aligned with the orientation of the torque receiving end, and are alternately arranged around the circumference of the torque receiving end. The first magnetic pole and the second magnetic pole are opposite magnetic poles.

3. The coupling of claim 2, wherein, in, The number of the first magnetic components is equal to the number of the second magnetic components.

4. The coupling of claim 2, wherein, The first magnetic element is uniformly arranged circumferentially at the torque output end; The second magnetic element is uniformly arranged circumferentially at the torque receiving end.

5. The coupling of claim 4, wherein, The central angle corresponding to the circumferential arc occupied by the gap between the first magnetic components at the torque output end is equal to the central angle corresponding to the circumferential arc occupied by a single first magnetic component at the torque output end. The central angle corresponding to the circumferential arc occupied by the gap between the second magnetic components at the torque receiving end is equal to the central angle corresponding to the circumferential arc occupied by a single second magnetic component at the torque receiving end.

6. A vacuum pump, characterized by Includes a rotary drive, a rotor, a cylinder, and a coupling according to any one of claims 1 to 5; The drive output shaft of the rotary drive component is connected to the drive shaft of the coupling; The rotor is connected to the driven shaft of the coupling and is rotatably disposed within the cylinder body; The torque output end of the coupling is coupled to the torque receiving end of the coupling.

7. Vacuum pump according to claim 6, characterized in that The cylinder body includes a cylindrical body and an end cap; The cylinder has an open end and an internal space formed by the outer edge of the cylinder; The rotor and the driven shaft of the coupling are located in the internal space; The end cap is located between the driving shaft and the driven shaft of the coupling and is sealed to the open end of the cylinder.

8. Vacuum pump according to claim 6, characterized in that The rotary drive component includes a permanent magnet motor.

9. Vacuum pump according to claim 6, characterized in that The rotor is rotatably connected to the cylinder body at both ends by bearings; wherein the bearings include non-magnetic bearings.

10. A vacuum working system, characterized by Includes a target chamber and a vacuum pump according to any one of claims 6 to 9; The target chamber is connected to the pumping end of the vacuum pump and is used to provide a vacuum working environment when the target vacuum level is achieved.

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