Polishing head capable of switching a plurality of preset polishing areas and chemical mechanical polishing apparatus

Abstract

The utility model relates to chemical mechanical grinding technical field discloses a kind of grinding head and chemical mechanical grinding equipment with multiple preset grinding area can be switched, including grinding head shell, external retaining ring;Rotary control disc is set in the retaining ring of grinding head shell, at least 2 groups of through preset air hole groups are arranged along its radial direction interval, and the preset air hole group is composed of different number and shape hole structure;Several pressure chambers, upper end and the rotary control disc sealed rotary contact, its lower end and adsorption film contact;Several pressure supply pipelines, sequentially arranged along the radial direction of rotary control disc and corresponding to several pressure chambers one by one, one end is connected with pressure supply equipment, after the other end and preset air hole group in rotary control disc butt joint, and several pressure chambers are sealed communication.Compared with prior art, the utility model expands the grinding mode of grinding head to more preset pressure supply mode, and according to product selection optimal preset grinding subarea to flexibly respond to various actual grinding needs.

Description

Technical Field

[0001] This utility model relates to the field of chemical mechanical polishing technology, and in particular to a polishing head and chemical mechanical polishing equipment that can switch between multiple preset polishing zones. Background Technology

[0002] In the field of chemical mechanical polishing (CMP) for semiconductor manufacturing, a variety of interrelated factors influence the overall polishing effect and product quality. Among these, the material removal rate (MRR) is a decisive factor, and the MRR is closely related to the pressure applied during polishing. Traditionally, MRR is often considered to be directly proportional to the polishing pressure. Therefore, precisely controlling the polishing pressure is a crucial challenge to overcome in order to achieve high-precision polishing and meet increasingly stringent practical standards.

[0003] In achieving precise grinding, the design of the grinding head is paramount. After extensive exploration and research, researchers and engineers have proposed various wafer mounting structure designs. Currently, 8-inch wafers, due to their lower process precision requirements, are mostly produced using 3-zone grinding heads. However, in the production of 12-inch wafers, the mainstream fixed-structure grinding head is typically a ring-shaped pneumatic compression clamp. Currently, two types of zoned grinding heads are widely used: a 5-zone adjustable grinding head, suitable for low-to-mid-range products, with simple adjustment and low cost; and a 7-zone grinding head, which allows for precise adjustment but is complex and costly. The main problems currently encountered in production are as follows:

[0004] 1. Traditional grinding heads struggle to adapt flexibly to the diverse grinding needs of different wafers. Mainstream CMP fixtures have fixed and unique pressure presets, which are insufficient for complex grinding tasks. 2. While the 5-zone grinding head commonly used in 12-inch wafer production offers advantages such as low cost and ease of operation, the 7-zone grinding head offers greater precision and higher product quality. However, due to the complexity of head replacement, there is currently no grinding head that can switch between 5-zone and 7-zone grinding modes. Typically, only one type of grinding head can be used to produce various products with different requirements, making it difficult to balance cost and quality.

[0005] There is an urgent need for a grinding head that can provide multiple pressure presets and switch between them to solve these problems. Utility Model Content

[0006] Purpose of the utility model: In view of the problems existing in the prior art, this utility model provides a grinding head and chemical mechanical grinding equipment that can switch between multiple preset grinding zones, which can expand the grinding mode of the grinding head to more preset pressure supply modes, and select the optimal preset grinding zone according to the product to flexibly meet various actual grinding needs.

[0007] Technical solution: This utility model provides a grinding head with switchable multiple preset grinding areas, including:

[0008] Grinding head housing, with an external retaining ring;

[0009] A rotary control disk is disposed within a retaining ring of the grinding head housing, and at least two sets of pre-set through-hole groups are arranged at intervals along its radial direction. The pre-set hole groups are composed of pore structures of different numbers and shapes.

[0010] Several pressure chambers are disposed inside the grinding head housing, with their upper ends in sealed rotational contact with the rotary control disk and their lower ends in contact with the adsorption membrane;

[0011] Several pressure supply lines are installed inside the grinding head housing, arranged sequentially along a certain radius of the rotating control disc and corresponding one-to-one with several pressure chambers. One end of each line is connected to the pressure supply device, and the other end is connected to the preset air hole group in the rotating control disc and then sealed and connected to several pressure chambers.

[0012] Furthermore, the number of preset air hole groups on the rotating control disk is no more than 12, and each preset air hole group is set at a different position along the radius direction of the rotating control disk.

[0013] Furthermore, the pressure chamber includes at least five pressure chambers, namely chambers Z1 to Z5, which are concentrically arranged around the center of the adsorption membrane. Chamber Z5 is in contact with the circular area of ​​the adsorption membrane, and chambers Z4 to Z1 are arranged radially outward from chamber Z5, and are in contact with the annular area of ​​the adsorption membrane.

[0014] Furthermore, five pressure supply lines are provided, each corresponding to one of the five pressure chambers. When the rotating control disc rotates to connect with different preset air hole groups, a portion of the pressure supply lines are connected to one or more pressure chambers, while the remaining pressure supply lines are not connected to any pressure chamber and are in an idle or closed state.

[0015] Furthermore, the number of preset pore groups in each group is less than or equal to 5, and the pore cross-sectional shape includes square and / or sloping right-angled trapezoid and / or sloping isosceles trapezoid.

[0016] Furthermore, the preset air hole group is provided in 3 sets:

[0017] The first set of preset air holes consists of 5 spaced cylindrical air holes. When the rotating control disk rotates to the point where the 5 cylindrical air holes correspond to the 5 pressure supply lines respectively, the 5 cylindrical air holes are connected to the 5 pressure chambers respectively.

[0018] The second set of preset air holes has three air holes arranged sequentially from the center of the rotating control disk outwards. The air hole cross-section shapes are a first slope right-angled trapezoid, a first square, and a second slope right-angled trapezoid. When the rotating control disk rotates to the point where the three air holes are directly aligned with the five pressure supply lines, the first slope right-angled trapezoid is connected to chambers Z5 and Z4, the first square is connected to chamber Z3, and the second slope right-angled trapezoid is connected to chambers Z2 and Z1.

[0019] The third set of preset air holes consists of three air holes arranged sequentially from the center of the rotating control disk outwards. The air hole cross-sectional shapes are a second square, a sloping isosceles trapezoid, and a third square. When the rotating control disk rotates to the point where the three air holes are aligned with the five pressure supply lines, the second square connects to the Z5 chamber, the sloping isosceles trapezoid connects to the Z2~Z4 chambers, and the third square connects to the Z1 chamber.

[0020] Furthermore, the rotary control disk is also provided with a rotary drive assembly for driving the rotary control disk to rotate.

[0021] Furthermore, the rotary drive assembly includes a rotating rod disposed inside the grinding head housing and connected to the upper end of the rotary control disk, and a first drive motor for driving the rotating rod to rotate, wherein the rotating rod and the grinding head housing are sealed together.

[0022] Furthermore, the grinding head is also provided with a fastening mechanism for fixing the rotation control disk. The fastening mechanism includes a limiting bolt, which passes through the retaining ring and is directly opposite the position of the rotation control disk.

[0023] The present invention also discloses a chemical mechanical grinding apparatus, including the above-mentioned grinding head with multiple preset grinding zones. Beneficial effects

[0024] 1. This utility model incorporates a rotary control disc into a traditional grinding head. The rotary control disc has a shower-like structure, with one side connected to the pressure supply line and the other side connected to the pressure chamber. The rotary control disc has different through-structures in different directions and radii, thereby achieving adjustable connection between the pressure supply line and the pressure chamber. By rotating the control disc, different preset air holes can be switched to face the pressure supply line, so that each air hole is connected to one pressure supply line on one side and multiple pressure chambers on the other side, ensuring that each pressure chamber is connected to one pressure supply line. Each pressure supply line can switch between an idle maintenance state without connection and a working state connecting one or more chambers, which can meet the needs of selecting the optimal preset grinding zone for grinding according to the product.

[0025] 2. This utility model can preset multiple sets of air holes according to actual product needs. Different sets of air holes can provide different pressures to the pressure chamber. Moreover, for ease of control, the preset air hole sets can be set at equal angles along the circumferential radius. In this way, during control, the relative position of the rotating control disc can be precisely controlled by rotating the corresponding degree each time.

[0026] 3. In this embodiment of the invention, five pressure chambers are provided, suitable for switchable five-zone and three-zone pressure supply control. Five sets of pressure supply lines T1-T5 are connected to five pressure chambers Z1-Z5. When the rotating control disc rotates to side A between the pressure supply lines and the pressure chambers, it functions similarly to a traditional grinding head, with the five sets of pressure supply lines corresponding to the five pressure chambers. When the rotating control disc rotates to side B between the pressure supply lines and the pressure chambers, pressure supply lines T2 / T4 are blocked by the rotating control disc and are not affected by the pressure of other pressure supply lines, remaining idle or closed. Pressure supply line T3 is normally connected to Z3 for pressure supply, while pressure supply line T1 forms a sealed area with chambers Z1 / Z2, thus supplying pressure to chambers Z1 / Z2 together. Similarly, T5 can supply pressure to chambers Z1 / Z2 together. This grinding preset is suitable for grinding requirements with high precision in medium radius (Z3 area) and low precision in other areas. When the rotary control disc rotates to side C between the pressure supply line and the chamber, T2 / T4 are blocked by the rotation of the rotary control disc and will not be affected by the pressure of other pressure supply lines. They are in an idle or closed state. T1 / T5 are connected to Z1 / Z5 respectively for pressure supply, while T3 forms a sealed area with the three chambers Z2-Z4, thereby supplying pressure to these three chambers together.

[0027] 4. In controlling the rotation of the control disc, this invention can be driven by a drive motor. A rotating rod and drive motor are directly installed inside the grinding head housing. The drive motor drives the rotating rod to rotate, and the rotating rod is connected to the center of the control disc, causing the control disc to rotate. This control process can be controlled by a PLC, connected to the surface of the grinding head housing via wiring. A control switch is located on the surface of the grinding head housing for easy control. This invention can also use other driving methods, not limited to motor drive.

[0028] 5. After the rotary control disc is rotated to the target position, it can be fastened by a fastening device, such as by passing a limiting bolt through the retaining ring and tightening the limiting bolt to achieve relative fixation of the rotary control disc.

[0029] 6. The chemical mechanical polishing equipment disclosed in this utility model can adapt to the needs of different products by using the polishing head of this utility model, and can achieve different polishing requirements by selecting different pressure supply methods. In actual polishing, it is only necessary to first adjust the rotation control disc of the polishing head, and then drive the polishing table to rotate, and control the up and down pressure, rotation, forward and backward, and left and right movement of the polishing head to achieve precise polishing. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0031] Figure 2 This is a top view and a cross-sectional view of the rotary control disk of this utility model;

[0032] Figure 3 This is a schematic cross-sectional view of the working state of the rotating control disc of the pre-set air hole group in Group A of this utility model.

[0033] Figure 4 This is a schematic diagram of the cross-sectional structure of the rotating control disc of the pre-set air hole group in group B of this utility model in working state.

[0034] Figure 5 This is a cross-sectional structural diagram of the rotating control disk of the preset air hole group in group C of this utility model in its working state.

[0035] Among them, 1-grinding head housing, 2-retaining ring, 3-rotation control disk, 4-pressure supply line, 5-pressure chamber, 6-adsorption membrane, 7-grinding pad, 8-polishing table, 9-wafer, 10-rotating rod, 11-first drive motor, 12-limiting bolt, 13-rotation shaft one, 14-rotation shaft two, 15-second drive motor, 16-third drive motor, 17-fourth drive motor, 18-fifth drive motor, 19-arm, 20-rotation shaft. Detailed Implementation

[0036] The present invention will now be described in detail with reference to the accompanying drawings.

[0037] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0039] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0040] This utility model discloses a grinding head that can switch between multiple preset grinding zones. See [link to relevant documentation] Figure 1 ,include:

[0041] The grinding head housing 1 has an external retaining ring 2. The retaining ring 2 is a circular structure and is located on the outer periphery of the grinding head housing 1, serving a limiting and retaining function. This invention adds a rotating control disk 3 to the traditional grinding head. The rotating control disk 3 is placed inside the retaining ring 2 of the grinding head housing 1, and has X sets of preset air holes spaced at intervals along its radial direction. Each preset air hole set consists of a number and shape of holes. The rotating control disk 3 is a solid disk with openings. The number of preset air hole sets X on the rotating control disk 3 is at least 2 sets and no more than 12 sets, with each set of preset air holes positioned at different locations along the radial direction of the rotating control disk 3.

[0042] Note: The settings can be customized according to actual needs. Different orientations with equal angular spacing can be set; if set at equal angles, the angle between different preset vent groups is 360 degrees / X. Different directions with unequal angular spacing can also be set, depending on actual requirements.

[0043] The grinding head is also provided with several pressure chambers 5, with a minimum of 5 pressure chambers 5, which are located inside the grinding head housing 1. The upper end of the pressure chambers 5 is in sealed rotational contact with the rotation control disk 3, and the lower end is in contact with the adsorption membrane 6.

[0044] Several pressure supply lines 4 are arranged inside the grinding head housing 1, arranged sequentially along a certain radius of the rotating control disk 3. Their number is the same as the number of pressure chambers 5, and they correspond one-to-one with several pressure chambers 5. One end of the pressure supply line 4 is connected to the pressure supply device, and the other end is connected to the preset air hole group in the rotating control disk 3 and then sealed and connected to several pressure chambers 5.

[0045] The rotary control disk 3 is also provided with a rotary drive assembly for driving the rotary control disk 3 to rotate. The rotary drive assembly includes a rotating rod 10 disposed inside the grinding head housing 1 and connected to the upper end of the rotary control disk 3, and a first drive motor 11 for driving the rotating rod 10 to rotate. The rotating rod 10 and the grinding head housing 1 are sealed together.

[0046] The grinding head is also equipped with a fastening mechanism for fixing the rotary control disk 3. The fastening mechanism includes a limit bolt 12, which passes through the retaining ring 2 and is directly opposite the rotary control disk 3.

[0047] Implementation method 1:

[0048] In this embodiment, there are five pressure chambers 5, designated as chambers Z1 to Z5, see [link / reference]. Figure 1 The Z5 chamber is a circular area that contacts the adsorption membrane 6, and the Z4 to Z1 chambers are arranged concentrically around the center of the adsorption membrane 6.

[0049] Five pressure supply lines 4 are provided, each corresponding to one of the five pressure chambers 5. When the control disc 3 is rotated to connect different preset vent groups with the pressure supply lines 4, a portion of the pressure supply lines 4 are connected to one or more pressure chambers 5, while the remaining pressure supply lines 4 are not connected to any pressure chamber 5 and are in an idle or closed state. Pressure supply lines 4 connected to at least one pressure chamber 5 should be opened by rotating the control disc 3, while pressure supply lines 4 not connected to any pressure chamber 5 should be in an idle or closed state. The number of preset vent groups in each group is less than or equal to five, and the vent cross-sectional shape includes square and / or sloping right-angled trapezoids and / or sloping isosceles trapezoids.

[0050] Implementation Method 2:

[0051] This embodiment is a further technical limitation of embodiment 1, specifically: three sets of preset air holes are provided, namely groups A, B, and C, which are respectively arranged along the 0-degree, 90-degree, and 270-degree directions. A top view and cross-sectional schematic diagram of the rotation control disc are shown below. Figure 2 As shown.

[0052] The first set of preset air holes, group A, consists of 5 spaced cylindrical air holes. When the control disc 3 rotates to the point where each of the 5 cylindrical air holes corresponds to one of the 5 pressure supply lines 4, the 5 cylindrical air holes are connected to the 5 pressure chambers 5 respectively. At this point, see [reference needed]. Figure 3 The specific operation is as follows:

[0053] The control disc 3 is rotated to align with the five pressure supply lines 4 (T1~T5) and the five pressure chambers 5 (Z1~Z5). The preset air hole group A is directly opposite them. One side of the preset air hole group A is connected to the pressure supply line 4, and the other side is connected to the pressure chamber 5, similar to a traditional grinding head. The five conventional pressure supply lines 4 are connected to the five circular / annular pressure chambers 5 via the five air holes of the preset air hole group A, and then locked in place by the limit bolts 12. Open all five pressure supply lines 4, set the pressure parameters, and begin grinding.

[0054] The second set of preset air vents, group B, consists of three air vents arranged sequentially outward from the center of the rotating control disk 3. The air vent cross-sections are a first sloped right-angled trapezoid, a first square, and a second sloped right-angled trapezoid. When the rotating control disk 3 rotates until the three air vents are directly aligned with the five pressure supply lines 4, the first sloped right-angled trapezoid connects to chambers Z5 and Z4, the first square connects to chamber Z3, and the second sloped right-angled trapezoid connects to chambers Z2 and Z1. (See also...) Figure 4 At this point, the upper base of the first sloping right-angled trapezoid faces the T5 pressure supply pipeline, and the lower base faces the Z5 and Z4 chambers. The T5 pressure supply pipeline forms a sealed area with the Z5 and Z4 chambers. The T4 pressure supply pipeline is blocked by the rotating control disc 3 and is not affected by the pressure of other pressure supply systems, remaining idle or closed. The upper end of the first square faces the T3 pressure supply pipeline, and the lower end faces the Z3 chamber. The T2 pressure supply pipeline is blocked by the rotating control disc 3 and is not affected by the pressure of other pressure supply systems, remaining idle or closed. The upper base of the second sloping right-angled trapezoid faces the T1 pressure supply pipeline, and the lower base faces the Z1 and Z2 chambers, forming a sealed area with the Z1 / Z2 chambers. It is then locked in place by the limit bolt 12. In actual operation, the pressure supply pipelines T1, T3, and T5 are opened, and the pressure parameters are set to grind Z1, Z2-Z4, and Z5 respectively. This grinding preset is suitable for grinding needs where high precision is required in the medium radius (Z3 area) and low precision is required in other areas.

[0055] The third group of preset air holes, group C, consists of three air holes arranged sequentially from the center of the rotating control disk 3 outwards. The air hole cross-sectional shapes are a second square, a sloping isosceles trapezoid, and a third square. When the rotating control disk 3 rotates to the point where the three air holes are directly aligned with the five pressure supply lines 4, the second square is connected to the Z5 chamber, the sloping isosceles trapezoid is connected to the Z2~Z4 chambers, and the third square is connected to the Z1 chamber.

[0056] See Figure 5At this point, the upper end of the second square is directly opposite the T5 pressure supply line, and the lower end is directly opposite the Z5 chamber, forming a sealed area between the T5 pressure supply line and the Z5 chamber. The T4 pressure supply line is blocked by the rotating control disc 3 and is not affected by the pressure of other pressure supply systems, remaining idle or closed. The upper base of the sloping isosceles trapezoid is directly opposite the T3 pressure supply line, and the lower base is directly opposite the Z2-Z4 chambers, forming a sealed area between the T3 pressure supply line and the Z2-Z4 chambers. The T2 pressure supply line is blocked by the rotating control disc 3 and is not affected by the pressure of other pressure supply systems, remaining idle or closed. The upper end of the third square is directly opposite the T1 pressure supply line, and the lower end is directly opposite the Z1 chamber, forming a sealed area with the Z1 chamber, and then it is locked in place by the limit bolt 12. In actual operation, the pressure supply lines T1, T3, and T5 are opened, and the pressure parameters are set to grind Z1-Z2, Z2, and Z4-Z5 respectively.

[0057] Finally, if the rotary control disk 3 is rotated to 180 degrees, all pressure supply lines will be blocked by the rotary control disk 3, and all pressure supply lines will be idle or closed, so grinding is not required.

[0058] Implementation Method 3:

[0059] This utility model also discloses a chemical mechanical polishing (CMP) apparatus, including a polishing head capable of switching between multiple preset polishing areas as described in Embodiment 1, 2, or 3 above. During the actual polishing process, the CMP apparatus further includes a polishing table 8, a polishing pad 7, a drive mechanism 1 for rotating the polishing table 8, and a drive mechanism 2 for rotating the polishing head and moving it in the X / Y / Z directions. The polishing table 8 is equipped with the polishing pad 7, the polishing head is mounted on the polishing pad 7, and the wafer 9 is positioned within the polishing head retaining ring 2 of the polishing pad 7. See also... Figure 1 The drive includes a rotating shaft 13 located at the lower center of the polishing table 8. A second drive motor 15 is driven and connected to the rotating shaft 13, which drives the rotating shaft 13 to rotate, thereby rotating the polishing table 8. A second rotating shaft 14 is located at the upper center of the grinding head housing 1, and is coupled to a third drive motor 16, which in turn is coupled to the arm 19. The third drive motor 16 moves the grinding head laterally relative to the arm 19 in a linear motion (X and / or Y direction). The grinding head also includes an actuator or a fourth drive motor to move the grinding head relative to the arm 19 and / or the polishing pad 7 in the Z direction. The grinding head is also coupled to a rotary actuator or a fifth drive motor 18, which rotates the grinding head about a rotating shaft 20 relative to the arm 19.

[0060] The third drive motor 16, the fourth drive motor 17, and the fifth drive motor 18 position and / or move the polishing head relative to the polishing surface of the polishing pad 7. The fourth drive motor 17 and the fifth drive motor 18 rotate the polishing head relative to the polishing surface and provide a downward force to cause the wafer 9 to press against the polishing surface of the polishing pad 7 during processing.

[0061] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent transformations or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A grinding head capable of switching between multiple preset grinding zones, characterized in that, include: Grinding head housing (1), external retaining ring (2); A rotating control disk (3) is set inside the retaining ring (2) of the grinding head housing (1), and at least two sets of through-hole groups are arranged at intervals along its radial direction. The set of through-hole groups consists of pore structures of different numbers and shapes. Several pressure chambers (5) are set inside the grinding head housing (1), with their upper ends in sealed rotational contact with the rotary control disk (3) and their lower ends in contact with the adsorption membrane (6); Several pressure supply lines (4) are set inside the grinding head housing (1), arranged sequentially along a certain radius of the rotating control disk (3) and corresponding one-to-one with several pressure chambers (5). One end of each line is connected to the pressure supply device, and the other end is connected to the preset air hole group in the rotating control disk (3) and then sealed and connected to several pressure chambers (5).

2. A grinding head with switchable multiple preset grinding areas according to claim 1, characterized in that, The number of preset air hole groups X set on the rotating control disk (3) is no more than 12, and each preset air hole group is set in a different orientation along the radius direction of the rotating control disk (3).

3. A grinding head with switchable multiple preset grinding zones according to claim 1, characterized in that, The number of pressure chambers (5) is at least 5, namely chambers Z1 to Z5, which are arranged concentrically around the center of the adsorption membrane (6). Chamber Z5 is in contact with the circular area of ​​the adsorption membrane, and chambers Z4 to Z1 are arranged radially outward from chamber Z5, and are in contact with the annular area of ​​the adsorption membrane (6).

4. A grinding head with switchable multiple preset grinding zones according to claim 3, characterized in that, Five pressure supply lines (4) are provided, each facing one of the five pressure chambers (5). When the rotating control disk (3) rotates to connect different preset air hole groups with the pressure supply lines (4), a portion of the pressure supply lines (4) are connected to one or more pressure chambers (5), while the remaining pressure supply lines (4) are not connected to any pressure chamber (5) and are in an idle or closed state.

5. A grinding head with switchable multiple preset grinding zones according to claim 3, characterized in that, The number of preset pore groups in each group is less than or equal to 5, and the pore cross-sectional shape includes square and / or sloping right-angled trapezoid and / or sloping isosceles trapezoid.

6. A grinding head with switchable multiple preset grinding zones according to claim 5, characterized in that, The preset pore group is provided in 3 groups: The first set of preset air holes consists of 5 spaced cylindrical air holes. When the rotating control disk (3) rotates to the point where the 5 cylindrical air holes correspond to the 5 pressure supply lines (4), the 5 cylindrical air holes are connected to the 5 pressure chambers (5). The second set of preset air holes has three air holes arranged sequentially from the center of the rotating control disk (3) outwards. The air hole cross-section shape is a first slope right-angled trapezoid, a first square, and a second slope right-angled trapezoid. When the rotating control disk (3) rotates to the point where the three air holes are directly opposite the five pressure supply lines (4), the first slope right-angled trapezoid is connected to the Z5 chamber and the Z4 chamber, the first square is connected to the Z3 chamber, and the second slope right-angled trapezoid is connected to the Z2 and Z1 chambers. The third set of preset air holes has three air holes arranged sequentially from the center of the rotating control disk (3) outwards, with the air hole cross-section shape being a second square, a sloping isosceles trapezoid, and a third square. When the rotating control disk (3) rotates to the point where the three air holes are directly aligned with the five pressure supply lines (4), the second square is connected to the Z5 chamber, the sloping isosceles trapezoid is connected to the Z2~Z4 chambers, and the third square is connected to the Z1 chamber.

7. A grinding head with switchable multiple preset grinding areas according to claim 1, characterized in that, The rotary control disk (3) is also provided with a rotary drive assembly for driving the rotary control disk (3) to rotate.

8. A grinding head with switchable multiple preset grinding zones according to claim 7, characterized in that, The rotary drive assembly includes a rotating rod (10) disposed inside the grinding head housing (1) and connected to the upper end of the rotary control disk (3), and a first drive motor (11) that drives the rotating rod (10) to rotate. The rotating rod (10) and the grinding head housing (1) are sealed together.

9. A grinding head with switchable multiple preset grinding areas according to claim 1, characterized in that, The grinding head is also provided with a fastening mechanism for fixing the rotating control disk (3). The fastening mechanism includes a limiting bolt (12), which passes through the retaining ring (2) and is directly opposite to the rotating control disk (3).

10. A chemical mechanical grinding apparatus, characterized in that, The grinding head with switchable multiple preset grinding areas as described in any one of claims 1 to 9.

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