Electromagnetic angle valve

Abstract

The utility model discloses an electromagnetic angle valve, including casing, moving iron core subassembly and static iron core subassembly, moving iron core subassembly includes bellow, compression spring, moving iron core, connecting rod, guide ring and adjusting screw, and static iron core subassembly includes electromagnetic coil, circuit board, yoke, static iron core and magnetic isolation ring. The utility model discloses through setting up "T" type moving iron core and thin wall electromagnetic coil combination structure, can accommodate big spring's bellow seal subassembly, only exhaust port gas buffer structure and be used for the stable magnetic isolation ring of suction under alternating current, has realized electromagnetic suction force promotion, buffer performance enhancement and stable sealing under 2bar pressure difference condition. It is applicable to the vacuum pipeline system of high vacuum system need quick opening and closing and the high sealing requirement.

Description

Technical Field

[0001] This utility model relates to the field of vacuum valve technology, and in particular to an electromagnetic angle valve. Background Technology

[0002] Vacuum valves are key components used in vacuum systems to control the flow, flow rate, and direction of gas. They are widely used in semiconductor manufacturing, vacuum coating, particle beam equipment, and the nuclear industry. Among them, electromagnetic angle valves are widely used in pre-evacuation and shut-off functions of high vacuum systems due to their advantages of fast response and ease of control.

[0003] However, existing electromagnetic angle valve products generally have the following defects:

[0004] 1. Poor buffering performance: The valve core experiences significant impact during the switching process, leading to easy damage to the mechanical structure and a limited service life;

[0005] 2. Insufficient pressure resistance: It can usually only withstand a pressure difference of 1 bar, which cannot meet the vacuum sealing requirements in high pressure difference scenarios;

[0006] 3. Limited suction force: Due to the limited suction force design of the electromagnet, it cannot drive a spring with a larger clamping force, resulting in limited overall sealing performance;

[0007] 4. Insufficient structural optimization: Key parameters such as magnetic flux path, structural fit, and guiding accuracy have not been fully optimized, affecting electromagnetic efficiency and opening / closing stability.

[0008] Therefore, there is an urgent need to provide a new type of electromagnetic angle valve with optimized structure, good buffering performance, and the ability to withstand higher pressure differentials. Utility Model Content

[0009] The purpose of this invention is to provide an electromagnetic angle valve to overcome the problems of "insignificant buffering effect" and "inability to withstand high pressure differential" in the prior art.

[0010] This utility model is achieved using the following technical solution: an electromagnetic angle valve, characterized in that it includes a housing, a moving iron core assembly, and a stationary iron core assembly. The moving iron core assembly is axially movable within the housing, and the stationary iron core assembly is disposed above the housing. The electromagnetic angle valve has an internal air buffer structure, which includes an air outlet channel and an adjusting screw for adjusting the opening of the air outlet channel. The air outlet channel connects the internal cavity between the moving iron core assembly and the stationary iron core assembly with the external environment, and is used to restrict gas from being discharged only through the air outlet channel during the movement of the moving iron core assembly, thereby achieving buffer control during the switching process.

[0011] Furthermore, the moving iron core assembly includes a base, which is disposed between the housing and the stationary iron core assembly. The adjusting screw is disposed on the base and is used to adjust the exhaust rate of the exhaust channel.

[0012] Furthermore, the moving iron core has a T-shaped structure, with its outer diameter matching the inner diameter of the yoke, which is used to increase the electromagnetic adsorption area and enhance the attraction force.

[0013] Furthermore, the moving iron core assembly includes a compression spring, a moving iron core, a connecting rod, and a bellows. The compression spring is disposed inside the bellows and is in a compressed state. One end of the connecting rod is connected to the moving iron core above the bellows, and the other end is connected to the valve plate below the bellows.

[0014] Furthermore, the moving iron core assembly further includes a guide ring one and a guide ring two. The guide ring one is disposed in the base and slides in contact with the moving iron core, and the guide ring two is disposed in the bellows and slides in contact with the connecting rod, so as to ensure that the moving iron core moves linearly along the axial direction.

[0015] Furthermore, the stationary iron core assembly includes a stationary iron core and a magnetic isolation ring. The magnetic isolation ring is disposed on the stationary iron core and is used to generate an induced current to stabilize the magnetic flux when the electromagnetic angle valve is driven by AC power. The stationary iron core is fixed inside the yoke.

[0016] Furthermore, the preload of the compression spring is designed to overcome a pressure difference of at least 2 bar.

[0017] The electromagnetic angle valve described in this utility model has the following beneficial effects:

[0018] Good buffering performance: This utility model effectively reduces switching impact and improves service life through the air buffering structure of "single air outlet + adjusting screw";

[0019] High pressure differential resistance: The designed large-section compression spring can provide clamping force to overcome a 2 bar pressure differential. Combined with a large-diameter T-shaped moving iron core structure and optimized magnetic circuit, it ensures sealing reliability under high pressure conditions. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. The drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the present invention;

[0022] Figure 2This is a schematic diagram of the disassembled state of this utility model;

[0023] Figure 3 This is a cross-sectional schematic diagram of the present invention;

[0024] Figure 4 yes Figure 3 Partial schematic diagram at point I in the middle;

[0025] Figure 5 This is a cross-sectional schematic diagram of the moving iron core assembly of this utility model;

[0026] Figure 6 yes Figure 5 Partial schematic diagram at point I in the middle;

[0027] Figure 7 This is a schematic cross-sectional view of the static iron core assembly of this utility model;

[0028] Figure 8 This is a schematic diagram of the valve opening state of this utility model;

[0029] Figure 9 This is a schematic diagram of the valve in the closed state of this utility model;

[0030] In the diagram, 1-housing; 2-moving iron core assembly; 3-stationary iron core assembly; 11-valve core sealing surface; 12-valve port sealing surface; 21-bellows; 22-compression spring; 23-base; 24-moving iron core; 25-connecting rod; 26-adjusting screw; 27-spring limit block; 28-guide ring one; 29-guide ring two; 31-electromagnetic coil; 32-circuit board; 33-yoke; 34-stationary iron core; 35-magnetic shielding ring. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0032] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention. Example

[0033] like Figure 1-9As shown, this embodiment provides an electromagnetic angle valve, including a housing 1, a moving iron core assembly 2, and a stationary iron core assembly 3. The moving iron core assembly 2 can move up and down axially within the housing 1, while the stationary iron core assembly 3 is fixedly disposed on the upper part of the housing 1.

[0034] Specifically, the housing 1 has a valve core sealing surface 11 and a valve port sealing surface 12 inside for valve sealing; the moving iron core assembly 2 includes a bellows 21, a compression spring 22, a base 23, a moving iron core 24, a connecting rod 25, an adjusting screw 26, a spring limiting block 27, a guide ring 1 28, and a guide ring 29. The connecting rod 25 passes through both ends of the bellows 21. One end of the connecting rod 25 is fixed to the bottom surface of the bellows 21 by a nut, and the other end is connected to the moving iron core 24. The upper end of the bellows 21 is fixed between the base 23 and the valve port sealing surface 12, and the lower end of the bellows 21 is connected to the valve plate. The valve plate is in sealing contact with the valve port sealing surface 12 when the valve is closed. A compression spring 22 is disposed between the bellows 21 and the spring limiting block 27. The spring limiting block 27 is fixed between the base 23 and the upper end face of the bellows 21. The compression spring 22 is in a compressed state, providing clamping force for the valve core when closed, and also providing preload force for the nut at the lower end of the connecting rod 25. The first guide ring 28 is disposed inside the base 23, and the second guide ring 29 is disposed inside the spring limiting block 27, together playing a guiding role to ensure that the moving iron core 24 maintains good axial straightness during up and down movement.

[0035] The stationary iron core assembly 3 includes an electromagnetic coil 31, a circuit board 32, a yoke 33, a stationary iron core 34, and a magnetic shielding ring 35. The stationary iron core 34 is fixed on the yoke 33, and the electromagnetic coil 31 is coaxially arranged with the stationary iron core 34. The circuit board 32 is connected to the yoke 33 by screws and to the electromagnetic coil 31 by wires, controlling the on and off of the electromagnetic coil 31. The magnetic shielding ring 35 is disposed in the groove of the contact surface between the stationary iron core 34 and the moving iron core 24, and is used to generate an induced current when using AC power supply, thereby generating an induced electromotive force and preventing the fluctuating electromotive force from being zero.

[0036] In this embodiment, the moving iron core 24 has a "T"-shaped structure, and its outer diameter is close to the inner diameter of the yoke 33, thus obtaining a greater electromagnetic attraction force when energized. The moving iron core 24 drives the bellows 21 and its internal structure to move upward through the connecting rod 25, overcoming the elastic force of the compression spring 22 and opening the valve. When the electromagnetic coil 31 is de-energized, the attraction force disappears, and the elastic force of the compression spring 22 pushes the moving iron core 24 and the connecting rod 25 downward. The valve plate at the lower end of the bellows 21 closes the valve by tightly fitting with the valve port sealing surface 12.

[0037] To achieve the buffering function, the base 23 is provided with an adjustable air hole, and the adjusting screw 26 is used to adjust the opening of the exhaust channel. Thus, when the moving iron core 24 moves up and down, air is slowly discharged through this single exhaust channel, forming an "air buffer" structure, which significantly reduces the impact of switching and extends the service life of the valve.

[0038] Furthermore, the bellows 21 provides a larger accommodating space, allowing the compression spring 22 to have a cross-sectional diameter much larger than conventional designs, thus providing a clamping force to overcome a 2-bar pressure difference. The combination of the "T"-shaped moving iron core 24 and the thin-walled, large-diameter electromagnetic coil 31 structure enables the electromagnet to attract a greater spring force, achieving reliable opening and closing under high pressure differential conditions.

[0039] In summary, this embodiment, by optimizing the electromagnetic and mechanical structures, not only significantly improves the valve's buffering performance but also substantially enhances its pressure resistance, making it suitable for rapid opening and closing control scenarios in high-pressure differential vacuum systems. Example

[0040] This embodiment is a further optimization based on Embodiment 1, specifically:

[0041] An "air buffer" structure is incorporated into the electromagnetic angle valve. This structure, through the arrangement of rubber seals and a single air outlet, ensures that the gas discharged from the moving iron core assembly 2 during valve opening or closing can only exit through a single channel, thus effectively achieving a buffering effect. One end of this channel is located between the moving iron core 24 and the stationary iron core 34, and the other end is located outside the base 23, connecting the moving iron core 24 and the stationary iron core 34 with the outside environment.

[0042] Specifically, the base 23 has a small hole on its outer side for installing an adjusting screw 26. This adjusting screw 26 controls the opening of the single exhaust port, thereby adjusting the gas discharge rate of the moving iron core 24 during its movement and mitigating the impact generated during valve opening and closing. By adjusting the air flow rate, a "buffered transition" is achieved during the up-and-down movement of the moving iron core 24, improving the service life and stability of the electromagnetic angle valve.

[0043] Meanwhile, the numerous rubber seals installed inside the moving iron core assembly 2 can form a closed cavity inside the valve body, thereby restricting the airflow path and ensuring that the gas generated during the switching action must be discharged through this single exhaust port, achieving a stable and adjustable air resistance buffering process.

[0044] This "air buffer" structure can significantly reduce the impact and noise generated by the moving iron core 24 when switching positions without introducing a complex mechanical damping structure, thus avoiding damage to the valve body structure and extending the product's service life. It is especially suitable for vacuum system applications with high-frequency switching. Example

[0045] This embodiment is a further optimization based on Embodiment 1, specifically:

[0046] To improve the sealing capability and structural reliability of the electromagnetic angle valve under high pressure differential environment, this embodiment optimizes the electromagnetic structure and component matching relationship, enabling the product to withstand stable operation under a pressure differential of 2 bar.

[0047] Specifically, this embodiment achieves high pressure differential bearing capacity through the following structure:

[0048] First, the electromagnetic coil 31 adopts a thin-walled structure with a large inner diameter and a very small difference between its inner and outer diameters (D0 / D1=0.75~0.8), which can accommodate a larger moving iron core 24. The diameters of both the moving iron core 24 and the stationary iron core 34 are designed to be relatively large, matching the outer diameter D1 of the winding of the electromagnetic coil 31, ensuring concentrated transmission of magnetic flux, thereby obtaining sufficient attraction force when energized and improving opening performance. At the same time, the gap between the outer diameter D0 of the moving iron core 24 and the inner diameter of the coil support is extremely small, further enhancing the attraction force.

[0049] Secondly, a clear height difference is established between the moving iron core 24 and the base 23. When the valve is open, the moving iron core 24 sinks into the base 23 to a certain depth L0 (approximately 3-4 mm); when the valve is closed, the height difference between the moving iron core 24 and the base 23 is L1 (i.e., L0 + 10 mm of valve stroke, approximately 13 mm). This two-stage structural design ensures that the magnetic flux is fully concentrated during the valve opening process, guaranteeing that the moving iron core 24 can overcome the clamping force provided by the compression spring 22 and achieve stable opening. In the closed state, the structure ensures that the spring is compressed sufficiently to withstand a pressure difference of up to 2 bar without leakage.

[0050] Furthermore, the bellows 21 has sufficient internal space to accommodate a compression spring 22 with a larger cross-section. The spring's clamping force is specifically designed to overcome a pressure difference of 2 bar, thus achieving reliable closure even when the electromagnet is de-energized. The "T"-shaped outer contour of the moving iron core 24 fits tightly with the inner cavity of the yoke 33, further enhancing the adsorption area and magnetic flux aggregation efficiency.

[0051] To ensure the durability of the overall structure, the coil support of the electromagnetic coil 31 is made of wear-resistant material and maintains a very small gap with the moving iron core 24, which effectively prevents the problem of reduced suction force due to mechanical wear during long-term opening and closing, and ensures that the product still has stable performance under high-frequency working conditions.

[0052] Through the above structural optimization, this embodiment can ensure reliable opening and closing of the valve under a pressure difference of 2 bar, while maintaining good sealing performance and buffering effect, making it suitable for various high vacuum systems or high pressure differential pipeline environments.

[0053] The above embodiments describe the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Modifications and variations made by those skilled in the art without departing from the spirit and scope of this utility model should be protected within the scope of the appended claims.

Claims

1. An electromagnetic angle valve, characterized in that, The device includes a housing (1), a moving iron core assembly (2), and a stationary iron core assembly (3). The moving iron core assembly (2) is axially movable within the housing (1), and the stationary iron core assembly (3) is positioned above the housing (1). The electromagnetic angle valve has an internal air buffer structure, which includes an air outlet channel and an adjusting screw (26) for adjusting the opening of the air outlet channel. The air outlet channel connects the internal cavity between the moving iron core assembly (2) and the stationary iron core assembly (3) with the external environment, and is used to restrict gas from being discharged only through the air outlet channel during the movement of the moving iron core assembly (2) to achieve buffer control during the switching process.

2. The electromagnetic angle valve according to claim 1, characterized in that, The moving iron core assembly (2) includes a base (23), which is disposed between the housing (1) and the stationary iron core assembly (3). The adjusting screw (26) is disposed on the base (23) and is used to adjust the exhaust rate of the exhaust channel.

3. The electromagnetic angle valve according to claim 1, characterized in that, The moving iron core (24) has a T-shaped structure, and its outer diameter is matched with the inner diameter of the yoke (33) to increase the electromagnetic adsorption area and enhance the attraction force.

4. An electromagnetic angle valve according to claim 1, characterized in that, The moving iron core assembly (2) includes a compression spring (22), a moving iron core (24), a connecting rod (25), and a bellows (21). The compression spring (22) is located inside the bellows (21) and is in a compressed state. One end of the connecting rod (25) is connected to the moving iron core (24) above the bellows (21), and the other end is connected to the valve plate below the bellows (21).

5. An electromagnetic angle valve according to claim 4, characterized in that, The moving iron core assembly (2) further includes a guide ring one (28) and a guide ring two (29). The guide ring one (28) is disposed in the base (23) and slides in contact with the moving iron core (24). The guide ring two (29) is disposed in the bellows (21) and slides in contact with the connecting rod (25) to ensure that the moving iron core (24) moves linearly along the axial direction.

6. An electromagnetic angle valve according to claim 3, characterized in that, The stationary iron core assembly (3) includes a stationary iron core (34) and a magnetic isolation ring (35). The magnetic isolation ring (35) is disposed on the stationary iron core (34) and is used to generate an induced current to stabilize the magnetic flux when the electromagnetic angle valve is driven by AC. The stationary iron core (34) is fixed inside the yoke (33).

7. An electromagnetic angle valve according to claim 4, characterized in that, The preload of the compression spring (22) is designed to overcome a pressure difference of at least 2 bar.

Images