A leak-proof vacuum chamber

Abstract

The utility model relates to vacuum equipment technical field discloses a kind of leakproof vacuum cavities, including vacuum cavity body, the outer wall of vacuum cavity body is fixed with connection frame, the outer wall of sealing door is provided with sealing door, the side of sealing door is fixedly connected with the side of the side wall of vacuum cavity body by hinged member, the side wall of the both ends of connection frame and sealing door is respectively provided with two groups of sealing reinforcement mechanism of sealing connection frame and sealing door junction place. The utility model is by the second sealing rubber strip and is engaged in the second sealing groove inside, increases the sealing property of the pipeline connection place of connecting pipe and the vacuum equipment of outside, the first sealing rubber strip of sealing door inner wall fixation is engaged in the first sealing groove inside, increases the sealing property between sealing door and connection frame, the connection place of connection frame and sealing door is increased sealing property by the sealing reinforcement mechanism set, realizes the function of preventing leakage to vacuum cavity body.

Description

Technical Field

[0001] This utility model relates to the field of vacuum equipment technology, specifically to a leak-proof vacuum chamber. Background Technology

[0002] A vacuum chamber is a hollow structure with airtight and insulating properties. It isolates the internal and external environments through a sealed outer shell, maintaining an internal vacuum or low-pressure state for precise control. Its core functions include environmental isolation and space containment, and it is widely used in semiconductor manufacturing, nuclear medicine, and other fields to ensure that processes are free from interference from gaseous impurities.

[0003] However, existing vacuum chambers often suffer from leakage problems due to poor sealing performance during use. This not only reduces the vacuum level and affects the process effect, but may also introduce impurities, seriously affecting product quality. Traditional sealing methods often use a single sealing ring, which is prone to aging and deformation after long-term use, leading to sealing failure. Therefore, those skilled in the art provide a leak-proof vacuum chamber to solve the problems mentioned in the background art. Utility Model Content

[0004] The purpose of this invention is to provide a leak-proof vacuum chamber to solve the problems mentioned in the above-mentioned technologies.

[0005] This utility model provides the following technical solution: a leak-proof vacuum chamber, including a vacuum chamber body, a connecting frame fixedly fitted on the outer wall of the vacuum chamber body, a sealing door provided on the outer wall of the sealing door, one side of the sealing door being fixedly connected to one side of the side wall of the vacuum chamber body via a hinge, a connecting pipe fixedly installed on the side wall of the vacuum chamber body, the connecting pipe being located on one side of the hinge, and sealing reinforcement mechanisms at the connection between the sealing connecting frame and the sealing door being provided at both the upper and lower ends of the connecting frame and the sealing door.

[0006] As a preferred embodiment of the above technical solution, the outer wall of the connecting frame is provided with a first sealing groove, the inner wall of the sealing door is fixedly connected with a first sealing strip, the end of the first sealing strip away from the sealing door is engaged inside the first sealing groove, and a transparent observation window is provided at the center of the outer wall of the sealing door.

[0007] As a preferred embodiment of the above technical solution, a first connecting flange is fixedly connected to the end of the connecting pipe away from the vacuum chamber body, a second sealing groove is provided at the end of the first connecting flange away from the vacuum chamber body, and a second connecting flange is provided at the end of the first connecting flange away from the connecting pipe.

[0008] As a preferred embodiment of the above technical solution, a second sealing strip is fixedly connected to the side of the second connecting flange near the first connecting flange, and the end of the second sealing strip away from the second connecting flange is engaged inside the second sealing groove.

[0009] As a preferred embodiment of the above technical solution, the sealing reinforcement mechanism includes two sets of horizontal snap-fit ​​strips that snap-fit ​​together at the upper and lower ends of the connecting frame and the sealing door. One end of each horizontal snap-fit ​​strip is fixedly connected to a vertical snap-fit ​​strip, and the inner sides of the two sets of vertical snap-fit ​​strips are snap-fit ​​together at the two sides of the connecting frame and the sealing door, respectively.

[0010] As a preferred embodiment of the above technical solution, both sets of horizontal and vertical snap-fit ​​strips have mounting grooves inside, and multiple sets of mounting grooves have third sealing strips slidably inserted inside them. The side of each pair of third sealing strips away from the mounting groove is fitted to the connection between the connecting frame and the sealing door.

[0011] As a preferred embodiment of the above technical solution, the ends of the two sets of transverse snap-fit ​​strips away from the vertical snap-fit ​​strips are fixedly connected to a first connecting block, and bolts are inserted into the interior of the two sets of first connecting blocks. The ends of the two sets of vertical snap-fit ​​strips away from the transverse snap-fit ​​strips are fixedly connected to a second connecting block. The bottom end of the bolt penetrates the interior of the second connecting block and extends to the outside of the second connecting block. A threaded sleeve is fitted onto the end of the bolt near the second connecting block.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] This invention increases the sealing performance of the connection between the connecting pipe and the external vacuum equipment by having a second sealing strip engage inside the second sealing groove. The first sealing strip fixed to the inner wall of the sealing door engages inside the first sealing groove, increasing the sealing performance between the sealing door and the connecting frame. The connection between the connecting frame and the sealing door is further sealed by a sealing reinforcement mechanism, thus achieving the function of preventing leakage of the vacuum chamber body and solving the problem of leakage caused by poor sealing performance of existing vacuum chambers. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of a leak-proof vacuum chamber;

[0015] Figure 2 This is a schematic diagram of a leak-proof vacuum chamber with a completely disassembled structure.

[0016] Figure 3 This is a schematic diagram of the connecting frame in a leak-proof vacuum chamber;

[0017] Figure 4 This is a schematic diagram of the connecting pipe structure in a leak-proof vacuum chamber;

[0018] Figure 5 This is a schematic diagram of a leak-proof vacuum cavity sealing reinforcement mechanism.

[0019] In the diagram: 1. Vacuum chamber body; 101. Connecting frame; 102. Sealing door; 103. First sealing groove; 104. First sealing strip; 105. Transparent observation window; 2. Connecting pipe; 201. First connecting flange; 202. Second sealing groove; 203. Second connecting flange; 204. Second sealing strip; 3. Sealing reinforcement mechanism; 301. Horizontal snap-fit ​​strip; 302. Vertical snap-fit ​​strip; 303. Mounting groove; 304. Third sealing strip; 305. First connecting block; 306. Bolt; 307. Second connecting block; 308. Threaded sleeve. Detailed Implementation

[0020] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0021] Please see Figures 1-5 As shown, this utility model provides a technical solution: a leak-proof vacuum chamber, including a vacuum chamber body 1, a connecting frame 101 fixedly fitted on the outer wall of the vacuum chamber body 1, a sealing door 102 provided on the outer wall of the sealing door 102, one side of the sealing door 102 being fixedly connected to one side of the side wall of the vacuum chamber body 1 via a hinge, a first sealing groove 103 being provided on the outer wall of the connecting frame 101, a first sealing strip 104 being fixedly connected to the inner wall of the sealing door 102, one end of the first sealing strip 104 away from the sealing door 102 engaging with the first sealing groove inside the 103, and a transparent observation window 105 being provided at the center of the outer wall of the sealing door 102.

[0022] The vacuum chamber body 1 is sealed by the sealing door 102. The first sealing strip 104 fixed to the inner wall of the sealing door 102 is engaged inside the first sealing groove 103, which increases the sealing between the sealing door 102 and the connecting frame 101. The situation inside the vacuum chamber body 1 can be observed through the transparent observation window 105.

[0023] As one implementation method in this embodiment, please refer to Figure 1 , Figure 3 and Figure 4 As shown, a connecting pipe 2 is fixedly installed on the side wall of the vacuum chamber body 1. The connecting pipe 2 is located on one side of the hinge. A first connecting flange 201 is fixedly connected to the end of the connecting pipe 2 away from the vacuum chamber body 1. A second sealing groove 202 is opened at the end of the first connecting flange 201 away from the vacuum chamber body 1. A second connecting flange 203 is provided at the end of the first connecting flange 201 away from the connecting pipe 2. A second sealing strip 204 is fixedly connected to the side of the second connecting flange 203 close to the first connecting flange 201. The end of the second sealing strip 204 away from the second connecting flange 203 is engaged inside the second sealing groove 202.

[0024] The operator connects the second connecting flange 203 and the first connecting flange 201 to the pipeline of the external vacuum equipment. At the same time, the second sealing strip 204 is engaged inside the second sealing groove 202, which increases the sealing performance of the connection between the connecting pipe 2 and the pipeline of the external vacuum equipment.

[0025] As one implementation method in this embodiment, please refer to Figure 1 , Figure 2 and Figure 5 As shown, both the upper and lower ends of the connecting frame 101 and the sealing door 102 are provided with sealing reinforcement mechanisms 3 at the connection between the connecting frame 101 and the sealing door 102. The sealing reinforcement mechanism 3 includes two sets of horizontal snap-fit ​​strips 301 that are snap-fitted to the upper and lower ends of the connecting frame 101 and the sealing door 102. One end of the horizontal snap-fit ​​strip 301 is fixedly connected to a vertical snap-fit ​​strip 302. The inner sides of the two sets of vertical snap-fit ​​strips 302 are snap-fitted to the two sides of the connecting frame 101 and the sealing door 102, respectively. The interior of both sets of horizontal snap-fit ​​strips 301 and vertical snap-fit ​​strips 302 is provided with mounting grooves 303. A third sealing reinforcement mechanism is slidably inserted into the interior of each of the multiple sets of mounting grooves 303. The sealing strip 304, on the side of each pair of third sealing strips 304 away from the mounting groove 303, is attached to the connection between the connecting frame 101 and the sealing door 102. The ends of the two sets of horizontal snap-fit ​​strips 301 away from the vertical snap-fit ​​strips 302 are fixedly connected to the first connecting block 305. Bolts 306 are inserted into the interior of the two sets of first connecting blocks 305. The ends of the two sets of vertical snap-fit ​​strips 302 away from the horizontal snap-fit ​​strips 301 are fixedly connected to the second connecting block 307. The bottom end of the bolt 306 penetrates the interior of the second connecting block 307 and extends to the outside of the second connecting block 307. The end of the bolt 306 near the second connecting block 307 is threaded with a threaded sleeve 308.

[0026] When the sealing door 102 overlaps with the connecting frame 101, the connection between the connecting frame 101 and the sealing door 102 is sealed by the sealing reinforcement mechanism 3. The operator first attaches two sets of horizontal snap-fit ​​strips 301 to the upper and lower ends of the connecting frame 101 and the sealing door 102, and then attaches vertical snap-fit ​​strips 302 to both sides of the connecting frame 101 and the sealing door 102, so that multiple sets of third sealing strips 304 adhere to the connection between the connecting frame 101 and the sealing door 102. Then, bolts 306 and threaded sleeves 308 are used to securely connect the two sets of horizontal snap-fit ​​strips 301 and vertical snap-fit ​​strips 302 together, ensuring the stability of the sealing reinforcement mechanism 3. Under the action of the bolts 306 and threaded sleeves 308, the horizontal snap-fit ​​strips 301 and vertical snap-fit ​​strips 302 are firmly fixed at the connection between the connecting frame 101 and the sealing door 102, preventing loosening.

[0027] Working principle: During use, the operator connects the second connecting flange 203 and the first connecting flange 201 to the pipeline of the external vacuum equipment. At the same time, the second sealing strip 204 is engaged inside the second sealing groove 202, which increases the sealing performance at the connection between the connecting pipe 2 and the pipeline of the external vacuum equipment. Then, the vacuum chamber body 1 is sealed through the sealing door 102. The first sealing strip 104 fixed to the inner wall of the sealing door 102 is engaged inside the first sealing groove 103, which increases the sealing performance between the sealing door 102 and the connecting frame 101.

[0028] When the sealing door 102 overlaps with the connecting frame 101, the connection between the connecting frame 101 and the sealing door 102 is sealed by the sealing reinforcement mechanism 3. The operator first attaches two sets of horizontal snap-fit ​​strips 301 to the upper and lower ends of the connecting frame 101 and the sealing door 102, and then attaches vertical snap-fit ​​strips 302 to both sides of the connecting frame 101 and the sealing door 102, so that multiple sets of third sealing strips 304 are attached to the connection between the connecting frame 101 and the sealing door 102. Then, the two sets of horizontal snap-fit ​​strips 301 and vertical snap-fit ​​strips 302 are fixedly connected together by bolts 306 and threaded sleeves 308 to ensure the stability of the sealing reinforcement mechanism 3. Under the action of bolts 306 and threaded sleeves 308, the transverse locking strip 301 and the vertical locking strip 302 are firmly fixed at the connection between the connecting frame 101 and the sealing door 102, and are not easy to loosen. In addition, the third sealing strip 304 is made of high elastic material, which has good elasticity and wear resistance, and can maintain its sealing performance for a long time. Then, the operator starts the external vacuum equipment to evacuate the vacuum chamber body 1. The inside of the vacuum chamber body 1 can be observed through the transparent observation window 105. The operation is simple and convenient, which increases the overall sealing of the vacuum chamber body 1 and prevents leakage.

[0029] The above embodiments are only used to illustrate the technical solution of this utility model, and are not intended to limit it.

Claims

1. A leak-proof vacuum chamber, comprising a vacuum chamber body (1), characterized in that: The outer wall of the vacuum chamber body (1) is fixedly fitted with a connecting frame (101), and a sealing door (102) is provided on the outer wall of the sealing door (102). One side of the sealing door (102) is fixedly connected to one side of the side wall of the vacuum chamber body (1) through a hinge. A connecting pipe (2) is fixedly installed on the side wall of the vacuum chamber body (1). The connecting pipe (2) is located on one side of the hinge. Both the upper and lower ends of the connecting frame (101) and the sealing door (102) are provided with sealing reinforcement mechanisms (3) at the connection between the sealing connecting frame (101) and the sealing door (102).

2. The leak-proof vacuum chamber according to claim 1, characterized in that: The outer wall of the connecting frame (101) is provided with a first sealing groove (103), and the inner wall of the sealing door (102) is fixedly connected with a first sealing strip (104). The end of the first sealing strip (104) away from the sealing door (102) is engaged inside the first sealing groove (103), and a transparent observation window (105) is provided at the center of the outer wall of the sealing door (102).

3. The leak-proof vacuum chamber according to claim 1, characterized in that: The end of the connecting pipe (2) away from the vacuum chamber body (1) is fixedly connected to a first connecting flange (201), the end of the first connecting flange (201) away from the vacuum chamber body (1) is provided with a second sealing groove (202), and the end of the first connecting flange (201) away from the connecting pipe (2) is provided with a second connecting flange (203).

4. A leak-proof vacuum chamber according to claim 3, characterized in that: A second sealing strip (204) is fixedly connected to the side of the second connecting flange (203) near the first connecting flange (201), and the end of the second sealing strip (204) away from the second connecting flange (203) is engaged inside the second sealing groove (202).

5. A leak-proof vacuum chamber according to claim 1, characterized in that: The sealing reinforcement mechanism (3) includes two sets of horizontal snap-fit ​​strips (301) that snap-fit ​​between the upper and lower ends of the connecting frame (101) and the sealing door (102). One end of the horizontal snap-fit ​​strip (301) is fixedly connected to a vertical snap-fit ​​strip (302). The inner sides of the two sets of vertical snap-fit ​​strips (302) are snap-fit ​​connected to both sides of the connecting frame (101) and the sealing door (102).

6. A leak-proof vacuum chamber according to claim 5, characterized in that: Both sets of horizontal snap-fit ​​strips (301) and vertical snap-fit ​​strips (302) have mounting grooves (303) inside. Multiple sets of mounting grooves (303) have third sealing strips (304) slidably inserted inside. The side of each pair of third sealing strips (304) away from the mounting groove (303) is in contact with the connection between the connecting frame (101) and the sealing door (102).

7. A leak-proof vacuum cavity according to claim 6, characterized in that: Two sets of transverse snap-fit ​​strips (301) are fixedly connected to a first connecting block (305) at the end away from the vertical snap-fit ​​strip (302). Bolts (306) are inserted into the interior of the two sets of first connecting blocks (305). Two sets of vertical snap-fit ​​strips (302) are fixedly connected to a second connecting block (307) at the end away from the transverse snap-fit ​​strip (301). The bottom end of the bolt (306) penetrates the interior of the second connecting block (307) and extends to the outside of the second connecting block (307). A threaded sleeve (308) is threaded onto the end of the bolt (306) near the second connecting block (307).

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