Insulating shockproof feet

Abstract

The utility model provides an insulating shockproof foot, include: including shockproof foot body, shockproof foot body has opposite first end and second end, the first end surface has insulating material and is used for installing in equipment ground pin to prevent the first end with the equipment ground pin interval forms the conductive path, the second end is used for installing fixedly to shockproof foot body. The utility model discloses through using insulating material on the first end surface, and insulating material has high resistivity, can effectively prevent the current through, namely effectively blocked the current conduction between equipment ground pin and shockproof foot, reached the effect of electrical isolation, make the current unable to flow through shockproof foot to the ground, avoided equipment secondary grounding phenomenon, thereby avoided the influence equipment's work performance.

Description

Technical Field

[0001] This utility model relates to the field of shockproof foot technology, and in particular to an insulated shockproof foot. Background Technology

[0002] Semiconductor industry equipment typically requires the installation of metal vibration-damping feet on the base of the equipment or its accessories to protect it from vibration. Because these feet are made of metal, they come into contact with the metal parts of the equipment's base, and testing has confirmed that installing these metal vibration-damping feet creates a grounding phenomenon between the equipment casing and the ground. External metal vibration-damping feet can cause secondary grounding of the equipment, thus affecting its performance, for example, impacting the measurement results of electron beam equipment.

[0003] In view of this, it is necessary to propose an insulated shockproof foot to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide an insulated shockproof foot to improve the problem of secondary grounding of equipment caused by existing external metal shockproof feet.

[0005] This utility model provides an insulated shockproof foot, comprising:

[0006] The anti-vibration script body has a first end and a second end that are disposed opposite to each other. The surface of the first end has an insulating material and is used for mounting on the equipment foot to prevent the formation of a conductive path between the first end and the equipment foot. The second end is used for mounting and fixing the anti-vibration script body.

[0007] In one possible embodiment, the shock-absorbing script body includes a first connecting segment, a second connecting segment, and a third connecting segment connected between the first connecting segment and the second connecting segment;

[0008] The first end is located at the end of the first connecting segment that is away from the second connecting segment.

[0009] In one possible embodiment, the material of the shock-absorbing script body is metal;

[0010] The entire surface of the first connecting segment is covered with insulating material; or,

[0011] The entire surface of the first connecting segment and the second connecting segment is made of insulating material; or,

[0012] The entire surface of the first connecting segment, the second connecting segment, and the third connecting segment is covered with insulating material.

[0013] In one possible embodiment, the insulating material is an insulating layer that covers or an insulating sleeve that encloses.

[0014] In one possible embodiment, the entire body of the shock-absorbing script is made of insulating material.

[0015] In one possible embodiment, the angle between the adjacent sides of the first connecting segment and the second connecting segment is an acute angle, and the angle between the adjacent sides of the second connecting segment and the third connecting segment is an acute angle; or,

[0016] The angle between the adjacent sides of the first connecting segment and the second connecting segment is a right angle, and the angle between the adjacent sides of the second connecting segment and the third connecting segment is a right angle; or,

[0017] The angle between the sides of the first connecting segment and the second connecting segment that are close to each other is an obtuse angle, and the angle between the sides of the second connecting segment and the third connecting segment that are close to each other is an obtuse angle.

[0018] In one possible embodiment, the insulating shock-absorbing foot further includes at least one first reinforcing member supporting the connection between the first connecting segment and the second connecting segment; and / or,

[0019] The insulating shockproof foot also includes at least one second reinforcing member supporting the connection between the second connecting segment and the third connecting segment.

[0020] In one possible embodiment, the insulating material is rubber, plastic, or ceramic.

[0021] In one possible embodiment, the first end is provided with a slot for mounting the device foot, and the surface of the slot, at least near the device foot, has an insulating material.

[0022] In one possible embodiment, the second end is provided with at least one mounting hole, and the shock-absorbing body is installed and fixed in the installation position by fasteners passing through the mounting holes.

[0023] The beneficial effects of the insulating anti-vibration foot provided by this utility model are as follows: Since the surface of the first end has insulating material, the first end of the anti-vibration foot body will not form a conductive path after it is installed and fixed with the equipment foot, ensuring that the anti-vibration foot will not cause the equipment to be grounded twice, thus avoiding affecting the working performance of the equipment. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of one embodiment of the insulating and shockproof foot of this utility model.

[0025] Figure 2 This is a schematic diagram of the insulating and shockproof foot of this utility model installed on the equipment foot.

[0026] Figure 3 This is a schematic diagram of another embodiment of the insulating and shockproof foot of this utility model.

[0027] Figure 4 This is a top view of one embodiment of the insulating shockproof foot of this utility model.

[0028] Explanation of reference numerals in the attached drawings: 110, shockproof base body; 1101, insulating material; 111, first connecting section; 1111, slot; 112, second connecting section; 113, third connecting section; 1131, mounting hole; 120, first reinforcing member; 130, second reinforcing member; 200, equipment foot. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0030] To address the problems existing in the prior art, embodiments of this utility model provide an insulated shock-absorbing foot. Figure 1 This is a schematic diagram of one embodiment of the insulating and shock-absorbing foot of this utility model. Figure 2 This is a schematic diagram of the insulating and shock-absorbing foot of this utility model installed on the equipment base. See [link / reference]. Figure 1 and Figure 2 The insulating shockproof foot includes a shockproof foot body 110, which has a first end and a second end that are disposed opposite to each other. The surface of the first end has an insulating material 1101 and is used to install on the equipment foot 200 to prevent the formation of a conductive path between the first end and the equipment foot 200. The second end is used to install and fix the shockproof foot body 110.

[0031] In existing metal anti-vibration foot designs, due to the conductivity of the metal material, an additional grounding path is formed between the equipment foot 200 and the ground, leading to secondary grounding. In this embodiment, by using an insulating material 1101 on the surface of the first end, the insulating material 1101, with its high resistivity, effectively prevents current flow, thus effectively blocking current conduction between the equipment foot 200 and the anti-vibration foot, achieving electrical isolation. This prevents current from flowing to the ground through the anti-vibration foot, thereby avoiding secondary grounding and preventing any impact on the equipment's performance.

[0032] The technical effects of the insulating and shockproof foot of this utility model will be explained using an electron beam device as an example.

[0033] Electron beam equipment relies on precisely controlled electron beams for operation. The generation, acceleration, focusing, and deflection of the electron beam are all achieved through precise electric and magnetic fields. Any external electrical interference, such as changes in the electric field or fluctuations in current, can affect the trajectory of the electron beam, thus impacting measurement results. In existing metal anti-vibration foot designs, the contact between the metal anti-vibration foot and the grounding foot of the electron beam equipment creates an additional grounding path. Current is diverted to the ground through the metal anti-vibration foot, altering the original electric field distribution of the electron beam equipment and interfering with its trajectory, thereby affecting the measurement results. In this embodiment, the insulated anti-vibration foot design effectively blocks current conduction between the electron beam equipment's grounding foot and the anti-vibration foot, avoiding secondary grounding of the electron beam equipment and ensuring that the internal electric field distribution of the electron beam equipment remains unaffected. The use of insulated anti-vibration feet ensures the stability of the internal electric field of the electron beam equipment, thereby guaranteeing that the electron beam's trajectory is undisturbed and ensuring the accuracy of the measurement results.

[0034] In one embodiment, see Figure 1 and Figure 2 The shockproof script body 110 includes a first connecting segment 111, a second connecting segment 112, and a third connecting segment 113 connected between the first connecting segment 111 and the second connecting segment 112, with the first end located at the end of the first connecting segment 111 away from the second connecting segment 112.

[0035] In the first embodiment, the shock-absorbing body 110 is made of metal, and the entire surface of the first connecting segment 111 has an insulating material 1101. In this embodiment, the insulating material 1101 is only provided on the entire surface of the first connecting segment 111, reducing the amount of insulating material 1101 used and thus reducing manufacturing costs.

[0036] In the second embodiment, the anti-vibration foot body 110 is made of metal, and the entire surface of the first connecting section 111 and the second connecting section 112 is provided with insulating material 1101. In this embodiment, insulating material 1101 is provided on the entire surface of the first connecting section 111 and the second connecting section 112. In other words, insulating material 1101 is provided on the surface of the area of ​​the anti-vibration foot body 110 near the equipment foot 200. While controlling the amount of insulating material 1101 used, it is ensured that the current conduction between the equipment foot 200 and the anti-vibration foot is effectively blocked, avoiding secondary grounding of the equipment.

[0037] In the third embodiment, the shock-absorbing foot body 110 is made of metal, and the entire surface of the first connecting segment 111, the second connecting segment 112, and the third connecting segment 113 is covered with an insulating material 1101. In this embodiment, the insulating material 1101 is provided on the entire surface of the first connecting segment 111, the second connecting segment 112, and the third connecting segment 113. In other words, the insulating material 1101 is provided on the entire surface of the shock-absorbing foot body 110, which improves the insulation of the insulating shock-absorbing foot and enhances the electrical isolation effect.

[0038] In the first to third embodiments described above, the insulating material 1101 is either a covering insulating layer or a covering insulating sleeve. The insulating layer and the shock-absorbing sleeve body 110 are an integral structure, resulting in better robustness and stability. The insulating sleeve can be removed and replaced when damaged, facilitating subsequent maintenance.

[0039] In the fourth embodiment, the overall material of the shockproof script body 110 is insulating material 1101.

[0040] In some specific embodiments, the insulating material 1101 is rubber, plastic, or ceramic, etc.

[0041] If rubber is used as the insulating material 1101, rubber is a good insulating material 1101 that can prevent current from passing through, ensuring the electrical isolation effect of the equipment and avoiding secondary grounding. Rubber materials are relatively inexpensive, easy to process and mold, reducing manufacturing costs. Rubber has excellent elasticity, which can effectively absorb and disperse vibrations, improving the shock absorption effect of the insulating and shock-absorbing feet.

[0042] If the insulating material 1101 is made of plastic, plastic has good insulating properties, which can prevent current from passing through, ensure the electrical isolation effect of the equipment, and avoid secondary grounding. Plastic materials generally have good chemical corrosion resistance and can be used in humid or chemically corrosive environments. The entire material of the shock-absorbing base 110 can be made of plastic.

[0043] If ceramic is used as the insulating material 1101, ceramic has extremely high insulation properties, which can effectively prevent current from passing through, ensure the electrical isolation effect of the equipment, and avoid secondary grounding. Ceramic materials have good high-temperature resistance and can maintain their performance in high-temperature environments.

[0044] In one embodiment, Figure 3 This is a schematic diagram of another embodiment of the insulating shockproof foot of this utility model. See also: Figure 3The insulating shock-absorbing foot also includes at least one first reinforcing member 120 supporting the connection between the first connecting segment 111 and the second connecting segment 112. Specifically, the first reinforcing member 120 is a first reinforcing plate or a first reinforcing rod. In this embodiment, the first reinforcing member 120 provides additional support for the connection between the first connecting segment 111 and the second connecting segment 112, playing a supporting and reinforcing role, enhancing the mechanical strength of the connection between the first connecting segment 111 and the second connecting segment 112, effectively reducing deformation and displacement between the first connecting segment 111 and the second connecting segment 112, improving its load-bearing capacity, and extending the service life of the shock-absorbing foot.

[0045] In another embodiment, see Figure 3 The insulating shock-absorbing foot also includes at least one second reinforcing member 130 supporting the connection between the second connecting segment 112 and the third connecting segment 113. Specifically, the second reinforcing member 130 is a second reinforcing plate or a second reinforcing rod. In this embodiment, the second reinforcing member 130 provides additional support for the connection between the second connecting segment 112 and the third connecting segment 113, playing a supporting and reinforcing role, enhancing the mechanical strength of the connection between the second connecting segment 112 and the third connecting segment 113, effectively reducing deformation and displacement between the second connecting segment 112 and the third connecting segment 113, improving its load-bearing capacity, and extending the service life of the shock-absorbing foot.

[0046] In the first embodiment, see Figure 1 and Figure 3 The angle between the adjacent sides of the first connecting segment 111 and the second connecting segment 112 is a right angle, and the angle between the adjacent sides of the second connecting segment 112 and the third connecting segment 113 is a right angle, that is, the first connecting segment 111 and the second connecting segment 112 are perpendicular, and the second connecting segment 112 and the third connecting segment 113 are perpendicular.

[0047] In one specific embodiment, see Figure 3 In the case where the first reinforcing member 120 is the first reinforcing plate, the first reinforcing plate is in the shape of a right triangle. In the case where the second reinforcing member 130 is the second reinforcing plate, the second reinforcing plate is in the shape of a right triangle.

[0048] In another specific embodiment, when the first reinforcing member 120 is a first reinforcing rod, the included angles between the first reinforcing member 120 and the first connecting segment 111, and between the first reinforcing member 120 and the second connecting segment 112, are both acute angles, for example, 45°. When the second reinforcing member 130 is a second reinforcing rod, the included angles between the second reinforcing member 130 and the second connecting segment 112, and between the second reinforcing member 130 and the third connecting segment 113, are both acute angles, for example, 45°. The first connecting segment 111, the second connecting segment 112, and the first reinforcing member 120 form a right-angled triangle structure, and the second connecting segment 112, the third connecting segment 113, and the second reinforcing member 130 also form a right-angled triangle structure. The right-angled triangle structure provides strong support and stability, effectively reducing deformation and displacement at the connection points, significantly enhancing the structural stability of the shock-absorbing foot, and helping to extend the service life of the shock-absorbing foot.

[0049] In the second embodiment, the angle between the adjacent sides of the first connecting segment 111 and the second connecting segment 112 is an acute angle, and the angle between the adjacent sides of the second connecting segment 112 and the third connecting segment 113 is an acute angle.

[0050] In one specific embodiment, when the first reinforcing member 120 is a first reinforcing plate, the first reinforcing plate is triangular in shape, preferably equilateral in shape. When the second reinforcing member 130 is a second reinforcing plate, the second reinforcing plate is triangular in shape, preferably equilateral in shape.

[0051] In another specific embodiment, when the first reinforcing member 120 is a first reinforcing rod, the included angles between the first reinforcing member 120 and the first connecting segment 111, and between the first reinforcing member 120 and the second connecting segment 112, are both acute angles, for example, 60°; when the second reinforcing member 130 is a second reinforcing rod, the included angles between the second reinforcing member 130 and the second connecting segment 112, and between the second reinforcing member 130 and the third connecting segment 113, are both acute angles, for example, 60°. The first connecting segment 111, the second connecting segment 112, and the first reinforcing member 120 form a triangular structure, preferably an equilateral triangular structure. The symmetry and stability of the equilateral triangular structure can evenly distribute and absorb forces from different directions, reduce deformation and displacement at the connection points, and enhance the overall structural stability of the shock-absorbing foot.

[0052] In the third embodiment, the angle between the adjacent sides of the first connecting segment 111 and the second connecting segment 112 is an obtuse angle, and the angle between the adjacent sides of the second connecting segment 112 and the third connecting segment 113 is an obtuse angle.

[0053] In one specific embodiment, when the first reinforcing member 120 is a first reinforcing plate, the first reinforcing plate is triangular in shape; when the second reinforcing member 130 is a second reinforcing plate, the second reinforcing plate is triangular in shape.

[0054] In another specific embodiment, when the first reinforcing member 120 is a first reinforcing rod, the included angles between the first reinforcing member 120 and the first connecting segment 111, and between the first reinforcing member 120 and the second connecting segment 112, are both acute angles; when the second reinforcing member 130 is a second reinforcing rod, the included angles between the second reinforcing member 130 and the second connecting segment 112, and between the second reinforcing member 130 and the third connecting segment 113, are both acute angles. The first connecting segment 111, the second connecting segment 112, and the first reinforcing member 120 form a triangular structure, and the second connecting segment 112, the third connecting segment 113, and the second reinforcing member 130 also form a triangular structure. The triangular structure provides strong support and stability, reduces deformation and displacement at the connection points, and enhances the overall structural stability of the shock-absorbing foot.

[0055] In one embodiment, Figure 4 This is a top view of one embodiment of the insulating shockproof foot of this utility model. See also: Figure 4 The second end is provided with at least one mounting hole 1131, through which fasteners are passed through the mounting holes 1131 to install and fix the anti-vibration script body 110 to the installation position. The fasteners are bolts, screws, etc.

[0056] In one embodiment, see Figure 2 and Figure 4 The first end is provided with a slot 1111 for mounting the equipment foot 200, and the surface of the slot 1111 near the equipment foot 200 has an insulating material 1101.

[0057] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0058] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0059] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0060] While the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as set forth in the claims. Furthermore, the utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains.

Claims

1. An insulating shockproof foot, characterized in that, include: The anti-vibration script body has a first end and a second end that are disposed opposite to each other. The surface of the first end has an insulating material and is used for mounting on the equipment foot to prevent the formation of a conductive path between the first end and the equipment foot. The second end is used for mounting and fixing the anti-vibration script body.

2. The insulating shockproof foot according to claim 1, characterized in that, The earthquake-resistant script body includes a first connecting segment, a second connecting segment, and a third connecting segment connecting the first connecting segment and the second connecting segment; The first end is located at the end of the first connecting segment that is away from the second connecting segment.

3. The insulating shockproof foot according to claim 2, characterized in that, The material of the shock-absorbing script body is metal; The entire surface of the first connecting segment is covered with insulating material; or, The entire surface of the first connecting segment and the second connecting segment is made of insulating material; or, The entire surface of the first connecting segment, the second connecting segment, and the third connecting segment is covered with insulating material.

4. The insulating shockproof foot according to claim 3, characterized in that, The insulating material is an insulating layer that is covered or an insulating sleeve that is wrapped.

5. The insulating shockproof foot according to claim 2, characterized in that, The entire body of the shockproof script is made of insulating material.

6. The insulating shockproof foot according to any one of claims 2-5, characterized in that, The angle between the adjacent sides of the first connecting segment and the second connecting segment is an acute angle, and the angle between the adjacent sides of the second connecting segment and the third connecting segment is an acute angle; or, The angle between the adjacent sides of the first connecting segment and the second connecting segment is a right angle, and the angle between the adjacent sides of the second connecting segment and the third connecting segment is a right angle; or, The angle between the sides of the first connecting segment and the second connecting segment that are close to each other is an obtuse angle, and the angle between the sides of the second connecting segment and the third connecting segment that are close to each other is an obtuse angle.

7. The insulating shockproof foot according to any one of claims 2-5, characterized in that, It also includes at least one first reinforcing member supporting the connection between the first connecting segment and the second connecting segment; and / or, It also includes at least one second reinforcing member that supports the connection between the second connecting segment and the third connecting segment.

8. The insulating shockproof foot according to any one of claims 1-5, characterized in that, The insulating material is rubber, plastic, or ceramic.

9. The insulating shockproof foot according to any one of claims 1-5, characterized in that, The first end is provided with a slot for mounting the device foot, and the surface of the slot, at least the portion near the device foot, has an insulating material.

10. The insulating shockproof foot according to any one of claims 1-5, characterized in that, The second end is provided with at least one mounting hole, and the shock-absorbing body is installed and fixed in the installation position by fasteners passing through the mounting holes.

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