Tcs gas holder and its gas supply panel assembly, pipeline system

Abstract

The utility model provides a kind of TCS gas cabinet and its gas supply disc surface subassembly, pipeline system, pipeline system includes: online hydrogen supply pipeline, offline hydrogen supply pipeline and multiple groups of cylinder connecting pipeline;Each group of cylinder connecting pipeline includes inlet pipeline and outlet pipeline, one end of inlet pipeline is connected to cylinder gas inlet end, one end of outlet pipeline is connected to cylinder liquid outlet end;Online hydrogen supply pipeline is connected with first hydrogen pipeline, when cylinder is in online or standby state, and the inlet pipeline corresponding with the cylinder keeps the state of communication;Offline hydrogen supply pipeline is connected with second hydrogen pipeline, when cylinder is in offline and pressurizes liquid, and the outlet pipeline corresponding with the cylinder keeps the state of communication, and the inlet pipeline corresponding with the cylinder keeps the state of communication when filling pressure. So configure, TCS gas cabinet in use process, can avoid pressurizing liquid, filling pressure and online hydrogen supply mutual interference, ensure the stability of system operation, shorten online operation time simultaneously, improve online efficiency.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, specifically to a TCS gas holder and its gas supply panel assembly and piping system. Background Technology

[0002] Trichlorosilane (TCS), an important organosilicon compound, has wide applications in silica gel preparation, organic synthesis, pharmaceuticals, and electronics. Because TCS is a self-igniting liquid, unlike other gaseous specialty gases, its gas holder design differs from that of a typical TCS gas holder. TCS gas holders generally use hydrogen as the driving force to pressurize the TCS liquid in the TCS cylinder to the target machine. In practice, the cylinder containing the TCS liquid is placed in the TCS gas holder, and after successfully connecting the cylinder to the existing piping system, TCS can be supplied online according to the preset process. Currently, the TCS gas holder is equipped with two cylinders: one for online supply of TCS, and the other in standby mode. Before disassembling the cylinder, a liquid compression operation must be performed to pressurize any residual liquid in the pipeline back into the cylinder. After completing the liquid compression process, the cylinder can be disassembled. After replacing the cylinder with a new one, it must be pressurized with hydrogen before online supply to ensure the standby cylinder reaches the machine's operating pressure threshold, guaranteeing stable gas supply. However, the existing TCS gas holder piping system is only equipped with one hydrogen pipeline. The cylinder pressure, filling and online supply are all achieved through this pipeline. The parallel use of hydrogen from multiple ends causes the problem of hydrogen diversion, resulting in pressure fluctuations at the supply end and affecting the stability of TCS supply. Utility Model Content

[0003] In view of this, the purpose of this application is to provide a TCS gas holder and its gas supply panel assembly and piping system, which aims to solve the problem of unstable TCS supply caused by mutual interference between liquid compression, pressurization and online hydrogen supply.

[0004] According to one aspect of this application, a piping system for a TCS gas holder is provided, comprising: an online hydrogen supply pipeline, an offline hydrogen supply pipeline, and multiple sets of cylinder connection pipelines; valves are provided on the online hydrogen supply pipeline, the offline hydrogen supply pipeline, and the multiple sets of cylinder connection pipelines.

[0005] Each set of cylinder connection pipes is used to connect one cylinder and includes an inlet pipe and an outlet pipe. One end of the inlet pipe is connected to the inlet end of the cylinder, and one end of the outlet pipe is connected to the outlet end of the cylinder.

[0006] The online hydrogen supply pipeline is used to connect to the external first hydrogen pipeline and is configured to maintain communication with the gas inlet pipeline corresponding to the gas cylinder when the gas cylinder is in the online or standby state.

[0007] The offline hydrogen supply pipeline is used to connect to an external second hydrogen pipeline, and is configured to maintain communication with the liquid outlet pipeline corresponding to the cylinder when the cylinder is offline and in a pressurized state, and is also configured to maintain communication with the gas inlet pipeline corresponding to the cylinder when the cylinder is offline and in a pressurized state.

[0008] Optionally, the other end of all the inlet pipes is connected to the online hydrogen supply pipe, and the other end of all the outlet pipes is connected to the outlet area; the valves include pneumatic valves and manual valves; each inlet pipe is equipped with a pneumatic valve; each outlet pipe is equipped with a pneumatic valve and a manual valve; each cylinder is equipped with a manual valve at both the inlet and outlet ends.

[0009] Optionally, the online hydrogen supply pipeline includes a first inlet port and a first supply pipeline; the first inlet port is connected to the first hydrogen pipeline and the first supply pipeline; the first supply pipeline is connected to all the inlet pipelines; the first supply pipeline is equipped with a filter, a pressure regulating valve, a pressure relief valve and a check valve.

[0010] Optionally, the offline hydrogen supply pipeline includes a second inlet port and a second supply pipeline; the second supply pipeline includes a main pipeline and multiple branch pipelines; the second inlet port connects the second hydrogen pipeline and the main pipeline; one end of each branch pipeline is connected to the main pipeline, and the other end is connected to multiple outlet pipelines in a corresponding manner; each branch pipeline is equipped with a pneumatic valve; the main pipeline is equipped with a manual valve, a pressure relief valve, a check valve, and a pneumatic valve.

[0011] Optionally, the piping system further includes a nitrogen purging inlet pipe connected to all the branch pipes; each group of cylinder connection pipes also includes a bypass pipe; each liquid outlet pipe is connected to a bypass pipe; one end of each bypass pipe is connected to a corresponding liquid outlet pipe, and the other end is connected to a Venturi device; each bypass pipe is also connected to a corresponding inlet pipe.

[0012] Each of the branch lines is equipped with a pneumatic valve on the section connecting the inlet line and the outlet line, and a pneumatic valve on the section connecting the venturi device and the inlet line; the nitrogen purging inlet line is equipped with a filter, a pressure regulating valve, a micro-leak valve, a pressure relief valve, a check valve and a pneumatic valve.

[0013] Optionally, the Venturi device includes a U-shaped pipeline equipped with a one-way valve, a micro-leakage valve, and a vacuum generator; the bypass pipeline is configured to switch between evacuation, nitrogen purging, and pressurization states.

[0014] Optionally, a manual valve, a pressure relief valve, a check valve, and a pneumatic valve are sequentially arranged on the main pipeline in the direction away from the second air intake port, and the manual valve on the main pipeline is normally open.

[0015] Optionally, the cylinder connection pipeline consists of two sets.

[0016] According to another aspect of this application, a gas supply panel assembly for a TCS gas holder is provided, including a mounting panel and a piping system of any one of the TCS gas holders, the piping system being mounted on the mounting panel.

[0017] According to another aspect of this application, a TCS gas holder is provided, which is provided with the gas supply panel assembly of any one of the TCS gas holders described in the present application.

[0018] The TCS gas holder and its gas supply panel assembly and piping system provided above include: an online hydrogen supply pipeline, an offline hydrogen supply pipeline, and multiple sets of cylinder connection pipelines; each of the online hydrogen supply pipeline, the offline hydrogen supply pipeline, and the multiple sets of cylinder connection pipelines is equipped with a valve; each set of cylinder connection pipelines is used to connect one cylinder and includes an inlet pipeline and an outlet pipeline, one end of the inlet pipeline being connected to the inlet end of the cylinder, and the outlet pipeline... The online hydrogen supply line connects to the liquid outlet of the gas cylinder. It connects to an external first hydrogen pipeline and is configured to maintain communication with the corresponding inlet pipeline when the gas cylinder is in an online or standby state. The offline hydrogen supply line connects to an external second hydrogen pipeline and is configured to maintain communication with the corresponding liquid outlet pipeline when the gas cylinder is offline and in a pressurized state, and also to maintain communication with the corresponding inlet pipeline when the gas cylinder is offline and in a pressurized state. With this configuration, the TCS gas holder, through its physical isolation design, allows for independent operation of liquid pressing, pressurization, and online hydrogen supply, ensuring stable and unfluctuated online hydrogen supply pressure and improving system stability. Simultaneously, during online operation, it significantly increases pressurization speed, shortens online time, and improves online efficiency. Attached Figure Description

[0019] Those skilled in the art will understand that the accompanying drawings are provided to better understand this application and do not constitute any limitation on the scope of this application.

[0020] Figure 1This application provides a pipeline layout diagram (PID diagram) for the online use of the right-side cylinder for liquid filling and the left-side cylinder for online use according to an embodiment. The bold red line in the diagram represents the liquid filling path of the right-side cylinder, the bold black line represents the path of the TCS output of the left and right cylinders, the bold yellow line represents the path of the online hydrogen supply of the left-side cylinder, the bold blue line represents the nitrogen purging inlet pipeline, and the hollow dots in the diagram represent pressure sensors.

[0021] Figure 2 This application provides a pipeline layout diagram of the right-side cylinder offline pressurization and the left-side cylinder online use according to an embodiment. The thick green line in the diagram represents the pressurization path of the right-side cylinder when it is in standby mode, the thick black line represents the path of TCS output from the left and right cylinders, and the thick yellow line represents the path of hydrogen supply to the left-side cylinder online.

[0022] Figure 3 This is a pipeline layout diagram for the online use of the right-side cylinder according to an embodiment of this application, where the thick yellow line indicates the online hydrogen supply path of the right-side cylinder;

[0023] Figure 4 This application provides a pipeline layout diagram of the left cylinder for offline liquid compression and the right cylinder for online use according to an embodiment. The thick red line in the diagram represents the liquid compression path of the left cylinder, the thick black line represents the path of TCS output from the left and right cylinders, and the thick yellow line represents the path of hydrogen supply to the right cylinder online.

[0024] Figure 5 This is a pipeline layout diagram of the left cylinder for offline pressurization and the right cylinder for online supply, provided according to an embodiment of this application. The bold green line in the diagram represents the pressurization path when the left cylinder is connected to the line, the bold black line represents the path for the TCS output from the left and right cylinders, and the bold yellow line represents the path for the hydrogen supply from the right cylinder.

[0025] [The following are the annotations in the attached diagram:] 1-Left cylinder, 2-Right cylinder, 10-Installation plate, 11-Online hydrogen supply line, 111-First inlet port, 112-First supply line, 12-Offline hydrogen supply line, 121-Second inlet port, 122-Second supply line, 123-Main line, 124-Branch line, 13-Inlet line, 14-Outlet line, 15-Bypass line, 16-Venturi device, 17-Nitrogen purging inlet line, HPI, LPI, PGI, BPV, PHP, LPV, PLP-Pneumatic valve, MIV-Manual valve, LF-Filter, RV-Pressure relief valve, CV-Check valve, PT-Pressure sensor, REG-Pressure regulating valve, PNBV, GNBV-Micro-leakage valve, VG-Vacuum generator, P, PG-Pressure gauge. Detailed Implementation

[0026] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. This application can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this application. Therefore, the drawings only show components related to this application and are not drawn according to the actual number, shape, and size of components in the implementation. In actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may also be more complex.

[0027] Furthermore, while each embodiment described below possesses one or more technical features, this does not imply that users of this application must simultaneously implement all technical features in any embodiment, or can only separately implement some or all technical features in different embodiments. In other words, provided it is feasible, those skilled in the art can selectively implement some or all of the technical features in any embodiment, or selectively implement a combination of some or all of the technical features in multiple embodiments, based on the disclosure of this application and depending on design specifications or actual needs, thereby increasing the flexibility in implementing this application.

[0028] As used herein, the singular forms “a,” “an,” and “the” include plural objects, and the plural form “multiple” includes two or more objects, unless otherwise expressly indicated. As used herein, the term “or” is generally used to include the meaning of “and / or,” unless otherwise expressly indicated, and the terms “installed,” “connected,” and “linked” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection. Connections can be mechanical or electrical. Connections can be direct or indirect through an intermediate medium, and can represent internal communication between two elements or an interaction between two elements. Relational terms such as “first,” “second,” etc., are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate or imply relative importance or implicitly specify the number of indicated technical features. Those skilled in the art will understand the specific meaning of the above terms in this application according to the specific circumstances.

[0029] First, let's introduce the research background. Currently, the TCS gas holder contains two gas cylinders. For example, when the left cylinder is in use online and the right cylinder is being dismantled, before dismantling, the cylinder needs to be depressurized via a Venturi line, and then hydrogen is introduced via a liquid-pressurizing line to pump residual liquid from the outlet line connected to the right cylinder back to the right cylinder. Because the liquid-pressurizing line and the in-line inlet line share the same hydrogen pipeline, the online hydrogen supply pressure to the left cylinder fluctuates, affecting TCS delivery and consequently the stability of the system operation. On the other hand, if the right cylinder is brought online for standby, before it comes online, because the pressure in the right cylinder is much lower than the system supply pressure, hydrogen needs to be introduced via the inlet line connected to the right cylinder to pressurize it to the system supply pressure before it can be used online. In this case, the inlet line connected to the right cylinder also shares the same hydrogen pipeline as the inlet line connected to the left cylinder, causing fluctuations in the online hydrogen supply pressure to the left cylinder and creating the same problem. To minimize the impact of liquid compression and pressurization, the current practice is to slowly open the manual valve on the cylinder to be connected to the line, thereby reducing fluctuations in the hydrogen pressure supplied by the cylinder in use. However, this method takes at least tens of minutes, is time-consuming and inefficient, and cannot fundamentally solve the problem of mutual interference between liquid compression, pressurization, and online hydrogen supply.

[0030] Based on this, this application provides a TCS gas holder and its gas supply panel assembly and piping system. By improving the piping system of the TCS gas holder, the liquid compression, pressurization and online hydrogen supply do not interfere with each other, and can effectively shorten the online operation time and improve the online efficiency.

[0031] To make the objectives, advantages, and features of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this application.

[0032] like Figures 1 to 5 As shown, this application provides a piping system for a TCS gas holder. This piping system includes an online hydrogen supply pipeline 11, an offline hydrogen supply pipeline 12, and multiple sets of cylinder connection pipelines. Valves are provided on the online hydrogen supply pipeline 11, the offline hydrogen supply pipeline 12, and the multiple sets of cylinder connection pipelines. It should be noted that the type and number of valves used in this application can be adjusted according to actual needs and are not particularly limited thereto. The cylinder connection pipelines can be two or more sets. Each set of cylinder connection pipelines is used to connect one cylinder. Each set of cylinder connection pipelines includes an inlet pipeline 13 and a liquid outlet pipeline 14; one end of the inlet pipeline 13 is connected to the inlet end of the cylinder, and one end of the liquid outlet pipeline 14 is connected to the outlet end of the cylinder.

[0033] The online hydrogen supply line 11 is used to connect to an external first hydrogen pipeline (not shown), and is configured to maintain communication with the corresponding inlet line 13 when the cylinder is in online or standby mode. Thus, hydrogen is supplied to the currently used cylinder online through the online hydrogen supply line 11, driving the cylinder to output a TCS (Transmission Control System), which then flows to the machine via the liquid outlet line 14.

[0034] The offline hydrogen supply line 12 is used to connect to an external second hydrogen pipeline (not shown), and is configured to remain connected to the liquid outlet line 14 or the gas inlet line 13 of the cylinder when the cylinder is offline. Specifically, the offline hydrogen supply line 12 has a liquid-pressurized state and a pressurized state, and can switch between the liquid-pressurized state and the pressurized state.

[0035] The offline hydrogen supply pipeline 12 is configured to maintain communication with the corresponding liquid outlet pipeline 14 when the cylinder is offline and in a pressurized state. This allows hydrogen to be supplied through the offline hydrogen supply pipeline 12, pushing any residual liquid in the liquid outlet pipeline 14 back into the cylinder to be disassembled. Those skilled in the art should understand that before pressurization, the cylinder needs to be depressurized, and after pressurization, the cylinder must undergo negative pressure maintenance and the pipeline must be purged before disassembly.

[0036] The offline hydrogen supply pipeline section 12 is also configured to maintain communication with the corresponding gas inlet pipeline 13 when the cylinder is offline and under pressurization. Hydrogen can then be supplied through the offline hydrogen supply pipeline 12 to pressurize the cylinder to be connected to the system, ensuring the pressure inside the cylinder reaches the required system supply pressure. Only after pressurization is complete can the cylinder be connected for standby.

[0037] As described above, the first and second hydrogen pipelines are independent and do not interfere with each other. Both are connected to an external gas source to supply hydrogen to the TCS gas holder's piping system. It should also be noted that, in this text, "online hydrogen supply" refers to the supplied hydrogen intended to drive the TCS in the in-use cylinder to flow out to the liquid outlet pipeline 14, and then through the main pipeline to the target machine; "offline hydrogen supply" refers to the supplied hydrogen intended to remove residual liquid from the liquid outlet pipeline 14 or to pressurize cylinders awaiting online use; "online status" refers to cylinders currently in use supplying TCS to the target machine; "offline status" refers to cylinders that need to be disassembled after use or that need to be pressurized; and "standby status" refers to cylinders that have been pressurized and are ready for online use.

[0038] As an example, the first hydrogen pipeline is an existing hydrogen pipeline, and the second hydrogen pipeline is a newly added hydrogen pipeline.

[0039] In this way, during the use of the TCS gas holder and its piping system, hydrogen is supplied to both in-use and standby cylinders via the online hydrogen supply line 11 and the offline hydrogen supply line 12 to pressurized or pressurized cylinders. This separates the pressurization and pressurization processes from the online hydrogen supply, ensuring that they do not interfere with each other and guaranteeing a stable and unfluctuating online hydrogen supply pressure to in-use cylinders, thus improving system operational stability. Secondly, during online operation, the manual valve (not labeled) at the standby cylinder can be opened to its maximum, effectively increasing the pressurization speed, shortening the online operation time, and improving online efficiency. For example, tests have shown that the online time for standby cylinders can be reduced from 50 minutes to 3 minutes, significantly reducing online time and improving efficiency. This application does not limit the pressurization pressure of standby cylinders; for example, pressurizing the cylinder to be online from 10 psi to 50 psi can meet the system supply pressure requirements, but this is not the only practical limitation.

[0040] Accordingly, this application also provides a gas supply panel assembly for a TCS gas holder, which includes a mounting plate 10 and a piping system. In this embodiment, the piping system is mounted on the mounting plate 10.

[0041] Furthermore, this application also provides a TCS gas holder, which includes the gas supply panel assembly provided in this application. The TCS gas holder may be equipped with an electrical control cabinet, in which the gas supply panel assembly is housed. The electrical control cabinet can also control various functional components on the pipeline system, especially various pneumatic valves, through a control system to achieve automated operation.

[0042] As an example, the TCS gas holder is equipped with two gas cylinders, namely cylinder 1 on the left and cylinder 2 on the right. Of course, the number of gas cylinders can be adjusted according to the actual situation, and this application does not limit this.

[0043] In this embodiment, there is one offline hydrogen supply pipeline 12, and two sets of cylinder connection pipelines. The gas inlet and liquid outlet of the left cylinder 1 are connected to the left gas inlet pipeline 13 and liquid outlet pipeline 14, respectively. The gas inlet and liquid outlet of the right cylinder 2 are connected to the right gas inlet pipeline 13 and liquid outlet pipeline 14, respectively. It should be noted that in other cases, more cylinders and corresponding cylinder connection pipelines can be added. The following is an illustrative description using two cylinders.

[0044] Figure 1In one of the described examples, the right-side cylinder 2 is in a liquid-pressurized state. Therefore, the offline hydrogen supply line 12 is connected to the right-side liquid outlet line 14, allowing hydrogen to flow into the right-side liquid outlet line 14 according to the liquid-pressurization path indicated by the red bold line. This forces the residual TCS liquid in the right-side liquid outlet line 14 to flow into the right-side cylinder 2. Simultaneously, the left-side cylinder 1 is in use. The left-side gas inlet line 13 is connected to the online hydrogen supply line 11, allowing hydrogen to be supplied to the left-side cylinder 1 according to the gas supply path indicated by the yellow bold line. This drives the TCS output in the left-side cylinder 1 and is then transported to the main pipeline via the left-side liquid outlet line 14, ultimately supplying the target machine.

[0045] Figure 4 In one of the described examples, the left cylinder 1 is in a liquid-pressurized state, and the liquid outlet line 14 on the left is connected to the hydrogen supply line 12 on the lower line. Hydrogen is supplied to the liquid outlet line 14 on the left, causing the residual TCS liquid in the liquid outlet line 14 on the left to flow into the left cylinder 1.

[0046] Figure 2 In one of the described examples, the right cylinder 2 is in the offline pressurization state. The right inlet pipe 13 is connected to the offline hydrogen supply pipe 12. Hydrogen can be supplied to the right cylinder 2 according to the pressurization path indicated by the green bold line to increase its pressure until the system supply pressure requirement is met.

[0047] Figure 5 In one of the described examples, the left cylinder 1 is in a pressurized state, and the left inlet pipe 13 is connected to the lower hydrogen supply pipe 12. Based on the pressurization path indicated by the green bold line, hydrogen is supplied to the left cylinder 1 to increase its pressure and meet the system supply pressure requirements.

[0048] Next, refer to Figure 3 As shown, if cylinder 2 on the right is in standby mode, the inlet pipe 13 on the right is connected to the online hydrogen supply pipe 11. After it is put into formal use, hydrogen can be supplied to cylinder 2 on the right through the online hydrogen supply pipe 11 (see the yellow bold line), driving the TCS output in cylinder 2 on the right, and then transported to the main pipeline through the liquid outlet pipe 14 on the right, and finally stably supplied to the target machine. Similarly, if cylinder 1 on the left is in standby mode, when it is put into use, the inlet pipe 13 on the left is switched to be connected to the online hydrogen supply pipe 11.

[0049] It should be understood that the switching of the above states can be achieved by controlling the opening or closing of the valve. Given that valve control methods are easily implemented by those skilled in the art based on their common knowledge, their operational details will not be elaborated upon. In actual use, the valves include at least pneumatic valves and manual valves.

[0050] In some embodiments, the other end of all the inlet pipes 13 is connected to the online hydrogen supply pipe 11, and the other end of all the outlet pipes 14 is connected to the outlet area. For ease of understanding, Figure 1 The location of the liquid outlet area is marked by a dashed box A. Furthermore, each of the inlet pipes 13 is equipped with a pneumatic valve HPI, and each of the outlet pipes 14 is equipped with a pneumatic valve LPI. When the cylinder is in an online or standby state, the pneumatic valve HPI on its corresponding inlet pipe 13 is normally open. At this time, the pneumatic valve LPI on the outlet pipe 14 determines whether the cylinder is in an online or standby state. Specifically, when the pneumatic valve LPI on the outlet pipe 14 is open, the cylinder is in an online state; conversely, the cylinder is in a standby state.

[0051] Furthermore, each of the liquid outlet lines 14 is also equipped with a manual valve (MIV), which is located further away from the gas cylinder than the pneumatic valve (LPI). This design allows for valve replacement by cutting off the TCS supply via the manual valve (MIV) when the pneumatic valve (LPI) fails.

[0052] In some embodiments, the online hydrogen supply pipeline 11 includes a first inlet port 111 and a first supply pipeline 112; the first inlet port 111 connects to a first hydrogen pipeline and the first supply pipeline 112; the first supply pipeline 112 connects to all the inlet pipelines 13. Specifically, in this embodiment, the first supply pipeline 112 connects to two of the inlet pipelines 13. In this case, the first supply pipeline 112 is equivalent to a main inlet pipe, and each inlet pipeline 13 is a branch pipeline. In actual use, simply operating the pneumatic valve HPI on the inlet pipeline 13 is sufficient to control the same first supply pipeline 112 to selectively connect to different inlet pipelines 13, switching between different cylinders to achieve online hydrogen supply.

[0053] In some embodiments, the first supply line 112 is equipped with a filter LF, a pressure regulating valve REG, a pressure relief valve RV, and a check valve CV. The intake pressure can be adjusted by the pressure regulating valve REG on the first supply line 112 to meet the system's requirements for different supply pressures. Optionally, the first supply line 112 is equipped with a pressure sensor PT.

[0054] In some embodiments, the offline hydrogen supply pipeline 12 includes a second inlet port 121 and a second supply pipeline 122; the second supply pipeline 122 includes a main pipeline 123 and multiple branch pipelines 124; the second inlet port 121 connects the second hydrogen pipeline and the main pipeline 123; one end of each branch pipeline 123 is connected to the main pipeline 123, and the other end is connected to multiple liquid outlet pipelines 14 respectively. Further, each branch pipeline 124 is equipped with a pneumatic valve PGI. By simply operating the pneumatic valve PGI on the branch pipeline 124, the same main pipeline 123 can be selectively connected to different branch pipelines 124, switching between different gas cylinders.

[0055] In this embodiment, the hydraulic pressurization and pressurization share a branch pipeline 124. In order to achieve the switching between hydraulic pressurization and pressurization, a bypass pipeline 15 is also required, and a pneumatic valve BPV is installed on the bypass pipeline 15. This part will be further explained later.

[0056] In some embodiments, the main pipeline 123 is equipped with a manual valve MIV, a pneumatic valve PHP, a pressure relief valve RV, and a check valve CV. Further, the main pipeline 123 also has a pressure gauge P. Preferably, the main pipeline 151 is provided with the manual valve MIV, pressure relief valve RV, check valve CV, and pneumatic valve PHP sequentially along the direction away from the second air inlet port 121; wherein the manual valve MIV is normally open, allowing manual shut-off of the gas supply for valve replacement when the pneumatic valve fails and needs replacement. In emergencies, the manual valve MIV can quickly cut off the hydrogen supply to ensure equipment safety.

[0057] It should be noted that the connection between the second supply line 122 and the liquid outlet line 14 and the air inlet line 13 mentioned above refers to a physical connection. However, a physical connection does not necessarily mean a continuous connection; the connection may be broken and there may be no continuous connection. Therefore, it is also necessary to operate the pneumatic valves PGI and PHP to control the connection status between the second supply line 122 and the liquid outlet line 14 or the air inlet line 13.

[0058] In this embodiment, the second supply pipeline 122 is an existing pressurized liquid pipeline. The modification can be completed simply by disconnecting the existing pressurized liquid pipeline and connecting it to the second gas inlet port 121. This configuration eliminates the need for new pipelines when modifying the TCS gas holder's piping system, thus saving costs and shortening modification time. Correspondingly, only the TCS gas holder's online program needs to be adjusted to ensure that the hydrogen used on the supply side is not diverted during standby operation, thereby guaranteeing system stability.

[0059] In some embodiments, the piping system of this application further includes a Venturi device 16 and a nitrogen purging inlet line 17. The nitrogen purging inlet line 17 is connected to all the branch lines 124. Thus, nitrogen purging, pressurization, and liquid filling can share the branch line 124. Specifically, each group of cylinder connection lines also includes a bypass line 15; each liquid outlet line 14 is connected to a bypass line 15; one end of each bypass line 15 is connected to a corresponding liquid outlet line 14, and the other end is connected to the Venturi device 16; each bypass line 15 is also connected to a corresponding inlet line 13.

[0060] In this configuration, each of the bypass pipes 15 is equipped with a pneumatic valve BPV on the section connecting the inlet pipe 13 and the outlet pipe 14, and a pneumatic valve LPV on the section connecting the venturi device 16 and the inlet pipe 13. The pneumatic valve BPV on the bypass pipe 15 controls the connection between the bypass pipe 15 and the branch pipe 124, and the pneumatic valve LPV on the bypass pipe 15 controls the connection between the bypass pipe 15 and the venturi device 16. Furthermore, the bypass pipe 15 is also equipped with a pressure sensor PT on the section connecting the inlet pipe 13 and the outlet pipe 14.

[0061] In some embodiments, the nitrogen purging inlet line 17 is equipped with a filter LF, a pressure regulating valve REG, a micro-leakage valve PNBV, a pressure relief valve RV, a one-way valve CV, and a pneumatic valve PLP. Optionally, the nitrogen purging inlet line 17 is equipped with a pressure gauge PG.

[0062] The bypass line 15 can be an existing line or a newly added line. In this embodiment, the bypass line 15 is an existing line, which is used not only for nitrogen purging but also for hydrogen pressurization and evacuation, thereby simplifying the piping structure on the TCS gas holder.

[0063] In some embodiments, the Venturi device 16 includes a U-shaped conduit with a one-way valve CV, a micro-leakage valve GNBV, and a vacuum generator VG. Further, the bypass conduit 15 is configured to switch between evacuation, nitrogen purging, and pressurization states.

[0064] When the branch line 15 is in the evacuation state, close the pneumatic valves LPI and PGI, and open the pneumatic valves BPV and LPV. The venturi device 16 then evacuates the liquid outlet line 14 and the air inlet line 13, discharging the gas from the lines to the waste gas treatment device. Note that during evacuation, the manual valve MIV on the cylinder must be closed to maintain pressure. The cylinder can only be disassembled after the evacuation is complete.

[0065] When the branch line 15 is in the evacuation state, it is also used to depressurize the cylinder. At this time, the gas phase manual valve MIV on the cylinder to be disassembled is opened, and the pneumatic valves LPI and PGI are closed. The pneumatic valves BPV and LPV are opened, and the cylinder is evacuated and depressurized through the Venturi device 16.

[0066] When the bypass line 15 is under nitrogen purging, close the pneumatic valves LPV, HPI, and LPI, open the pneumatic valve BPV, and close the manual valve MIV on the cylinder to be disassembled. After nitrogen purging, open the pneumatic valve LPV again and evacuate through the Venturi device 16. This nitrogen purging and evacuation process can be repeated multiple times. After completing the nitrogen purging and evacuation, open the pneumatic valve PLP and close the micro-leakage valve PNBV to allow a small amount of nitrogen to enter the pipeline, preventing dust from entering the process pipeline during cylinder disassembly. Only then can the cylinder be disassembled.

[0067] For the Venturi device 16, when its micro-leakage valve GNBV is closed, a small amount of nitrogen enters the U-shaped pipe and flows out from the outlet of the U-shaped pipe, which can prevent pollutants from the exhaust gas treatment device from entering the pipeline system; when the micro-leakage valve GNBV is open, nitrogen enters from the inlet of the U-shaped pipe, and the gas is drawn in by the Venturi effect and discharged to the exhaust gas treatment device. During the drawing process, the vacuum generator VG can assist in the exhaust and improve the exhaust efficiency.

[0068] When the bypass line 15 is pressurized, open the pneumatic valves PGI and BPV, and close the pneumatic valves LPV, LPI and HPI. Open the gas phase manual valve MIV on the cylinder to be connected to the line, and close the liquid phase manual valve MIV. Hydrogen can then be introduced into the cylinder for pressurization.

[0069] Taking the pressure injection and filling of cylinder 2 on the right as an example. (Reference) Figure 1 and Figure 2 As shown, the manual valve MIV on the main pipeline 123 is normally open. During liquid compression, the pneumatic valve PHP on the main pipeline 123 opens, the pneumatic valve PGI on the left branch pipeline 124 closes, the pneumatic valve PGI on the right branch pipeline 124 opens, the pneumatic valve LPI on the right outlet pipeline 14 closes, and the pneumatic valves BPV and LPV on the right side branch pipeline 15 close. During pressurization, the pneumatic valve BPV on the right side branch pipeline 16 opens, and the pneumatic valve HPI on the right air inlet pipeline 13 and the liquid phase manual valve MIV on the right cylinder 2 close. The liquid compression and pressurization operations of the left cylinder 1 are similar and will not be described in detail.

[0070] Furthermore, in this embodiment, the cylinder disassembly process may include: depressurization (cylinder opening) - liquid compression - negative pressure holding (cylinder closing) - nitrogen purging of the pipeline - evacuation of the pipeline - cylinder disassembly. Understandably, during negative pressure holding, all valves are closed for a period of time to check for internal leaks. After successful negative pressure holding, nitrogen purging is performed. Nitrogen purging prevents TCS leakage and volatilization during cylinder disassembly, and nitrogen purging and evacuation can be repeated multiple times to thoroughly remove gas from the pipeline.

[0071] After replacing the gas cylinder, the cylinder pressurization process may include: nitrogen purging of the pipeline (cylinder closed) - pressurization (cylinder open) - evacuation of the pipeline (cylinder closed) - cylinder ready for online use (cylinder open). Since the pipeline may be disassembled during cylinder replacement, potentially introducing impurities, nitrogen purging is performed before pressurization to remove these impurities. After nitrogen purging, pressurization begins. During pressurization, the manual valve on the cylinder to be used is manually opened. After pressurization, the manual valve on the cylinder is closed first, then the pipeline is evacuated. Finally, the manual valve on the cylinder to be used is opened, ready for online use.

[0072] Finally, it should be noted that the functional components shown in the attached drawings include, but are not limited to, one-way valves, pressure gauges, pneumatic valves, manual valves, pressure regulating valves, pressure relief valves, vacuum generators, filters, pressure sensors, and micro-leakage valves. The specific settings are determined by actual needs. In addition, all pneumatic valves described in this document are communicatively connected to the control system, and the control system controls the opening and closing of the pneumatic valves. Since these are easily implemented by those skilled in the art based on their knowledge, they are not described in detail.

[0073] It should be understood that the above embodiments specifically disclose the features of the preferred embodiments of this application, enabling those skilled in the art to better understand this application. Those skilled in the art should understand that, based on the disclosure of this application, appropriate modifications can be easily made to this application to achieve the same purpose and / or the same advantages as the embodiments disclosed in this application. Those skilled in the art should also recognize that such similar structures do not depart from the scope of this application, and that they can be changed, substituted, and modified in various ways without departing from the scope of this application.

Claims

1. A piping system for a TCS gas holder, characterized in that, include: The system includes an online hydrogen supply pipeline, an offline hydrogen supply pipeline, and multiple sets of cylinder connection pipelines; valves are installed on the online hydrogen supply pipeline, the offline hydrogen supply pipeline, and the multiple sets of cylinder connection pipelines. Each set of cylinder connection pipes is used to connect one cylinder and includes an inlet pipe and an outlet pipe. One end of the inlet pipe is connected to the inlet end of the cylinder, and one end of the outlet pipe is connected to the outlet end of the cylinder. The online hydrogen supply pipeline is used to connect to the external first hydrogen pipeline and is configured to maintain communication with the gas inlet pipeline corresponding to the gas cylinder when the gas cylinder is in the online or standby state. The offline hydrogen supply pipeline is used to connect to an external second hydrogen pipeline, and is configured to maintain communication with the liquid outlet pipeline corresponding to the cylinder when the cylinder is offline and in a pressurized state, and is also configured to maintain communication with the gas inlet pipeline corresponding to the cylinder when the cylinder is offline and in a pressurized state.

2. The piping system of the TCS gas holder according to claim 1, characterized in that, The other end of all the inlet pipes is connected to the online hydrogen supply pipe, and the other end of all the outlet pipes is connected to the outlet area; the valves include pneumatic valves and manual valves; each inlet pipe is equipped with a pneumatic valve; each outlet pipe is equipped with a pneumatic valve and a manual valve; each cylinder is equipped with a manual valve at both the inlet and outlet ends.

3. The piping system of the TCS gas holder according to claim 2, characterized in that, The online hydrogen supply pipeline includes a first inlet port and a first supply pipeline; the first inlet port is connected to the first hydrogen pipeline and the first supply pipeline; the first supply pipeline is connected to all the inlet pipelines; the first supply pipeline is equipped with a filter, a pressure regulating valve, a pressure relief valve and a check valve.

4. The piping system of the TCS gas holder according to claim 2, characterized in that, The offline hydrogen supply pipeline includes a second inlet port and a second supply pipeline; the second supply pipeline includes a main pipeline and multiple branch pipelines; the second inlet port connects the second hydrogen pipeline and the main pipeline; one end of each branch pipeline is connected to the main pipeline, and the other end is connected to multiple outlet pipelines in a corresponding manner; each branch pipeline is equipped with a pneumatic valve; the main pipeline is equipped with a manual valve, a pressure relief valve, a check valve, and a pneumatic valve.

5. The piping system of the TCS gas holder according to claim 4, characterized in that, It also includes a nitrogen purging inlet line connected to all of the branch lines; each group of cylinder connection lines also includes a bypass line; each liquid outlet line is connected to a bypass line; one end of each bypass line is connected to a corresponding liquid outlet line, and the other end is connected to a Venturi device; each bypass line is also connected to a corresponding inlet line. Each of the aforementioned branch lines is equipped with a pneumatic valve on the section connecting the air inlet line and the liquid outlet line, and a pneumatic valve on the section connecting the Venturi device and the air inlet line; the nitrogen purging air inlet line is equipped with a filter, a pressure regulating valve, a micro-leakage valve, a pressure relief valve, a check valve, and a pneumatic valve.

6. The piping system of the TCS gas holder according to claim 5, characterized in that, The Venturi device includes a U-shaped pipeline with a one-way valve, a micro-leakage valve, and a vacuum generator; the side branch pipeline is configured to switch between evacuation, nitrogen purging, and pressurization states.

7. The piping system of the TCS gas holder according to claim 4, characterized in that, A manual valve, a pressure relief valve, a check valve, and a pneumatic valve are sequentially arranged along the main pipeline in the direction away from the second air intake port. The manual valve on the main pipeline is normally open.

8. The piping system of the TCS gas holder according to claim 1, characterized in that, The cylinder connection pipeline consists of two sets.

9. A gas supply panel assembly for a TCS gas holder, characterized in that, It includes an installation panel and a piping system for a TCS gas holder as described in any one of claims 1-8, the piping system being installed on the installation panel.

10. A TCS gas holder, characterized in that, The gas supply panel assembly of the TCS gas holder as described in claim 9 is provided.

Images