Probe station with mobile module

Abstract

The utility model discloses a kind of mobile modules for probe station, specifically related to probe station technical field, including support seat, the support seat top is equipped with the support groove for the limit mobile seat, and mobile seat top is equipped with assembly station, the support seat both ends are respectively equipped with the envelope tube and envelope tube that are connected with support groove, the fixed ring is threadedly connected in envelope tube inside and envelope tube inside all.This utility model is by two fixed rings respectively threadedly connected to envelope tube and envelope tube inside, then rotating the assembly ring connection of link pipe and mobile seat, limit fixing to the corrugated pipe both ends in this way, so that corrugated pipe can be integrally sleeved on the outside of threaded rod, and by the elasticity of corrugated pipe with mobile seat displacement, realize the effect that corrugated pipe is always sleeved on the outside of threaded rod, thus can avoid external dust and other impurities adhere to the outside of threaded rod, ensure the transmission stability between mobile seat and threaded rod.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technology field of probe station, more specifically to a kind of mobile module for probe station. BACKGROUND

[0002] Probe station is the key equipment in the field of semiconductor chip testing, and plays a crucial role in chip research and development, production and quality control. It is mainly used to provide accurate test environment for chips, and through the electrical connection between probe and the pads or other test points on the chip, the detection of various electrical performance parameters of the chip, such as voltage, current, resistance, capacitance, etc. Among them, the mobile module is usually installed in the key part of the probe station, and through the precise mechanical transmission device, it can realize high-precision translation or other multi-dimensional motion. When the probe station is ready to test the chip, the mobile module can accurately drive the object table or the probe support according to the preset program or the operator's instruction, so that the probe can quickly and accurately align the test points on the chip.

[0003] As shown in the prior art with publication number CN218625296U, although the lead screw in the prior art is respectively inserted with the fixed shaft and the fixed bearing, so that the lead screw can be quickly extracted from the fixed frame after the end cover and the fixed frame are separated, and because the side support and the table body are designed in a split type, the side support can be fixedly connected with the fixed frame through the first positioning nail and the second positioning nail after the side support and the table body are separated, so that the fixed frame serves as the force-bearing component of the mechanism above the lead screw sliding table, and the table body can be taken out from the fixed frame for replacement, thereby achieving the effect of quickly replacing the worn parts inside the lead screw sliding table. However, this technical solution can only realize the disassembly and assembly of the lead screw, and cannot effectively ensure the use performance of the lead screw, because the lead screw in this technical solution is directly exposed to the outside, which causes the external dust and other impurities to adhere to the outside of the lead screw, thereby affecting the transmission stability between the lead screw and the sliding block. UTILITY MODEL CONTENTS

[0004] In order to overcome the above-mentioned defects of the prior art, the utility model provides a kind of mobile module for probe station, by two fixed rings are respectively screwed to the inside of the envelope and the envelope, then rotating the assembly ring on the adapter pipe and the moving seat is connected, in this way, the ends of the bellows are limited and fixed, so that the bellows can be integrally fitted outside the threaded rod, and by the extensibility of the bellows, the moving seat is displaced, realizing the effect that the bellows are always fitted outside the threaded rod, thereby avoiding the adhesion of external dust and other impurities to the outside of the threaded rod, ensuring the transmission stability between the moving seat and the threaded rod, to solve the problems in the above background art.

[0005] To achieve the above object, the utility model provides the following technical scheme: A probe station moves module, including support seat, the support seat top is equipped with the support groove for the position mobile seat, and the mobile seat top is equipped with the assembly station, support seat both ends are equipped with the envelope tube and the envelope tube that communicate with the support groove, the envelope tube inside and envelope tube inside all are connected with the fixed ring of screw thread, and the fixed ring inside is equipped with the bellow, the bellow away from the fixed ring one end is equipped with the cross section is T's link ring, and the link ring outside is equipped with the link pipe,

[0006] The link pipe away from the link ring one end inside is equipped with the assembly ring of screw thread, and the assembly ring is installed in the mobile seat close to the link pipe one side.

[0007] In a preferred embodiment, the support groove is provided with a threaded rod, the mobile seat and the bellow are sleeved on the outside of the threaded rod, and the threaded rod is threadedly connected with the mobile seat;

[0008] Both ends of the threaded rod extend into the envelope tube and the envelope tube, and both ends of the threaded rod are provided with clamping grooves.

[0009] In a preferred embodiment, the envelope tube away from the support seat one side is equipped with the servo motor, the output shaft of servo motor penetrates the envelope tube and extends to the envelope tube inside, the output shaft of servo motor is equipped with the fixed clamping base, and the fixed clamping base extends to one of the clamping grooves inside.

[0010] In a preferred embodiment, the envelope tube away from the support seat one end is provided with a mounting ring, the mounting ring is provided with a positioning ring extending into the envelope tube on the side close to the support seat, and the positioning ring is threadedly connected with the envelope tube;

[0011] The inside of the mounting ring is movably connected with an activity plate through a bearing, and the side of the activity plate close to the envelope tube is provided with an activity clamping base, and the activity clamping base extends into the other clamping groove.

[0012] In a preferred embodiment, the cross section of the fixed clamping base, the cross section of the clamping groove and the cross section of the activity clamping base are all rectangular, and the outside of the fixed clamping base and the outside of the activity clamping base are all in contact with the inner wall of the clamping groove.

[0013] In a preferred embodiment, the cross section of the support groove and the cross section of the mobile seat are both rectangular, and the outside of the mobile seat is in contact with the inner wall of the support groove.

[0014] The technical effect and advantage of the utility model:

[0015] By threadedly connecting two fixed rings to the inside of the sealing pipe and the sealing tube respectively, and then connecting the adapter pipe with the assembly ring on the moving seat, the ends of the corrugated pipe are fixed in position, so that the corrugated pipe can be integrally sleeved outside the threaded rod, and the corrugated pipe can be displaced with the moving seat, so that the corrugated pipe is always sleeved outside the threaded rod, thereby avoiding the adhesion of external dust and other impurities to the outside of the threaded rod, and ensuring the transmission stability between the moving seat and the threaded rod. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a whole structure schematic view of the utility model;

[0017] Figure 2 It is a support seat sectional view of the utility model;

[0018] Figure 3 It is a corrugated pipe explosion view of the utility model;

[0019] Figure 4 It is an adapter pipe sectional view of the utility model;

[0020] Figure 5 It is a threaded rod front view of the utility model.

[0021] The signs are: 1, support seat; 2, moving seat; 3, support groove; 4, assembly table; 5, sealing tube; 6, sealing pipe; 7, fixed ring; 8, corrugated pipe; 9, adapter ring; 10, adapter pipe; 11, assembly ring; 12, threaded rod; 13, clamping groove; 14, servo motor; 15, fixed clamping seat; 16, mounting ring; 17, positioning ring; 18, movable plate; 19, movable clamping seat. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0023] Refer to the drawings in the description Figures 1-5This utility model provides a movable module for a probe station, including a support base 1. The top of the support base 1 has a support groove 3 for limiting the movable base 2, and an assembly platform 4 is installed on the top of the movable base 2. A sealing cylinder 5 and a sealing tube 6, which are connected to the support groove 3, are respectively installed at both ends of the support base 1. A fixing ring 7 is threadedly connected inside the sealing tube 6 and the sealing cylinder 5, and a corrugated pipe 8 is installed inside the fixing ring 7. A connecting ring 9 with a T-shaped cross section is installed at the end of the corrugated pipe 8 away from the fixing ring 7, and a connecting tube 10 is sleeved on the outside of the connecting ring 9. An assembly ring 11 is threadedly connected inside the end of the connecting tube 10 away from the connecting ring 9, and the assembly ring 11 is installed on the side of the movable base 2 near the connecting tube 10.

[0024] The mounting platform 4 on the movable seat 2 is connected to the probe station. To facilitate the displacement and adjustment of the probe station, a threaded rod 12 is provided inside the support groove 3. The movable seat 2 and the bellows 8 are both sleeved on the outside of the threaded rod 12, and the threaded rod 12 is threadedly connected to the movable seat 2. The two ends of the threaded rod 12 extend into the sealing cylinder 5 and the sealing tube 6, respectively. Both ends of the threaded rod 12 are provided with slots 13. The displacement of the movable seat 2 is driven by the rotation of the threaded rod 12. Since the cross-section of the support groove 3 and the cross-section of the movable seat 2 are both rectangular, and the outside of the movable seat 2 is in contact with the inner wall of the support groove 3, the support groove 3 can limit the movement of the movable seat 2. This ensures the stability of the movable seat 2 when the threaded rod 12 drives it to move, and avoids the movable seat 2 from shifting during the displacement process.

[0025] Meanwhile, to ensure the stability and ease of driving the threaded rod 12, it is necessary to limit the movement at both ends of the threaded rod 12, such as... Figure 3 As shown, a servo motor 14 is installed on the side of the sealing cylinder 5 away from the support base 1. The output shaft of the servo motor 14 passes through the sealing cylinder 5 and extends into the interior of the sealing cylinder 5. A fixing bracket 15 is installed on the output shaft of the servo motor 14, and the fixing bracket 15 extends into one of the slots 13. Furthermore, a mounting ring 16 is provided at the end of the sealing tube 6 away from the support base 1. A positioning ring 17 extending into the sealing tube 6 is installed on the side of the mounting ring 16 near the support base 1, and the positioning ring 17 is threadedly connected to the sealing tube 6. Inside the 16, a movable plate 18 is movably connected via a bearing, and a movable bracket 19 is installed on the side of the movable plate 18 near the sealing tube 6. The movable bracket 19 extends into another slot 13, allowing the operator to thread the mounting ring 16 onto the sealing tube 6 via the positioning ring 17 and engage the movable bracket 19 into one of the slots 13. At the same time, the fixed bracket 15 on the servo motor 14 engages with another slot 13 on the threaded rod 12, thereby achieving the effect of limiting and supporting both ends of the threaded rod 12.

[0026] Furthermore, the cross-sections of the fixed card seat 15, the slot 13, and the movable card seat 19 are all rectangular, and the outer surfaces of the fixed card seat 15 and the movable card seat 19 are in contact with the inner wall of the slot 13. This allows the fixed card seat 15 and the movable card seat 19 to drive the threaded rod 12 to rotate through the slot 13. Thus, when the servo motor 14 drives the fixed card seat 15 to operate, the fixed card seat 15 can rotate together with the threaded rod 12. The threaded rod 12 then drives the movable seat 2, which is limited by the support slot 3, to move, thereby improving the operating efficiency of the threaded rod 12.

[0027] When it is necessary to disassemble the threaded rod 12, first rotate the disassembly and installation ring 16 to separate the movable bracket 19 from the threaded rod 12, and then rotate the threaded rod 12 to separate it from the movable seat 2, so as to facilitate the disassembly of the threaded rod 12.

[0028] To ensure the transmission stability of the threaded rod 12 and the movable seat 2, it is necessary to prevent external dust from entering. Therefore, before assembling the threaded rod 12, the operator rotates the two fixing rings 7 into the sealing tube 6 and the sealing cylinder 5 respectively, and then rotates the connecting tube 10 to connect with the assembly ring 11 on the movable seat 2. This can limit and fix both ends of the bellows 8. After the bellows 8 is assembled, the threaded rod 12 is then assembled into the support groove 3, and the bellows 8 is completely fitted onto the outside of the threaded rod 12. This can prevent external dust and other impurities from adhering to the outside of the threaded rod 12, thereby ensuring the transmission stability between the movable seat 2 and the threaded rod 12.

[0029] Finally: The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A movable module for a probe station, comprising a support base (1), characterized in that: The support base (1) has a support groove (3) on its top for limiting the moving base (2), and the moving base (2) has an assembly table (4) on its top. The support base (1) has a sealing cylinder (5) and a sealing tube (6) connected to the support groove (3) at its two ends respectively. The sealing tube (6) and the sealing cylinder (5) are threaded with a fixing ring (7), and the fixing ring (7) has a corrugated pipe (8) installed inside. The corrugated pipe (8) has a connecting ring (9) with a T-shaped cross section installed at the end away from the fixing ring (7), and the connecting ring (9) has a connecting tube (10) sleeved on the outside. The end of the connecting tube (10) away from the connecting ring (9) is internally threaded with an assembly ring (11), and the assembly ring (11) is installed on the side of the movable seat (2) near the connecting tube (10).

2. The probe station moving module according to claim 1, characterized in that: The support groove (3) is provided with a threaded rod (12), the movable seat (2) and the bellows (8) are both sleeved on the outside of the threaded rod (12), and the threaded rod (12) is threadedly connected to the movable seat (2); The threaded rod (12) extends into the sealing cylinder (5) and the sealing tube (6) at both ends, and a slot (13) is provided at both ends of the threaded rod (12).

3. The probe station moving module according to claim 2, characterized in that: A servo motor (14) is installed on the side of the sealing cylinder (5) away from the support base (1). The output shaft of the servo motor (14) passes through the sealing cylinder (5) and extends into the interior of the sealing cylinder (5). A fixed bracket (15) is installed on the output shaft of the servo motor (14), and the fixed bracket (15) extends into one of the slots (13).

4. A movable module for a probe station according to claim 3, characterized in that: The sealing tube (6) is provided with an installation ring (16) at one end away from the support base (1). A positioning ring (17) extending into the sealing tube (6) is installed on the side of the installation ring (16) close to the support base (1), and the positioning ring (17) is threadedly connected to the sealing tube (6). The mounting ring (16) is movably connected to a movable plate (18) via a bearing, and a movable bracket (19) is installed on the side of the movable plate (18) near the sealing tube (6), the movable bracket (19) extending into another slot (13).

5. A movable module for a probe station according to claim 4, characterized in that: The cross-sections of the fixed card holder (15), the card slot (13), and the movable card holder (19) are all rectangular, and the outside of the fixed card holder (15) and the outside of the movable card holder (19) are in contact with the inner wall of the card slot (13).

6. A movable module for a probe station according to claim 1, characterized in that: The cross-section of the support groove (3) and the cross-section of the movable seat (2) are both rectangular, and the outside of the movable seat (2) is in contact with the inner wall of the support groove (3).

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