A glove box external dust removal device

Abstract

The utility model provides a glove box external dust removal device relates to dust removal device field, this glove box external dust removal device, including glove box, one side of glove box is provided with two check valve, the inner chamber fixed connection of check valve has sealing ring, the inboard clamping of sealing ring has sealing ring, the inner chamber inlay of check valve has spring, one end of spring is connected with sealing ring fixedly, the outside fixed connection of check valve has two mounting plate, the inboard swing joint of mounting plate has screw rod, the outside screwing of screw rod has screw sleeve, can prevent the dust-containing gas of external unfiltered from being treated directly into glove box, guarantee the cleanliness stability of glove box internal environment, reduce the dust removal efficiency decline problem caused by gas backflow, improve the reliability of overall dust removal system, the gas of fan box will be circulated and exchanged together, so the heat dissipation of fan will be taken together, greatly improve the fan life.

Description

Technical Field

[0001] This utility model relates to an external dust removal device for glove boxes, specifically an external dust removal device for glove boxes, belonging to the technical field of dust removal devices. Background Technology

[0002] Chemical vapor deposition (CVD) is a commonly used thin film deposition equipment. Its basic principle is to transport the precursor to the reaction chamber via a carrier gas, where a chemical reaction occurs on the substrate surface at high temperature to form the desired thin film. A glove box is typically used in CVD equipment to provide a clean environment isolated from water, oxygen, and dust particles during sample transfer after the chamber is opened, preventing sample contamination. The dust removal system is mainly used to remove dust particles from the surface of the gas homogenizer in the CVD reaction chamber. During the CVD reaction, a small amount of chemical reaction occurs on the surface of the gas homogenizer, depositing a thin film. Over time, this accumulated film forms dust that clogs the gas homogenizer; this system is used to clean these dust particles. In existing technology, the CVD equipment and the dust removal system are placed together in a glove box, which provides a stable, sealed environment of water, oxygen, and nitrogen, isolated from the external environment with no gas exchange.

[0003] The prior art patent application (application number 201921579015.2) entitled "Built-in Dust Removal Device for Glove Boxes" includes an air inlet assembly, a dust collection housing assembly, a circulating fan, and an air outlet assembly. The air inlet assembly is connected to the dust collection housing assembly, which is fixed to the inner side of a side panel of the glove box. The circulating fan is fixed to the outer side of the side panel. The side panel of the glove box has an air inlet and an air outlet. The dust collection housing and the circulating fan are connected via a pipe passing through the glove box's air outlet. The circulating fan is connected to the air outlet assembly, which is connected to the glove box's air inlet. This dust removal device has a simple and compact structure, small size, convenient installation, and easy operation. This invention can meet the user's need to remove particulate matter such as titanium alloy powder or nano-dust from glove boxes that cannot be processed in the surrounding air or is harmful to the human body.

[0004] However, during filter cleaning, external gas may flow back into the glove box without restriction, and gas inside the box may also leak out unexpectedly. This reverse gas flow not only disrupts the pressure balance and clean environment inside the glove box, but also, because the fan is installed in a closed system, the heat of the fan cannot be dissipated in time, making the fan easily damaged. New technical solutions need to be designed to address this issue. Utility Model Content

[0005] The purpose of this invention is to provide an external dust removal device for glove boxes to solve the above-mentioned problems, thereby addressing the issues of preventing dust from returning to the glove box and contaminating it, as well as facilitating heat dissipation from the external fan in the prior art.

[0006] This utility model is achieved through the following technical solution: an external dust removal device for a glove box.

[0007] A glove box is provided, with two one-way valves on one side. A sealing ring is fixedly connected to the inner cavity of each one-way valve, and a sealing ring is snapped into the inner side of the sealing ring. A spring is embedded within the inner cavity of each one-way valve, with one end of the spring fixedly connected to the sealing ring. Two mounting plates are fixedly connected to the outer side of each one-way valve, with threaded rods rotatably connected to the inner side of each mounting plate. Threaded sleeves are screwed onto the outer side of each threaded rod. A clamping tube is fixedly connected between one end of each of the two threaded sleeves, with one end of the clamping tube extending into the interior of the one-way valve. A fan box is provided on one side of the glove box, with an exhaust fan fixedly connected to its inner cavity. Through the snapping engagement of the sealing ring and the sealing ring, the one-way valve can be initially lifted. The sealing performance is enhanced by the spring providing elastic support to the sealing ring, ensuring tight contact between the sealing ring and related components, further improving the sealing performance. The threaded rod, threaded sleeve, and clamping tube allow the threaded sleeve to move by rotating the threaded rod, causing the clamping tube to press against the internal components of the check valve. This strengthens the sealing effect and allows for easy adjustment of the clamping degree according to actual needs, improving the flexibility and reliability of the check valve. The fan box provides installation and protection space for the exhaust fan, preventing it from being directly affected by the external environment and extending its service life. The exhaust fan can extract or transport gas from inside the glove box, facilitating control of the gas pressure environment within the glove box and meeting the gas environment requirements of different experiments or operations.

[0008] Preferably, a sealing sleeve is rotatably connected to one side of the mounting plate. The sealing sleeve is located outside the threaded rod, and one end of the sealing sleeve extends into the inside of the threaded sleeve. The sealing sleeve is fitted on the outside of the threaded rod and extends into the inside of the threaded sleeve, which can effectively prevent external dust, moisture and other impurities from entering the connection between the threaded rod and the threaded sleeve, avoid impurities from affecting the thread transmission of the two, ensure the smoothness of the adjustment process, and at the same time reduce the wear of the components and improve the durability of the device.

[0009] Preferably, one end of the clamping tube is in contact with the spring, one side of the one-way valve is fixedly connected to the glove box, and the other side of the clamping tube is fixedly connected to the glove box. The clamping tube is in contact with the spring, and the elastic buffering effect of the spring can prevent the clamping tube from causing rigid impact to other components, thus playing a protective role. The one-way valve and the clamping tube are fixedly connected to the glove box respectively, which can enhance the stability of the overall structure, ensure that the components will not loosen or shift during operation, and ensure the safety and reliability of the glove box operation.

[0010] Preferably, an exhaust pipe is fixedly connected to the top of the inner cavity of the fan box, and the top end of the exhaust pipe passes through the fan box and extends to the outside of the fan box. An air supply pipe is fixedly connected to the outside of the fan box. The exhaust pipe is used to introduce outside gas into the fan box or draw gas from the glove box, while the air supply pipe is responsible for transporting the gas processed by the fan to a designated location. The two work together to make the gas flow path clearer and improve the efficiency of gas delivery. The exhaust pipe extends through the fan box to the outside, which facilitates connection with external equipment or the glove box, enhancing the connection convenience and applicability of the device.

[0011] Preferably, one end of the air supply pipe passes through the fan box and extends to the outside of the fan box, and the air supply pipe is fixedly connected to the one-way valve on one side. The fixed connection between the air supply pipe and the one-way valve can ensure that the gas will not leak during the transportation process and improve the sealing of the gas transportation. The air supply pipe passes through the fan box and extends to the outside and is connected to the one-way valve, so that a stable gas flow channel is formed between the fan box and the one-way valve, ensuring that the exhaust fan can effectively regulate the gas circuit where the one-way valve is located and improve the overall collaborative working capability of the device.

[0012] Preferably, a filter chamber is fixedly connected to one end of the exhaust pipe, and the filter chamber is fixedly connected to the clamping pipe on one side. A pressure cap is provided inside the filter chamber, and a filter element is fixedly connected to one side of the pressure cap. The filter element is fixedly connected to the filter chamber. The filter element in the filter chamber can filter the gas entering the exhaust pipe, remove impurities, particulate matter and other harmful substances from the gas, ensure the cleanliness of the gas entering the glove box or other components, and avoid impurities from interfering with experiments or operations. The pressure cap can fix the filter element and prevent it from moving during gas flow, ensuring the stability of the filtration effect. The fixed connection between the filter chamber and the clamping pipe enhances the connection between the filtration system and the overall structure.

[0013] Preferably, an air intake chamber is fixedly connected to the outside of the filter chamber, and four air intake pipes are fixedly connected to the outside of the air intake chamber. Twelve air intake branch pipes are fixedly connected to the inner cavity of the air intake chamber. One end of each air intake branch pipe passes through the air intake chamber and extends into the inner cavity of the filter chamber. The four air intake pipes can simultaneously introduce impact gas from different sources, increasing the gas intake volume and improving the intake efficiency. The twelve air intake branch pipes disperse and transport the gas in the air intake chamber to the filter chamber, allowing the gas to more evenly impact and clean the dust on the filter element, improving the cleaning effect and extending the service life of the filter element.

[0014] This utility model provides an external dust removal device for glove boxes, which has the following beneficial effects:

[0015] 1. This external dust collector for the glove box, through a one-way valve mechanism, enables unidirectional gas flow, effectively preventing filtered clean gas or inert gas inside the glove box from flowing back into the unfiltered area, thus avoiding secondary pollution; at the same time, it can prevent unfiltered dust-laden gas from entering the glove box directly without treatment, ensuring the cleanliness of the glove box's internal environment is stable, reducing the problem of decreased dust removal efficiency caused by gas backflow, and improving the reliability of the overall dust removal system.

[0016] 2. This external dust removal device for the glove box allows clean gas filtered by the filter element to exit from the other end of the filter box and enter the fan box. The fan draws the gas discharged from the filter cartridge and the gas inside the fan box into the air intake port and then discharges it from the exhaust port back into the glove box. This cycle repeats to exchange gases. The gas in the fan box is also circulated and exchanged, so the heat dissipation of the fan is also carried away, greatly improving the life of the fan. Attached Figure Description

[0017] Figure 1 This is a front-view three-dimensional structural diagram of the present invention;

[0018] Figure 2 This is a side view of the three-dimensional structure of the present invention;

[0019] Figure 3 This is a cross-sectional view of the filter chamber of this utility model;

[0020] Figure 4 This is a cross-sectional view of the one-way valve of this utility model;

[0021] [Explanation of Key Component Symbols]

[0022] 1. Glove box;

[0023] 2. One-way valve; 201. Sealing ring; 202. Sealing ring; 203. Spring;

[0024] 3. Mounting plate; 301. Threaded rod; 302. Threaded sleeve; 303. Sealing sleeve;

[0025] 4. Clenching tube;

[0026] 5. Fan box; 501. Exhaust fan; 502. Exhaust duct; 503. Air supply duct;

[0027] 6. Filter compartment; 601. Pressure cap; 602. Filter element;

[0028] 7. Air intake chamber; 701. Air intake pipe; 702. Air intake branch pipe. Detailed Implementation

[0029] This utility model provides an external dust removal device for a glove box.

[0030] Please see Figure 1 , Figure 2 , Figure 3 and Figure 4 The glove box 1 includes two one-way valves 2 on one side. A sealing ring 201 is fixedly connected to the inner cavity of the one-way valve 2. A sealing ring 202 is snapped into the inner side of the sealing ring 201. A spring 203 is embedded in the inner cavity of the one-way valve 2. One end of the spring 203 is fixedly connected to the sealing ring 202.

[0031] Please refer to it again. Figure 1 , Figure 2 and Figure 4 Two mounting plates 3 are fixedly connected to the outer side of the one-way valve 2. A threaded rod 301 is rotatably connected to the inner side of the mounting plate 3. A threaded sleeve 302 is screwed to the outer side of the threaded rod 301. A sealing sleeve 303 is rotatably connected to one side of the mounting plate 3. The sealing sleeve 303 is located outside the threaded rod 301, and one end of the sealing sleeve 303 extends into the interior of the threaded sleeve 302. A pressure tube 4 is fixedly connected between one end of the two threaded sleeves 302. One end of the pressure tube 4 extends into the interior of the one-way valve 2, and one end of the pressure tube 4 contacts the spring 203. One side of the one-way valve 2 is fixedly connected to the glove box 1, and one side of the pressure tube 4 is fixedly connected to the glove box 1.

[0032] When gas flows from a specific direction (e.g., from the pressure tube 4 into the one-way valve 2), the gas pressure pushes the sealing ring 202 to compress the spring 203, creating a gap between the sealing ring 202 and the sealing ring 201. Gas can flow through this gap. When gas attempts to flow in the opposite direction, the spring 203, due to its elasticity, pushes the sealing ring 202 back to its original position, causing the sealing ring 202 to tightly engage with the sealing ring 201, forming a seal and preventing gas from flowing in the opposite direction. Simultaneously, by rotating the threaded rod 301 on the mounting plate 3, the threaded sleeve 302 can be moved along the threaded rod 301, thereby... The pressure tube 4 moves synchronously, and the degree of compression of the spring 203 by the pressure tube 4 changes, thereby adjusting the force of the spring 203 on the sealing ring 202, thus controlling the opening pressure during one-way flow. The sealing sleeve 303 forms a seal at the connection between the threaded rod 301 and the threaded sleeve 302, preventing contaminants from entering the thread groove of the threaded rod 301 and affecting the rotation of the threaded rod 301, ensuring the sealing reliability of the one-way valve mechanism. It can be adjusted with the wind force of the exhaust fan 501 to adjust the initial opening pressure of the valve, solving the problem that the one-way valve cannot open normally due to insufficient suction of the exhaust fan 501.

[0033] Please refer to it again. Figure 1 , Figure 2 and Figure 3A fan box 5 is installed on one side of the glove box 1. An exhaust fan 501 is fixedly connected to the inner cavity of the fan box 5. The external exhaust fan 501 eliminates the power selection limitation of the glove box 1 and reduces the sealing performance requirements of the exhaust fan 501. A common exhaust fan 501 can meet the requirements for isolating the external gas environment. An exhaust pipe 502 is fixedly connected to the top of the inner cavity of the fan box 5. The top end of the exhaust pipe 502 passes through the fan box 5 and extends to the outside of the fan box 5. An air supply pipe 503 is fixedly connected to the outside of the exhaust fan 501. One end of the air supply pipe 503 passes through the fan box 5 and extends to the outside of the fan box 5. The air supply pipe 503 is fixedly connected to a one-way valve 2 on one side. A filter chamber 6 is fixedly connected to one end of the exhaust pipe 502. The filter chamber 6 is fixedly connected to a pressure pipe 4 on one side. A pressure cap is installed inside the filter chamber 6. 601, a filter element 602 is fixedly connected to one side of the pressure cap 601. The filter element 602 is fixedly connected to the filter chamber 6. An air inlet chamber 7 is fixedly connected to the outside of the filter chamber 6. Four air inlet pipes 701 are fixedly connected to the outside of the air inlet chamber 7. Twelve air inlet branch pipes 702 are fixedly connected to the inner cavity of the air inlet chamber 7. One end of the air inlet branch pipe 702 passes through the air inlet chamber 7 and extends to the inner cavity of the filter chamber 6. One-way valves are installed on the exhaust pipe 502 and the air supply pipe 503. Blowing the filter element 602 can achieve the function of cleaning the filter element 602, which can extend the service life of the filter element 602 and reduce the number of times the filter element 602 is replaced. The blowing gas can be nitrogen. When replacing the filter element 602, only the gas environment inside the device outside the glove box 1 is disrupted. The gas environment inside the glove box 1 remains unchanged. The operation time for restoring the closed gas environment is short and energy is saved.

[0034] When gas impact cleaning of filter element 602 is required, an external air pump provides the impact power. The external air pump first blows air, and the impact cleaning gas enters the air intake chamber 7 through the air intake pipe 701 on the air intake chamber 7. Then, it enters the filter chamber 6 through the twelve air intake branch pipes 702 in the air intake chamber 7. Since the air intake branch pipes 702 can evenly disperse the gas into the filter chamber 6, the gas can comprehensively impact the surface of filter element 602, causing the dust attached to filter element 602 to fall off under the impact force. After the dust falls off, the external air pump switches to the suction mode and suctions the air intake chamber 7 and filter chamber 6 through the air intake pipe 701. The fallen dust will be drawn out of the filter chamber 6 by the airflow through the air intake chamber 7 and the air intake pipe 701, thereby completing the cleaning of filter element 602 and restoring its filtration performance. The pressure cap 601 can fix the filter element 602 during the impact and suction process, preventing the filter element 602 from being displaced or damaged due to the negative pressure generated by the airflow impact or suction.

[0035] Working principle: When gas flows from a specific direction (e.g., from the pressure tube 4 into the one-way valve 2), the gas pressure pushes the sealing ring 202 to compress the spring 203, creating a gap between the sealing ring 202 and the sealing ring 201. Gas can flow through this gap. When gas attempts to flow in the opposite direction, the spring 203, due to its elasticity, pushes the sealing ring 202 back to its original position, causing the sealing ring 202 to tightly engage with the sealing ring 201, forming a seal and preventing gas from flowing in the opposite direction. Simultaneously, by rotating the threaded rod 301 on the mounting plate 3, the threaded sleeve 302 can be moved along the threaded rod 301, thereby causing the pressure tube 4 to move synchronously. The degree of compression of the spring 203 by the pressure tube 4 changes, thus adjusting the force of the spring 203 on the sealing ring 202, thereby controlling the opening pressure during one-way flow. The sealing sleeve 303 forms a seal at the connection between the threaded rod 301 and the threaded sleeve 302, preventing contaminants from entering the thread groove of the threaded rod 301 and affecting the rotation of the threaded rod 301, thus ensuring... To ensure the sealing reliability of the one-way valve mechanism, when gas impact cleaning of filter element 602 is required, an external air pump provides the impact power. The external air pump first performs a blowing operation, and the impact cleaning gas enters the air inlet chamber 7 through the air inlet pipe 701 on the air inlet chamber 7. Subsequently, it enters the filter chamber 6 through the twelve air inlet branch pipes 702 inside the air inlet chamber 7. Since the air inlet branch pipes 702 can evenly disperse the gas into the filter chamber 6, the gas can comprehensively impact the surface of filter element 602, causing the gas adhering to the filter element 602 to be cleaned. Dust falls off under impact. After the dust falls off, the external air pump switches to suction mode and suctions air from the air intake chamber 7 and the filter chamber 6 through the air intake pipe 701. The fallen dust will be drawn out of the filter chamber 6 through the air intake chamber 7 and the air intake pipe 701 in sequence with the airflow, thus cleaning the filter element 602 and restoring its filtration performance. The pressure cap 601 can fix the filter element 602 during the impact and suction process, preventing the filter element 602 from being displaced or damaged due to the impact of airflow or the negative pressure generated by suction.

[0036] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. An external dust removal device for a glove box, comprising a glove box (1), characterized in that: Two one-way valves (2) are provided on one side of the glove box (1). A sealing ring (201) is fixedly connected to the inner cavity of the one-way valve (2). A sealing ring (202) is snapped into the inner side of the sealing ring (201). A spring (203) is embedded in the inner cavity of the one-way valve (2). One end of the spring (203) is fixedly connected to the sealing ring (202). Two mounting plates (3) are fixedly connected to the outer side of the one-way valve (2). A threaded rod (301) is rotatably connected to the inner side of the mounting plate (3). A threaded sleeve (302) is screwed onto the outer side of the threaded rod (301). A pressure tube (4) is fixedly connected between one end of the two threaded sleeves (302). One end of the pressure tube (4) extends into the interior of the one-way valve (2). A fan box (5) is provided on one side of the glove box (1). An exhaust fan (501) is fixedly connected to the inner cavity of the fan box (5).

2. The external dust removal device for a glove box according to claim 1, characterized in that: A sealing sleeve (303) is rotatably connected to one side of the mounting plate (3). The sealing sleeve (303) is located outside the threaded rod (301), and one end of the sealing sleeve (303) extends into the interior of the threaded sleeve (302).

3. The external dust removal device for a glove box according to claim 2, characterized in that: One end of the clamping tube (4) is in contact with the spring (203), one side of the one-way valve (2) is fixedly connected to the glove box (1), and the other side of the clamping tube (4) is fixedly connected to the glove box (1).

4. The external dust removal device for a glove box according to claim 3, characterized in that: The top of the inner cavity of the fan box (5) is fixedly connected to an exhaust pipe (502), the top end of the exhaust pipe (502) passes through the fan box (5) and extends to the outside of the fan box (5), and the outside of the exhaust fan (501) is fixedly connected to an air supply pipe (503).

5. The external dust removal device for a glove box according to claim 4, characterized in that: One end of the air supply pipe (503) passes through the fan box (5) and extends to the outside of the fan box (5), and the air supply pipe (503) is fixedly connected to the one-way valve (2) on one side.

6. The external dust removal device for a glove box according to claim 5, characterized in that: A filter chamber (6) is fixedly connected to one end of the exhaust pipe (502). The filter chamber (6) is fixedly connected to the pressing pipe (4) on one side. A pressure cap (601) is provided in the inner cavity of the filter chamber (6). A filter element (602) is fixedly connected to one side of the pressure cap (601). The filter element (602) is fixedly connected to the filter chamber (6).

7. The external dust removal device for a glove box according to claim 6, characterized in that: An air intake chamber (7) is fixedly connected to the outside of the filter chamber (6). Four air intake pipes (701) are fixedly connected to the outside of the air intake chamber (7). Twelve air intake branch pipes (702) are fixedly connected to the inner cavity of the air intake chamber (7). One end of each air intake branch pipe (702) passes through the air intake chamber (7) and extends into the inner cavity of the filter chamber (6).

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