Silane decarburization fixed bed
By employing a dual adsorbent layout and a heat insulation material zone design in the silane decarbonization fixed bed, the problems of low catalyst utilization and heat insulation were solved, achieving a highly efficient silane decarbonization process and improving decarbonization efficiency and product purity.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 宁夏福泰材料科技有限公司
- Filing Date
- 2025-04-01
- Publication Date
- 2026-07-10
AI Technical Summary
Existing silane decarbonization fixed-bed catalysts have small contact areas and low utilization rates, resulting in low decarbonization efficiency. At the same time, the thermal insulation problem has not been fully considered, which affects the reaction efficiency and product quality.
The system employs a dual adsorbent configuration with a rational adsorbent layout to increase the catalyst contact area. A heat insulation material zone is also set up within the bed to ensure catalyst activity and temperature stability. The system also features a detachable screen tube structure for easy maintenance and catalyst replacement.
It improves the efficiency of silane decarbonization, extends equipment lifespan, reduces operating costs, and ensures product purity and reaction efficiency.
Smart Images
Figure CN224474864U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of silane decarbonization technology, specifically to a silane decarbonization fixed bed. Background Technology
[0002] A fixed-bed silane decarbonization system is a key device for removing carbon impurities from silanes. Silanes are an important raw material in the semiconductor industry, and their purity has a crucial impact on the performance of semiconductor devices. Existing silane decarbonization technologies mainly employ the fixed-bed method. Its working principle involves passing silane gas through a solid catalyst bed for a decarbonization reaction. Common fixed-bed devices include a reaction vessel, inlet and outlet pipes, and catalyst components.
[0003] Existing fixed-bed reactors have a simple structure, but due to their small catalyst contact area, the catalyst utilization rate is low, which limits the reaction rate and causes the catalyst activity to decrease rapidly over time, affecting the decarbonization efficiency. At the same time, the existing reactors have not adequately considered the heat insulation problem in their structural design, and the exhaust gas carries a large amount of heat, resulting in serious heat dissipation during the reaction process, which reduces the reaction efficiency and product quality. Summary of the Invention
[0004] This invention provides a fixed bed for silane decarbonization to solve the problem of low decarbonization efficiency caused by low catalyst utilization during silane decarbonization.
[0005] To address the aforementioned problems, this utility model provides a silane decarbonization fixed bed, comprising: a bed body; a support located in the upper part of the bed body; an inner liner containing an adsorbent zone located inside the bed body; a feed pipe located at the top of the bed body and communicating with the inner liner; a discharge pipe communicating with the adsorbent zone; an air inlet pipe located at the top of the bed body and communicating with the inner liner; a catalyst screen pipe threadedly connected to the air inlet pipe; a filter screen located at the bottom of the adsorbent zone; and an adsorbent screen pipe fitted onto a central screen pipe connected to the air outlet pipe located at the bottom of the bed body.
[0006] By adopting the above scheme, a dual adsorbent configuration is set up, the adsorbent layout is reasonably arranged, the full contact of the adsorbents is ensured, their utilization rate is enhanced, and the silane decarbonization efficiency is maximized.
[0007] According to one embodiment of the present invention, the fixed bed further includes two covers fixed to the side of the bed body. The covers are composed of a base fixed to the bed body and an upper cover connected by a rotating shaft. The upper cover is provided with a pull ring at the upper end. Through the above solution, the upper cover can be easily opened and closed, and it can be opened by the pull ring to facilitate the replacement or testing of the catalyst. At the same time, the side-mounted design reduces the difficulty of disassembly and maintenance, further reduces operating costs, and improves decarbonization efficiency.
[0008] According to one embodiment of the present invention, the base and the top cover are also sealed by bolts. The bolted sealing not only ensures the airtightness of the bed body, but also makes it easy to operate and maintain, making the silane decarbonization process more efficient and reliable.
[0009] According to one embodiment of the present invention, the bottom of the inner liner is further provided with a heat insulation material area. The heat insulation material area can effectively maintain the temperature of the catalyst, avoid excessive cooling, and ensure that the activity of the catalyst is always kept in the best state, so as to continuously and efficiently carry out the decarbonization reaction. At the same time, it forms an insulation area to prevent the high temperature of the gas discharged during the reaction from affecting the inner liner.
[0010] According to one embodiment of the present invention, an exhaust pipe is also provided on the top of the bed body, with one end of the exhaust pipe located in the space between the bed body and the inner liner. Through the above solution, the temperature of the inner liner is prevented from being too high, which would increase the air pressure in the space between the bed body and the inner liner and thus affect the decarbonization reaction.
[0011] According to one embodiment of the present invention, the catalyst screen tube and the adsorbent screen tube are provided with at least two layers. By setting the number of screen tube layers, the catalyst is increased, the reaction is made more complete, and the decarbonization efficiency is further improved.
[0012] According to one embodiment of this utility model, both the catalyst screen tube and the adsorbent screen tube are detachable threaded connections. The detachable design allows for individual replacement when the screen tube is damaged or saturated with adsorption, thus extending the service life of the equipment.
[0013] According to one embodiment of the present invention, the above-mentioned central screen tube is composed of a stainless steel tube and a filter tube flange connection. The bottom of the stainless steel tube should be placed below the second layer of adsorbent screen tube. The design of the stainless steel tube ensures that the gas after being treated in the adsorbent zone must be treated by two layers of adsorbent screen tubes before it can be discharged from the reaction bed, ensuring the purity requirements after silane decarbonization. The filter tube only allows gas molecules to enter, preventing the adsorbent from falling into the filter tube and being discharged together with the silane molecules.
[0014] The technical advantages of this application are as follows:
[0015] This application provides a silane decarbonization fixed bed that employs a dual adsorbent configuration and a rationally arranged adsorbent layout to ensure sufficient contact between the gas and the adsorbent, thereby improving utilization and enhancing decarbonization efficiency. Simultaneously, a heat-insulating material zone is provided to effectively maintain temperature, prevent excessively rapid cooling, and ensure continuous and efficient decarbonization reaction. This heat-insulating material zone also forms an insulating area, preventing the high-temperature gas emitted during the reaction from affecting the inner liner. Attached Figure Description
[0016] Figure 1This is a cross-sectional schematic diagram of the overall structure of a silane decarburization fixed bed provided by this utility model.
[0017] Figure 2 This is a top view structural diagram of a silane decarburization fixed bed provided by this utility model.
[0018] Explanation of reference numerals in the attached figures:
[0019] 1. Bed body; 2. Exhaust pipe; 3. Air inlet pipe; 4. Feed pipe; 5. Catalyst screen pipe; 6. Support; 7. Adsorbent zone; 8. Adsorbent screen pipe; 9. Central screen pipe; 91. Stainless steel pipe; 92. Filter screen pipe; 10. Insulation material zone; 11. Air outlet pipe; 12. Cover; 1201. Base; 1202. Top cover; 1203. Pull ring; 1204. Rotating shaft; 13. Filter screen; 14. Discharge pipe; 15. Inner liner. Detailed Implementation
[0020] The following will be combined with the appendix Figures 1-2 The embodiments of the technical solution of this application are described in detail below. The following embodiments are only used to illustrate the technical solution of this application more clearly, and are therefore only examples and should not be used to limit the scope of protection of this application.
[0021] Example 1
[0022] Reference Figure 1 and Figure 2 This utility model provides a silane decarbonization fixed bed, comprising a bed body 1, a support 6 located in the upper part of the bed body 1, an inner liner 15 located inside the bed body 1 with an adsorbent zone 7, a feed pipe 4 located at the top of the bed body 1 and connected to the inner liner 15, a discharge pipe 14 connected to the adsorbent zone 7, an air inlet pipe 3 located at the top of the bed body 1 and connected to the inner liner 15, a catalyst screen pipe 5 threadedly connected to the air inlet pipe 3, a filter screen 13 located at the bottom of the adsorbent zone 7, and an adsorbent screen pipe 8 sleeved on a central screen pipe 9 connected to the air outlet pipe 11 located at the bottom of the bed body 1.
[0023] Silane enters the fixed bed through the inlet pipe 3 and decarbonizes in contact with the adsorbent under the action of the catalyst. Byproducts are absorbed by the adsorbent, and the saturated adsorbent is discharged through the outlet pipe 14. The decarbonized silane gas enters the second adsorption and decarbonization zone through the filter screen. The mixed gas that has not been completely decarbonized continues to be decarbonized under the action of the adsorbent screen pipe 8. After decarbonization, it is filtered through the central screen pipe 9 and discharged through the outlet pipe 11. The design adopts a detachable screen pipe structure, which further extends the service life of the equipment.
[0024] By adopting the above scheme, a dual adsorbent configuration is set up, the adsorbent layout is reasonably arranged, the full contact of the adsorbents is ensured, their utilization rate is enhanced, and the silane decarbonization efficiency is maximized.
[0025] The aforementioned fixed bed also includes two covers 12 fixed to the side of the bed body 1. Each cover 12 is composed of a base 1201 fixed to the bed body 1 and an upper cover 1202 connected by a pivot 1204. The upper cover 1202 is provided with a pull ring 1203 at its upper end. Through the above scheme, the upper cover 1202 can be easily opened and closed, and can be opened by the pull ring 1203, which facilitates the replacement or testing of the catalyst. At the same time, the side-mounted design reduces the difficulty of disassembly and maintenance, further reduces operating costs, and improves decarbonization efficiency.
[0026] The aforementioned base 1201 and top cover 1202 are also sealed by bolts. The bolted connection of the cover 12 ensures the airtightness of the bed 1 while facilitating operation and maintenance, making the silane decarbonization process more efficient and reliable.
[0027] The bottom of the inner liner 15 is also provided with a heat insulation material zone 10. The heat insulation material zone 10 can effectively maintain the temperature and prevent excessive cooling, thereby ensuring that the activity of the catalyst is always kept at the optimal state, so as to carry out the decarbonization reaction continuously and efficiently. At the same time, it forms an insulation zone to prevent the high temperature of the gas discharged during the reaction from affecting the inner liner 15. Specifically, the heat insulation material is ceramic fiber, aluminum silicate fiber or other high temperature resistant materials.
[0028] The aforementioned bed 1 is also equipped with an exhaust pipe 2, one end of which is located in the space between the bed 1 and the inner liner 15. This design avoids the inner liner 15 from getting too hot, which would increase the air pressure in the space between the bed 1 and the inner liner 15 and thus affect the decarbonization reaction.
[0029] The catalyst screen tube 5 and the adsorbent screen tube 8 are provided with at least 2 layers. By setting the number of screen tube layers, the catalyst is increased, the reaction is made more complete, and the decarbonization efficiency is further improved.
[0030] The catalyst screen tube 5 and the adsorbent screen tube 8 mentioned above are both detachable threaded connections. The detachable design allows for individual replacement or cleaning when the screen tube is damaged or saturated with adsorption, thus improving the service life of the equipment.
[0031] The aforementioned central screen tube 9 is composed of a stainless steel tube 91 and a filter tube 92 connected by flanges. The bottom of the stainless steel tube 91 should be placed below the second layer of adsorbent screen tube 8. The design of the stainless steel tube 91 ensures that the gas after being treated in the adsorbent zone 7 must be treated by two layers of adsorbent screen tubes 8 before it can be discharged from the reaction bed, ensuring the purity requirements after silane decarbonization. The filter tube 92 only allows gas molecules to enter, preventing the adsorbent from falling into the filter tube 92 and being discharged together with the silane molecules.
[0032] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.
Claims
1. A silane decarburization fixed bed, characterized in that, include: The bed body (1), the support (6) located in the upper part of the bed body (1), the inner liner (15) located inside the bed body (1) and having an adsorbent zone (7), the feed pipe (4) located at the top of the bed body (1) and connected to the inner liner (15), and the discharge pipe (14) connected to the adsorbent zone (7). An air inlet pipe (3) is located at the top of the bed (1) and communicates with the inner liner (15); a catalyst screen pipe (5) is threadedly connected to the air inlet pipe; a filter screen (13) is located at the bottom of the adsorbent zone (7); and an adsorbent screen pipe (8) is sleeved on the central screen pipe (9) which is connected to the air outlet pipe (11) located at the bottom of the bed (1).
2. The silane decarburization fixed bed according to claim 1, characterized in that, It also includes two covers (12) fixed to the side of the bed (1). The covers (12) are composed of a base (1201) fixed to the bed (1) and an upper cover (1202) connected by a pivot (1204). The upper cover (1202) is provided with a pull ring (1203) at the upper end.
3. The silane decarburization fixed bed according to claim 2, characterized in that, The base (1201) and the top cover (1202) are also sealed by bolts.
4. The silane decarburization fixed bed according to claim 3, characterized in that, The bottom of the inner liner (15) is also provided with a heat insulation material area (10).
5. The silane decarburization fixed bed according to claim 1, characterized in that, The top of the bed body (1) is provided with an exhaust pipe (2), one end of which is placed in the space between the bed body (1) and the inner liner (15).
6. The silane decarburization fixed bed according to claim 1, characterized in that, The catalyst screen tube (5) and the adsorbent screen tube (8) are provided with at least 2 layers.
7. The silane decarburization fixed bed according to claim 6, characterized in that, Both the catalyst screen tube (5) and the adsorbent screen tube (8) are detachable threaded connections.
8. The silane decarburization fixed bed according to claim 1, characterized in that, The central screen tube (9) is composed of a stainless steel tube (91) and a filter tube (92) connected by flanges. The bottom of the stainless steel tube (91) should be placed below the second layer of adsorbent screen tube (8).