A quartz glass powder purification melting furnace

CN224478035UActive Publication Date: 2026-07-10RIHONG SEMICONUCTING MATERIAL NANTONG CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
RIHONG SEMICONUCTING MATERIAL NANTONG CO LTD
Filing Date
2025-08-08
Publication Date
2026-07-10

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Abstract

The utility model discloses a kind of quartz glass powder purification with melting furnace, including melting tank, the outside of the melting tank is equipped with heat preservation cover, the upper end of the heat preservation cover is provided with the feeding machine for putting quartz glass powder into the melting tank, the inside of the melting tank is provided with screening residue discharge mechanism for discharging the residue impurity separated out in quartz glass powder, one side of the heat preservation cover is provided with the driving mechanism for driving the screening residue discharge mechanism, the tank wall of the melting tank is also provided with the trigger mechanism for judging residue impurity accumulation amount and starting the driving mechanism in time;The utility model is simple in structure, reasonable in design, uses sieve tray to replace filter plate, when impurity accumulation occurs, impurities can be discharged downward by turning over 180 degrees, and the melting tank is guided out by lower filter plate, improve overall production efficiency, reduce process complexity and safety hazard under high temperature environment, further ensure the consistency of product.
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Description

Technical Field

[0001] This utility model relates to the technical field of glass powder melting equipment, specifically a melting furnace for purifying quartz glass powder. Background Technology

[0002] Quartz glass powder, as a high-purity silicon-based material, is widely used in high-tech fields such as semiconductors, optical communications, and photovoltaics due to its excellent optical properties, thermal stability, and chemical inertness. Furnace refining is a key process in the preparation of high-purity quartz glass powder. High-temperature melting effectively removes metallic impurities and defects such as bubbles from the raw materials, achieving a SiO2 purity of over 99.99%. With the rapid development of 5G communications and the integrated circuit industry, the purity requirements for quartz glass powder are constantly increasing, placing higher demands on the melting refining process and equipment.

[0003] The shortcomings of existing technology:

[0004] Currently, the melting furnace used for quartz glass powder purification mainly consists of a heating system, a melting chamber, a filtration device, and a cooling system. The filter plate is a key component for removing impurities, physically filtering the molten quartz glass at high temperatures. However, existing equipment has significant drawbacks: during continuous production, impurities such as filtered metal oxides gradually accumulate on the filter plate surface. As the impurity layer thickens, it not only clogs the filter pores, reducing melt flow, but also alters the temperature distribution within the flow channel, affecting the purification effect. Operators need to frequently stop the machine to check the filter plate's condition and clean it through mechanical scraping or acid washing. This process not only reduces production efficiency but also increases process complexity. Operating in a high-temperature environment also poses safety hazards, and this intermittent production mode makes it difficult to guarantee consistent product purity. Utility Model Content

[0005] The purpose of this invention is to provide a melting furnace for purifying quartz glass powder, so as to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a melting furnace for purifying quartz glass powder, comprising a melting box, an insulation cover fitted on the outside of the melting box, a feeding machine for feeding quartz glass powder into the melting box at the upper end of the insulation cover, a screening and slag discharge mechanism inside the melting box for discharging residual impurities precipitated from the quartz glass powder, a driving mechanism for driving the screening and slag discharge mechanism on one side of the insulation cover, and a triggering mechanism for judging the amount of residual impurities accumulated and activating the driving mechanism in a timely manner on the wall of the melting box.

[0007] Preferably, the screening and slag discharge mechanism includes:

[0008] A positioning ring is disposed on the inner wall of the melting box. The inner wall surface of the positioning ring is conical. The lower end of the positioning ring is provided with a sieve plate for receiving quartz glass powder particles. The two ends of the sieve plate are rotatably connected to the mounting hole at the lower end of the positioning ring through pins.

[0009] The lower filter plate is inclinedly disposed inside the melting box at the lower end of the sieve plate. The lower end of the lower filter plate passes through the through groove at the lower end of the melting box and is rotatably connected to the inner wall of the through groove at the lower end of the melting box by a positioning shaft. The inner wall of the melting box is also provided with a support bar for supporting the upper position of the lower filter plate. The lower end of the support bar is rotatably connected to an eccentric wheel. The axle of the eccentric wheel is connected to the drive mechanism to drive the lower filter plate to vibrate up and down.

[0010] Preferably, the drive mechanism includes:

[0011] A power box is installed on the outer wall of the heat insulation cover, and the output shaft of the power box passes through the box wall of the melting box and the heat insulation cover and is connected to a pin on one side of the screen plate;

[0012] Synchronous pulleys are respectively mounted on the output shaft of the power box and the axle of the eccentric wheel. Both synchronous pulleys are located between the heat insulation cover and the melting box, and a synchronous belt connects the two synchronous pulleys.

[0013] Preferably, the triggering mechanism includes:

[0014] A trigger rod is tilted and rotatably connected to a through groove on one side of the upper end of the melting tank, and a float is rotatably connected to the lower end of the trigger rod.

[0015] A positioning seat is disposed on the outer wall of the melting tank, below the upper end of the trigger rod. The positioning seat is provided with a touch switch that matches the upper end of the trigger rod by means of an expansion groove.

[0016] Preferably, the pontoon is made of ceramic material and has a hollow structure, and the upper end of the pontoon has a ventilation hole.

[0017] Preferably, a slag storage box is provided at the lower end of the heat insulation cover, below the slag discharge point of the lower filter plate.

[0018] Preferably, the lower end of the lower filter plate is provided with a liquid-separating groove, which is filled with ceramic particles.

[0019] Compared with the prior art, the beneficial effects of this utility model are:

[0020] 1. This quartz glass powder purification melting furnace is equipped with a screening and slag discharge mechanism. It uses a screen plate instead of a filter plate. When impurities accumulate, they can be discharged downwards by flipping the screen 180 degrees and then discharged from the melting box through the lower filter plate. The entire process does not require opening the melting box or the intervention of personnel, which improves the overall production efficiency, reduces the complexity of the process and the safety hazards in high-temperature environments, and further ensures the consistency of the product.

[0021] 2. This quartz glass powder purifying melting furnace, by setting a driving mechanism, realizes the synchronous vibration effect of the lower filter plate when the screen plate rotates, which improves the efficiency of impurities being discharged from the lower filter plate, prevents impurities from accumulating on the lower filter plate, and placing the power box on the outside of the heat insulation cover can also significantly improve the service life of the equipment and avoid high temperature damage.

[0022] 3. This quartz glass powder purifying melting furnace is equipped with a triggering mechanism, which uses the liquid level as a basis to judge the flow status of the sieve plate. When the flow of the sieve plate deteriorates or becomes blocked, the touch switch is triggered in time to control the start of the drive mechanism, which is fast and accurate. Attached Figure Description

[0023] Figure 1 This is a three-dimensional schematic diagram of the present invention;

[0024] Figure 2 This is a schematic diagram of the internal structure of the present invention;

[0025] Figure 3 For the present utility model Figure 2 An enlarged view of point A in the diagram;

[0026] Figure 4 For the present utility model Figure 2 An enlarged schematic diagram at point B.

[0027] In the diagram: 1. Melting box; 2. Insulation cover; 3. Feeder; 4. Screening and slag discharge mechanism; 401. Positioning ring; 402. Screen plate; 403. Lower filter plate; 404. Support bar; 405. Eccentric wheel; 5. Drive mechanism; 501. Power box; 502. Synchronous pulley; 503. Synchronous belt; 6. Trigger mechanism; 601. Trigger rod; 602. Float box; 603. Positioning seat; 604. Touch switch; 7. Slag storage box; 8. Liquid separator. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0030] In the description of this patent, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "setting" should be interpreted broadly. For example, they can refer to a fixed connection or setting, a detachable connection or setting, or an integrated connection or setting. Those skilled in the art can understand the specific meaning of the above terms in this patent according to the specific circumstances.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "several" means two or more, unless otherwise explicitly specified. Example

[0032] Please see Figure 1-4As shown, this utility model provides a technical solution for a quartz glass powder purifying melting furnace: A quartz glass powder purifying melting furnace includes a melting box 1, an insulation cover 2 fitted on the outside of the melting box 1, a feeder 3 for feeding quartz glass powder into the melting box 1 installed at the upper end of the insulation cover 2, a screening and slag discharge mechanism 4 installed inside the melting box 1 for discharging residual impurities precipitated from the quartz glass powder, a drive mechanism 5 for driving the screening and slag discharge mechanism 4 installed on one side of the insulation cover 2, and a trigger mechanism 6 installed on the wall of the melting box 1 for judging the amount of residual impurities accumulated and activating the drive mechanism 5 in a timely manner. During the quartz glass powder purifying and melting operation, the raw material is fed onto the screening and slag discharge mechanism 4 through the feeder 3, and then the heating structure inside the melting box 1 begins to heat and melt the quartz glass powder. The molten quartz glass powder flows through the screening and slag discharge mechanism 4 and is discharged to the lower end of the melting box 1, completing the purification. The residues and impurities precipitated from the quartz glass powder are screened out by the slag discharge mechanism 4. When they accumulate to a certain amount, the trigger mechanism 6 sends an electrical signal to the controller of the melting furnace or directly starts the drive mechanism 5. The drive mechanism 5 drives the slag discharge mechanism 4 to discharge the precipitated residues and impurities from the melting box 1.

[0033] The screening and slag discharge mechanism 4 includes a positioning ring 401 and a lower filter plate 403. The positioning ring 401 is fixedly installed on the inner wall of the melting box 1. The inner wall surface of the positioning ring 401 is conical. A screen plate 402 for receiving quartz glass powder particles is movably installed at the lower end of the positioning ring 401. The two ends of the screen plate 402 are rotatably connected to the mounting holes at the lower end of the positioning ring 401 through pins. The screen plate 402 is driven to rotate by the drive mechanism 5, and the single rotation angle is 180 degrees, which means it can be flipped over. The lower filter plate 403 is tilted and movably installed inside the melting box 1 at the lower end of the screen plate 402. The lower end of the lower filter plate 403 passes through the through groove at the lower end of the melting box 1 and is rotatably connected to the inner wall of the through groove at the lower end of the melting box 1 through a positioning shaft. A support bar 404 is also installed on the inner wall of the melting box 1 to support the lower filter plate 403 at a high position, so as to prevent the lower filter plate 403 from rotating excessively and getting stuck on the inner wall of the melting box 1 or causing the precipitated residue to fall into the melting box 1. The lower end of the support bar 404 is rotatably connected to an eccentric wheel 405. The axle of the eccentric wheel 405 is connected to the drive mechanism 5 to drive the lower filter plate 403 to vibrate up and down.

[0034] During the purification process, the raw material is released onto the screen plate 402 via the feeder 3 and heated to melt. The molten quartz glass powder flows downward through the screen plate 402 and the lower filter plate 403, converging at the lower end of the melting tank 1 and being discharged. Residual impurities precipitated from the quartz glass powder accumulate on the screen plate 402. When excessive impurities clog the screen plate 402 or impurities reduce its flowability, the solution level above the screen plate 402 rises and is sensed by the triggering mechanism 6. Subsequently, the drive mechanism 5 is activated by the internal controller, causing the screen plate 402 to rotate 180 degrees. After rotation, the molten liquid quartz glass powder and precipitated impurities above the screen plate 402 all fall onto the lower filter plate 403. The impurities are intercepted by the lower filter plate 403 and slide downwards along it for collection, while the liquid quartz glass powder permeates through the lower filter plate 403 and converges at the lower end of the melting tank 1. During this process, the drive mechanism 5 synchronously drives the eccentric wheel 405 to rotate, causing the lower filter plate 403 to vibrate. This makes it easier for the residual impurities and particles intercepted by the lower filter plate 403 to slide down actively and be collected. After the screen plate 402 has finished flipping, the feeder 3 can feed the next batch of quartz glass powder for purification.

[0035] By using the screening and slag discharge mechanism 4, the screen plate 402 replaces the filter plate. When impurities accumulate, they can be discharged downwards by flipping 180 degrees and then discharged from the melting box 1 through the lower filter plate 403. The entire process does not require opening the melting box 1 or the intervention of personnel, which improves the overall production efficiency, reduces the complexity of the process and the safety hazards in the high-temperature environment, and further ensures the consistency of the product.

[0036] The drive mechanism 5 includes a power box 501 and synchronous pulleys 502. The power box 501 is mounted on the outer wall of the insulation cover 2 and houses a motor. The output shaft of the power box 501 passes through the walls of the melting tank 1 and the insulation cover 2 and is connected to a pin on one side of the sieve plate 402. The synchronous pulleys 502 are located on the output shaft of the power box 501 and the axle of the eccentric wheel 405, respectively. Both synchronous pulleys 502 are located between the insulation cover 2 and the melting tank 1, and a synchronous belt 503 connects the two synchronous pulleys 502.

[0037] When the screen disc 402 flips, the motor in the power box 501 directly drives the screen disc 402 to rotate 180 degrees. During this process, the synchronous pulley 502 and the synchronous belt 503 output power to the axle of the eccentric wheel 405, driving the eccentric wheel 405 to rotate and thus causing one end of the lower filter plate 403 to vibrate up and down. The diameter of the synchronous pulley 502 on the output shaft of the power box 501 should be larger than the diameter of the synchronous pulley 502 on the axle of the eccentric wheel 405 to ensure the transmission ratio, so as to achieve the effect of the screen disc 402 rotating 180 degrees and the lower filter plate 403 vibrating synchronously several times.

[0038] The drive mechanism 5 enables synchronous vibration of the lower filter plate 403 when the screen plate 402 rotates, which improves the efficiency of impurities being discharged from the lower filter plate 403, prevents impurities from accumulating on the lower filter plate 403, and the placement of the power box 501 on the outside of the heat insulation cover 2 can also significantly improve the service life of the equipment and avoid high temperature damage.

[0039] The triggering mechanism 6 includes a trigger rod 601 and a positioning seat 603. The trigger rod 601 is tilted and rotatably connected to a through groove on one side of the upper end of the melting tank 1, and the lower end of the trigger rod 601 is rotatably connected to a float box 602. The positioning seat 603 is installed on the outer wall of the melting tank 1, located below the upper end of the trigger rod 601. A touch switch 604 matching the upper end of the trigger rod 601 is installed on the positioning seat 603 through a telescopic groove. A spring is installed inside the telescopic groove to ensure the reset capability of the touch switch 604.

[0040] When the liquid level on the screen plate 402 rises, the float box 602, under the action of buoyancy, will drive the lower end of the trigger rod 601 to rotate and rise. The other end of the trigger rod 601 will simultaneously rotate and descend, activating the touch switch 604. After being activated, the touch switch 604 sends an electrical signal to the internal controller or directly to the power box 501, which in turn drives the screen plate 402 to flip and the lower filter plate 403 to vibrate. After being subjected to force, the touch switch 604 will overcome the spring force and retract into the positioning seat 603, automatically resetting when the force is no longer applied.

[0041] The triggering mechanism 6 enables the use of liquid level as a basis to determine the flow status of the screen plate 402. When the flow of the screen plate 402 deteriorates or becomes blocked, the touch switch 604 is activated in time to control the start of the drive mechanism 5, which is quick and accurate.

[0042] The float 602 is made of high-temperature resistant ceramic material and has a hollow structure to ensure buoyancy. The upper end of the float 602 is provided with a vent hole to prevent the internal pressure of the float 602 from increasing due to high temperature and causing it to crack.

[0043] The lower end of the heat insulation cover 2 is located below the slag discharge point of the lower filter plate 403 and is equipped with a slag storage box 7. The slag storage box 7 is used to receive impurities falling from below the lower filter plate 403.

[0044] The lower end of the filter plate 403 is equipped with a liquid separation tank 8, which is filled with ceramic particles. When the solution passes through the liquid separation tank 8, it will flow into the tank and seep downward to prevent it from flowing out. As the liquid separation tank 8 is filled, the impurity particles can only slide downward into the slag storage box 7.

[0045] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A melting furnace for purifying quartz glass powder, comprising a melting box (1), characterized in that: The outer side of the melting box (1) is fitted with a heat insulation cover (2). The upper end of the heat insulation cover (2) is provided with a feeder (3) for feeding quartz glass powder into the melting box (1). The inside of the melting box (1) is provided with a slag discharge mechanism (4) for discharging the residue and impurities precipitated from the quartz glass powder. A drive mechanism (5) for driving the slag discharge mechanism (4) is provided on one side of the heat insulation cover (2). A trigger mechanism (6) for judging the amount of residue and impurities accumulated and activating the drive mechanism (5) in time is also provided on the wall of the melting box (1).

2. The melting furnace for purifying quartz glass powder according to claim 1, characterized in that: The screening and slag discharge mechanism (4) includes: Positioning ring (401), the positioning ring (401) is disposed on the inner wall of the melting box (1), the inner wall surface of the positioning ring (401) is conical, and the lower end of the positioning ring (401) is provided with a sieve plate (402) for receiving quartz glass powder particles. The two ends of the sieve plate (402) are rotatably connected to the mounting hole at the lower end of the positioning ring (401) by a pin. The lower filter plate (403) is inclinedly disposed in the melting box (1) at the lower end of the sieve plate (402). The lower end of the lower filter plate (403) passes through the through groove at the lower end of the melting box (1) and is rotatably connected to the inner wall of the through groove at the lower end of the melting box (1) by a positioning shaft. The inner wall of the melting box (1) is also provided with a support bar (404) for supporting the lower filter plate (403) at a high position. The lower end of the support bar (404) is rotatably connected to an eccentric wheel (405). The axle of the eccentric wheel (405) is connected to the drive mechanism (5) to drive the lower filter plate (403) to vibrate up and down.

3. The melting furnace for purifying quartz glass powder according to claim 2, characterized in that: The drive mechanism (5) includes: Power box (501), the power box (501) is set on the outer wall of the heat insulation cover (2), and the output shaft of the power box (501) passes through the box wall of the melting box (1) and the heat insulation cover (2) and is connected to the pin on one side of the screen plate (402); Synchronous pulleys (502) are respectively located on the output shaft of the power box (501) and the axle of the eccentric wheel (405). Both synchronous pulleys (502) are located between the heat insulation cover (2) and the melting box (1), and a synchronous belt (503) connects the two synchronous pulleys (502).

4. The melting furnace for purifying quartz glass powder according to claim 1, characterized in that: The triggering mechanism (6) includes: A trigger rod (601) is tilted and rotatably connected to a through groove on one side of the upper end of the melting box (1), and a float box (602) is rotatably connected to the lower end of the trigger rod (601). Positioning seat (603) is located on the outer wall of the melting box (1) below the upper end of the trigger rod (601). The positioning seat (603) is provided with a touch switch (604) that matches the upper end of the trigger rod (601) by opening a telescopic groove.

5. The melting furnace for purifying quartz glass powder according to claim 4, characterized in that: The float (602) is made of ceramic material and has a hollow structure. The upper end of the float (602) has a ventilation hole.

6. The melting furnace for purifying quartz glass powder according to claim 2, characterized in that: The lower end of the heat insulation cover (2) is provided with a slag storage box (7) located below the slag discharge point of the lower filter plate (403).

7. The melting furnace for purifying quartz glass powder according to claim 6, characterized in that: The lower end of the lower filter plate (403) is provided with a liquid separation tank (8), which is filled with ceramic particles.