A high-purity aluminum target material processing and forming device

Abstract

The utility model provides a kind of high-purity aluminum target material processing forming device, it is related to high-purity aluminum target material fine grinding technical field, including annealing furnace and preheating chamber, the workpiece table for placing high-purity aluminum target material is provided in the annealing furnace furnace bottom and setting has lifting frame in annealing furnace, by setting the switch cooperation of gas valve, switch valve, solenoid valve, lifting frame can be realized to drop to the periphery of lifting cover covering workpiece table before, hot air in upper portion in annealing furnace is sent into preheating chamber, then hot air rises to realize the hot air rising in lifting cover again into preheating chamber, finally using lifting frame along the surface of lifting cover continuously drop to annealing furnace furnace bottom, hot air in lower space in annealing furnace can be realized to extrude and send into preheating chamber, by three times operation, hot air in annealing furnace is completely collected in preheating chamber, guarantee recovery efficiency.

Description

Technical Field

[0001] This utility model relates to the field of high-purity aluminum target material precision grinding technology, and in particular to a high-purity aluminum target material processing and forming device. Background Technology

[0002] In the process of forming high-purity aluminum sputtering targets, one step involves annealing the targets. For example, in the existing annealing furnace (publication number CN216303940U), the insulation door is first opened, and then the processing table is pulled out of the furnace body 1. The parts to be processed are placed on the processing table, and then the processing table is retracted into the furnace body. The hot air circulation fan is started, and the hot air from the fan circulates through the burners in the hot air pipes within the furnace body, uniformly heating the parts inside. After heating is complete, the hot air circulation fan is turned off, and the hot air pump is turned on to circulate the hot air inside the furnace body. The hot air is drawn into the preheating chamber and stored. Then the hot air pump is turned off, and the cooling device is started to cool the parts inside the furnace. After cooling is completed, the cold air pump is started, and the cold air pump discharges the used cold air from the furnace to the outside of the furnace through the cold exhaust pipe. After the cold air is discharged, the cold air pump is turned off, and then the insulation door is opened, the processing table is pulled out, and the processed parts are removed. The parts can then be processed again. When the parts are heated again, the hot air circulation fan can use the hot air stored in the preheating chamber to quickly heat the inside of the furnace and improve the utilization rate of the heat in the hot air.

[0003] However, the preheating chamber has a limited capacity and may not be able to fully accommodate all the residual heat flow inside the furnace. If the recovered heat flow exceeds the capacity of the preheating chamber, some of the heat flow may be wasted. Utility Model Content

[0004] The purpose of this invention is to solve the problems existing in the prior art by proposing a high-purity aluminum target material processing and forming device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a high-purity aluminum target material processing and forming device, comprising an annealing furnace and a preheating chamber, wherein the bottom of the annealing furnace is provided with a workpiece platform for placing high-purity aluminum target materials, and a lifting frame is provided inside the annealing furnace; a lifting cover for covering the workpiece platform is fixedly installed at the middle position of the surface of the lifting frame, and a lifting frame sleeved around the outer wall of the lifting cover and slidably connected to the inner wall of the annealing furnace is installed at the bottom edge of the lifting frame; a gas valve is installed through one side of the bottom of the annealing furnace, and a gas guide pipe is provided between the gas outlet end of the gas valve and one side of the preheating chamber; a switch valve is fixedly installed through the surface of the workpiece platform; a solenoid valve is installed through one side of the top of the lifting cover, and a connecting pipe extending into the preheating chamber is sleeved above the valve port of the solenoid valve.

[0006] Preferably, an electric telescopic rod is provided between the inner top surface of the annealing furnace and the outer top of the lifting hood, and a vertically arranged electric push rod is provided at the corner of the bottom surface of the lifting frame and the upper surface of the lifting frame.

[0007] Preferably, the connecting pipe is positioned close to the air guide pipe.

[0008] Preferably, the preheating chamber is located on the top edge of the annealing furnace and a piston plate is slidably installed inside the preheating chamber. An electric telescopic rod is also provided between the piston plate and the inner wall of the preheating chamber on the side away from the gas guide pipe.

[0009] Preferably, a vent valve is installed through the top of the annealing furnace at a position offset from the preheating chamber.

[0010] Preferably, the lifting cover faces downward and is inserted into the sides of the workpiece table.

[0011] Preferably, the telescopic ends of the electric telescopic rod and the electric push rod inside the annealing furnace extend downwards.

[0012] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0013] 1. In this utility model, by setting up the switching of air valve, switch valve and solenoid valve, the lifting frame can be lowered to cover the workpiece table before the lifting cover is lowered to send the upper hot air in the annealing furnace into the preheating chamber. Then, the hot air in the lifting cover is raised and re-enters the preheating chamber by the rising hot air. Finally, the lifting frame is lowered along the surface of the lifting cover to the bottom of the annealing furnace, so that the hot air in the lower space of the annealing furnace is squeezed and sent into the preheating chamber. Through three operations, the hot air in the annealing furnace is completely collected in the preheating chamber, ensuring the recovery efficiency.

[0014] 2. In this utility model, by setting a piston plate, the suction force generated by the piston plate moving to the left is used to draw the hot air that is covered by the lifting cover and gathered around the workpiece into the preheating chamber through the opened solenoid valve and connecting pipe. Alternatively, by moving the piston plate to the right, the hot air stored in the preheating chamber can be moved in the opposite direction and sent into the annealing furnace, thus realizing the circulation of hot air. Attached Figure Description

[0015] Figure 1 This utility model provides a three-dimensional structural schematic diagram of a high-purity aluminum target material processing and forming device;

[0016] Figure 2 This utility model proposes a high-purity aluminum target material processing and forming device. Figure 1 A schematic diagram of the side view structure;

[0017] Figure 3 This utility model proposes a high-purity aluminum target material processing and forming device. Figure 1A schematic diagram of the structure viewed from below;

[0018] Figure 4 This utility model proposes a high-purity aluminum target material processing and forming device. Figure 1 A schematic diagram of the rear section structure.

[0019] Legend: 1. Preheating chamber; 2. Annealing furnace; 3. Gas duct; 4. Lifting frame; 5. Lifting frame; 6. Lifting cover; 7. Vent valve; 8. Electric push rod; 9. Gas valve; 10. Switch valve; 11. Electric telescopic rod; 12. Piston plate; 13. Connecting pipe; 14. Solenoid valve; 15. Workpiece table. Detailed Implementation

[0020] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0021] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0022] like Figures 1-4As shown, a high-purity aluminum target material processing and forming device includes an annealing furnace 2 and a preheating chamber 1. The furnace door of the annealing furnace 2 is normally installed (not shown in this design). A workpiece table 15 for placing high-purity aluminum targets is provided at the bottom of the annealing furnace 2, and a lifting frame 5 is provided inside the annealing furnace 2. A lifting cover 6 for covering the workpiece table 15 is fixedly installed at the center of the lifting frame 5, and a lifting frame 4 is installed at the bottom edge of the lifting frame 5, which is sleeved on the outer wall of the lifting cover 6 and slidably connected to the inner wall of the annealing furnace 2. The opening of the lifting cover 6 faces downward and is inserted into the sides of the workpiece table 15. After the pure aluminum sputtering is annealed, the lifting frame 5 descends to cover the workpiece table 15 with the lifting cover 6 on its surface. Then, the lifting frame 4 moves downward along the outer wall of the lifting cover 6. A vent valve 7 is installed through the furnace top of the annealing furnace 2 at a staggered position from the preheating chamber 1. When the lifting frame 5 descends, the lifting frame 4 on its surface presses down the hot air gathered in the space above the annealing furnace 2. Furthermore, when the lifting frame 4 descends, the vent valve 7 opens, allowing outside air to enter the space above the lifting frame 4, thus ensuring equal air pressure in the upper and lower spaces during the lifting process. A vent valve 7 is installed through the bottom of the annealing furnace 2 on one side. A valve 9 is installed, and a guide pipe 3 is provided between the outlet of the valve 9 and one side of the preheating chamber 1. When the lifting frame 5 descends, the valve 9 is opened, allowing the hot air compressed by the lifting frame 4 and gathered in the space above the annealing furnace 2 to enter the preheating chamber 1 for collection through the opened valve 9 and guide pipe 3. After the lifting cover 6 covers the workpiece table 15, the lifting frame 4 continues to descend, allowing the residual hot air in the annealing furnace 2 to continue to enter the preheating chamber 1 along the opened valve 9 and guide pipe 3. A switch valve 1 is fixedly installed through the surface of the workpiece table 15. 0. A solenoid valve 14 is installed through one side of the top of the lifting cover 6. A connecting pipe 13 extending into the preheating chamber 1 is sleeved above the valve port of the solenoid valve 14. The connecting pipe 13 is set close to the air guide pipe 3. After the lifting cover 6 is sleeved around the workpiece table 15, it is opened by the solenoid valve 14 and the switch valve 10. Utilizing the principle of hot air rising, the hot air that is covered by the lifting cover 6 and gathers around the workpiece rises along the opened solenoid valve 14 and the connecting pipe 13 into the preheating chamber 1. Meanwhile, the cold air from the outside enters the lifting cover 6 through the opened solenoid valve 14, ensuring constant air pressure.

[0023] An electric telescopic rod 11 is installed between the inner top surface of the annealing furnace 2 and the outer top of the lifting cover 6. Vertical electric push rods 8 are installed at the corners of the bottom surface of the lifting frame 5 and the upper surface of the lifting frame 4. The telescopic ends of the electric telescopic rod 11 and the electric push rod 8 in the annealing furnace 2 extend downwards. The extension of the electric telescopic rod 11 in this scheme is used to push the lifting frame 5 down, or the extension of the electric push rod 8 in this scheme is used to make the lifting frame 4 descend along the outer side of the lifting cover 6.

[0024] The preheating chamber 1 is located on the outer top edge of the annealing furnace 2, and a piston plate 12 is slidably installed inside the preheating chamber 1. An electric telescopic rod 11 is also provided between the piston plate 12 and the inner wall of the preheating chamber 1 on the side away from the gas guide pipe 3. In use, the piston plate 12 can be moved by extending or retracting the electric telescopic rod 11. Figure 4 As shown, the suction force generated by the piston plate 12 moving to the left enables the hot air gathered around the workpiece and covered by the lifting cover 6 to be drawn into the preheating chamber 1 through the opened solenoid valve 14 and connecting pipe 13. Alternatively, the hot air stored in the preheating chamber 1 can be moved in the opposite direction and sent into the annealing furnace 2 by the piston plate 12 moving to the right.

[0025] In operation, place the high-purity aluminum target on the workpiece table 15, close the furnace door, and after annealing, extend the electric telescopic rod 11 inside the furnace to push the lifting frame 5, causing the lifting cover 6 and lifting frame 4 to descend synchronously. During descent, the vent valve 7 and the gas valve 9 open, allowing hot air from the upper part of the annealing furnace 2 to enter the preheating chamber 1 through the gas valve 9 and the gas guide pipe 3, until the opening of the lifting cover 6 covers the workpiece table 15. Then, the gas valve 9 closes, and the switching valve 10 and the solenoid valve 14 open, utilizing the piston plate 12. The suction force generated by moving to the left allows the hot air gathered around the workpiece and covered by the lifting cover 6 to be drawn into the preheating chamber 1 through the open solenoid valve 14 and connecting pipe 13. Then, the switch valve 10 is closed and the air valve 9 is opened. The lifting frame 4 continues to descend, allowing the remaining hot air to be forced into the preheating chamber 1. Finally, the air valve 9 is closed, and the lifting cover 6 and lifting frame 4 rise to reset. After the workpiece is removed, a new workpiece is placed in. The switch valve 10 is opened, and the piston plate 12 moves to the right, allowing the hot air stored in the preheating chamber 1 to move in the opposite direction and be sent into the annealing furnace 2.

[0026] The wiring diagrams for the vent valve 7, electric push rod 8, air valve 9, switch valve 10, electric telescopic rod 11, and solenoid valve 14 in this utility model are common knowledge in the field. Their working principles are known technologies. The appropriate model is selected according to actual use. Therefore, the control methods and wiring layouts of the vent valve 7, electric push rod 8, air valve 9, switch valve 10, electric telescopic rod 11, and solenoid valve 14 will not be explained in detail.

[0027] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the present utility model.

Claims

1. A high-purity aluminum target material processing and forming apparatus, comprising an annealing furnace (2) and a preheating chamber (1), characterized in that: The annealing furnace (2) has a workpiece platform (15) for placing high-purity aluminum targets at the bottom and a lifting frame (5) inside the annealing furnace (2). A lifting cover (6) for covering the workpiece platform (15) is fixedly installed at the middle position of the surface of the lifting frame (5). A lifting frame (4) is installed at the bottom edge of the lifting frame (5) and is sleeved on the outer wall of the lifting cover (6) and slidably connected to the inner wall of the annealing furnace (2). A gas valve (9) is installed through one side of the bottom of the annealing furnace (2). A gas guide pipe (3) is provided between the gas outlet end of the gas valve (9) and one side of the preheating chamber (1). A switch valve (10) is fixedly installed through the surface of the workpiece platform (15). A solenoid valve (14) is installed through one side of the top of the lifting cover (6). A connecting pipe (13) extending into the preheating chamber (1) is sleeved on the valve port above the solenoid valve (14).

2. The high-purity aluminum target material processing and forming apparatus according to claim 1, characterized in that: An electric telescopic rod (11) is provided between the inner top surface of the annealing furnace (2) and the outer top of the lifting cover (6), and an electric push rod (8) is provided vertically at the corner of the bottom surface of the lifting frame (5) and the upper surface of the lifting frame (4).

3. The high-purity aluminum target material processing and forming apparatus according to claim 1, characterized in that: The connecting pipe (13) is positioned close to the air guide pipe (3).

4. The high-purity aluminum sputtering and forming apparatus according to claim 1, characterized in that: The preheating chamber (1) is located on the top edge of the annealing furnace (2) and a piston plate (12) is slidably installed inside the preheating chamber (1). An electric telescopic rod (11) is also provided between the piston plate (12) and the inner wall of the preheating chamber (1) on the side away from the gas guide pipe (3).

5. The high-purity aluminum sputtering and forming apparatus according to claim 1, characterized in that: A vent valve (7) is installed through the top of the annealing furnace (2) at a position offset from that of the preheating chamber (1).

6. The high-purity aluminum target material processing and forming apparatus according to claim 1, characterized in that: The lifting cover (6) faces downward and is inserted into the sides of the workpiece table (15).

7. The high-purity aluminum target material processing and forming apparatus according to claim 2, characterized in that: The electric telescopic rod (11) and electric push rod (8) inside the annealing furnace (2) extend and retract downwards at their telescopic ends.

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