A single crystal furnace centering device

Abstract

This utility model relates to the technical field of single crystal furnace alignment equipment, and more particularly to a single crystal furnace alignment device. It includes a chassis, on the upper surface of which a single crystal furnace body is mounted. An adjustment mechanism is provided on the side of the chassis near the furnace body. The adjustment mechanism includes a rotating disk movably connected to one side of the chassis, and the side of the rotating disk away from the chassis is fixedly connected to the furnace body. Two fixing plates are fixedly connected to one side of the chassis. A first lead screw is rotatably connected to the inner wall of each fixing plate, and a connecting plate is threaded onto the arc surface of the first lead screw. The single crystal furnace alignment device provided by this utility model has the advantage that, when aligning the single crystal furnace with the crystal rod, the overall angle of the single crystal furnace can be adjusted through the adjustment mechanism. This adjustment mechanism improves the cooling effect of the single crystal furnace on the crystal rod and enhances the safety of the entire single crystal furnace alignment process.

Description

Technical Field

[0001] This utility model relates to the technical field of single crystal furnace centering equipment, and in particular to a single crystal furnace centering equipment. Background Technology

[0002] A single crystal furnace is a device used to ensure that the crystal rods in the single crystal furnace are coaxial with other important components inside the furnace.

[0003] Utility model CN221028783U discloses a single crystal furnace, the key technical points of which are: a furnace cylinder, a crucible, a first insulating cylinder, and an exhaust sleeve. The furnace cylinder has an open-end cavity, and a first through hole penetrating the side wall of the furnace cylinder is provided. The crucible is disposed in the cavity. The first insulating cylinder is disposed in the cavity and located above the crucible. A second through hole penetrating the wall of the first insulating cylinder is provided. The two ends of the exhaust sleeve are located in the first and second through holes. The exhaust sleeve has an exhaust channel penetrating along its axial direction, and the exhaust channel is connected to the cavity of the crucible to discharge volatiles. The first and second through holes are located above the cavity of the crucible. This structural form can shorten the gas flow path, thereby improving exhaust efficiency, and also helps reduce the corrosion of the heating zone of the heater by volatiles, thereby improving the service life of the heater.

[0004] Regarding the aforementioned issues, the following technical defects exist: A single-crystal furnace is a high-temperature device used to produce single-crystal silicon, widely applied in semiconductors, solar energy, and other fields. During operation, factors such as base descent and switching of the water-cooled heat shield during furnace shutdown can cause a deviation in the coaxiality of the crystal rod and the water-cooled heat shield, resulting in the crystal rod shifting in a certain direction. To adjust the crystal rod position, manual centering is usually required after the furnace is shut down, or manual adjustment of the tungsten wire rope weight of the lifting head during refeeding to ensure the crystal rod is centered. Currently, single-crystal furnaces are generally under-operated, and manual adjustment cannot guarantee the uniform diameter of the crystal rod. Furthermore, the centering process is time-consuming, labor-intensive, and requires highly skilled personnel, while also posing safety risks associated with working at heights. When the crystal rod is not centered, the cooling effect of the water-cooled heat shield will be affected, leading to uneven cooling of the crystal rod, incomplete release of thermal stress, and potentially causing a crystal rod explosion, which in severe cases can lead to a production accident.

[0005] Therefore, it is necessary to provide a new type of single crystal furnace centering device to solve the above-mentioned technical problems. Utility Model Content

[0006] The purpose of this invention is to address the shortcomings of existing technologies, such as the inability to guarantee the uniformity of crystal rod diameter when the single crystal furnace is generally running for too long, the time-consuming and labor-intensive centering process, the high technical requirements for personnel, the safety risks of working at heights, and the impact on the cooling effect of the water-cooled heat shield when the crystal rod is not centered, resulting in uneven cooling of the crystal rod, incomplete release of thermal stress, and the possibility of crystal rod explosion, which can lead to production accidents in severe cases.

[0007] To solve the above-mentioned technical problems, this utility model provides a single crystal furnace centering device, comprising: a chassis, a single crystal furnace body mounted on the upper surface of the chassis, an adjustment mechanism provided on the side of the chassis near the single crystal furnace body, the adjustment mechanism including a rotating disk, the rotating disk being movably connected to one side of the chassis, the side of the rotating disk away from the chassis being fixedly connected to the single crystal furnace body, two fixing plates fixedly connected to one side of the chassis, a first lead screw rotatably connected to the inner wall of the fixing plate, a connecting plate being threadedly connected to the arc surface of the first lead screw, and the connecting plate being fixedly connected to one side of the rotating disk. Next, two first servo motors are installed on one side of the chassis. The output ends of the two first servo motors are respectively installed at one end of the arc surface of the two first lead screws. Connecting blocks are fixedly connected to both sides of the single crystal furnace body. The inner wall of the connecting block is threaded through a second lead screw. An adjusting plate is rotatably connected to one end of the arc surface of the second lead screw. One side of the adjusting plate is fixedly connected to the rotating disk. Two second servo motors are fixedly connected to the side of the rotating disk near the single crystal furnace body. The output ends of the two second servo motors are respectively fixedly connected to the other end of the arc surface of the two second lead screws.

[0008] The aforementioned components achieve the following effects: The single crystal furnace body is a high-temperature device used to produce single crystal silicon, widely used in semiconductors, solar energy, and other fields. During operation, factors such as the descent of the base and the switching of the water-cooled heat shield during furnace shutdown can cause a deviation in the coaxiality of the crystal rod and the water-cooled heat shield, resulting in the crystal rod shifting in a certain direction. To adjust the position of the crystal rod, manual centering is usually required after the single crystal furnace body is shut down, or manual adjustment of the tungsten wire rope weight of the lifting head during refeeding to ensure that the crystal rod is centered. Currently, single crystal furnaces generally operate for more than 24 hours, and manual adjustment cannot guarantee the uniformity of the crystal rod diameter. Moreover, the centering process is time-consuming, labor-intensive, and requires high technical skills from personnel. It also poses safety risks associated with working at heights. When the crystal rod is not centered, the cooling effect of the water-cooled heat shield will be affected, resulting in uneven cooling of the crystal rod, incomplete release of thermal stress, and the possibility of rod explosion. In severe cases, it can lead to production accidents. At this time, an adjustment mechanism can be used to replace manual adjustment of the single crystal furnace body. The adjustment mechanism can effectively improve efficiency, reduce personnel operation risks, and improve equipment accuracy.

[0009] Preferably, a fixed cylinder is fixedly connected to the output end of the first servo motor. One inner wall of the fixed cylinder is slidably connected to the arc surface of the first lead screw, and a limit rod slides through the other inner wall of the fixed cylinder. A spring is fitted onto one end of the arc surface of the limit rod, and the two ends of the spring slide through the inner wall of the limit rod and are fixedly connected to the limit rod and the fixed cylinder, respectively. The effect achieved by the above components is that by pulling the limit rod out from the fixed cylinder and the first lead screw, the first servo motor can be removed from the chassis, facilitating maintenance of the first servo motor.

[0010] Preferably, a guide block is fixedly connected to one end of the arc surface of the limiting rod, and the guide block is funnel-shaped.

[0011] The effect achieved by the above components is that the guide block allows the limiting rod to connect with the inner wall of the fixed cylinder more quickly.

[0012] Preferably, a pull ring is rotatably connected to the inner wall of the limiting rod.

[0013] The effect achieved by the above components is that the pull ring can increase the speed at which the limit rod is pulled.

[0014] Preferably, a placement frame is fixedly connected to the chassis near each of the two first servo motors. The effect of these components is that the placement frame can better guide the first servo motors during installation, improving installation accuracy.

[0015] Preferably, a contact pad is fixedly connected to the bottom wall of the placement frame.

[0016] The effect achieved by the above components is that the contact pad can prevent wear when the first servo motor contacts the bottom of the placement frame.

[0017] Preferably, the connecting plate is a steel plate.

[0018] The above-mentioned components achieve the following effects: the surface of the steel connecting plate is less prone to deformation, resulting in a longer service life.

[0019] Compared with related technologies, the single crystal furnace centering device provided by this utility model has the following beneficial effects:

[0020] By setting an adjustment mechanism, when it is necessary to align the single crystal furnace with the crystal rod, the overall angle of the single crystal furnace can be adjusted through the adjustment mechanism. In this way, the cooling effect of the single crystal furnace on the crystal rod can be improved, and the safety of the entire single crystal furnace adjustment process can be enhanced. Attached Figure Description

[0021] Figure 1 A schematic diagram of the structure of a single crystal furnace centering device provided by this utility model;

[0022] Figure 2 for Figure 1 The diagram shows the structure of the adjustment mechanism.

[0023] Figure 3 for Figure 1 A partial structural schematic diagram of the adjustment mechanism shown;

[0024] Figure 4 for Figure 1 The diagram shows a partial breakdown of the adjustment mechanism.

[0025] Labels in the diagram: 1. Chassis; 2. Adjustment mechanism; 201. First servo motor; 202. First lead screw; 203. Fixing plate; 204. Connecting plate; 205. Adjusting plate; 206. Connecting block; 207. Second servo motor; 208. Fixing cylinder; 209. Limiting rod; 210. Spring; 211. Pull ring; 212. Guide block; 213. Placement frame; 214. Contact pad; 215. Rotating disk; 216. Second lead screw; 3. Single crystal furnace body. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0027] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0028] Please see Figures 1 to 4 The present invention provides a single crystal furnace centering device, comprising: a chassis 1, a single crystal furnace body 3 mounted on the upper surface of the chassis 1, and an adjustment mechanism 2 provided on the side of the chassis 1 near the single crystal furnace body 3.

[0029] In the embodiments of this utility model, please refer to Figures 2 to 4The adjusting mechanism 2 includes a rotating disk 215, which is movably connected to one side of the chassis 1. The side of the rotating disk 215 away from the chassis 1 is fixedly connected to the single crystal furnace body 3. Two fixing plates 203 are fixedly connected to one side of the chassis 1. A first lead screw 202 is rotatably connected to the inner wall of the fixing plate 203. A connecting plate 204 is threadedly connected to the arc surface of the first lead screw 202. The connecting plate 204 is fixedly connected to one side of the rotating disk 215. Two first servo motors 201 are installed on one side of the chassis 1. The output ends of the two first servo motors 201 are respectively installed at one end of the arc surface of the two first lead screws 202. Both sides of the single crystal furnace body 3 are fixedly connected to... A connecting block 206 has a threaded inner wall through which a second lead screw 216 passes. An adjusting plate 205 is rotatably connected to one end of the arc surface of the second lead screw 216. One side of the adjusting plate 205 is fixedly connected to a rotating disk 215. Two second servo motors 207 are fixedly connected to the side of the rotating disk 215 closest to the single crystal furnace body 3. The output ends of the two second servo motors 207 are respectively fixedly connected to the other ends of the arc surfaces of the two second lead screws 216. The single crystal furnace body 3 is a high-temperature device used for producing single crystal silicon, widely used in semiconductors, solar energy, and other fields. During operation, the single crystal furnace body 3 experiences changes due to the descent of the base and the switching of the water-cooled heat shield during furnace shutdown. Factors such as these can cause a misalignment in the coaxiality of the crystal ingot and the water-cooled heat shield, resulting in the crystal ingot shifting in a certain direction. To adjust the position of the crystal ingot, manual centering is usually required after the single crystal furnace body 3 has been shut down, or manual adjustment of the tungsten wire rope weight of the lifting head during refeeding to ensure the crystal ingot is centered. Currently, single crystal furnaces generally operate for more than 24 hours, and manual adjustment cannot guarantee the uniformity of the crystal ingot's diameter. Moreover, the centering process is time-consuming, labor-intensive, and requires highly skilled personnel. It also poses safety risks associated with working at heights. When the crystal ingot is not centered, the cooling effect of the water-cooled heat shield will be affected, leading to uneven cooling of the crystal ingot, incomplete release of thermal stress, and potentially causing the crystal ingot to explode, which could be serious. This could lead to production accidents. In such cases, the adjustment mechanism 2 can be used to adjust the single crystal furnace body 3 instead of manually. The adjustment mechanism 2 can effectively improve efficiency, reduce the risk of personnel operation, and improve equipment accuracy. The output end of the first servo motor 201 is fixedly connected to a fixed cylinder 208. One inner wall of the fixed cylinder 208 is slidably connected to the arc surface of the first lead screw 202. The other inner wall of the fixed cylinder 208 slides through a limit rod 209. A spring 210 is sleeved on one end of the arc surface of the limit rod 209. The two ends of the spring 210 slide through the inner wall of the limit rod 209 and the first lead screw 202, and are respectively fixedly connected to the limit rod 209 and the fixed cylinder 208.The aforementioned components achieve the following effects: by pulling the limiting rod 209 out of the fixed cylinder 208 and the first lead screw 202, the first servo motor 201 can be removed from the chassis 1, facilitating maintenance of the first servo motor 201. A guide block 212 is fixedly connected to one end of the arc surface of the limiting rod 209. The guide block 212 is funnel-shaped and allows the limiting rod 209 to connect more quickly to the inner wall of the fixed cylinder 208. A pull ring 211 is rotatably connected to the inner wall of the limiting rod 209, allowing it to be lifted. The high-speed pull limit rod 209 is used to fix the placement frame 213 at the position of the chassis 1 near the two first servo motors 201. The placement frame 213 can better guide the first servo motors 201 during installation and improve the installation accuracy. The bottom wall of the placement frame 213 is fixedly connected to the contact pad 214. The contact pad 214 can prevent wear when the first servo motor 201 contacts the bottom of the placement frame 213. The connecting plate 204 is made of steel plate. The surface of the steel connecting plate 204 is less prone to deformation and has a better service life.

[0030] The working principle of the single crystal furnace centering device provided by this utility model is as follows: When it is necessary to adjust the single crystal furnace body 3, the first servo motor 201 can be started. The movement of the first servo motor 201 will drive the connecting plate 204 to move through the first lead screw 202. The movement of the connecting plate 204 will drive the rotating disk 215 and the single crystal furnace body 3 to slide on the chassis 1. At this time, the single crystal furnace body 3 can be driven to move laterally. Then, the second servo motor 207 is started. The movement of the second servo motor 207 will drive the second lead screw 216 to rotate through the output end. The rotation of the second lead screw 216 will drive the connecting block 206 and the adjusting plate 205 to move. At this time, the single crystal furnace body 3 can be driven to move longitudinally again. Thus, with the cooperation of the first servo motor 201 and the second servo motor 207, the position and angle of the single crystal furnace body 3 can be adjusted.

[0031] The circuits and controls involved in this utility model are all existing technologies, and will not be described in detail here.

[0032] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A single crystal furnace centering device, characterized in that, include: A chassis (1) is provided, on the upper surface of which a single crystal furnace body (3) is mounted. An adjustment mechanism (2) is provided on the side of the chassis (1) near the single crystal furnace body (3). The adjustment mechanism (2) includes a rotating disk (215). The rotating disk (215) is movably connected to one side of the chassis (1). The side of the rotating disk (215) away from the chassis (1) is fixedly connected to the single crystal furnace body (3). Two fixing plates (203) are fixedly connected to one side of the chassis (1). A first lead screw (202) is rotatably connected to the inner wall of the fixing plate (203). A connecting plate (204) is threadedly connected to the arc surface of the first lead screw (202). The connecting plate (204) is fixedly connected to one side of the rotating disk (215). A single crystal furnace body (3) is mounted on one side of the chassis (1). There are two first servo motors (201), and the output ends of the two first servo motors (201) are respectively installed at one end of the arc surface of the two first lead screws (202). Connecting blocks (206) are fixedly connected to both sides of the single crystal furnace body (3). The inner wall of the connecting block (206) is threaded through a second lead screw (216). One end of the arc surface of the second lead screw (216) is rotatably connected to an adjusting plate (205). One side of the adjusting plate (205) is fixedly connected to a rotating disk (215). Two second servo motors (207) are fixedly connected to the side of the rotating disk (215) near the single crystal furnace body (3). The output ends of the two second servo motors (207) are respectively fixedly connected to the other end of the arc surface of the two second lead screws (216).

2. The single crystal furnace centering device according to claim 1, characterized in that, A fixed cylinder (208) is fixedly connected to the output end of the first servo motor (201). One inner wall of the fixed cylinder (208) is slidably connected to the arc surface of the first lead screw (202). A limit rod (209) slides through the other inner wall of the fixed cylinder (208). A spring (210) is sleeved on one end of the arc surface of the limit rod (209). The limit rod (209) slides through the inner wall of the first lead screw (202). The two ends of the spring (210) are fixedly connected to the limit rod (209) and the fixed cylinder (208) respectively.

3. The single crystal furnace centering device according to claim 2, characterized in that, One end of the arc surface of the limiting rod (209) is fixedly connected to a guide block (212), which is funnel-shaped.

4. The single crystal furnace centering device according to claim 2, characterized in that, The inner wall of the limiting rod (209) is rotatably connected to a pull ring (211).

5. The single crystal furnace centering device according to claim 1, characterized in that, The chassis (1) is fixedly connected to a placement frame (213) near the two first servo motors (201).

6. The single crystal furnace centering device according to claim 5, characterized in that, The bottom wall of the placement frame (213) is fixedly connected to a contact pad (214).

7. The single crystal furnace centering device according to claim 1, characterized in that, The connecting plate (204) is a steel plate.

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