A high-resolution image acquisition device for wafer inspection

By incorporating an electric telescopic rod and a heat dissipation grille, the design solves the problems of inaccurate positioning, cumbersome adjustment, and easy damage in existing high-resolution image acquisition devices during wafer inspection, achieving efficient and stable image acquisition and convenient maintenance.

CN224481756UActive Publication Date: 2026-07-10SUZHOU ASEN SEMICON CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SUZHOU ASEN SEMICON CO LTD
Filing Date
2025-08-12
Publication Date
2026-07-10

AI Technical Summary

Technical Problem

Existing high-resolution image acquisition devices suffer from problems such as inaccurate positioning, cumbersome adjustment, easy damage, and high maintenance costs in wafer inspection.

Method used

The device employs an electric telescopic rod to drive the moving block in conjunction with the positioning protrusion, enabling precise positioning and automated installation of the image acquisition unit. Combined with the design of a heat dissipation grille and inspection plate, it improves the stability and ease of maintenance of the device.

Benefits of technology

It enables rapid and accurate positioning of the image acquisition device, improves detection efficiency, reduces maintenance time and costs, and ensures stable operation of the device for a long time.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a high resolution image acquisition device for wafer detection, including image collector and installation frame, the image collector sets up at the right side of installation frame, the left side mounting of image collector has the mounting block, the left side of mounting block is through the inner chamber of installation frame, the bottom of mounting block and the bottom of installation frame inner chamber are in contact, the top of mounting block is equipped with the positioning recess, the bottom of positioning recess inner chamber is provided with the positioning lug, the top of positioning lug is through the top of positioning recess, the top of positioning lug is installed with the moving block. The utility model discloses through electric telescopic link drive moving block drive positioning lug and the cooperation on the positioning recess of mounting block, realizes the accurate positioning and installation of image collector, and the automation control of electric telescopic link makes the installation and position adjustment of image collector more convenient, need not manual operation, and the working efficiency of wafer detection has been improved greatly.
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