A self-isolating warning high temperature chuck

Abstract

The utility model discloses a high -temperature chuck of self -isolation warning relates to high -temperature chuck technical field, including heat -proof base and the heat -proof base upper end setting's glass ring, the inside of glass ring is provided with the isolation cylinder, and the inside of isolation cylinder is provided with chuck, the upper end of heat -proof base is provided with the power supply board, and the power supply board is located the inside of isolation cylinder. This high -temperature chuck of self -isolation warning, set up glass ring in the outside of heating structure, can reduce the influence of heat radiation, and is provided with two sets of temperature sensor, can guarantee the accuracy of temperature detection, and utilize alarm can send alarm in time, remind staff the emergence of unexpected situation, handle in time and reduce property loss, through the setting of the butt joint outer ring and sealing inner ring can seal between chuck and vacuum cylinder, and vacuum cylinder and isolation cylinder set up in the outside of heating structure, can further reduce the heat loss in the process of chuck heating, and then reduce the waste of electric energy.

Description

Technical Field

[0001] This utility model relates to the field of high-temperature chuck technology, specifically a high-temperature chuck with self-isolation warning. Background Technology

[0002] A high-temperature chuck is a device used to heat wafers. During operation, the chuck can be heated to 200-300 degrees Celsius, effectively heating the wafer on top of the chuck. However, existing chucks have certain drawbacks. The heating tubes themselves are relatively large, which increases the overall thickness of the heating platform. This increased thickness leads to a decrease in heat transfer rate and an increase in manufacturing costs. Furthermore, the installation method of the heating tubes results in a widening temperature difference from the center outwards, which can easily cause uneven heating and make it difficult to achieve process specifications.

[0003] Patent CN222320191U discloses a novel dual-purpose wafer chuck. The thermocouple monitors the temperature of the heating plate in real time and transmits the detected temperature information to a controller. The controller compares the real-time temperature information with a preset heating temperature. When the heating plate reaches the preset temperature, the controller stops the heating wire from heating further, stabilizing the heating plate at the preset temperature. A cooling component promptly cools the welded wafer, preventing insufficiently cooled wafers from oxidizing after being removed from the vacuum chamber. By winding the heating wire into multiple heating coils, which are evenly spaced radially along the heating plate, the heating of the wafer is more uniform. This combination of welding and cooling processes improves the welding quality and efficiency of the wafer.

[0004] In the aforementioned patent, the chuck solves the problems mentioned above. However, the chuck still has the following problems: during the operation of the chuck, the heating process is completed by the heating wire at the lower end of the heating plate. The lower end of the heating wire is provided with a cover plate, and the lower end of the cover plate is provided with a base plate. The lower end of the base plate is in direct contact with the air, which can easily cause the heat loss of the heating structure at the lower end of the chuck to be too fast during the heating process. This results in the chuck consuming too much electrical energy during the heating process, causing a waste of resources.

[0005] To address the aforementioned issues, there is an urgent need for innovative design based on the existing chuck structure. Utility Model Content

[0006] The purpose of this invention is to provide a high-temperature chuck with self-isolation warning, in order to solve the problem mentioned in the background art where the chuck needs to be heated by a heating wire at the lower end of the heating plate during operation. The lower end of the heating wire is provided with a cover plate, and the lower end of the cover plate is provided with a base plate. The lower end of the base plate is in direct contact with the air, which can easily lead to excessive heat loss from the heating structure at the lower end of the chuck during heating, resulting in excessive energy consumption and waste of resources.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a high-temperature chuck with self-isolation warning, comprising a heat-insulating base and a fiberglass ring disposed on the upper end of the heat-insulating base; an isolation cylinder is disposed inside the fiberglass ring, and a chuck is disposed inside the isolation cylinder; a power supply board is disposed on the upper end of the heat-insulating base, and the power supply board is located inside the isolation cylinder; a temperature sensor is disposed on the upper end of the power supply board; and an alarm is disposed on the upper end of the heat-insulating base.

[0008] The upper end of the heat insulation base is provided with a heat insulation structure to reduce heat loss, and the interior of the heat insulation base is provided with a chuck lifting structure.

[0009] Preferably, the heat insulation structure includes a vacuum cylinder, which is snapped onto the upper end of the heat insulation base, and the vacuum cylinder is located inside the isolation cylinder, and the inside of the vacuum cylinder is in a vacuum state.

[0010] Preferably, the insulation structure further includes a docking outer ring and a sealing inner ring, with the docking outer ring disposed at the lower end of the chuck, and a heating element disposed between the chuck and the docking outer ring. The heating element is bonded to the lower end of the chuck and is made of copper alloy.

[0011] Preferably, the sealing inner ring is disposed at the upper end of the vacuum cylinder, and the sealing inner ring is located outside the docking outer ring.

[0012] Preferably, the lifting structure includes lifting rods, which are slidably installed inside the heat insulation base. Four sets of lifting rods are evenly distributed inside the heat insulation base, and a lifting ring is fixedly installed at the lower end of the lifting rods.

[0013] Preferably, a connecting plate is fixedly installed inside the lifting ring, and a rotating rod is rotatably installed at the lower end of the connecting plate, and a moving plate is rotatably installed at the lower end of the rotating rod, while the moving plate is slidably connected to the heat insulation base.

[0014] Preferably, the heat insulation base is equipped with a drive motor inside, and the output end of the drive motor is fixedly installed with a bidirectional threaded rod, which is threadedly connected to two sets of moving plates.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] 1. Placing the fiberglass ring on the outside of the heating structure can reduce the impact of heat radiation. It is equipped with two sets of temperature sensors to ensure the accuracy of temperature detection. In addition, the alarm can be used to issue a timely warning to remind staff of the occurrence of accidents and to deal with them in time to reduce property damage.

[0017] 2. Furthermore, by setting the outer ring and the inner sealing ring, the chuck and the vacuum cylinder can be sealed. And by setting the vacuum cylinder and the isolation cylinder on the outside of the heating structure, the heat loss during the heating process of the chuck can be further reduced, thereby reducing the waste of electrical energy.

[0018] 3. Furthermore, by driving the motor, the lifting rod can be moved upward to push the chuck and the isolation cylinder apart, thereby facilitating the maintenance of the lower structure of the chuck and improving the convenience of chuck maintenance. Attached Figure Description

[0019] Figure 1 This is a top-view three-dimensional structural diagram of the present invention;

[0020] Figure 2 This is a top-view three-dimensional structural diagram of the fiberglass ring of this utility model;

[0021] Figure 3 This is a top-view three-dimensional structural diagram of the power supply board of this utility model;

[0022] Figure 4 This is a top sectional view of the three-dimensional structure of the isolation cylinder of this utility model;

[0023] Figure 5 This is a top-view three-dimensional structural diagram of the lifting rod of this utility model;

[0024] Figure 6 This is a top view of the three-dimensional structure of the connecting plate of this utility model;

[0025] Figure 7 This is a top-view three-dimensional structural diagram of the rotating rod of this utility model.

[0026] In the diagram: 1. Insulated base; 2. Fiberglass ring; 3. Insulation cylinder; 4. Chuck; 5. Power supply board; 6. Temperature sensor; 7. Alarm; 8. Vacuum cylinder; 9. Outer docking ring; 10. Sealing inner ring; 11. Lifting rod; 12. Lifting ring; 13. Drive motor; 14. Bidirectional threaded rod; 15. Moving plate; 16. Rotating rod; 17. Connecting plate; 18. Heating element. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0028] Example 1: In a specific embodiment, this utility model provides the following technical solution: a high-temperature chuck with self-isolation warning, such as... Figures 1-3 The basic usage process of this high-temperature chuck is shown in the figure.

[0029] The heat insulation base 1 and the fiberglass ring 2 set on the upper end of the heat insulation base 1; the fiberglass ring 2 is equipped with an isolation cylinder 3 inside, and the isolation cylinder 3 is equipped with a chuck 4 inside; the upper end of the heat insulation base 1 is equipped with a power supply board 5, and the power supply board 5 is located inside the isolation cylinder 3; the upper end of the power supply board 5 is equipped with a temperature sensor 6; and the upper end of the heat insulation base 1 is equipped with an alarm 7.

[0030] When using this self-isolated high-temperature chuck, the wafer to be heated needs to be placed on the upper end of the chuck 4, and the wafer is heated by the chuck 4. During this process, the heating element 18 is heated by the heating wire at the lower end of the chuck 4. After being heated, the heating element 18 will quickly transfer heat to make its internal temperature uniform, and the heating element 18 will heat the chuck 4 set on its upper end, thereby completing the heating of the wafer. During the heating process, the heat loss of the heating wire will be reduced. At the same time, after the heating is completed or during the maintenance of the lower structure of the chuck 4, the drive motor 13 needs to be activated to drive the chuck 4 to move upward, so as to facilitate the maintenance of the lower structure of the chuck 4 and complete the basic use process of the chuck 4, effectively ensuring the ease of use of the chuck 4.

[0031] Example 2: In one specific embodiment, such as Figures 1-4 As shown, in order to solve the problem of excessive heat loss in the existing high-temperature chuck 4, the working process of the heat insulation structure at the lower end of the chuck 4 is disclosed.

[0032] The upper end of the heat insulation base 1 is provided with a heat insulation structure to reduce heat loss. The heat insulation structure includes a vacuum cylinder 8, which is snapped onto the upper end of the heat insulation base 1 and located inside the isolation cylinder 3. The interior of the vacuum cylinder 8 is in a vacuum state. The heat insulation structure also includes a docking outer ring 9 and a sealing inner ring 10. The docking outer ring 9 is located at the lower end of the chuck 4, and a heating element 18 is provided between the chuck 4 and the docking outer ring 9. The heating element 18 is bonded to the lower end of the chuck 4 and is made of copper alloy. The sealing inner ring 10 is located at the upper end of the vacuum cylinder 8 and is located outside the docking outer ring 9.

[0033] When using this self-isolating high-temperature chuck, the outer mating ring 9 must mate with the inner sealing ring 10, and the outer mating ring 9 must be located outside the inner sealing ring 10 to seal the vacuum cylinder 8 and the chuck 4. The heating wire is located inside the vacuum cylinder 8, which reduces heat loss. Figure 4 Furthermore, the isolation cylinder 3 is located outside the vacuum cylinder 8, which can further reduce heat loss and energy waste. The fiberglass ring 2 can reduce heat radiation, and the temperature sensor 6 will detect the temperature at the lower end of the chuck 4, thereby ensuring the stable working state of the chuck 4. When the temperature sensor 6 detects an abnormal signal, it will transmit a signal to the alarm 7 to make the alarm sound, so that the operator can stop the operation of the chuck 4 and avoid accidental losses.

[0034] Example 3: Based on the above examples, such as... Figures 1-7 The rising process of the chuck 4 is shown in the figure.

[0035] The heat insulation base 1 is equipped with a chuck 4 lifting structure inside. The lifting structure includes a lifting rod 11, which is slidably installed inside the heat insulation base 1. There are four sets of lifting rods 11 distributed at equal angles inside the heat insulation base 1. A lifting ring 12 is fixedly installed at the lower end of the lifting rod 11. A connecting plate 17 is fixedly installed inside the lifting ring 12. A rotating rod 16 is rotatably installed at the lower end of the connecting plate 17. A moving plate 15 is rotatably installed at the lower end of the rotating rod 16. The moving plate 15 is slidably connected to the heat insulation base 1. A drive motor 13 is installed inside the heat insulation base 1. A bidirectional threaded rod 14 is fixedly installed at the output end of the drive motor 13. The bidirectional threaded rod 14 is threadedly connected to two sets of moving plates 15.

[0036] When using this self-isolating high-temperature chuck, during maintenance or replacement of the lower internal structure of the chuck 4, it is necessary to move the chuck 4 upwards, according to... Figure 6During this process, the drive motor 13 needs to work and drive the bidirectional threaded rod 14 to rotate. Since the threads at both ends of the bidirectional threaded rod 14 rotate in opposite directions, the two sets of moving plates 15 will move closer to each other. At this time, the moving plates 15 will push the rotating rod 16 to rotate. The rotation of the rotating rod 16 will cause the connecting plate 17 and the lifting ring 12 to move upward. At this time, the lifting ring 12 will push the chuck 4 upward through the lifting rod 11 at its upper end, which facilitates the maintenance or replacement of the structure at the lower end of the chuck 4, improves the convenience of maintenance of the chuck 4, and increases the overall practicality.

[0037] The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-temperature chuck with self-isolation warning, comprising a heat-insulating base (1) and a fiberglass ring (2) disposed on the upper end of the heat-insulating base (1); Its features are: The fiberglass ring (2) is provided with an isolation cylinder (3) inside, and a chuck (4) is provided inside the isolation cylinder (3). The upper end of the heat insulation base (1) is provided with a power supply board (5), and the power supply board (5) is located inside the isolation cylinder (3). The upper end of the power supply board (5) is provided with a temperature sensor (6), and the upper end of the heat insulation base (1) is provided with an alarm (7). The upper end of the heat insulation base (1) is provided with a heat insulation structure to reduce heat loss, and the interior of the heat insulation base (1) is provided with a chuck (4) lifting structure.

2. The high-temperature chuck with self-isolation warning according to claim 1, characterized in that: The insulation structure includes a vacuum cylinder (8), which is fitted onto the upper end of the heat insulation base (1). The vacuum cylinder (8) is located inside the isolation cylinder (3), and the inside of the vacuum cylinder (8) is in a vacuum state.

3. The high-temperature chuck with self-isolation warning according to claim 1, characterized in that: The insulation structure also includes a docking outer ring (9) and a sealing inner ring (10), and the docking outer ring (9) is located at the lower end of the chuck (4), and a heating element (18) is provided between the chuck (4) and the docking outer ring (9). The heating element (18) is bonded to the lower end of the chuck (4), and the heating element (18) is made of copper alloy.

4. A high-temperature chuck with self-isolation warning according to claim 3, characterized in that: The sealing inner ring (10) is located at the upper end of the vacuum cylinder (8), and the sealing inner ring (10) is located outside the docking outer ring (9).

5. A high-temperature chuck with self-isolation warning according to claim 4, characterized in that: The lifting structure includes a lifting rod (11), which is slidably installed inside the heat insulation base (1). The lifting rod (11) is distributed in four groups at equal angles inside the heat insulation base (1), and a lifting ring (12) is fixedly installed at the lower end of the lifting rod (11).

6. A high-temperature chuck with self-isolation warning according to claim 5, characterized in that: The lifting ring (12) is fixedly installed with a connecting plate (17), and a rotating rod (16) is rotatably installed at the lower end of the connecting plate (17), and a moving plate (15) is rotatably installed at the lower end of the rotating rod (16), while the moving plate (15) is slidably connected to the heat insulation base (1).

7. A high-temperature chuck with self-isolation warning according to claim 6, characterized in that: The heat insulation base (1) is equipped with a drive motor (13), and the output end of the drive motor (13) is fixedly installed with a bidirectional threaded rod (14), and the bidirectional threaded rod (14) is threadedly connected to two sets of moving plates (15).

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