Coated carrier, coating apparatus, and solar cell production system

Abstract

The application relates to a coating carrier plate, a coating device and a solar cell production system. The coating carrier plate comprises a plate body and a protruding part. The plate body is grounded. The plate body is provided with a bearing area and a non-bearing area. The bearing area is used for bearing a cell piece. The protruding part is arranged in the non-bearing area. During coating, the electric field intensity of the protruding part is increased under the tip effect of the protruding part, so that an arc is attracted to the protruding part for discharging. Since the coating carrier plate is grounded, the current can be rapidly introduced into the ground, so that the damage to a TCO thin film is reduced, the coating quality is improved, and the sparking phenomenon caused in a magnetron sputtering process is improved, and the yield is improved.

Description

Technical Field

[0001] This application relates to the field of solar cell coating technology, and in particular to a coating carrier, coating apparatus and solar cell production system. Background Technology

[0002] In Homojunction Solar Cells (HJTs), the amorphous silicon thin film layers located on both sides of the silicon wafer provide good passivation contact, but their overall long-range disordered structure results in low carrier mobility, preventing the cell current from being fully collected by the metal electrodes. To address this issue, transparent conductive oxide (TCO) films are commonly used, as they can effectively improve the overall conversion efficiency of HJT cells.

[0003] Typically, physical vapor deposition (PVD) equipment is used to deposit TCO thin films on the surface of solar cells. However, during the magnetron sputtering process in PVD equipment, excessive electric field strength at the corners of the sputtering source can lead to corona discharge, causing arcing and damaging the TCO thin film. This results in compromised coating quality and yield of the solar cells. Utility Model Content

[0004] Therefore, it is necessary to provide a coating carrier, coating device, and solar cell production system that can reduce damage to TCO thin films, improve coating quality, and ensure yield.

[0005] In a first aspect, this application provides a coating carrier plate, comprising:

[0006] A plate body, the plate body being used for grounding, the plate body having a load-bearing area and a non-load-bearing area, the load-bearing area being used to support the battery cells; and

[0007] The protrusion is located in the non-load-bearing area and is used to attract the electric arc to it for discharge.

[0008] In one embodiment, the carrier area is provided in multiple ways, and all the carrier areas are arranged in an array.

[0009] In one embodiment, the bearing area has at least two rows and at least two columns; the protrusion is located in the area enclosed by the bearing areas of two adjacent rows and the bearing areas of two adjacent columns.

[0010] In one embodiment, the plate has opposing first and second plate surfaces, both of which are provided with the protrusion.

[0011] In one embodiment, the protrusions on the first plate surface and the protrusions on the second plate surface are provided in a one-to-one correspondence.

[0012] In one embodiment, the protrusion is spherical.

[0013] In one embodiment, the coating substrate further includes a conductor disposed on the substrate, and the protrusion is disposed at one end of the conductor away from the substrate.

[0014] In one embodiment, the bearing area is provided with a through hole; the coating carrier plate also includes a loading frame, which is disposed on the plate body and surrounds the through hole.

[0015] Secondly, this application also provides a coating apparatus, comprising:

[0016] Coating chamber;

[0017] The target material, disposed within the coating chamber, is used to sputter target atoms onto the surface of the solar cell; and

[0018] The coating carrier plate of any one of the above, wherein the coating carrier plate is disposed in the coating chamber, and the coating carrier plate is used to support the battery cell; and

[0019] A drive wheel is disposed in the coating chamber and electrically connected to the coating carrier plate. The drive wheel is used to drive the coating carrier plate to move.

[0020] Thirdly, this application also provides a solar cell production system, including the above-mentioned coating apparatus.

[0021] In the aforementioned coating substrate, coating apparatus, and solar cell production equipment, during coating, the electric field strength at the protruding part increases due to the tip effect, thereby attracting the electric arc to the protruding part for discharge. Since the coating substrate is grounded, the current can be rapidly conducted to the ground, reducing damage to the TCO thin film, improving coating quality, and also mitigating arcing caused during magnetron sputtering, thus increasing yield. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of a coating carrier plate according to an embodiment of this application.

[0023] Figure 2 for Figure 1 The top view of the coated carrier plate shown.

[0024] Figure 3 for Figure 1 A front view of a partial structure of the coating carrier plate shown.

[0025] Explanation of icon numbers:

[0026] 10. Coated carrier plate; 11. Plate body; 111. Load-bearing area; 112. Non-load-bearing area; 113. First plate surface; 114. Second plate surface; 115. Through hole; 12. Protrusion; 13. Loading frame; 14. Conductor. Detailed Implementation

[0027] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0028] An embodiment of this application provides a solar cell production system, including a coating apparatus. The coating apparatus includes a coating chamber, a coating carrier plate 10, and a target material, both of which are disposed within the coating chamber. The coating carrier plate 10 is used to support the solar cell, and the target material is used to sputter target atoms onto the surface of the solar cell.

[0029] In the production process of HJT cells, a coating device is used to deposit a TCO thin film. Specifically, the cell with amorphous silicon coating is placed on the coating carrier plate 10. Under the action of an electromagnetic field, accelerated high-energy gas particles (Ar+) bombard the target material. Atoms on the target surface gain energy and escape from the surface, depositing onto the surface of the cell to form an oxide thin film on the surface of the cell.

[0030] During magnetron sputtering, excessive electric field strength at the corners of the sputtering source can lead to corona discharge, causing arcing and damaging the TCO film, which is detrimental to improving the conversion efficiency of the solar cell.

[0031] To address the sparking issue, this embodiment refers to... Figure 1 , Figure 1 A schematic diagram of the structure of a coating carrier plate according to an embodiment of this application is shown. The coating carrier plate 10 includes a plate body 11 and a protrusion 12. The plate body 11 is grounded. The plate body 11 is provided with a bearing area 111 and a non-bearing area 112. The bearing area 111 is used to bear the battery cells. The protrusion 12 is provided in the non-bearing area 112 and is used to attract the electric arc to it for discharge.

[0032] It should be noted that the non-load-bearing area 112 refers to the area of ​​the plate 11 other than the load-bearing area 111.

[0033] During coating, the electric field strength of the protrusion 12 increases due to the tip effect, thereby attracting the electric arc to the protrusion 12 for discharge. Since the coating carrier 10 is grounded, the current can be quickly conducted to the ground, which reduces damage to the TCO film, improves the coating quality, and also improves the arcing phenomenon caused by magnetron sputtering, thus increasing the yield.

[0034] In one embodiment, the coating apparatus further includes a drive wheel. The drive wheel is disposed within the coating chamber and is electrically connected to the coating carrier plate 10. The drive wheel is used to drive the coating carrier plate 10 to move. During coating, the amorphous silicon coated solar cell is placed on the coating carrier plate 10, and the drive wheel drives the coating carrier plate 10 to move relative to the target material to generate an oxide film on the surface of the solar cell.

[0035] Furthermore, the drive wheel is grounded. Specifically, the coating apparatus also includes a grounding wire, one end of which is grounded, and the other end is electrically connected to the drive wheel. It can be understood that the coating carrier 10 is grounded through the drive wheel. During the coating process, because the drive wheel is grounded, the charge on the coating carrier 10 can be conducted to the drive wheel, which then transfers the charge to the ground through the grounding wire. This reduces damage to the TCO film, improves coating quality, and ensures a high yield.

[0036] In one embodiment, the cross-sectional area of ​​the protrusion 12 gradually decreases in the direction away from the plate surface of the plate body 11, so as to form a top surface on the side of the protrusion 12 away from the plate body 11, so that the top surface of the protrusion 12 can form a tip discharge effect.

[0037] Optionally, in the direction perpendicular to the surface of the plate 11, the cross-sectional shape of the protrusion 12 can be circular or arc-shaped.

[0038] In one embodiment, see Figure 3 , Figure 3 It shows Figure 1 The diagram shows a partial front view of the coating carrier plate 10. The coating carrier plate 10 also includes a conductor 14. The conductor 14 is disposed on the plate body 11, and a protrusion 12 is disposed at the end of the conductor 14 facing away from the plate body 11. It is understood that the protrusion 12 is electrically connected to the plate body 11 via the conductor 14. By providing the conductor 14, the conductor 14 can guide the charge of the protrusion 12 to the coating carrier plate 10, and then guide it to the ground through the transmission wheel and the grounding wire.

[0039] Optionally, the conductor 14 is a cylinder. Of course, in other embodiments, the conductor 14 may also be other shapes, and is not limited thereto.

[0040] In one embodiment, the conductor 14 is fixedly connected to the plate 11 and the protrusion 12. Optionally, the conductor 14 is welded to the plate 11 and the protrusion 12.

[0041] Of course, in other embodiments, the conductor 14 may also be detachably connected to the plate 11 and the protrusion 12.

[0042] In one embodiment, see Figure 3 , Figure 3 It shows Figure 1 The diagram shows a partial front view of the structure of the coating carrier plate. The plate body 11 has opposing first plate surface 113 and second plate surface 114.

[0043] Furthermore, a target material is provided on the side of the first plate 113 facing away from the second plate 114, and a target material is provided on the side of the second plate 114 facing away from the first plate 113. Under the action of an electromagnetic field, accelerated high-energy gas particles (Ar+) bombard the target material on the first plate 113 facing away from the second plate 114 and the target material on the second plate 114 facing away from the first plate 113. Atoms on the surface of the target material gain energy and escape from the surface, depositing onto the front and back sides of the solar cell to form oxide thin films on opposite sides of the solar cell. In this way, coatings can be applied to opposite sides of the solar cell simultaneously, which is beneficial to improving coating efficiency.

[0044] In one embodiment, see Figure 1 , Figure 1 A schematic diagram of the structure of a coating carrier plate according to an embodiment of this application is shown. The carrier area 111 is provided with a through hole 115. Optionally, the through hole 115 is square in shape, so that the through hole 115 can be adapted to the shape of the solar cell.

[0045] Further, see Figure 1 and Figure 2 , Figure 1 A schematic diagram of the structure of a coating carrier plate according to an embodiment of this application is shown. Figure 2 It shows Figure 1 The diagram shows a top view of the coating carrier plate. The coating carrier plate 10 also includes a support frame 13. The support frame 13 is disposed on the plate body 11 and surrounds the through hole 115. In use, the battery cell is placed in the support frame 13, which supports the battery cell and ensures the stability of the battery cell placement. Because the plate body 11 has the through hole 115, the target material on the side of the first plate surface 113 opposite to the second plate surface 114 and the target material on the side of the second plate surface 114 opposite to the first plate surface 113 can both coat the battery cell, which helps to improve the coating efficiency.

[0046] In one embodiment, see Figure 1 and Figure 3 , Figure 1 A schematic diagram of the structure of a coating carrier plate according to an embodiment of this application is shown. Figure 3 It shows Figure 1The diagram shows a partial front view of the coating carrier plate. Both the non-load-bearing area 112 of the first plate surface 113 and the non-load-bearing area 112 of the second plate surface 114 have protrusions 12. During coating, due to the tip effect of the protrusions 12, the electric field strength of the protrusions 12 of the first plate surface 113 increases, thereby attracting the electric arc on the side of the first plate surface 113 away from the second plate surface 114 to the protrusions 12 of the first plate surface 113 for discharge. Simultaneously, the electric field strength of the protrusions 12 of the second plate surface 114 increases, thereby attracting the electric arc on the side of the second plate surface 114 away from the first plate surface 113 to the protrusions 12 of the second plate surface 114 for discharge. Since the coating carrier plate 10 is grounded, the current can be quickly conducted to the ground, thus reducing damage to the TCO thin film, improving coating quality, and ensuring a high yield.

[0047] Further, see Figure 1 , Figure 1 A schematic diagram of the structure of a coating carrier plate according to an embodiment of this application is shown. The protrusions 12 on the first plate surface 113 and the protrusions 12 on the second plate surface 114 are provided in a one-to-one correspondence.

[0048] In this embodiment, see Figure 1 , Figure 1 A schematic diagram of the structure of a coating carrier plate according to an embodiment of this application is shown. Both the first plate surface 113 and the second plate surface 114 are provided with 16 protrusions 12, and the protrusions 12 of the first plate surface 113 and the protrusions 12 of the second plate surface 114 are arranged in a one-to-one correspondence.

[0049] In one embodiment, see Figure 2 and Figure 1 , Figure 2 A schematic diagram of the structure of a coating carrier plate according to an embodiment of this application is shown. Figure 1 It shows Figure 1 The diagram shows a top view of the coating carrier. Multiple carrier areas 111 are provided, and all carrier areas 111 are arranged in an array. This allows multiple solar cells to be placed one-to-one in the multiple carrier areas 111, which improves coating efficiency while ensuring coating quality.

[0050] In one embodiment, see Figure 2 and Figure 1 , Figure 2 A schematic diagram of the structure of a coating carrier plate according to an embodiment of this application is shown. Figure 1 It shows Figure 2 The top view of the coating carrier plate shown. The carrier area 111 has at least two rows and at least two columns.

[0051] It should be noted that the number of carrying areas 111 can be set according to actual needs, and no specific limit is made here.

[0052] Optionally, seeFigure 1 There are 25 carrier areas 111, and the 25 carrier areas 111 are arranged in an array to form 5 rows and 5 columns.

[0053] In one embodiment, see Figure 2 and Figure 1 , Figure 2 A schematic diagram of the structure of a coating carrier plate according to an embodiment of this application is shown. ​ It shows ​ The diagram shows a top view of the coating carrier plate. The protrusion 12 is located at the position formed by the bearing areas 111 of two adjacent rows and two adjacent columns. It can be understood that the protrusion 12 is located at the center of the bearing areas 111 of two adjacent rows and two adjacent columns.

[0054] In this embodiment, see ​ A protrusion 12 is provided in the area enclosed between two adjacent rows of bearing areas 111 and two adjacent columns of bearing areas 111, so that 16 protrusions 12 are provided on both the first plate surface 113 and the second plate surface 114. In this way, the protrusions 12 are evenly distributed, and the arrangement of the protrusions 12 is more reasonable.

[0055] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0056] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0057] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0058] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0059] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0060] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0061] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A coated carrier plate (10), characterized in that, include: The plate (11) is used for grounding. The plate (11) is provided with a bearing area (111) and a non-bearing area (112). The bearing area (111) is used to support the battery cells. as well as A protrusion (12) is provided in the non-load-bearing area (112) and is used to attract an electric arc to it for discharge.

2. The coating carrier plate (10) according to claim 1, characterized in that, The carrier area (111) is provided in multiple ways, and all the carrier areas (111) are arranged in an array.

3. The coating carrier plate (10) according to claim 2, wherein the bearing area (111) is provided with at least two rows and at least two columns; The protrusion (12) is located in the area enclosed by the two adjacent rows of the bearing area (111) and the two adjacent columns of the bearing area (111).

4. The coating carrier plate (10) according to claim 1, characterized in that, The plate (11) has a first plate surface (113) and a second plate surface (114) opposite each other, and both the first plate surface (113) and the second plate surface (114) are provided with the protrusion (12).

5. The coating carrier plate (10) according to claim 4, characterized in that, The protrusions (12) of the first plate surface (113) and the protrusions (12) of the second plate surface (114) are provided in a one-to-one correspondence.

6. The coating carrier plate (10) according to any one of claims 1 to 5, characterized in that, The protrusion (12) is spherical.

7. The coating carrier plate (10) according to any one of claims 1 to 5, characterized in that, The coating carrier plate (10) further includes a conductor (14), which is disposed on the plate body (11), and the protrusion (12) is disposed at one end of the conductor (14) away from the plate body (11).

8. The coating carrier plate (10) according to any one of claims 1 to 5, characterized in that, The bearing area (111) is provided with a through hole (115); The coating carrier plate (10) also includes a loading frame (13), which is disposed on the plate body (11) and surrounds the through hole (115).

9. A coating apparatus, characterized in that, include: Coating chamber; The target material is disposed in the coating chamber and is used to sputter target atoms onto the surface of the battery cell. as well as The coating carrier plate (10) as described in any one of claims 1 to 8, wherein the coating carrier plate (10) is disposed within the coating chamber, and the coating carrier plate (10) is used to support the battery cell; and A drive wheel is disposed in the coating chamber and is electrically connected to the coating carrier plate (10). The drive wheel is used to drive the coating carrier plate (10) to move.

10. A solar cell production system, characterized in that, Includes the coating apparatus as described in claim 9.

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