A ReticleSMIFPod150 switch box mechanism

Abstract

The application discloses a Reticle SMIF Pod 150 switch box mechanism, which comprises a box body and a cover body, and locking parts are arranged at two sides of the cover body at intervals; the locking parts have a locking position for locking the box body and the cover body and an unlocking position for unlocking the box body and the cover body; the switch box mechanism comprises a main body, an unlocking module and a transfer module; the unlocking module comprises a first driving machine and an unlocking part; the first driving machine drives the unlocking part to move and drives the locking parts to switch between the locking position and the unlocking position through the unlocking part; the transfer module comprises a second driving machine and a transfer part; the transfer part is provided with a placing surface for placing the box body; and the second driving machine drives the transfer part to move to drive the box body and the cover body to abut against each other or separate from each other. The first driving machine drives the unlocking part to move, accurately drives the locking parts at the two sides of the cover body to switch between the locking position and the unlocking position, avoids direct contact between the hands of an operator and the locking parts, and reduces the risk that the hands are contaminated and contaminate the sealing surface of the cover body.

Description

Technical Field

[0001] This application belongs to the technical field of photomask production equipment, specifically relating to a Reticle SMIF Pod150 switch box mechanism. Background Technology

[0002] In the field of semiconductor integrated circuit manufacturing, the reticle is a core precision component in the photolithography process, and its surface quality and precision directly determine the chip production yield. To ensure that the reticle is protected from particulate contamination, physical damage, and environmental interference during storage, transportation, and use, the industry widely uses the Reticle SMIF Pod 150 (standard mechanical interface box for reticles) as a dedicated storage and transportation container. The Reticle SMIF Pod 150 typically consists of a box body and a cover. The box body has a precision positioning structure inside to fix the reticle, and the cover forms a sealed connection with the box body through locking parts on the edges, thereby isolating it from external dust, moisture, and contaminants.

[0003] Currently, in the mask management process of semiconductor wafer fabs, the opening and closing operations of the Reticle SMIF Pod 150 still largely rely on manual labor. The specific procedure is as follows: the operator must manually align the locking parts of the cover. There are two locking parts on each side of the cover; pulling both locking parts on one side unlocks that side. Once both locking parts are unlocked, the cover and the housing are separated to remove or insert the mask. After completing the operation, the locking parts are reversed to reseal the mask. However, this manual operation mode has significant technical drawbacks:

[0004] First, there is a high risk of contamination. Photomasks are extremely sensitive to surface particles, especially those larger than 0.1 μm. During manual handling, the operator's skin, clothing fibers, or dust from the environment can easily enter the housing through contact or airflow, causing surface contamination of the photomask and resulting in defects in the photolithography pattern. In severe cases, this can lead to the scrapping of an entire batch of wafers. In addition, manual contact with the sealing surfaces of the cover or housing may leave behind organic matter such as grease and sweat, which can damage the sealing performance and cause secondary contamination.

[0005] Secondly, the operation is inefficient. Manually opening the box requires multiple steps, including positioning, unlocking, separating, picking up and placing the mask, and resetting and locking. Each operation cycle takes a long time, which is difficult to match the high-speed and automated process requirements of semiconductor production lines, becoming a bottleneck restricting the turnover efficiency of mask.

[0006] Third, poor operational consistency. Different operators may apply different amounts of force and operate at different speeds to the locking mechanism, which may lead to excessive wear, deformation, or positioning deviation of the locking mechanism, affecting the sealing reliability of the Reticle SMIF Pod 150. If the unlocking operation is not performed properly, it may also cause hard friction between the cover and the box when separating them, resulting in particulate contamination or structural damage.

[0007] To address these issues, the industry has attempted to develop semi-automatic box-opening devices, but existing solutions often suffer from complex structures, insufficient unlocking reliability, and poor transport stability. For example, some devices can only drive a single locking mechanism, making it difficult to adapt to the simultaneous unlocking requirements of multiple locking mechanisms spaced apart on both sides of the Reticle SMIF Pod 150; some devices have low integration between the unlocking and transport mechanisms, requiring multiple positioning and calibration steps, resulting in cumbersome operation procedures; and some devices have unreasonable transmission structure designs, leading to poor coordination between unlocking and transport actions, which can easily cause impacts or jamming, increasing the risk of mask damage. Utility Model Content

[0008] This application provides a Reticle SMIF Pod 150 switch box mechanism to solve the technical problems of low efficiency and easy adverse effects on the internal mask of the traditional Reticle SMIF Pod 150 switch box.

[0009] The technical solution adopted in this application is as follows:

[0010] A Reticle SMIF Pod 150 switch box mechanism is disclosed. The Reticle SMIF Pod 150 includes a box body and a cover. Locking portions are spaced apart on both sides of the cover. Each locking portion has a locking position for locking the box body and the cover and an unlocking position for releasing the lock. The switch box mechanism includes a main body and an unlocking module and a transfer module disposed on the main body. The unlocking module includes a first drive motor and an unlocking portion. The first drive motor drives the unlocking portion to move and, through the unlocking portion, causes the locking portion to switch between a locking position and an unlocking position. The transfer module includes a second drive motor and a transfer component. The transfer component has a placement surface for placing the box body. The second drive motor drives the transfer component to move so that the box body and the cover come into contact or separate.

[0011] The switch box mechanism described in this application also includes the following additional technical features:

[0012] The unlocking module includes unlocking groups arranged in alignment on both sides of the placement surface. Each unlocking group is provided with the first drive motor and an unlocking part corresponding to the number of locking parts. Each unlocking group also includes a transmission component fixedly connected to the output shaft of the first drive motor. The first drive motor drives the transmission component to move, thereby moving the unlocking part.

[0013] The unlocking part has a first direction of motion that drives the locking part to switch between an unlocked position and a locked position, and the output shaft of the first drive motor has a second direction of motion that drives the transmission component to move. The first direction of motion is perpendicular to the second direction of motion.

[0014] The transmission component extends along the first movement direction and has a transmission groove that forms an angle with the first movement direction. The unlocking module also includes a sliding part located in the transmission groove. The sliding part is fixedly connected to the unlocking part. The sliding part slides in the transmission groove as the transmission component moves to drive the unlocking part to move along the first movement direction.

[0015] The unlocking module also includes a guide member, which has a guide groove parallel to the first direction of movement, and the unlocking part is located in the guide groove.

[0016] The guide groove has a first limiting end, and the transmission groove has a second limiting end. When the unlocking part drives the locking part to the unlocked position, the unlocking part abuts against the inner wall of the first limiting end, and the sliding part abuts against the inner wall of the second limiting end.

[0017] The switch box mechanism also includes limiting blocks disposed on both sides of the placement surface. The two limiting blocks are located between the two unlocking groups and are used to restrict the movement of the box body.

[0018] The main body includes a support plate at its top and a mounting cavity below the support plate. The unlocking module is mounted on the support plate, and the transfer module is mounted on the mounting cavity. The support plate has a clearance opening. The second drive motor drives the transfer component to move vertically so that it reciprocates between a position flush with the clearance opening and a position below the clearance opening.

[0019] The transfer module further includes a lifting structure, which includes a slide rail extending in a vertical direction and a support arm extending in a horizontal direction. The support arm is fixedly installed on the top of the slide rail, and the transfer component is installed on the support arm. The second drive motor drives the slide rail to slide relative to the main body.

[0020] The main body has a pick-and-place port on its side that communicates with the mounting cavity, and the second drive motor and the lifting structure are located on the side of the main body away from the pick-and-place port.

[0021] Due to the adoption of the above technical solution, the beneficial effects achieved by this application are as follows:

[0022] 1. This application, through a combined structure of a main body, an unlocking module, and a transfer module, provides a streamlined process for unlocking and separating the box and cover in the automated opening and closing operation of the Reticle SMIF Pod150. In actual semiconductor factory mask management scenarios, the first drive motor of the unlocking module drives the unlocking part to move, precisely switching the locking parts on both sides of the cover between the locked and unlocked positions, replacing the traditional manual pulling operation mode of the locking parts. This mechanized drive method avoids direct contact between the operator's hands and the locking parts, reducing the risk of contamination of the cover's sealing surface by hand dirt, while ensuring a high degree of consistency in the force and stroke of each switching action of the locking parts, effectively reducing the wear or deformation of the locking parts caused by uneven operating force. In addition, the second drive motor of the transfer module drives the transfer component to move, realizing the automatic contact or separation of the box and cover, greatly reducing the hard friction that may occur when manually separating the cover and box. During mask placement and removal, the placement surface of the transfer component provides stable support for the housing, ensuring that the housing remains horizontal during opening and closing. This prevents the mask from shifting or colliding within the housing due to tilting or shaking during manual operation. This not only meets the automation requirements of semiconductor production lines but also reduces the risk of particulate contamination by minimizing human contact, providing reliable assurance for the safe storage and transfer of masks, and significantly improving the opening and closing efficiency of the Reticle SMIF Pod150.

[0023] 2. When the Reticle SMIF Pod 150 is placed on the transporter's placement surface, the unlocking assemblies on both sides can simultaneously align and drive the locking parts on both sides of the cover, achieving synchronous unlocking of the two locking parts on each side. This synchronous drive design avoids the uneven force caused by driving only one side of the locking parts, ensuring that the locking parts on both sides of the cover are under balanced force during unlocking, effectively preventing the cover from tilting or jamming due to delayed unlocking on one side. Each unlocking assembly is connected to the first drive motor through a transmission component, enabling a single drive motor to drive multiple unlocking parts simultaneously. This improves the integration of the unlocking components, reduces the number of mechanical connection points in the equipment, and lowers the risk of particles generated due to loose parts or wear. Attached Figure Description

[0024] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0025] Figure 1This is a schematic diagram of the Reticle SMIF Pod 150 switch box mechanism according to one embodiment of this application;

[0026] Figure 2 This is a schematic diagram of the structure of the Reticle SMIF Pod 150 switch box mechanism according to one embodiment of this application;

[0027] Figure 3 This is a top view of the unlocking module portion structure according to one embodiment of this application;

[0028] Figure 4 for Figure 3 Enlarged view of part A;

[0029] Figure 5 for Figure 3 Enlarged view of part B.

[0030] List of components and reference numerals:

[0031] 1 Main body, 11 Support plate, 111 Clearance opening, 12 Mounting cavity, 13 Removal and placement opening;

[0032] 2 Unlocking module, 21 First drive motor, 22 Unlocking part, 23 Transmission component, 231 Transmission groove, 2311 Second limiting end, 24 Sliding part, 25 Guide component, 26 Guide groove, 261 First limiting end;

[0033] 3. Transfer module, 31. Second drive motor, 32. Transfer component, 321. Placement surface, 33. Lifting structure, 331. Slide rail, 332. Support arm;

[0034] 4. Unlock group. Detailed Implementation

[0035] To more clearly illustrate the overall concept of this application, a detailed explanation is provided below with reference to the accompanying drawings.

[0036] Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application may also be implemented in other ways different from those described herein. Therefore, the scope of protection of this application is not limited to the specific embodiments disclosed below. It should be noted that, unless otherwise specified, the embodiments of this application and the features thereof can be combined with each other.

[0037] Furthermore, it should be understood in the description of this application that the terms "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0038] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0039] In this application, unless otherwise expressly specified and limited, the "above" or "below" of the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. In the description of this specification, references to terms such as "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described can be combined in any suitable manner in one or more embodiments or examples.

[0040] like Figures 1 to 5 As shown, a Reticle SMIF Pod 150 switch box mechanism is disclosed. The Reticle SMIF Pod 150 includes a box body and a cover body. Locking parts are provided on both sides of the cover body at intervals. The locking parts have a locking position for locking the box body and the cover body and an unlocking position for unlocking the box body and the cover body. The switch box mechanism includes a main body 1, and an unlocking module 2 and a transfer module 3 disposed on the main body 1. The unlocking module 2 includes a first drive motor 21 and an unlocking part 22. The first drive motor 21 drives the unlocking part 22 to move and drives the locking part to switch between the locking position and the unlocking position through the unlocking part 22. The transfer module 3 includes a second drive motor 31 and a transfer component 32. The transfer component 32 has a placement surface 321 for placing the box body. The second drive motor 31 drives the transfer component 32 to move so that the box body and the cover body abut or separate.

[0041] This application, through a combined structure of main body 1, unlocking module 2, and transfer module 3, provides a streamlined process for unlocking and separating the box and cover in the automated opening and closing operation of the Reticle SMIF Pod150. In the actual semiconductor factory mask management scenario, the first drive motor 21 of the unlocking module 2 drives the unlocking part 22 to move, precisely switching the locking parts on both sides of the cover between the locked and unlocked positions, replacing the traditional manual pulling operation mode of the locking parts. This mechanized drive method avoids direct contact between the operator's hands and the locking parts, reducing the risk of contamination of the cover's sealing surface by hand dirt, while ensuring that the force and stroke of the locking parts remain highly consistent with each switching action, effectively reducing the wear or deformation of the locking parts caused by uneven operating force. In addition, the second drive motor 31 of the transfer module 3 drives the transfer component 32 to move, realizing the automatic contact or separation of the box and cover, greatly reducing the hard friction that may occur when manually separating the cover and box. During the mask placement and removal process, the placement surface 321 of the transfer component 32 provides stable support for the box, ensuring that the box remains horizontal during separation or closure, and preventing displacement or collision of the mask within the box due to tilting or shaking during manual operation. This not only meets the automation process requirements of semiconductor production lines but also reduces the risk of particulate contamination by minimizing human contact, providing reliable assurance for the safe storage and transfer of the mask, and significantly improving the opening and closing efficiency of the Reticle SMIF Pod 150.

[0042] Specifically, the main body 1 is a frame structure, and the unlocking module 2 and the transfer module 3 are integrated and installed on the main body 1. The first drive motor 21 of the unlocking module 2 is a servo motor, and its output end is connected to the transmission component through a coupling. The unlocking part 22 is a columnar protrusion structure adapted to the locking part. The locking part has a through hole. When the Reticle SMIF Pod 150 is placed on the placement surface 321, the unlocking part 22, which has a columnar protrusion structure, is inserted into the through hole of the locking part. The unlocking part 22 can move away from or towards the cover to unlock or lock the cover. During operation, when the Reticle SMIF Pod 150 is placed on the placement surface 321 of the transfer component 32, the first drive motor 21 drives the unlocking part 22 to move, which in turn drives the locking part to switch from the locked position to the unlocked position. After unlocking, the second drive motor 31 drives the transfer component 32 to move, causing the box body and the cover to separate, exposing the mask placement area. After placement, the second drive motor 31 drives the transfer component 32 to move in the opposite direction, causing the box body and the cover to re-abut. Then, the first drive motor 21 drives the unlocking part 22 to reset, and the locking part returns to the locked position, completing the box closing operation.

[0043] As a preferred embodiment of this application, such as Figure 1 , Figures 3 to 5As shown, the unlocking module 2 includes unlocking groups 4 arranged on both sides of the placement surface 321. Each unlocking group 4 is provided with a first drive motor 21 and an unlocking part 22 corresponding to the number of locking parts. Each unlocking group 4 also includes a transmission component 23 fixedly connected to the output shaft of the first drive motor 21. The first drive motor 21 drives the transmission component 23 to move so as to drive the unlocking part 22 to move.

[0044] When the Reticle SMIF Pod 150 is placed on the placement surface 321 of the transfer component 32, the unlocking groups 4 on both sides can simultaneously drive the locking parts on both sides of the cover to achieve synchronous unlocking of the two locking parts on one side. This synchronous drive design avoids the problem of uneven force caused by driving the locking parts on one side, ensuring that the locking parts on both sides of the cover are balanced in force during the unlocking process, and effectively preventing the cover from tilting or jamming due to the lag of unlocking on one side. Each unlocking group 4 is connected to the first drive motor 21 through the transmission component 23, so that a single drive motor can drive multiple unlocking parts 22 at the same time, improving the integration of the unlocking components, reducing the mechanical connection nodes of the equipment, and reducing the risk of particles generated due to loose parts or wear.

[0045] Once the Reticle SMIF Pod 150 is positioned, the first drive motors 21 on both sides start simultaneously, driving the transmission component 23 to move. The transmission component 23 drives each unlocking part 22 to move synchronously, so that the unlocking part 22 contacts the locking part and unlocks it. After unlocking, the first drive motor 21 drives the transmission component 23 to move in the opposite direction, and the transmission component 23 drives the unlocking part 22 to reset, and the locking part returns to the locked state.

[0046] As a preferred embodiment of this implementation, such as Figure 3 As shown, the unlocking part 22 has a first movement direction that drives the locking part to switch between the unlocking position and the locking position, and the output shaft of the first drive motor 21 has a second movement direction that drives the transmission member 23 to move. The first movement direction is perpendicular to the second movement direction.

[0047] In this embodiment, the bidirectional arrow Y indicates the first direction of motion, and the bidirectional arrow X indicates the second direction of motion. Figure 3 In the upper unlocking group 4, the unlocking part 22 is in the locked position, and in the lower unlocking group 4, the unlocking part 22 is in the unlocked position. The first direction of movement of the unlocking part 22 is the direction of movement that drives the locking part to switch between the unlocked and locked positions; the second direction of movement of the output shaft of the first drive motor 21 is the direction of movement that drives the transmission component 23, and the first direction of movement is perpendicular to the second direction of movement. When the first drive motor 21 is working, the output shaft moves along the second direction of movement, and transmits the movement to the unlocking part 22 through the transmission structure, causing the unlocking part 22 to move along the first direction of movement, thereby driving the locking part to switch positions. This vertical direction of movement design makes reasonable use of the internal space of the main body 1.

[0048] As a preferred example in this embodiment, such as Figure 4 As shown, the transmission component 23 extends along the first movement direction and has a transmission groove 231 that forms an angle with the first movement direction. The unlocking module 2 also includes a sliding part 24 located in the transmission groove 231. The sliding part 24 is fixedly connected to the unlocking part 22. The sliding part 24 slides in the transmission groove 231 as the transmission component 23 moves, thereby driving the unlocking part 22 to move along the first movement direction.

[0049] When the first drive motor 21 drives the transmission component 23 to move, the transmission groove 231 moves together with the transmission component 23. The inner wall of the transmission groove 231 exerts a force on the sliding part 24, pushing the sliding part 24 to slide within the transmission groove 231. At the same time, it drives the unlocking part 22 to move along the first direction of movement, thereby driving the locking part. Through the cooperation between the transmission groove 231 and the sliding part 24, the movement of the transmission component 23 is converted into the movement of the unlocking part 22 in the required direction.

[0050] The vertical conversion between the first and second motion directions is achieved through the cooperation structure between the transmission groove 231 of the transmission component 23 and the sliding part 24, providing a stable and reliable mechanical conversion path for power transmission. In actual operation, when the first drive motor 21 drives the transmission component 23 to move along the second motion direction, the sliding of the sliding part 24 within the transmission groove 231 smoothly converts the motion of the transmission component 23 into the linear motion of the unlocking part 22 along the first motion direction. This grooved wheel transmission structure avoids the impact vibration caused by rigid connections. It ensures that the driving action of the unlocking part 22 on the locking part is gentle and stable, reducing the probability of vibration of the cover or box due to impact, and improving the stability of the mask within the box.

[0051] As a preferred method in this example, such as Figures 3 to 5 As shown, the unlocking module 2 also includes a guide member 25, which has a guide groove 26 parallel to the first movement direction, and the unlocking part 22 is located in the guide groove 26.

[0052] For ease of display, Figure 3The upper unlocking assembly 4 has a guide 25, while the lower unlocking assembly 4 conceals the guide 25 to facilitate the display of the unlocking part 22's structure. During the movement of the unlocking part 22, the guide groove 26 constrains the unlocking part 22, restricting its movement to the first direction of motion and preventing it from shifting or wobbling during movement. The guide groove 26 provides a stable movement trajectory for the unlocking part 22, ensuring precise engagement with the locking part. In actual unlocking operations, the unlocking part 22 needs to be precisely aligned with the locking part on the cover and move along a fixed trajectory. The design of the guide groove 26, parallel to the first direction of motion, provides rigid constraint to the unlocking part 22, effectively preventing it from shifting or wobbling due to uneven force during movement, ensuring consistent stroke and trajectory for each unlocking action. This high-precision guiding characteristic is particularly advantageous in continuous operation cycles, ensuring accurate unlocking of Reticle SMIF Pod 150 placed by different batches and operators.

[0053] Preferably, the guide member 25 is detachably connected to the main body 1 by means of bolts or other means.

[0054] Furthermore, such as Figure 4 , Figure 5 As shown, the guide groove 26 has a first limiting end 261, and the transmission groove 231 has a second limiting end 2311. When the unlocking part 22 drives the locking part to the unlocked position, the unlocking part 22 abuts against the inner wall of the first limiting end 261, and the sliding part 24 abuts against the inner wall of the second limiting end 2311.

[0055] The first limiting end 261 is the end position of the guide groove 26, and the second limiting end 2311 is the end position of the transmission groove 231. When the unlocking part 22 drives the locking part to the unlocked position, the end of the unlocking part 22 abuts against the inner wall of the first limiting end 261, restricting the unlocking part 22 from continuing to move in the first direction of movement; at the same time, the end of the sliding part 24 abuts against the inner wall of the second limiting end 2311, restricting the sliding part 24 from further sliding in the transmission groove 231. The first limiting end 261 of the guide groove 26 and the second limiting end 2311 of the transmission groove 231 form a double limiting structure, providing a precise and reliable positioning guarantee for the unlocking position of the unlocking part 22; when the unlocking part 22 drives the locking part to the unlocked position, the unlocking part 22 abuts against the first limiting end 261, and the sliding part 24 abuts against the second limiting end 2311, ensuring that the locking part is unlocked in place while avoiding excessive outward stretching of the locking part.

[0056] As another preferred embodiment of this implementation, the switch box mechanism also includes limiting blocks disposed on both sides of the placement surface 321. The two limiting blocks are located between the two unlocking groups 4 and are used to restrict the movement of the box body.

[0057] When the box is placed on the placement surface 321, the two side walls of the box contact the limiting blocks. The limiting blocks restrict the lateral movement of the box on the placement surface 321 through their abutment action, ensuring the stability of the box's position on the placement surface 321. During the movement of the box driven by the transfer module 3, the limiting blocks continuously limit the box to prevent it from shifting and ensure accurate alignment of the locking and unlocking parts 22.

[0058] As a preferred embodiment of this application, such as Figures 1 to 3 As shown, the main body 1 includes a support plate 11 located on top of it and an installation cavity 12 located below the support plate 11. The unlocking module 2 is installed on the support plate 11, and the transfer module 3 is installed in the installation cavity 12. The support plate 11 has a clearance opening 111. The second drive motor 31 drives the transfer component 32 to move in the vertical direction so that it reciprocates between a position flush with the clearance opening 111 and a position located below the clearance opening 111.

[0059] The second drive unit 31 drives the transfer component 32 to move vertically, enabling it to reciprocate between a position flush with and below the clearance opening 111. When the transfer component 32 is flush with the clearance opening 111, it receives or places the Reticle SMIF Pod 150. When the transfer component 32 moves below the clearance opening 111, it separates the housing from the cover, facilitating the removal and placement of the mask. The mounting cavity 12 conceals the transfer module 3 underneath, resulting in a clean appearance and reducing the area of ​​the transfer module 3 exposed to the outside, thus improving the aesthetics of the switch box mechanism. Simultaneously, the mounting cavity 12 provides some protection for the transfer module 3. The clearance opening 111 of the support plate 11 provides a channel for the lifting and lowering movement of the transfer component 32, so that the transfer component 32 can receive the Reticle SMIF Pod 150 at a position flush with the clearance opening 111, and then descend vertically to below the clearance opening 111 to complete the separation action. This vertical lifting and lowering method avoids the mask tilting that may be caused by horizontal transfer.

[0060] Specifically, the output shaft of the second drive motor 31 rotates and drives the lifting structure 33 to slide up and down relative to the main body 1 through the lead screw assembly.

[0061] As a preferred embodiment of this implementation, such as Figure 2 As shown, the transfer module 3 also includes a lifting structure 33, which includes a slide rail 331 extending in the vertical direction and a support arm 332 extending in the horizontal direction. The support arm 332 is fixedly installed on the top of the slide rail 331, and the transfer component 32 is installed on the support arm 332. The second drive motor 31 drives the slide rail 331 to slide relative to the main body 1.

[0062] The slide rail 331 extends vertically and is installed within the mounting cavity 12. The support arm 332 extends horizontally, with its bottom fixedly installed on the top of the slide rail 331, and can slide vertically together with the slide rail 331. The transfer component 32 is installed on the top of the support arm 332 and remains relatively fixed to it. The combination of the slide rail 331 and the support arm 332 in the lifting structure 33 provides stable guidance and support for the vertical movement of the transfer component 32, ensuring that the transfer component 32 remains horizontal during the lifting process, avoiding tilting or shaking of the box, and ensuring that the separation process of the lid and the box is evenly stressed, reducing the probability of poor separation of the box and the lid due to unstable movement. In addition, the horizontally extending support arm 332 installs the transfer component 32 on the top of the slide rail 331, so that the force on the transfer component 32 is evenly transmitted to the slide rail 331 through the support arm 332, dispersing the weight load of the box and the mask plate, and reducing the probability of stress concentration at a single connection point.

[0063] As a preferred example in this embodiment, such as Figure 1 As shown, the main body 1 has a pick-up and put-out port 13 on its side that communicates with the mounting cavity 12. The second drive motor 31 and the lifting structure 33 are located on the side of the main body 1 away from the pick-up and put-out port 13.

[0064] By opening a pick-and-place port 13 on the side of the main body 1 and arranging the second drive motor 31 and the lifting structure 33 on the side opposite to the pick-and-place port 13, the human-machine interaction and space utilization of the equipment are optimized. In the actual operation scenario of a semiconductor factory, operators or automated robotic arms can conveniently put the Reticle SMIF Pod 150 into or take it out of the equipment through the pick-and-place port 13. The position design of the pick-and-place port 13 conforms to ergonomics or the movement trajectory of the robotic arm, reducing the range of motion during operation and lowering the risk of environmental particulate matter being stirred up due to excessive range of motion.

[0065] For any parts not mentioned in this application, existing technologies may be used or referenced.

[0066] The various embodiments in this specification are described in a progressive manner. The same or similar parts between the various embodiments can be referred to each other. Each embodiment focuses on describing the differences from other embodiments.

[0067] The above description is merely an embodiment of this application and is not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A switch box mechanism for a Reticle SMIF Pod 150, the Reticle SMIF Pod 150 comprising a box body and a cover body, wherein locking portions are provided at intervals on both sides of the cover body, the locking portions having a locking position for locking the box body and the cover body and an unlocking position for releasing the locking of the box body and the cover body, characterized in that, The switch box mechanism includes a main body, and an unlocking module and a transfer module disposed on the main body; The unlocking module includes a first drive motor and an unlocking part. The first drive motor drives the unlocking part to move and, through the unlocking part, causes the locking part to switch between a locked position and an unlocked position. The transfer module includes a second drive motor and a transfer component. The transfer component has a placement surface for placing the box. The second drive motor drives the transfer component to move so that the box comes into contact with or separates from the cover.

2. The switch box mechanism according to claim 1, characterized in that, The unlocking module includes unlocking groups arranged in alignment on both sides of the placement surface. Each unlocking group is provided with the first drive motor and an unlocking part corresponding to the number of locking parts. Each unlocking group also includes a transmission component fixedly connected to the output shaft of the first drive motor. The first drive motor drives the transmission component to move, thereby moving the unlocking part.

3. The switch box mechanism according to claim 2, characterized in that, The unlocking part has a first direction of motion that drives the locking part to switch between an unlocked position and a locked position, and the output shaft of the first drive motor has a second direction of motion that drives the transmission component to move. The first direction of motion is perpendicular to the second direction of motion.

4. The switch box mechanism according to claim 3, characterized in that, The transmission component extends along the first movement direction and has a transmission groove that forms an angle with the first movement direction. The unlocking module also includes a sliding part located in the transmission groove. The sliding part is fixedly connected to the unlocking part. The sliding part slides in the transmission groove as the transmission component moves to drive the unlocking part to move along the first movement direction.

5. The switch box mechanism according to claim 4, characterized in that, The unlocking module also includes a guide member, which has a guide groove parallel to the first direction of movement, and the unlocking part is located in the guide groove.

6. The switch box mechanism according to claim 5, characterized in that, The guide groove has a first limiting end, and the transmission groove has a second limiting end. When the unlocking part drives the locking part to the unlocked position, the unlocking part abuts against the inner wall of the first limiting end, and the sliding part abuts against the inner wall of the second limiting end.

7. The switch box mechanism according to claim 2, characterized in that, The switch box mechanism also includes limiting blocks disposed on both sides of the placement surface. The two limiting blocks are located between the two unlocking groups and are used to restrict the movement of the box body.

8. The switch box mechanism according to claim 1, characterized in that, The main body includes a support plate at its top and a mounting cavity below the support plate. The unlocking module is mounted on the support plate, and the transfer module is mounted on the mounting cavity. The support plate has a clearance opening. The second drive motor drives the transfer component to move vertically so that it reciprocates between a position flush with the clearance opening and a position below the clearance opening.

9. The switch box mechanism according to claim 8, characterized in that, The transfer module further includes a lifting structure, which includes a slide rail extending in a vertical direction and a support arm extending in a horizontal direction. The support arm is fixedly installed on the top of the slide rail, and the transfer component is installed on the support arm. The second drive motor drives the slide rail to slide relative to the main body.

10. The switch box mechanism according to claim 9, characterized in that, The main body has a pick-and-place port on its side that communicates with the mounting cavity, and the second drive motor and the lifting structure are located on the side of the main body away from the pick-and-place port.

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