A code scanning device for entering a reticle ID

By designing an automated photomask ID scanning device, the automatic identification and accurate entry of photomask IDs are achieved, solving the problem of manual entry errors and improving the efficiency and quality of wafer production.

CN224501282UActive Publication Date: 2026-07-14RONGXIN SEMICONDUCTOR (NINGBO) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
RONGXIN SEMICONDUCTOR (NINGBO) CO LTD
Filing Date
2025-08-20
Publication Date
2026-07-14

AI Technical Summary

Technical Problem

In existing technologies, photomask lithography requires manual ID entry, which is prone to errors, affects wafer production efficiency and quality, and also involves a heavy workload.

Method used

A barcode scanning device was designed, comprising a machine base, a photomask reader, a slide table, a slider, a motor, and a warning light. This device enables automatic identification and recording of photomask IDs, uses supplementary lighting and infrared sensors for positioning and identification, and utilizes card slots, pressure posts, and inductive switches for precise positioning and sensing of the photomask box.

Benefits of technology

It improves the accuracy and efficiency of photomask ID entry, reduces the probability of photomask box misalignment, and enhances the quality and efficiency of wafer production.

✦ Generated by Eureka AI based on patent content.

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Abstract

This utility model discloses a scanning device for inputting photomask IDs. The technical solution includes: a machine base and a photomask reader. The machine base has a scanning groove near its rear surface. Slides are installed on both sides of the scanning groove. Slider blocks are installed on the rear surfaces of both slides. Slide plates are installed on the rear surfaces of both slider blocks. A sliding groove is provided in the middle of the sliding plate. A sliding seat is installed inside the sliding groove. A movable seat is installed on the front surface of the sliding seat. The photomask reader is installed in the middle of the front surface of the movable seat. A controller is installed at the top of the scanning groove. This scanning device for inputting photomask IDs solves the problem that in existing wafer photomask lithography processes, manual input of photomask IDs is required. Manual operation is prone to errors, affecting normal wafer production, and placing a heavy workload on production assistants, resulting in poor wafer production efficiency. This device improves the accuracy and efficiency of photomask ID input.
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