An air extraction guard

Abstract

The utility model provides a kind of air extraction protection device, for being installed in the connecting place of vacuum pipeline and process chamber of plasma etching machine, air extraction protection device includes cover body and the multiple ventilation structures of being arranged along the circumferential interval of cover body, ventilation structure includes air inlet hole group, first installation slot group and second installation slot sequentially arranged along the radial direction of cover body and from outside to inside, first installation slot group includes multiple first installation slots, air inlet hole group includes multiple air inlet holes, multiple air inlet holes are distributed in multilayer circular array, part of air inlet hole and multiple first installation slots one-to-one correspondence communication, the rest air inlet hole and second installation slot communication;Wherein, first installation slot is equipped with first filter screen, second installation slot is equipped with second filter screen, the mesh number of second filter screen is greater than the mesh number of first filter screen.The utility model can effectively avoid solid deposit peeling into vacuum pipeline, effectively guarantee the air extraction efficiency of vacuum air extraction system.

Description

Technical Field

[0001] This utility model relates to the field of air extraction technology for etching machines, and in particular to an air extraction protection device. Background Technology

[0002] In the LED industry, plasma etching machines are key equipment for transferring patterns from photoresist to target materials to form designed designs. The etching machine's process chamber is typically connected to a vacuum pumping system via vacuum piping. This system, consisting of a backing dry pump, a Roots pump, and a molecular pump, removes gaseous products from the process chamber to ensure the high vacuum environment required during etching. During etching, gaseous products gradually adhere to the walls of the process chamber and the inner surface of the rear chamber cover plate located at the top of the process chamber due to physical adsorption or chemical reactions, eventually forming solid deposits.

[0003] However, existing plasma etching machines generally lack protective devices in the vacuum pipes connecting the process chamber and the vacuum pumping system. This allows solid deposits to easily fall into the vacuum pipes after being peeled off. Since the vacuum pumping system cannot remove the solid material, the deposits not only adhere to the pumping blades and rotor of the pumping system, reducing pumping efficiency and making it difficult to achieve the set vacuum level in the process chamber, but also cause the product to remain in the process chamber for too long, affecting product yield. Furthermore, as the solid deposits accumulate in the pipes, they can easily be carried into the molecular pump body, causing instantaneous collision damage to the high-speed rotating molecular pump blades. Therefore, there is an urgent need to develop a vacuum protection device. Utility Model Content

[0004] Based on this, the purpose of this utility model is to provide a vacuum protection device, which aims to solve the technical problem that the vacuum pipes connecting the process chamber and the vacuum pumping system of the plasma etching machine in the prior art are generally not equipped with protective devices, which makes it easy for solid deposits attached to the process chamber and the rear chamber cover plate to fall into the vacuum pipes after being peeled off, thus reducing the pumping efficiency.

[0005] The purpose of this utility model is to provide a gas extraction protection device for installation at the connection between the vacuum pipe and the process chamber of a plasma etching machine. The gas extraction protection device includes a cover and a plurality of ventilation structures spaced apart along the circumference of the cover. The ventilation structure includes an air inlet group, a first mounting groove group, and a second mounting groove arranged radially from the outside to the inside of the cover. The first mounting groove group includes a plurality of first mounting grooves. The air inlet group includes a plurality of air inlets. The plurality of air inlets are distributed in a multi-layer circular array. Some of the air inlets are connected to the plurality of first mounting grooves one by one, and the remaining air inlets are connected to the second mounting groove.

[0006] The first mounting slot is provided with a first filter screen, and the second mounting slot is provided with a second filter screen, wherein the mesh size of the second filter screen is greater than that of the first filter screen.

[0007] In addition, the exhaust protection device described above according to this utility model may also have the following additional technical features:

[0008] Furthermore, the first filter screen has a mesh size of 100-200 mesh, and the second filter screen has a mesh size of 300-500 mesh.

[0009] Furthermore, the air inlet group includes three layers of circularly arrayed air inlets, wherein one central air inlet of the first layer is located at the geometric center of the ventilation structure, and the central air inlet and some of the outer air inlets of the third layer are connected to the second mounting groove through the corresponding first mounting groove to form a two-stage filtration channel;

[0010] Multiple intermediate air inlets located in the second layer and the remaining outer air inlets in the third layer are directly connected to the second mounting slot to form a single-stage filtration channel.

[0011] Furthermore, the first mounting slot group includes 7 first mounting slots, of which 1 first mounting slot is connected to the central air inlet, and 6 first mounting slots are connected to 6 outer air inlets in the third layer in a one-to-one correspondence.

[0012] Furthermore, the bottom of the second mounting groove is provided with 7 second mounting grooves, of which 1 first mounting groove is located at the geometric center of the second mounting groove, and the other 6 first mounting grooves are distributed in a regular hexagonal array along the circumference of the second mounting groove at the bottom of the second mounting groove, and the distance between the center of the 6 first mounting grooves and the center of the second mounting groove is equal.

[0013] Furthermore, the air inlet is circular, and the opening of the first mounting groove is a regular hexagon, with the height of the hexagon being 1.5 to 2 times the inner diameter of the air inlet.

[0014] Furthermore, the second mounting groove is a circular structure, and the inner diameter of the second mounting groove is 3 to 4 times the diameter of the inscribed circle of the first mounting groove.

[0015] Furthermore, the depth of the air inlet is 4mm-8mm, the groove depth of the first mounting groove is 8mm-16mm, and the groove depth of the second mounting groove is 12mm-24mm.

[0016] Furthermore, the cover includes a cover plate portion, a collar portion extending vertically outward from the circumferential outer edge of the cover plate portion, and an annular baffle portion extending radially outward from the circumferential outer edge of the collar portion. The collar portion is used to be fitted onto the air inlet end of the vacuum pipe of the plasma etching machine, and a plurality of ventilation structures are provided on the circumferential surface of the collar portion.

[0017] Compared to existing technologies, the beneficial effects of this utility model's extraction protection device are as follows: by installing the extraction protection device of this application on the air inlet end of the vacuum pipeline, it can effectively prevent solid deposits from entering the vacuum pipeline after being peeled off, thus effectively ensuring the extraction efficiency of the vacuum extraction system. Specifically, by setting multiple ventilation structures in the circumferential direction of the cover, the ventilation structure includes an air inlet group, a first mounting groove group, and a second mounting groove. Through the layered layout of the air inlets and the combination of two-stage filters, it can achieve graded filtration of solid deposits of different particle sizes, effectively intercepting solid deposits. Among them, the two-stage filtration channel formed by the central air inlet and part of the outer air inlets, the first mounting groove, and the second mounting groove can intercept large solid deposits; the single-stage filtration channel formed by the middle air inlet and the remaining outer air inlets and the second mounting groove can intercept small solid deposits, thereby effectively preventing solid deposits from entering the vacuum extraction system, protecting core components such as the molecular pump in the vacuum extraction system, and ensuring the normal operation of the plasma etching machine and the vacuum extraction system. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the air extraction protection device of this utility model from a first-view perspective.

[0019] Figure 2 This is a three-dimensional structural diagram of the air extraction protection device of this utility model from a second perspective.

[0020] Figure 3 for Figure 2 Enlarged view of the structure at point A in the middle;

[0021] Figure 4 This is a schematic diagram showing the exhaust protection device of this utility model with the first and second filters concealed.

[0022] Figure 5 for Figure 4 Enlarged view of the structure at point B.

[0023] The above-mentioned figures include the following reference numerals: 10-cover body; 11-cover plate portion; 12-ring portion; 13-baffle portion; 21-air inlet; 22-first mounting groove; 23-second mounting groove; 31-first filter screen; 32-second filter screen.

[0024] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model. Detailed Implementation

[0025] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. Several embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this utility model will be more thorough and complete.

[0026] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0028] Please see Figures 1 to 5 The image shows a vacuum protection device of this utility model, which is used to install at the connection between the vacuum pipeline and the process chamber of a plasma etching machine. The vacuum protection device includes a cover 10 and multiple ventilation structures spaced apart along the circumference of the cover 10. Specifically, the cover 10 adopts an integrated design, which includes a cover plate 11, a collar 12 extending vertically outward from the outer circumferential edge of the cover plate 11, and an annular baffle 13 extending radially outward from the outer circumferential edge of the collar 12. Multiple ventilation structures are provided on the circumferential surface of the collar 12. The cover plate 11, the collar 12, and the annular baffle 13 together form a closed space, which can be used to regulate the airflow direction, so that the airflow can only enter the vacuum pipeline through the preset ventilation structures, so as to facilitate subsequent filtration. At the same time, the multiple ventilation structures are evenly distributed along the circumference of the cover 10, which can ensure that the airflow enters evenly from all directions, avoid local airflow obstruction or pressure unevenness, and improve the overall filtration efficiency and the stability of the device operation.

[0029] More specifically, the inner diameter of the collar portion 12 is adapted to the air inlet end of the vacuum pipe, and is tightly fitted onto the vacuum pipe through a flange sealing connection to ensure a firm and good seal between the gas extraction protection device of this application and the vacuum pipe, preventing gas leakage. The inner diameter of the annular baffle portion 13 is larger than the outer diameter of the vacuum pipe, forming an outwardly expanding shielding structure that can shield the end face of the vacuum pipe, thereby effectively preventing solid deposits from falling into the vacuum pipe after peeling off.

[0030] In this embodiment, the cover 10 is made of polytetrafluoroethylene (PTFE), which has a smooth surface and solid deposits do not easily adhere to it. During the etching process, even if a small number of particles come into contact with the surface of the cover 10, they will be difficult to accumulate due to the low adhesion of the surface and will be easily carried away by the airflow, thereby reducing the frequency of manual cleaning and reducing maintenance costs.

[0031] As an example, the ventilation structure includes an air inlet group, a first mounting groove group, and a second mounting groove 23 arranged radially from the outside to the inside along the cover 10. The first mounting groove group includes multiple first mounting grooves 22, and the air inlet group includes multiple air inlets 21. The multiple air inlets 21 are distributed in a multi-layer circular array, with some air inlets 21 corresponding to and communicating with multiple first mounting grooves 22, and the remaining air inlets 21 communicating with the second mounting groove 23. A first filter screen 31 is provided in the first mounting groove 22, and a second filter screen 32 is provided in the second mounting groove 23. The mesh size of the second filter screen 32 is greater than that of the first filter screen 31. Specifically, the mesh size of the first filter screen 31 is 100-200 mesh, and the mesh size of the second filter screen 32 is 300-500 mesh. The filtration accuracy of the second filter screen 32 is at least one order of magnitude higher than that of the first filter screen 31.

[0032] In some embodiments, the first filter screen 31 is made of sintered metal mesh, which has high mechanical strength and impact resistance, and can effectively intercept solid deposits with larger particle sizes. The second filter screen 32 is made of porous ceramic filter sheet, which can finely filter solid deposit particles with smaller particle sizes.

[0033] Furthermore, the air inlet assembly includes three layers of circularly arrayed air inlets 21. The first layer has only one central air inlet, located at the geometric center of the ventilation structure. The second layer has six intermediate air inlets arranged in a ring around the central air inlet. The third layer has twelve outer air inlets arranged in a ring around the second layer of air inlets 21. The central air inlet of the first layer and the six outer air inlets of the third layer are connected to the second mounting groove 23 via corresponding first mounting grooves 22, forming a two-stage filtration channel. When the mixed airflow enters these air inlets 21, it first passes through the first filter screen 31, where larger solid deposits are intercepted because they cannot pass through the filter screen pores. The airflow passing through the first filter screen 31 continues forward and then passes through the second filter screen 32 for secondary filtration, further removing any remaining larger particles, thus achieving efficient interception of large solid deposits.

[0034] Meanwhile, the six intermediate air inlets in the second layer and the remaining six outer air inlets in the third layer are directly connected to the second mounting slot 23 to form a single-stage filtration channel, which can be used to process particles with smaller diameters. This design, in which some air inlets 21 are directly connected to the second mounting slot 23, not only reduces the obstruction of gas flow and achieves the goal of controlling the overall flow resistance of the device at a low level, but also gives full play to the fine filtration capability of the second filter screen 32 to ensure effective interception of small solid particles.

[0035] Furthermore, the first mounting slot group includes seven first mounting slots 22, one of which is connected to the central air inlet, and the other six are connected to the six outer air inlets in the third layer.

[0036] Furthermore, the bottom of the second mounting groove 23 is provided with 7 second mounting grooves 23, of which 1 first mounting groove 22 is located at the geometric center of the second mounting groove 23, and the other 6 first mounting grooves 22 are distributed in a regular hexagonal array along the circumference of the second mounting groove 23 at the bottom of the second mounting groove 23, and the distance between the center of the 6 first mounting grooves 22 and the center of the second mounting groove 23 is equal.

[0037] Furthermore, the air inlet 21 is circular, and the opening of the first mounting groove 22 is a regular hexagon, with the height of the hexagon being 1.5 to 2 times the inner diameter of the air inlet 21. It should be understood that the design of the regular hexagonal opening of the first mounting groove 22 ensures smooth air intake while providing a stable installation space for the first filter 31. Additionally, compared to a circle, the regular hexagonal structure has greater structural strength within the same area, improving the ventilation structure's resistance to deformation.

[0038] Furthermore, the second mounting groove 23 has a circular structure, and the inner diameter of the second mounting groove 23 is 3 to 4 times the diameter of the inscribed circle of the first mounting groove 22, so as to facilitate the installation of the second filter screen 32 and provide sufficient filtration area for the second filter screen 32.

[0039] Furthermore, the depth of the air intake 21 is 4mm-8mm, the groove depth of the first mounting groove 22 is 8mm-16mm, and the groove depth of the second mounting groove 23 is 12mm-24mm. As a specific example, in this embodiment, the depth of the air intake 21 is 5mm, the groove depth of the first mounting groove 22 is 10mm, and the groove depth of the second mounting groove 23 is 15mm.

[0040] In some embodiments, a guide channel structure can also be provided on the inner wall of the air inlet 21. This guide channel structure can be spiral-shaped, with a spiral angle of 30°-45°, a depth of 0.5mm-1mm, and a width of 1mm-1.5mm. In this way, during the extraction process, when the mixed airflow enters the air inlet 21, the guide channel forces the airflow to rotate, creating a swirling effect. Under centrifugal force, larger solid deposits are thrown towards the wall of the air inlet 21. Subsequently, under the combined action of gravity and airflow thrust, they move along the spiral path of the guide channel towards the outlet of the air inlet 21, and are ultimately intercepted on the surface of the first filter screen 31 or the second filter screen 32. This design not only enhances the separation efficiency of solid deposits but also allows the airflow to be more evenly distributed on the filter surface, preventing premature clogging of the filter screen due to concentrated airflow in localized areas.

[0041] In summary, the beneficial effects of the gas extraction protection device of this utility model are as follows: by installing the gas extraction protection device of this application on the air inlet end of the vacuum pipeline, it can effectively prevent solid deposits from entering the vacuum pipeline after being peeled off, thus effectively ensuring the gas extraction efficiency of the vacuum extraction system. Specifically, by setting multiple ventilation structures in the circumferential direction of the cover, the ventilation structure includes an air inlet group, a first mounting groove group, and a second mounting groove. Through the layered layout of the air inlets and the combination of two-stage filters, graded filtration of solid deposits of different particle sizes is achieved, effectively intercepting solid deposits. Among them, the two-stage filtration channel formed by the central air inlet and part of the outer air inlets, the first mounting groove, and the second mounting groove can intercept large solid deposits; the single-stage filtration channel formed by the middle air inlet and the remaining outer air inlets and the second mounting groove can intercept small solid deposits, thereby effectively preventing solid deposits from entering the vacuum extraction system, protecting core components such as the molecular pump in the vacuum extraction system, and ensuring the normal operation of the plasma etching machine and the vacuum extraction system.

[0042] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0043] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this utility model application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model application should be determined by the appended claims.

Claims

1. A suction protection device, characterized in that, For installation at the connection between the vacuum pipe and the process chamber of a plasma etching machine, the air extraction protection device includes a cover and a plurality of ventilation structures spaced apart along the circumference of the cover. The ventilation structure includes an air inlet group, a first mounting groove group, and a second mounting groove arranged radially from the outside to the inside of the cover. The first mounting groove group includes a plurality of first mounting grooves, and the air inlet group includes a plurality of air inlets. The plurality of air inlets are distributed in a multi-layer circular array, wherein some air inlets are connected to a plurality of first mounting grooves in a one-to-one correspondence, and the remaining air inlets are connected to the second mounting groove. The first mounting slot is provided with a first filter screen, and the second mounting slot is provided with a second filter screen, wherein the mesh size of the second filter screen is greater than that of the first filter screen.

2. The air extraction protection device according to claim 1, characterized in that, The first filter screen has a mesh size of 100-200 mesh, and the second filter screen has a mesh size of 300-500 mesh.

3. The air extraction protection device according to claim 1, characterized in that, The air inlet group includes three layers of circularly arrayed air inlets, wherein one central air inlet in the first layer is located at the geometric center of the ventilation structure, and the central air inlet and some of the outer air inlets in the third layer are connected to the second mounting groove through the corresponding first mounting groove to form a two-stage filtration channel. Multiple intermediate air inlets located in the second layer and the remaining outer air inlets in the third layer are directly connected to the second mounting slot to form a single-stage filtration channel.

4. The air extraction protection device according to claim 3, characterized in that, The first mounting slot group includes 7 first mounting slots, of which 1 first mounting slot is connected to the central air inlet, and 6 first mounting slots are connected to the 6 outer air inlets in the third layer one by one.

5. The air extraction protection device according to claim 4, characterized in that, The bottom of the second mounting groove is provided with 7 second mounting grooves, of which 1 first mounting groove is located at the geometric center of the second mounting groove, and the other 6 first mounting grooves are distributed in a regular hexagonal array along the circumference of the second mounting groove at the bottom of the second mounting groove, and the distance between the center of the 6 first mounting grooves and the center of the second mounting groove is equal.

6. The air extraction protection device according to claim 1, characterized in that, The air inlet is circular, and the opening of the first mounting groove is a regular hexagon, with the height of the regular hexagon being 1.5 to 2 times the inner diameter of the air inlet.

7. The air extraction protection device according to claim 6, characterized in that, The second mounting groove is a circular structure, and the inner diameter of the second mounting groove is 3 to 4 times the diameter of the inscribed circle of the first mounting groove.

8. The air extraction protection device according to claim 7, characterized in that, The depth of the air inlet is 4mm-8mm, the depth of the first mounting groove is 8mm-16mm, and the depth of the second mounting groove is 12mm-24mm.

9. The air extraction protection device according to claim 1, characterized in that, The cover includes a cover plate portion, a collar portion extending vertically outward from the circumferential outer edge of the cover plate portion, and an annular baffle portion extending radially outward from the circumferential outer edge of the collar portion. The collar portion is used to fit onto the air inlet end of the vacuum pipe of the plasma etching machine, and a plurality of ventilation structures are provided on the circumferential surface of the collar portion.

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