Graphite thermal expansion measurement assembly and silicon carbide crystal growth furnace

By using a graphite thermal expansion measurement component in a silicon carbide crystal growth furnace, the deformation of the graphite heating element is calibrated by breaking the brittle support, thus solving the problem of measuring the deformation of the graphite heating element and achieving a more accurate distribution design.

CN224517658UActive Publication Date: 2026-07-17TONGWEI MICROELECTRONICS CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
TONGWEI MICROELECTRONICS CO LTD
Filing Date
2025-06-24
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

During the silicon carbide crystal growth process, there is a lack of means to directly measure the deformation of the graphite heating element, which makes it difficult to effectively measure the thermal expansion of the graphite heating element and affects the accuracy of its distribution design.

Method used

A graphite thermal expansion measurement component is designed, including a base and a support member. The support member is provided with multiple brittle feet. The brittle feet are broken by the thermal deformation of the graphite heating element to calibrate the deformation and realize the deformation measurement of the graphite heating element.

Benefits of technology

It can accurately measure the deformation of graphite heating elements in actual production, ensuring that they are within a reasonable distribution range and improving the accuracy of subsequent designs.

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Abstract

The utility model discloses a graphite thermal expansion measurement subassembly and silicon carbide crystal growing furnace, related to crystal growth technical field, this graphite thermal expansion measurement subassembly includes base and support component, base is used for setting below the graphite heating body of measurement, and support component sets up on the base, and extends upward from the base, and support component is spaced apart with the graphite heating body of measurement in horizontal direction, a plurality of brittle legs are evenly spaced and arranged on support component along vertical direction, a plurality of brittle legs stretch out support component along horizontal direction, and the brittle leg for resisting in the bottom of graphite heating body of measurement is located at the top, so that at least one brittle leg is broken when graphite heating body of measurement is vertically deformed by heat.
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Claims

1. A graphite thermal expansion measurement assembly, comprising: The device includes a base (110) and a support member (130). The base (110) is positioned below the graphite heating element (230) to be tested. The support member (130) is positioned on the base (110) and extends upward from the base (110). The support member (130) is spaced apart from the graphite heating element (230) in the horizontal direction. The support member (130) is provided with a plurality of brittle legs (150) evenly spaced in the vertical direction. The plurality of brittle legs (150) extend out of the support member (130) in the horizontal direction. The brittle leg (150) at the top is used to abut against the bottom end of the graphite heating element (230) to break at least one of the brittle legs (150) when the graphite heating element (230) is heated and deformed vertically.

2. The graphite thermal expansion measurement assembly of claim 1, wherein, The sidewall of the support member (130) is provided with a plurality of mounting grooves (131), at least some of the mounting grooves (131) are uniformly arranged in the vertical direction, and a plurality of brittle legs (150) are distributed and correspondingly assembled in the plurality of mounting grooves (131) in the same vertical direction.

3. The graphite thermal expansion measurement assembly of claim 2, wherein, Each of the brittle feet (150) includes a graphite pin, which includes an integrally connected mounting portion (151) and a foot portion (153). The mounting portion (151) is correspondingly engaged in the mounting groove (131). One end of the foot portion (153) is connected to the mounting portion (151), and the other end extends horizontally out of the support member (130) and is used to abut against the bottom of the graphite heating element (230) to be tested.

4. The graphite thermal expansion measurement assembly of claim 3, wherein, The mounting groove (131) is rectangular, the shape of the mounting part (151) is adapted to the mounting groove (131), the support part (153) is connected to the middle of the mounting part (151), and the support part (153) and the mounting part (151) form a T-shaped structure.

5. The graphite thermal expansion measurement assembly of any one of claims 1-4, wherein, The sidewall of the support member (130) is provided with multiple rows of mounting grooves (131). Each row of mounting grooves (131) extends vertically and includes multiple mounting grooves (131) evenly distributed at a preset interval. The number of mounting grooves (131) in adjacent rows of mounting grooves (131) is the same and the preset interval is the same. The distance between the multiple rows of mounting grooves (131) and the base (110) is different.

6. The graphite thermal expansion measurement assembly of claim 5, wherein, The distance between the multiple sets of mounting slots (131) and the base (110) increases or decreases in a stepped manner along the horizontal direction.

7. The graphite thermal expansion measurement assembly of claim 6, wherein, The difference in distance between the mounting slots (131) in adjacent columns and the base (110) is 0.25 mm.

8. The graphite thermal expansion measurement assembly of claim 1, wherein, The graphite thermal expansion measuring assembly also includes an insulating plate (170), which is used to be set at the bottom of the furnace. The base (110) is fixedly set on the insulating plate (170), and the width of the insulating plate (170) is greater than the width of the base (110).

9. The graphite thermal expansion measurement assembly of claim 1, wherein, There are two support members (130), which are arranged opposite to each other on the base (110) and form a clamping gap for accommodating the graphite heating element (230) to be tested, and the brittle legs (150) on the two support members (130) extend towards each other.

10. A silicon carbide crystal growth furnace (200), characterized in that, The device includes a furnace body (210), a graphite heating element (230), and a graphite thermal expansion measuring assembly as described in any one of claims 1-9. The graphite heating element (230) is disposed inside the furnace body (210), the base (110) is disposed below the graphite heating element (230), and the support member (130) is spaced apart from the graphite heating element (230) in the horizontal direction. The brittle support leg (150) at the top abuts against the bottom end of the graphite heating element (230).