A photolithography machine illumination system for improving illumination uniformity
By introducing a slider and disassembly mechanism into the lithography machine, the problem of inconvenient replacement of the collimating lens was solved, which improved the uniformity of illumination and simplified the operation, and reduced the replacement cost.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI YAMAN OPTOELECTRONICS TECH CO LTD
- Filing Date
- 2025-08-22
- Publication Date
- 2026-07-21
AI Technical Summary
The collimating lens in existing lithography machines is inconvenient to replace, making it difficult to maintain illumination uniformity, which increases replacement costs and operational complexity.
A lithography machine illumination system for improving illumination uniformity was designed, employing a slider and disassembly/removal mechanism, including a mounting block, a rectangular slot, a fixing slot, and a hook-shaped clamp. Through the stable engagement of the hook-shaped clamp with the fixing slot and the assistance of a spring, the collimating lens can be easily disassembled and installed.
It enables convenient replacement of collimating lenses, improves the usability of the lithography machine's illumination system and the continuity of illumination uniformity, and reduces replacement costs and operational complexity.
Smart Images
Figure CN224536341U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of lithography machine technology, specifically to a lithography machine illumination system that improves illumination uniformity. Background Technology
[0002] The collimating lens of a lithography machine is a key optical component in the lithography illumination system. Its core function is to convert the diverging beam emitted by the light source into a high-precision parallel beam (collimated beam), providing a foundation for subsequent homogenization modules, pupil shaping, and mask exposure.
[0003] According to Chinese Patent Publication No. CN114217511B, a near-field stepping illumination structure for a lithography machine includes a stepper motor. The stepper motor is fixed to one side of a first support plate. A guide plate is fixedly connected to one end of the first support plate, and a second support plate arranged parallel to the first support plate is fixedly connected to the other end of the guide plate. A lead screw arranged along the length of the guide plate is rotatably mounted between the first and second support plates. A slider is threaded onto the lead screw. Rollers that can roll along the guide plate are symmetrically mounted on the side of the slider facing the guide plate. A guide plate has a guide rail on the side facing the slider. The guide plate has a strip-shaped opening arranged along its length. Two stepped grooves, symmetrically arranged on the side of the guide plate facing the slider, communicate with the strip-shaped opening. A contact plate that contacts the roller is slidably inserted into the stepped groove. This invention has the following advantages: it prevents the roller from directly contacting the guide plate, extending the service life of the guide plate. The above-mentioned technology, by installing the collimating lens at the bottom of the slider to form a single structure, makes it inconvenient to replace a damaged collimating lens. Replacement requires disassembling the entire guide plate, increasing replacement costs and causing inconvenience to workers. Therefore, this invention proposes a lithography machine illumination system that improves illumination uniformity to solve the above-mentioned problems. Utility Model Content
[0004] The technical problem to be solved by this utility model is to provide a lithography machine illumination system that improves the uniformity of illumination, addressing the shortcomings of the prior art.
[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a lithography machine illumination system for improving illumination uniformity, including a guide plate, a slider slidably connected to the guide plate, a collimating lens disposed at the bottom of the slider, a light source disposed on the left side of the guide plate, and a disassembly and assembly mechanism disposed between the slider and the collimating lens. The disassembly and assembly mechanism includes a mounting block, a rectangular groove, a fixing groove, and a hook-shaped lever. A slot is opened at the bottom of the slider, the collimating lens is connected to the bottom of the mounting block, and the top of the mounting block is inserted into the inside of the slot. The rectangular groove is opened at the top of the mounting block, the fixing groove is opened on the inner wall of the rectangular groove, and one end of the hook-shaped lever is inserted into the inside of the fixing groove.
[0006] Preferably, the slider has a rectangular cavity inside, the hook-shaped lever is slidably connected to the slider, and the other end is located outside the slider. The other end of the hook-shaped lever is connected to a pressing block.
[0007] Preferably, a round rod is connected inside the rectangular cavity, a connecting block is connected to the top of the hook-shaped clamp, and the round rod passes through the connecting block and is slidably connected to the connecting block. A spring is sleeved on the outer wall of the round rod, and the two ends of the spring are respectively connected to the outer wall of the connecting block and the inner wall of the rectangular cavity.
[0008] Preferably, a stepper motor is installed on the left side of the guide plate, a lead screw is threaded to the slider, the lead screw is installed at the output end of the stepper motor, a guide rod is slidably connected to the slider, and a guide wheel is installed on the outer wall of the slider.
[0009] Preferably, the slider is provided with a protective mechanism, which includes a rectangular hole, a U-shaped rod and a shielding shell. The rectangular hole is opened on the slider, and the U-shaped rod passes through the rectangular hole and is slidably connected to the rectangular hole. The shielding shell is connected to the end of the U-shaped rod.
[0010] Preferably, a driving plate is connected to the front of the U-shaped rod, and a spring is connected to the top of the driving plate.
[0011] The present invention adopts the above technical solution, which can bring the following beneficial effects: 1. This lithography machine illumination system, which improves illumination uniformity, allows the collimating lens to be stably installed at the bottom of the slider by inserting one end of the hook-shaped lever into the fixed slot. The hook-shaped lever can be disengaged from the fixed slot by pressing the pressing block with two fingers of one hand, thus facilitating the disassembly and replacement of the collimating lens. The operation is simple and improves the practicality of the illumination system.
[0012] 2. This lithography machine illumination system, which improves illumination uniformity, can shield the pressing block by setting a shielding shell to prevent accidental contact that could affect the stability of the collimating lens installation. The upward moving plate causes the U-shaped rod to move the shielding shell upward to expose the pressing block, which facilitates the installation and removal of the collimating lens. Attached Figure Description
[0013] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the slider and guide wheel of this utility model; Figure 3 This is a cross-sectional view of the slider and mounting block of this utility model; Figure 4 This is a schematic diagram of the disassembly and assembly mechanism and the protective mechanism of this utility model.
[0014] In the diagram: 1. Guide plate; 2. Stepper motor; 3. Slider; 4. Collimating lens; 5. Light source; 6. Assembly / disassembly mechanism; 61. Mounting block; 62. Rectangular groove; 63. Fixing groove; 64. Hook-shaped clamp; 65. Pressing block; 66. Connecting block; 67. Round rod; 68. Spring 1; 7. Protective mechanism; 71. Rectangular hole; 72. U-shaped rod; 73. Shielding shell; 74. Driving plate; 75. Spring 2; 8. Guide wheel. Detailed Implementation
[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0016] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0017] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "setting" should be interpreted broadly. For example, they can refer to a fixed connection or setting, a detachable connection or setting, or an integral connection or setting. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0018] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "several" means two or more, unless otherwise explicitly specified.
[0019] like Figure 1-4As shown, this utility model provides a lithography machine illumination system for improving illumination uniformity, including a guide plate 1, a slider 3 slidably connected to the guide plate 1, and a collimating lens 4 disposed at the bottom of the slider 3. The collimating lens 4 is made of high-precision fused silica material, with a surface roughness controlled below 0.5nm and a flatness error ≤λ / 20 (λ is the wavelength of the light source), which can effectively reduce scattering loss during beam reflection / refraction and avoid local light intensity fluctuations caused by insufficient optical surface precision. Simultaneously, the collimating lens 4 adopts an aspherical design, compensating for aberrations such as spherical aberration and coma by optimizing the curvature distribution, so that the divergence angle of the output parallel beam is controlled within a reasonable range. This ensures that when the beam is transmitted to subsequent homogenizing modules (such as microlens arrays and integrating bars), the energy distribution is symmetrical and the edge transition is smooth, laying the foundation for illumination uniformity. A light source 5 is disposed on the left side of the guide plate 1, and a disassembly and assembly mechanism 6 is disposed between the slider 3 and the collimating lens 4. The disassembly and assembly mechanism 6 includes a mounting block 61, a rectangular groove 62, a fixing groove 63, and a hook-shaped clamping rod 64. A slot is provided at the bottom, and the collimating lens 4 is connected to the bottom of the mounting block 61. The top of the mounting block 61 is inserted into the slot. A rectangular groove 62 is provided at the top of the mounting block 61, and a fixing groove 63 is provided on the inner wall of the rectangular groove 62. One end of the hook-shaped locking rod 64 is inserted into the fixing groove 63. There are two hook-shaped locking rods 64 and two fixing grooves 63, which are symmetrically arranged. A rectangular cavity is provided inside the slider 3. The hook-shaped locking rod 64 is slidably connected to the slider 3, and the other end is provided on the outside of the slider 3. A pressing block 65 is connected to facilitate pressing the hook-shaped locking rod 64 to disengage it from the fixing groove 63. A round rod 67 is connected inside the rectangular cavity. A connecting block 66 is connected to the top of the hook-shaped locking rod 64, and the round rod 67 passes through the connecting block 66 and is slidably connected to the connecting block 66. A spring 68 is sleeved on the outer wall of the round rod 67, and the two ends of the spring 68 are respectively connected to the outer wall of the connecting block 66 and the inner wall of the rectangular cavity. The spring 68 can drive the hook-shaped locking rod 64 to reset, and the round rod 67 can reposition the hook. A guide rod 64 is used to guide and improve the stability of movement when pressed. A stepper motor 2 is installed on the left side of the guide plate 1. A lead screw is threaded to the slider 3 and installed at the output end of the stepper motor 2. A guide rod is slidably connected to the slider 3, and a guide wheel 8 is installed on the outer wall of the slider 3. A guide hole is opened at the top of the guide plate 1, and the top of the slider 3 is slidably connected in the guide hole. The stepper motor 2 can drive the lead screw to rotate, so that the slider 3 can slide left and right to adjust the distance between itself and the light source 5. The sliding stability of the slider 3 can be improved by setting the guide rod and the guide wheel 8.
[0020] Specifically, by inserting one end of the hook-shaped lever 64 into the fixing groove 63, the collimating lens 4 can be stably installed at the bottom of the slider 3. By pressing the pressing block 65 with two fingers of one hand at the same time, the hook-shaped lever 64 can be disengaged from the fixing groove 63, thus facilitating the disassembly and replacement of the collimating lens 4. The operation is simple and improves the usability of the lighting system. The mounting block 61 and the slot of the slider 3 are fitted with a clearance (fitting clearance ≤ 0.02mm). The contact surfaces of the rectangular groove 62 and the hook-shaped locking rod 64 are precision ground to ensure that the perpendicularity error between the optical axis and the moving direction of the slider 3 after the collimator 4 is installed is negligible. This high-precision positioning design avoids beam deflection caused by installation deviation during the replacement of the collimator 4, ensuring that the newly replaced collimator 4 is coaxial with the original system's optical path and maintaining the continuity of illumination uniformity. In addition, the elasticity of the spring 68 is optimized to form a stable engagement between the hook-shaped locking rod 64 and the fixing groove 63, preventing micro-displacement of the collimator 4 due to loosening during long-term use, and further ensuring the stability of the beam distribution.
[0021] In this embodiment, a protective mechanism 7 is provided on the slider 3. The protective mechanism 7 includes a rectangular hole 71, a U-shaped rod 72, and a shielding shell 73. The rectangular hole 71 is opened on the slider 3, and the U-shaped rod 72 passes through the rectangular hole 71 and is slidably connected to the rectangular hole 71. The shielding shell 73 is connected to the end of the U-shaped rod 72. A driving plate 74 is connected to the front of the U-shaped rod 72, and a second spring 75 is connected to the top of the driving plate 74. A groove is opened on the front of the slider 3, and a sliding groove is opened on the back of the inner wall of the groove. The driving plate 74 passes through the sliding groove and is slidably connected to the sliding groove. The second spring 75 is located inside the sliding groove, and the second spring 75 can drive the shielding shell 73 at the end of the U-shaped rod 72 to reset.
[0022] Specifically, by setting up the shield 73, the pressing block 65 can be shielded to prevent accidental contact from affecting the stability of the collimating lens 4 installation. The upward moving plate 74 causes the U-shaped rod 72 to move the shield 73 upward to expose the pressing block 65, which facilitates the installation and removal of the collimating lens 4.
[0023] It is worth noting that all the technologies not described in the above manual are existing technologies and are not the main innovations, so they will not be described in detail here.
[0024] This invention provides a lithography machine illumination system to improve illumination uniformity. Many methods and approaches exist for implementing this technical solution; the above are merely preferred embodiments. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this invention, and these improvements and modifications should also be considered within the scope of protection of this invention. All components not explicitly stated in this embodiment can be implemented using existing technology.
Claims
1. A lithography machine illumination system for improving illumination uniformity, comprising a guide plate (1), characterized in that: A slider (3) is slidably connected to the guide plate (1). A collimating lens (4) is provided at the bottom of the slider (3). A light source (5) is provided on the left side of the guide plate (1). A disassembly and assembly mechanism (6) is provided between the slider (3) and the collimating lens (4). The disassembly and assembly mechanism (6) includes a mounting block (61), a rectangular groove (62), a fixing groove (63), and a hook-shaped lever (64). A slot is provided at the bottom of the slider (3). The collimating lens (4) is connected to the bottom of the mounting block (61), and the top of the mounting block (61) is inserted into the inside of the slot. The rectangular groove (62) is opened at the top of the mounting block (61). The fixing groove (63) is opened on the inner wall of the rectangular groove (62). One end of the hook-shaped lever (64) is inserted into the inside of the fixing groove (63).
2. The lithography machine illumination system for improving illumination uniformity according to claim 1, characterized in that: The slider (3) has a rectangular cavity inside. The hook-shaped lever (64) is slidably connected to the slider (3), and its other end is located outside the slider (3). The other end of the hook-shaped lever (64) is connected to a pressing block (65).
3. The lithography machine illumination system for improving illumination uniformity according to claim 2, characterized in that: A round rod (67) is connected inside the rectangular cavity. A connecting block (66) is connected to the top of the hook-shaped clamp (64). The round rod (67) passes through the connecting block (66) and is slidably connected to the connecting block (66). A spring (68) is sleeved on the outer wall of the round rod (67). The two ends of the spring (68) are respectively connected to the outer wall of the connecting block (66) and the inner wall of the rectangular cavity.
4. The lithography machine illumination system for improving illumination uniformity according to claim 1, characterized in that: A stepper motor (2) is installed on the left side of the guide plate (1), and a lead screw is threaded to the slider (3). The lead screw is installed at the output end of the stepper motor (2). A guide rod is slidably connected to the slider (3), and a guide wheel (8) is installed on the outer wall of the slider (3).
5. The lithography machine illumination system for improving illumination uniformity according to claim 1, characterized in that: The slider (3) is provided with a protective mechanism (7), which includes a rectangular hole (71), a U-shaped rod (72) and a shielding shell (73). The rectangular hole (71) is opened on the slider (3), and the U-shaped rod (72) passes through the rectangular hole (71) and is slidably connected to the rectangular hole (71). The shielding shell (73) is connected to the end of the U-shaped rod (72).
6. The lithography machine illumination system for improving illumination uniformity according to claim 5, characterized in that: The front of the U-shaped rod (72) is connected to a drive plate (74), and the top of the drive plate (74) is connected to a spring (75).