A thin film vacuum gauge tube anti-pollution device

Abstract

The utility model discloses a kind of film vacuum gauge tube anti-pollution devices, including vacuum gauge tube body, the lower end of vacuum gauge tube body is equipped with interface, the lower end of interface is equipped with adapter pipe, filter disc is equipped in the adapter pipe, the position corresponding with filter disc is equipped with movable ring on the adapter pipe, the movable ring is used to open adapter pipe, and the lower end of filter disc is located in adapter pipe and is equipped with conical baffle, the lower end of adapter pipe is equipped with mounting seat, the lower end of mounting seat is equipped with mounting ring, adapter pipe and be located in the upper and lower ends of filter disc are all equipped with snap ring, the snap ring is used to support and limit of filter disc.The utility model provides a kind of film vacuum gauge tube anti-pollution device without external energy source, can avoid humidity pollution gauge sensitive element, can also reduce the measurement drift caused by condensate attachment, significantly improve the measurement stability in semiconductor coating, plasma etching and other humid process.

Description

Technical Field

[0001] This utility model relates to the field of vacuum gauge protection technology, specifically a thin-film vacuum gauge anti-contamination device. Background Technology

[0002] Thin-film vacuum gauges (such as piezoresistive or capacitive thin-film gauges) require protection against contamination, which is directly related to their core working principle and precision structure. Contamination can fundamentally disrupt their measurement mechanism, leading to loss of accuracy, increased drift, hysteresis, and even permanent damage. Chinese Patent No. CN202420057952.6 provides a vacuum gauge protection device, relating to the field of vacuum gauge technology. The device includes a vacuum gauge with a protective mechanism and an auxiliary mechanism. The protective mechanism includes a protective cover and an annular block. The bottom of the protective cover has an annular groove, inside which a sealing ring is installed. Three locking blocks are fixed to the bottom of the protective cover, and three locking holes are formed at the top of the annular block. This invention, by setting up a protective mechanism, prevents the surface of the vacuum gauge from being oxidized, corroded, or contaminated during long-term storage, thus ensuring the conductivity and accuracy of the vacuum gauge during later use, and consequently guaranteeing the accuracy of the measurement results.

[0003] Based on the above, the inventors have discovered the following problems: The above-mentioned device can ensure the conductivity and accuracy of the vacuum gauge tube during later use, thereby ensuring the accuracy of the measurement results during later use of the vacuum gauge tube. However, it ignores the problem of pollution prevention during the use of the thin-film vacuum gauge tube. In heavily polluted industrial environments (such as semiconductor manufacturing, PVD / CVD coating, plasma etching, and material analysis) or systems using oil pumps, contaminants will adhere to the surface of the gauge tube film during use, thereby affecting the accuracy of measurement and the stability of the process. Utility Model Content

[0004] The purpose of this invention is to provide a thin-film vacuum gauge anti-pollution device to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a thin-film vacuum gauge tube anti-pollution device, comprising a vacuum gauge tube body, an interface at the lower end of the vacuum gauge tube body, a connecting tube at the lower end of the interface, a filter disc inside the connecting tube, a movable ring at a position corresponding to the filter disc on the connecting tube, the movable ring being used to open the connecting tube, and a conical baffle at the lower end of the filter disc inside the connecting tube, a mounting seat at the lower end of the connecting tube, and a mounting ring at the lower end of the mounting seat.

[0006] Furthermore, retaining rings are provided inside the connecting tube at both the upper and lower ends of the filter disc, and the retaining rings are used to support and limit the filter disc.

[0007] Furthermore, one end of the movable ring is hinged to the connecting tube, and the other end of the movable ring is provided with a latch, which is used to fix the movable ring and keep the connecting tube sealed.

[0008] Furthermore, the cross-sectional diameter of the end of the conical baffle away from the filter disk is smaller than the cross-sectional diameter of the end closer to the filter disk, and the cross-sectional diameter of the end of the filter disk closer to the filter disk is smaller than the cross-sectional diameter of the filter disk.

[0009] Furthermore, the filter disc has a slot on its side, and a sealing ring is provided in the slot.

[0010] Furthermore, the mounting ring is provided with threads for installation.

[0011] Compared with the prior art, the beneficial effects of this utility model are: this thin-film vacuum gauge anti-pollution device is reasonable and has the following advantages:

[0012] (1) Dual protection is achieved through the tapered baffle's tapered flow channel design. On the one hand, its tapered structure guides the airflow evenly through the upstream filter plate, avoiding excessive local flow velocity that could lead to filter failure and significantly improving the capture efficiency of particulate pollutants. On the other hand, the flow channel contraction causes the gas to accelerate and then expand rapidly in the downstream cavity, inducing the Joule-Thomson effect to generate local low temperature. This effect can actively capture moisture: when dealing with high humidity gas, water vapor preferentially condenses on the surface of the baffle and the wall of the connecting tube, effectively preventing liquid water or ice crystals from entering the vacuum gauge film area. This passive condensation design does not require external energy, which avoids moisture contamination of the gauge sensitive element and reduces measurement drift caused by condensate adhesion, significantly improving measurement stability in humid processes such as semiconductor coating and plasma etching.

[0013] (2) The side-opening maintenance structure formed by the movable ring and the locking buckle greatly reduces the operation and maintenance cost; by unlocking the locking buckle and rotating the movable ring, the filter disc inside the connecting pipe can be directly exposed, and the filter element can be quickly replaced or cleaned without disassembling the vacuum pipeline; the filter disc is precisely limited by the upper and lower retaining rings, and the design of the sealing ring embedded in the slot ensures that the airtightness is restored to its original state after maintenance; this mechanism completely solves the pain point of traditional gauge cleaning requiring interruption of vacuum and disassembly of the system, especially suitable for continuous production scenarios such as PVD / CVD, reducing maintenance time by more than 80%; at the same time, the modular filter unit avoids the scrapping of the entire gauge, extends the life of the core sensor, and comprehensively reduces the operation and maintenance cost and downtime loss of the vacuum monitoring system in a highly polluted environment. Attached Figure Description

[0014] Figure 1This is a three-dimensional structural diagram of the present invention;

[0015] Figure 2 This is a schematic diagram of the internal structure of part of this utility model;

[0016] Figure 3 This is a cross-sectional structural diagram of the present invention;

[0017] Figure 4 This is a partially exploded structural diagram of the present invention;

[0018] In the diagram: 1. Vacuum gauge tube body; 2. Interface; 3. Connecting tube; 4. Movable ring; 5. Filter disc; 6. Mounting base; 7. Mounting ring; 8. Locking buckle; 9. Snap ring; 10. Conical baffle; 11. Snap groove; 12. Sealing ring. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] Please see Figure 1-4 The present invention provides a technical solution as follows:

[0021] Example:

[0022] A thin-film vacuum gauge anti-contamination device includes a vacuum gauge body 1, an interface 2 at the lower end of the vacuum gauge body 1, a connecting tube 3 at the lower end of the interface 2, a filter disc 5 inside the connecting tube 3, a movable ring 4 at a position corresponding to the filter disc 5 on the connecting tube 3, the movable ring 4 being used to open the connecting tube 3, and a conical baffle 10 at the lower end of the filter disc 5 inside the connecting tube 3, a mounting seat 6 at the lower end of the connecting tube 3, and a mounting ring 7 at the lower end of the mounting seat 6.

[0023] The connecting pipe 3 is provided with retaining rings 9 at both the upper and lower ends of the filter disc 5. The retaining rings 9 are used to support and limit the filter disc 5.

[0024] One end of the movable ring 4 is hinged to the connecting tube 3, and the other end of the movable ring 4 is provided with a locking buckle 8. The locking buckle 8 is used to fix the movable ring 4 and keep the connecting tube 3 sealed.

[0025] Wherein, the cross-sectional diameter of the end of the conical baffle 10 away from the filter disk 5 is smaller than the cross-sectional diameter of the end closer to the filter disk 5, and the cross-sectional diameter of the end face of the filter disk 5 closer to the filter disk 5 is smaller than the cross-sectional diameter of the filter disk 5.

[0026] The filter disc 5 has a slot 11 on its side, and a sealing ring 12 is provided in the slot 11.

[0027] The mounting ring 7 is provided with threads for installation.

[0028] Working Principle: In use, the device is installed into the vacuum system via the mounting ring 7. Airflow from the vacuum environment enters the connecting pipe 3 through the mounting ring 7. The conical baffle 10 is located downstream of the filter disc 5, and its conical structure forms a gradually narrowing flow channel. This design guides the airflow evenly through the upstream filter disc 5, improving filtration efficiency. Furthermore, the narrowing of the flow channel accelerates the gas through the constricted area, causing expansion in the cavity downstream of the baffle. For gases with excessive moisture, this expansion process can induce a localized temperature reduction Joule-Thomson effect, promoting the rise of water vapor. The particles condense on the surface or inside the cavity of the baffle 10, rather than entering the membrane area, thus reducing the risk of contamination. The particulate pollutants are trapped by the filter disc 5. The filter disc 5 is supported and limited by the retaining rings 9 at both ends, and the sealing ring 12 on its side is embedded in the groove 11 to ensure a seal inside the connecting pipe 3. When maintenance or replacement of the filter disc 5 is required, the latch 8 is opened and the movable ring 4 is rotated around the hinge point to open the side wall of the connecting pipe 3, and the filter disc 5 can be taken out for cleaning or replacement. Then the movable ring 4 is closed and fixed with the latch 8 to restore the seal.

[0029] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A thin-film vacuum gauge anti-contamination device, comprising a vacuum gauge body (1), characterized in that: The lower end of the vacuum gauge tube body (1) is provided with an interface (2), the lower end of the interface (2) is provided with a connecting tube (3), the connecting tube (3) is provided with a filter disc (5), the connecting tube (3) is provided with a movable ring (4) at the position corresponding to the filter disc (5), the movable ring (4) is used to open the connecting tube (3), and the lower end of the filter disc (5) is provided with a conical baffle (10) inside the connecting tube (3), the lower end of the connecting tube (3) is provided with a mounting seat (6), and the lower end of the mounting seat (6) is provided with a mounting ring (7).

2. The anti-contamination device for a thin-film vacuum gauge according to claim 1, characterized in that: The connecting tube (3) is provided with retaining rings (9) at both the upper and lower ends of the filter disc (5). The retaining rings (9) are used to support and limit the filter disc (5).

3. The anti-contamination device for a thin-film vacuum gauge according to claim 2, characterized in that: One end of the movable ring (4) is hinged to the connecting tube (3), and the other end of the movable ring (4) is provided with a buckle (8). The buckle (8) is used to fix the movable ring (4) and keep the connecting tube (3) sealed.

4. The anti-contamination device for a thin-film vacuum gauge according to claim 3, characterized in that: The diameter of the cross section of the tapered baffle (10) at the end away from the filter disc (5) is smaller than the diameter of the cross section at the end near the filter disc (5), and the diameter of the cross section of the end face of the filter disc (5) near the filter disc (5) is smaller than the diameter of the cross section of the filter disc (5).

5. The anti-contamination device for a thin-film vacuum gauge according to claim 4, characterized in that: The filter disc (5) has a slot (11) on its side, and a sealing ring (12) is provided in the slot (11).

6. The anti-contamination device for a thin-film vacuum gauge according to claim 5, characterized in that: The mounting ring (7) is provided with threads for installation.

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