A polishing execution device

Abstract

The polishing execution device comprises a swing rod assembly, a limiting rod, a polishing drum and a limiting block. The swing rod assembly comprises oppositely arranged first and second end faces, and has a through hole. The limiting rod is arranged in the through hole in an extendable and rotatable manner, and comprises oppositely arranged first and second ends. The first end of the limiting rod is elastically connected to the first end face of the swing rod assembly. The polishing drum is arranged on the second end face of the swing rod assembly, and has a limiting space inside. The side of the polishing drum, which is close to the second end face of the swing rod assembly, is provided with a limiting opening corresponding to the through hole, and the limiting opening is communicated with the limiting space. The limiting block is arranged on the second end of the limiting rod and located on the side of the limiting space where the limiting opening is arranged. Displacement or falling of the polishing drum during polishing is prevented, and equipment failure and product loss caused by human operation errors are avoided.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and more specifically, to a polishing execution device. Background Technology

[0002] In the semiconductor manufacturing industry, edge polishing of silicon wafers is a crucial process. With the continuous development of semiconductor technology, the quality requirements for silicon wafer edges are becoming increasingly stringent. Traditional edge polishing machines use polishing pads to contact the silicon wafer edges for polishing, and the polishing drum that mounts the PAD is typically fixed to the Round polishing frame (a structure on the edge polishing area polishing head that assists in mounting the polishing drum) with a single screw. While this fixing method was widely used in early polishing equipment, it has gradually revealed some problems that urgently need to be addressed. First, the screw fixing method requires a high level of skill and experience from the operator. In actual operation, the tightening force, tightening sequence, and number of tightenings all require the operator to judge based on experience and feel. Improper operation can easily lead to stripping of the screws, causing them to fail to securely fix the polishing drum. Once the polishing drum falls off, it will not only damage the silicon wafer being polished, causing abnormal product loss, but may also damage other components of the polishing equipment, increasing equipment maintenance costs and downtime. Second, the traditional screw fixing method also poses certain safety hazards during equipment operation. Screws may loosen over time due to vibration and wear, potentially causing the polishing drum to shift or fall off during polishing, thus affecting polishing quality and the normal operation of the equipment. Furthermore, screw fixing methods have some design limitations. For example, the fixing strength of a single screw is limited, making it difficult to meet the requirements of high-precision polishing processes for the secure fixing of the polishing drum; the installation and removal of screws require specialized tools, increasing operational complexity and time costs. Moreover, with the continuous upgrading of semiconductor manufacturing processes, higher demands are being placed on the automation level and production efficiency of polishing equipment. Traditional screw fixing methods can no longer meet the needs of modern polishing equipment for automated operation and rapid mold changeover. In large-scale production, frequent manual operations not only reduce production efficiency but may also introduce more quality risks. Utility Model Content

[0003] In view of the problems existing in the prior art described above, this application provides a polishing execution device that can prevent the polishing drum from shifting or falling off during the polishing process.

[0004] To achieve the above and other related objectives, this utility model provides a polishing execution device, comprising:

[0005] A rocker arm assembly includes a first end face and a second end face disposed opposite to each other, and the rocker arm assembly has a through hole;

[0006] The limiting rod, which is telescopic and rotatable, is provided in the through hole. The limiting rod includes a first end and a second end that are disposed opposite to each other. The first end of the limiting rod is elastically connected to the first end face of the rocker arm assembly.

[0007] A polishing drum is disposed on the second end face of the rocker arm assembly. The polishing drum has a limiting space inside. A limiting port corresponding to the through hole is provided on the side of the polishing drum near the second end face of the rocker arm assembly. The limiting port is connected to the limiting space.

[0008] The limiting block is located at the second end of the limiting rod and on the side where the limiting opening is located in the limiting space.

[0009] Optionally, the limiting block is a cuboid structure, the limiting opening is rectangular, the length of the limiting opening is greater than or equal to the length of the limiting block, and the width of the limiting opening is greater than or equal to the width of the limiting block and less than the length of the limiting block.

[0010] Optionally, the limiting space includes:

[0011] Enter the passage and connect with the limit switch;

[0012] The rotating cavity is connected to the inlet channel, and the limiting block can rotate within the rotating cavity;

[0013] A locking groove is provided between the inlet channel and the rotating cavity. The shape of the locking groove is consistent with the shape of the limiting block. The direction of the locking groove pointing to the inlet channel is defined as the projection direction. The side of the polishing drum near the second end face of the rocker arm assembly is the projection surface. The projection of the locking groove does not completely coincide with the projection of the inlet channel.

[0014] Optionally, the rotating cavity has a cylindrical structure, and the bottom surface of the rotating cavity is arranged adjacent to the entry channel.

[0015] Optionally, the distance from the first end to the second end of the limiting rod is greater than the shortest distance from the first end face of the rocker arm assembly to the limiting space.

[0016] Optionally, the rocker arm assembly also includes:

[0017] The base plate is located at the bottom of the second end face of the rocking assembly and on a plane perpendicular to the plane on which the rocking assembly is located.

[0018] Optionally, the polishing actuator further includes:

[0019] The spring assembly has one end connected to the first end of the limit rod and the other end connected to the first end face of the rocker arm assembly.

[0020] Optionally, the polishing actuator further includes:

[0021] At least two fixing members are symmetrically arranged on the left and right sides of the second end face of the rocker arm assembly;

[0022] At least two slots are provided on one side of the polishing drum near the second end face of the rocker arm assembly, corresponding to the fixing element.

[0023] Optionally, the rocker arm assembly includes:

[0024] rocker arm;

[0025] The connecting plate is positioned between the rocker arm and the polishing drum and lies on a plane parallel to the plane containing the rocker arm.

[0026] Optionally, the limiting rod may further include a handle disposed at the first end of the limiting rod.

[0027] As described above, the polishing device provided by this utility model has at least the following beneficial technical effects:

[0028] The polishing actuator of this utility model includes a rocker arm assembly, a limiting rod, a polishing drum, and a limiting block. The rocker arm assembly includes a first end face and a second end face disposed opposite to each other, and has a through hole. A retractable and rotatable portion of the limiting rod is disposed in the through hole. The limiting rod includes a first end and a second end disposed opposite to each other, and the first end of the limiting rod is elastically connected to the first end face of the rocker arm assembly. The polishing drum is disposed on the second end face of the rocker arm assembly, and has a limiting space inside. A limiting opening corresponding to the through hole is provided on the side of the polishing drum near the second end face of the rocker arm assembly, and the limiting opening communicates with the limiting space. The limiting block is disposed on the second end of the limiting rod and located on the side of the limiting opening in the limiting space.

[0029] This utility model's polishing actuator employs a combination of a rocker arm assembly, a limiting rod, a polishing drum, and a limiting block. This prevents the polishing drum from shifting or falling off during the polishing process, avoiding equipment malfunctions and product losses due to human error. The elastic connection and mechanical limiting design of the limiting rod not only simplifies the installation and disassembly process but also reduces operation time and labor intensity. The locking groove design further enhances the stability of the polishing drum during operation, ensuring high-quality completion of the polishing process. Attached Figure Description

[0030] Figure 1 The diagram shown is a structural schematic of the rocker arm assembly provided by this utility model.

[0031] Figure 2 Displayed as Figure 1 A cross-sectional view from the perspective of AA.

[0032] Figure 3 The diagram shown is a structural schematic of the polishing drum provided by this utility model.

[0033] Figure 4 Displayed as Figure 3 A cross-sectional view from BB's perspective.

[0034] Figure Labels

[0035] 1. Rocker arm assembly; 11. First end face; 12. Second end face; 121. Fixing component; 13. Through hole; 15. Rocker arm; 16. Connecting plate; 17. Base plate; 2. Limiting rod; 21. First end; 211. Handle; 22. Second end; 3. Polishing drum; 31. Limiting space; 311. Entry channel; 312. Rotating cavity; 313. Locking groove; 32. Limiting port; 33. Slot; 4. Limiting block; 5. Spring assembly. Detailed Implementation

[0036] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0037] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Although the illustrations only show components related to this utility model and are not drawn according to the actual number, shape and size of the components, the shape, quantity, positional relationship and proportion of each component can be arbitrarily changed under the premise of realizing the technical solution of this utility model, and the layout of the components may also be more complex.

[0038] This embodiment provides a polishing execution device, referring to... Figures 1 to 4 It includes a rocker arm assembly 1, a limit rod 2, a polishing drum 3, and a limit block 4.

[0039] Reference Figure 1 and Figure 2The rocker arm assembly 1 is one of the core structures of the entire polishing actuator. The rocker arm assembly 1 includes a first end face 11 and a second end face 12 arranged opposite to each other. The main body of the rocker arm assembly 1 is designed with a certain strength and rigidity to ensure it can withstand various forces during polishing while maintaining stable operation. The rocker arm assembly 1 has a through hole 13. The telescopic and rotatable portion of the limiting rod 2 is disposed in the through hole 13. The limiting rod 2 includes a first end 21 and a second end 22 arranged opposite to each other. The first end 21 of the limiting rod 2 is elastically connected to the first end face 11 of the rocker arm assembly 1. Specifically, the first end 21 of the limiting rod 2 is elastically connected to the first end face 11 of the rocker arm assembly 1 via a spring assembly 5. The spring assembly 5 not only provides the necessary elastic restoring force for the limiting rod 2, ensuring that the limiting rod 2 can quickly and accurately reset during operation, but also absorbs the impact force generated during operation to a certain extent, protecting the limiting rod 2 and related components from damage. This flexible connection method allows the limiting rod 2 to have a certain degree of flexibility during operation, adapting to different operating forces and speeds, thereby improving the operational convenience and reliability of the entire device. The first end 21 of the limiting rod 2 has a handle 211. The handle 211 is designed with full consideration of ergonomic principles, providing the operator with a convenient grip and operating point. Through the handle 211, the operator can easily apply pushing or pulling forces to the limiting rod 2 to achieve its telescopic movement. This design makes the operation process more intuitive and convenient, reduces the operator's labor intensity, and improves work efficiency. In actual operation, the operator can easily push or pull the limiting rod 2 by gripping the handle 211, utilizing the elastic characteristics of the spring assembly 5 to achieve the telescopic movement of the limiting rod 2.

[0040] Reference Figures 1 to 4A polishing drum 3 is disposed on the second end face 12 of the rocker arm assembly 1. The polishing drum 3 has a limiting space 31 inside, which is used to accommodate a limiting block 4, thereby fixing the polishing drum 3. A limiting opening 32 corresponding to the through hole 13 is provided on the side of the polishing drum 3 near the second end face 12 of the rocker arm assembly 1. The limiting opening 32 precisely corresponds to the through hole 13 on the rocker arm assembly 1 and directly connects to the limiting space 31. Specifically, in this embodiment, the limiting space 31 includes an entry channel 311, a rotating cavity 312, and a locking groove 313. The entry channel 311 communicates with the limiting opening 32, providing a passage for the limiting block 4 to enter the limiting space 31. When the limiting block 4 enters the entry channel 311 through the limiting opening 32, the limiting block 4 will enter the rotating cavity 312 along the entry channel 311. The rotating cavity 312 is a relatively large space, allowing the limiting block 4 to rotate freely within it, thereby adjusting its position and orientation. The locking groove 313 is located between the entry channel 311 and the rotating cavity 312, and its shape is consistent with that of the limiting block 4. This design ensures that the limiting block 4 can be firmly locked in the locking groove 313 after rotation. To further enhance the reliability of locking, the direction of the locking groove 313 pointing towards the entry channel 311 is defined as the projection direction, and the side of the polishing drum 3 near the second end face 12 of the rocker arm assembly 1 is defined as the projection surface. The projection of the locking groove 313 does not completely coincide with the projection of the entry channel 311. This incomplete coincidence design prevents the limiting block 4 from exiting through the entry channel 311 after rotation, thus ensuring that it is firmly locked in the locking groove 313 and that the polishing drum 3 will not loosen during polishing. In addition, the length design of the limiting rod 2 is also very critical. The distance from the first end 21 to the second end 22 of the limiting rod 2 is greater than the shortest distance from the first end face 11 of the rocker arm assembly 1 to the limiting space 31. This design ensures that during the extension and retraction of the limiting rod 2, the second end 22 can smoothly push the limiting block 4 into the limiting space 31, and can also pull the limiting block 4 out of the limiting space 31 when needed, facilitating the installation and removal of the polishing drum 3. This ingenious dimensional design not only improves the ease of operation but also enhances the stability and reliability of the entire polishing actuator.

[0041] Reference Figure 3 and Figure 4The limiting block 4 is disposed at the second end of the limiting rod 2 and located on the side of the limiting opening 32 in the limiting space 31. This design allows the limiting block 4 to smoothly enter the limiting space 31 through the limiting opening 32, thereby fixing the polishing drum 3. Specifically, the limiting block 4 adopts a cuboid structure in this embodiment. This structure is not only simple but also provides sufficient contact area to ensure the fixing effect. The limiting opening 32, which matches the shape of the limiting block 4, is designed as a rectangle. In this embodiment, the length of the limiting opening 32 is greater than or equal to the length of the limiting block 4, and the width of the limiting opening 32 is greater than or equal to the width of the limiting block 4 and less than the length of the limiting block 4, to ensure that the limiting block 4 can smoothly enter the limiting space 31 through the limiting opening 4, and that there is no risk of the limiting block 4 passing through the limiting opening 32 and exiting the limiting space 31 after rotating in the limiting space 31.

[0042] Optionally, refer to Figures 1 to 4 The rocker arm assembly 1 also includes a base plate 17, which is disposed at the bottom of the second end face 12 of the rocker arm assembly 1 and located on a plane perpendicular to the plane on which the rocker arm assembly 1 is located. This design allows the base plate 17 to provide additional support for the entire polishing actuator, especially when the polishing drum 3 is mounted on the second end face 12. The base plate 17 can effectively distribute and bear the weight of the polishing drum 3, thereby reducing structural deformation or instability that may be caused by weight concentration. Optionally, to further enhance the fixing stability of the polishing drum 3, the polishing actuator of this embodiment also includes at least two fixing members 121 and at least two slots 33. At least two fixing members 121 are symmetrically arranged on the left and right sides of the second end face 12 of the rocker arm assembly 1. At least two slots 33 are correspondingly arranged on the side of the polishing drum 3 near the second end face 12 of the rocker arm assembly 1, corresponding to the fixing members 121. This symmetrical design can not only evenly distribute the weight of the polishing drum 3, but also ensure that it remains stable during the polishing process and does not shake or shift. The cooperation of the fixing member 121 and the slot 33 provides an additional fixing point for the polishing drum 3, further enhancing its stability during the polishing process. Optionally, to optimize the structural design and improve the overall performance of the device, in this embodiment, the rocker arm assembly 1 includes a rocker arm 15 and a connecting plate 16. The connecting plate 16 is disposed between the rocker arm 15 and the polishing drum 3 and is located on a plane parallel to the plane where the rocker arm 15 is located. This design not only enhances the structural strength of the rocker arm assembly 1 but also provides more stable support for the polishing drum 3. The presence of the connecting plate 16 allows the polishing drum 3 to be more securely mounted on the rocker arm assembly 1, while also helping to disperse the forces generated during the polishing process, reducing pressure on the rocker arm 15, thereby extending the service life of the device.

[0043] Reference Figures 1 to 4When limiting the polishing drum 3, firstly, since the length of the limiting opening 32 is greater than or equal to the length of the limiting block 4, and the width of the limiting opening 32 is greater than or equal to the width of the limiting block 4, the limiting block 4 can smoothly pass through the limiting opening 32. When it is necessary to limit the polishing drum 3, first rotate the limiting rod 2 until the length direction of the limiting block 4 is consistent with the length direction of the limiting opening 32. Then, by pushing the limiting rod 2, the limiting block 4 moves along the axial direction of the limiting rod 2 and enters the limiting space 31 inside the polishing drum 3 through the limiting opening 32. After the limiting block 4 enters the limiting space 31, the next operation is to rotate the limiting rod 2. Since the limiting block 4 is located at the second end 22 of the limiting rod 2, rotating the limiting rod 2 will cause the limiting block 4 to rotate together. After rotating the limiting block 4 to the same direction as the locking groove 313, the operator ends the application of force to the limiting rod 2. Since the first end 21 of the limiting rod 2 is elastically connected to the first end face 11 of the rocker arm assembly 1, this elastic connection gives the limiting rod 2 a certain elastic restoring force. Under the action of the elastic restoring force, the limiting block 4 will rebound from the second end 22 toward the first end 11 along the axial direction of the limiting rod 2. Subsequently, the limiting block 4 will be inserted into the locking groove 313, thus being blocked by the edge of the limiting opening 32, and thus fixed on the side of the limiting space 31 where the limiting opening 32 is located. Through the above process, the limiting block 4 can effectively fix the polishing drum 3 on the second end face 12 of the rocker arm assembly 1, ensuring that the polishing drum 3 remains stable during the polishing process and will not loosen or fall off, thereby improving the polishing quality and the reliability of equipment operation. This limiting method is not only simple to operate, but also ingenious in structure. It utilizes the shape of the limiting block 4 and the size characteristics of the limiting opening 32, as well as the elastic connection characteristics of the limiting rod 2, to achieve fast and reliable limiting and fixing of the polishing drum 3.

[0044] Reference Figures 1 to 4 The polishing actuator of this utility model adopts a combination of a rocker arm assembly 1, a limiting rod 2, a polishing drum 3, and a limiting block 4. This combination prevents the polishing drum 3 from shifting or falling off during the polishing process, avoiding equipment failure and product loss due to human error. The elastic connection and mechanical limiting design of the limiting rod 2 not only simplifies the installation and disassembly process but also reduces operation time and labor intensity. The design of the locking groove 313 further enhances the stability of the polishing drum 3 during operation, ensuring high-quality completion of the polishing process.

[0045] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A polishing actuator, characterized in that, include: A rocker arm assembly includes a first end face and a second end face disposed opposite to each other, and the rocker arm assembly has a through hole; A limiting rod, a telescopic and rotatable portion of which is disposed in the through hole, the limiting rod includes a first end and a second end disposed opposite to each other, the first end of the limiting rod being elastically connected to the first end face of the rocker arm assembly; A polishing drum is disposed on the second end face of the rocker arm assembly. The polishing drum has a limiting space inside. A limiting opening corresponding to the through hole is provided on the side of the polishing drum near the second end face of the rocker arm assembly. The limiting opening is connected to the limiting space. A limiting block is disposed at the second end of the limiting rod and located on the side where the limiting opening is located in the limiting space.

2. The polishing actuator according to claim 1, characterized in that, The limiting block has a cuboid structure, the limiting opening has a rectangular shape, the length of the limiting opening is greater than or equal to the length of the limiting block, and the width of the limiting opening is greater than or equal to the width of the limiting block and less than the length of the limiting block.

3. The polishing actuator according to claim 2, characterized in that, The limiting space includes: Enter the channel and connect with the limiting port; A rotating cavity is connected to the inlet channel, and the limiting block can rotate within the rotating cavity; A locking groove is disposed between the entry channel and the rotating cavity. The shape of the locking groove is consistent with the shape of the limiting block. The direction of the locking groove pointing to the entry channel is defined as the projection direction. The side of the polishing drum near the second end face of the rocker arm assembly is the projection surface. The projection of the locking groove does not completely coincide with the projection of the entry channel.

4. The polishing actuator according to claim 3, characterized in that, The rotating cavity has a cylindrical structure, and its bottom surface is adjacent to the entry channel.

5. The polishing actuator according to claim 1, characterized in that, The distance from the first end to the second end of the limiting rod is greater than the shortest distance from the first end face of the rocker arm assembly to the limiting space.

6. The polishing actuator according to claim 1, characterized in that, The rocker arm assembly also includes: The base plate is disposed at the bottom of the second end face of the rocker arm assembly and is located on a plane perpendicular to the plane on which the rocker arm assembly is located.

7. The polishing actuator according to claim 1, characterized in that, Also includes: The spring assembly has one end connected to the first end of the limiting rod and the other end connected to the first end face of the rocker arm assembly.

8. The polishing actuator according to claim 1, characterized in that, Also includes: At least two fixing members are symmetrically arranged on the left and right sides of the second end face of the rocker arm assembly; At least two slots are provided on one side of the polishing drum near the second end face of the rocker arm assembly, corresponding to the fixing member.

9. The polishing actuator according to claim 1, characterized in that, The rocker arm assembly includes: rocker arm; A connecting plate is disposed between the rocker arm and the polishing drum and is located on a plane parallel to the plane on which the rocker arm is located.

10. The polishing actuator according to claim 1, characterized in that, The limiting rod further includes a handle, which is disposed at the first end of the limiting rod.

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