Coating adjustment system for 3D workpieces

Abstract

The utility model relates to a film processing technical field discloses a kind of film adjustment systems of 3D workpiece, loading shaft is rotatably connected in film chamber, and loading support is connected with loading shaft along the radial direction of loading shaft, for fixing workpiece;Film thickness correction plate is fixed and spaced between sputtering source and loading fixture, and installation structure is simple, and assembly efficiency is high, and structural stability is strong, can promote the adjustment effect of making film uniformity;The first shielding portion of film thickness correction plate is parallel to the extension direction of sputtering source, and located between the sputtering center area of sputtering source and the first film surface facing sputtering source, in the plane perpendicular to the extension direction of sputtering source, can block part of sputtering film material to reach the first film surface of workpiece, reduce the film layer thickness difference of the first film surface of workpiece facing sputtering source and the second film surface not facing sputtering source, can average the dispersion of sputtered film material in space, benefit in realizing the film uniformity on the entire workpiece surface.

Description

Technical Field

[0001] This utility model relates to the field of coating processing technology, and in particular to a coating adjustment system for 3D workpieces. Background Technology

[0002] In sputtering deposition, charged particles bombard the target surface, giving the target atoms or molecules sufficient energy to detach from the target and deposit a thin film on the workpiece surface. To achieve the desired deposition effect and uniformity in sputtering deposition, a film thickness correction plate is typically installed in the vacuum deposition apparatus to adjust the spatial distribution of the deposition thickness.

[0003] However, current film thickness correction plates can generally only adjust the spatial distribution of coating thickness along the extension direction of the sputtering target. Especially when uniform coating is required on the surface of a 3D workpiece, the desired coating uniformity is often unattainable. In existing technologies, to achieve uniform coating on the surface of a 3D workpiece, a film thickness correction plate that revolves with the 3D workpiece is placed on the fixture. However, this arrangement often results in a complex mounting structure for the film thickness correction plate, low assembly efficiency, and the structural stability of the plate is easily affected by the complexity of the structure and assembly, thus impacting the coating uniformity adjustment effect. Utility Model Content

[0004] The purpose of this invention is to provide a coating adjustment system for 3D workpieces, which has a simple and stable structure, high assembly efficiency, and effectively adjusts and improves the coating uniformity on the entire workpiece surface.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A coating adjustment system for 3D workpieces includes:

[0007] Coating chamber;

[0008] A sputtering source, wherein the sputtering source is disposed inside the coating chamber;

[0009] A loading fixture includes a loading shaft and a loading bracket. The loading shaft is rotatably connected to the coating chamber and rotates about its axis. The axial direction of the loading shaft is parallel to the extension direction of the sputtering source. The loading bracket is connected to the loading shaft radially and is used to fix the workpiece. When the workpiece moves to the closest point to the sputtering source, the first coating surface of the workpiece faces the sputtering source.

[0010] A film thickness correction plate is fixed in the coating chamber and spaced between the sputtering source and the loading fixture. The film thickness correction plate includes a first shielding portion, the extension direction of which is parallel to the extension direction of the sputtering source. When the workpiece moves to the closest point to the sputtering source, the first shielding portion is located between the sputtering center region of the sputtering source and the first coating surface in a plane perpendicular to the extension direction of the sputtering source.

[0011] As an optional technical solution for the coating adjustment system of 3D workpieces, the width of the first shielding part varies along the extension direction of the first shielding part.

[0012] As an optional technical solution for the coating adjustment system of 3D workpieces, the width of the middle part of the first shielding part is greater than the width of both ends.

[0013] As an optional technical solution for the coating adjustment system of 3D workpieces, the film thickness correction plate further includes two second blocking parts, which are spaced apart on both sides of the first blocking part.

[0014] As an optional technical solution for the coating adjustment system of 3D workpieces, the width of the middle part of the second shielding part is greater than the width of both ends.

[0015] As an optional technical solution for the coating adjustment system of 3D workpieces, the loading bracket is rotatably connected to the loading shaft, and the loading bracket rotates about the radial direction of the loading shaft.

[0016] As an optional technical solution for the coating adjustment system of 3D workpieces, the loading shaft is provided with multiple loading brackets at intervals along the circumferential direction.

[0017] As an optional technical solution for the coating adjustment system of 3D workpieces, the loading shaft is provided with multiple loading brackets spaced apart along the axial direction.

[0018] As an optional technical solution for the coating adjustment system of 3D workpieces, the coating adjustment system of 3D workpieces includes two sputtering sources, and the sputtering sources are set in a one-to-one correspondence with the film thickness correction plate.

[0019] As an optional technical solution for the coating adjustment system of 3D workpieces, the two sputtering sources are symmetrically arranged on both sides of the loading shaft.

[0020] The beneficial effects of this utility model are:

[0021] The 3D workpiece coating adjustment system provided by this utility model includes a coating chamber that is in a vacuum state during operation, and a sputtering source, a loading fixture, and a film thickness correction plate, all assembled inside the coating chamber. The loading fixture includes a loading shaft and a loading bracket. The loading shaft is rotatably connected to the coating chamber and rotates around its axis, with the axial direction of the loading shaft parallel to the extension direction of the sputtering source. The loading bracket is connected to the loading shaft radially and is used to fix the workpiece so that the first coating surface of the workpiece is perpendicular to the radial direction of the loading shaft. A film thickness correction plate is fixed in the coating chamber, spaced between the sputtering source and the loading fixture. The installation structure of the film thickness correction plate is simple, with high assembly efficiency and strong structural stability, thereby improving the adjustment effect of coating uniformity. The film thickness correction plate includes a first shielding part, the extension direction of which is parallel to the extension direction of the sputtering source. When the workpiece moves to the closest point to the sputtering source, the first coating surface of the workpiece faces the sputtering source. In a plane perpendicular to the extension direction of the sputtering source, the first shielding part is located between the sputtering center region of the sputtering source and the first coating surface. The first shielding part can block part of the sputtered film material from reaching the first coating surface of the workpiece. By shielding the first coating surface in the region with the highest sputtering rate, the difference in film thickness between the first coating surface of the workpiece facing the sputtering source and the second coating surface not facing the sputtering source is reduced. The film thickness correction plate can adjust the sputtered film material by spatially dispersing and averaging, thereby helping to achieve coating uniformity on the entire workpiece surface. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of sputtering in the 3D workpiece coating adjustment system provided by a specific embodiment of the present invention after the film thickness correction plate is removed;

[0023] Figure 2 This is a sputtering schematic diagram of the coating adjustment system for 3D workpieces provided in a specific embodiment of this utility model;

[0024] Figure 3 This is a sputtering schematic diagram of a coating adjustment system for 3D workpieces with different workpiece conditions, provided by a specific embodiment of this utility model.

[0025] Figure 4 This is a schematic diagram of the structure of the 3D workpiece coating adjustment system with two sputtering sources provided in a specific embodiment of the present invention;

[0026] Figure 5 yes Figure 4 A structural diagram from another perspective;

[0027] Figure 6 This is a schematic diagram of the structure of a film thickness correction plate in one of the coating adjustment systems for 3D workpieces provided in a specific embodiment of this utility model.

[0028] Figure 7 This is a schematic diagram of the structure of another film thickness correction plate of the 3D workpiece coating adjustment system provided in a specific embodiment of this utility model.

[0029] Figure 8 This is a schematic diagram of the structure of another film thickness correction plate of the 3D workpiece coating adjustment system provided in a specific embodiment of this utility model.

[0030] In the picture:

[0031] 100 Sputtering source; 110 Sputtering center area; 200 Loading fixture; 210 Loading shaft; 220 Loading bracket; 300 Film thickness correction plate; 310 First shielding part; 320 Second shielding part; 330 Mounting part; 400 Workpiece; 410 First coating surface; 420 Second coating surface. Detailed Implementation

[0032] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0033] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0035] In the description of this embodiment, the terms "upper," "lower," "right," and "left," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0036] like Figures 1 to 8 As shown, this utility model discloses a coating adjustment system for a 3D workpiece, including a coating chamber that is in a vacuum state during operation, and a sputtering source 100, a loading fixture 200, and a film thickness correction plate 300, all assembled inside the coating chamber. The loading fixture 200 includes a loading shaft 210 and a loading bracket 220. The loading shaft 210 is rotatably connected to the coating chamber and rotates around its axis. The axial direction of the loading shaft 210 is parallel to the extension direction of the sputtering source 100. The loading bracket 220 is connected to the loading shaft 210 radially and is used to fix the workpiece 400 so that the first coating surface 410 of the workpiece 400 is perpendicular to the radial direction of the loading shaft 210. Because the workpiece 400 has a 3D shape, on both sides of the first coating surface 410 on the workpiece 400 are second coating surfaces 420 that are nearly perpendicular to the first coating surface 410. When the workpiece 400 is closest to the sputtering source 100, the second coating surfaces 420 cannot efficiently receive the film material facing the sputtering source 100. Therefore, the density of the film material received by the second coating surfaces 420 from the sputtering source 100 is low, such as... Figure 1 As shown, the coating thickness of the second coating surface 420 is lower than that of the first coating surface 410.

[0037] In order to change this situation, such as Figure 2 As shown, the film thickness correction plate 300 is fixed in the coating chamber and spaced between the sputtering source 100 and the loading fixture 200. The film thickness correction plate 300 will not rotate with the rotation of the loading fixture 200 and the workpiece 400 on it. The installation structure of the film thickness correction plate 300 is simple, the assembly efficiency is high, and the structural stability is strong, thereby improving the adjustment effect of coating uniformity.

[0038] The extension direction of the sputtering source 100 is set as the first direction; when the workpiece 400 moves to the closest point to the sputtering source 100, the first coating surface 410 of the workpiece 400 faces the sputtering source 100, and at this time, the extension direction perpendicular to the sputtering source 100 on the first coating surface 410 is the second direction.

[0039] The film thickness correction plate 300 includes a first shielding portion 310, the extension direction of which is parallel to the extension direction of the sputtering source 100, i.e., the first direction.

[0040] When the workpiece 400 moves to the closest point to the sputtering source 100, in a plane perpendicular to the extending direction of the sputtering source 100, the first shielding portion 310 is located between the sputtering center region 110 of the sputtering source 100 and the first coating surface 410.

[0041] The sputtering center region 110 of the sputtering source 100 can be the region where the sputtering source 100 is closest to the workpiece 400 when the workpiece 400 moves to its closest point. Understandably, the sputtering center region 110 includes at least a large portion of the region of the sputtering source 100 with a high deposition rate. Specifically, in a magnetron sputtering coating apparatus, if the sputtering source 100 is a single target, the three magnets within the target tube are arranged with alternating polarities, including two edge magnets and one center magnet. Their arrangement could be, for example, NSN', with the higher sputtering rate located at the polarity boundary between adjacent magnets, such as the center of NS and the center of SN'. In this embodiment, the sputtering center region 110 is defined as the target surface region close to the region between the two polarity boundaries. If the sputtering source 100 is a pair of adjacent twin targets, in this embodiment, the sputtering center region 110 is defined as the target surface region close to the region between the center magnets of the two targets.

[0042] The first shielding portion 310 can block part of the sputtered film material from reaching the first coating surface 410 of the workpiece 400. By shielding the first coating surface 410, the region with the highest sputtering rate, the spatial distribution of the coating thickness of the sputtering source 100 on the workpiece 400 in the second direction is adjusted, thereby reducing the difference in film thickness between the first coating surface 410 facing the sputtering source 100 and the second coating surface 420 not facing the sputtering source 100. Figure 2 and Figure 3 As shown, for workpieces 400 with different shapes, the film thickness correction plate 300 can adjust the sputtered film material by spatially dispersing and averaging it, which is conducive to achieving uniform coating on the entire surface of the workpiece 400.

[0043] In some embodiments, when the workpiece 400 moves to the closest point to the sputtering source 100, the first coating surface 410 of the workpiece 400 is directly facing the sputtering center region 110, at which time the shielding effect of the first shielding part 310 is optimal.

[0044] In this embodiment, the coating adjustment system for the 3D workpiece includes two sputtering sources 100, and the sputtering sources 100 and the film thickness correction plate 300 are set in a one-to-one correspondence. The area with a larger coating rate of the coating source generally refers to the center line position of the corresponding sputtering source 100. Therefore, the two first shielding parts 310 are respectively aligned with the center line positions of the two sputtering sources 100 and fixed.

[0045] Furthermore, the two sputtering sources 100 are symmetrically arranged on both sides of the loading shaft 210, and the two sputtering sources 100 and the two first shielding parts 310 are arranged in parallel on the same straight line. Setting multiple sputtering sources 100 can also improve sputtering efficiency and coating uniformity.

[0046] Specifically, the loading bracket 220 is rotatably connected to the loading shaft 210. The loading bracket 220 rotates about the radial direction of the loading shaft 210. The loading fixture 200 can make the workpiece 400 revolve and rotate at the same time as loading it, which helps to obtain extremely high coating uniformity.

[0047] For example, the loading shaft 210 is provided with a plurality of loading brackets 220 spaced circumferentially, such as Figure 2 and Figure 4 As shown, the loading shaft 210 can be optionally, but is not limited to, a hexagonal prism or an octagonal prism, with each face corresponding to a loading bracket 220, maintaining the overall stability of the loading fixture 200. This allows for the simultaneous coating of multiple workpieces 400, improving coating efficiency. Figure 5 As shown, the loading shaft 210 is provided with multiple loading brackets 220 at intervals along the axial direction, which can further increase the number of coated workpieces 400 in the same batch and save time and space costs.

[0048] Optionally, the first shielding portion 310 is strip-shaped, and a mounting portion 330 for fixing the first shielding portion 310 to the film thickness correction plate 300 can be provided. The width of the first shielding portion 310, i.e., its width in the second direction, can vary along the extension direction of the first shielding portion 310 to simultaneously achieve coating uniformity of the workpiece 400 in the first direction. It should be noted that within a certain range, the larger the width of the first shielding portion 310 in the second direction, the better the coating uniformity of the workpiece 400 in the second direction, but the coating rate will decrease.

[0049] like Figure 7 As shown, the width of the middle part of the first shielding part 310 is greater than the width of both ends, so as to improve the situation that the coating thickness of the two end regions of the sputtering source 100 is small in the extension direction of the sputtering source 100. The outer contour of the first shielding part 310 can be selectively set to have arc-shaped features or stepped features.

[0050] like Figure 8 As shown, the film thickness correction plate 300 also includes two second shielding portions 320, which are spaced apart on both sides of the first shielding portion 310. The first shielding portion 310 and the second shielding portion 320 work together to assist in adjusting the spatial distribution of the coating thickness in the extension direction of the sputtering source 100. Similarly, by setting the width of the middle part of the second shielding portion 320 to be greater than the width of both ends, the adjustment effect of the film thickness correction plate 300 in the coating adjustment system of the 3D workpiece is further improved.

[0051] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

A coating adjustment system for 1.3D workpieces, characterized in that, include: Coating chamber; A sputtering source (100) is disposed inside the coating chamber; A loading fixture (200) includes a loading shaft (210) and a loading bracket (220). The loading shaft (210) is rotatably connected to the coating chamber and rotates about its axis. The axial direction of the loading shaft (210) is parallel to the extension direction of the sputtering source (100). The loading bracket (220) is connected to the loading shaft (210) radially. The loading bracket (220) is used to fix the workpiece (400). When the workpiece (400) moves to the closest point to the sputtering source (100), the first coating surface (410) of the workpiece (400) faces the sputtering source (100). A film thickness correction plate (300) is fixed in the coating chamber. The film thickness correction plate (300) is spaced between the sputtering source (100) and the loading fixture (200). The film thickness correction plate (300) includes a first shielding portion (310). The extension direction of the first shielding portion (310) is parallel to the extension direction of the sputtering source (100). When the workpiece (400) moves to the closest point to the sputtering source (100), in a plane perpendicular to the extension direction of the sputtering source (100), the first shielding portion (310) is located between the sputtering center region (110) of the sputtering source (100) and the first coating surface (410).

2. The coating adjustment system for 3D workpieces according to claim 1, characterized in that, The width of the first blocking portion (310) varies along the extending direction of the first blocking portion (310).

3. The coating adjustment system for 3D workpieces according to claim 2, characterized in that, The width of the middle part of the first blocking part (310) is greater than the width of both ends.

4. The coating adjustment system for 3D workpieces according to claim 1, characterized in that, The film thickness correction plate (300) further includes two second shielding portions (320), which are spaced apart on both sides of the first shielding portion (310).

5. The coating adjustment system for 3D workpieces according to claim 4, characterized in that, The width of the middle part of the second shielding part (320) is greater than the width of both ends.

6. The coating adjustment system for 3D workpieces according to claim 1, characterized in that, The loading bracket (220) is rotatably connected to the loading shaft (210), and the loading bracket (220) rotates about the radial direction of the loading shaft (210).

7. The coating adjustment system for 3D workpieces according to claim 1, characterized in that, The loading shaft (210) is provided with a plurality of loading brackets (220) spaced apart circumferentially.

8. The coating adjustment system for 3D workpieces according to claim 1, characterized in that, The loading shaft (210) is provided with a plurality of loading brackets (220) spaced apart along the axial direction.

9. The coating adjustment system for 3D workpieces according to claim 1, characterized in that, The coating adjustment system for the 3D workpiece includes two sputtering sources (100), and the sputtering sources (100) are configured in a one-to-one correspondence with the film thickness correction plate (300).

10. The coating adjustment system for a 3D workpiece according to claim 9, characterized in that, The two sputtering sources (100) are symmetrically arranged on both sides of the loading shaft (210).

Images