An optical element surface inspection apparatus

Abstract

The utility model discloses an optical element surface detection equipment, including optical platform, X axis linear displacement module, optical element bearing platform, optical element surface detection unit, be equipped with the protection cover of the X axis linear displacement module, optical element bearing platform, optical element surface detection unit cover in its inside on optical platform, optical element bearing platform includes the servo turntable of being located on the sliding platform of X axis linear displacement module, is located on the turntable of servo turntable's deflection platform, optical element surface detection unit is arranged in the outside of X axis linear displacement module close to the middle position, and the detection head of optical element surface detection unit is perpendicular to the X axis linear displacement module, and the bottom of optical element surface detection unit is equipped with Y axis linear displacement module, and Y axis linear displacement module bottom is equipped with Z axis linear displacement module, and the bottom fixed connection of Z axis linear displacement module is on optical platform, and this scheme is favorable to reduce the influence of vibration factor and improve the accuracy of detection.

Description

Technical Field

[0001] This disclosure relates to the field of optical component inspection technology, and in particular to an optical component surface inspection device. Background Technology

[0002] For optical components, especially high-precision mirrors, surface shape and roughness are key indicators determining their performance. Currently, traditional inspection methods typically use contact probe profilometers or single white-light interferometers. Contact measurements are inefficient and pose a risk of scratching the sample; while traditional white-light interferometers, limited by a finite field of view and point-by-point measurement mode, struggle to achieve rapid and complete measurements of the entire surface of large-sized optical components. Furthermore, existing inspection equipment is not adequately designed to withstand environmental vibrations or vibrations generated during operation. Vibrations propagate through the base platform or air into the instrument, causing minute displacements of optical components (such as lenses and mirrors). For example, in scanning electron microscopy, vibrations can cause the microscope tube or sample stage to shift, resulting in jagged or blurred image edges. Therefore, existing optical component surface inspection equipment needs optimization and improvement to suppress the effects of external environmental temperature, light, noise, and environmental vibrations, and to improve the stability of the instrument's movement during adjustments to the working distance. Utility Model Content

[0003] To overcome the shortcomings of the prior art, this disclosure proposes an optical element surface inspection device, which reduces the impact of external environmental vibration or micro-vibration during device operation, and improves the stability of the device's inspection unit when adjusting the working distance with the object being inspected, thereby improving the accuracy of the inspection.

[0004] The specific technical solution of this utility model is as follows: an optical element surface inspection device, including an optical platform, an X-axis linear displacement module disposed on the optical platform, an optical element support platform disposed on the X-axis linear displacement module, and an optical element surface shape inspection unit disposed on the optical platform. The optical platform is provided with a protective cover that encloses the X-axis linear displacement module, the optical element support platform, and the optical element surface shape inspection unit. The optical element support platform includes a servo turntable disposed on the sliding table of the X-axis linear displacement module and a tilting stage disposed on the turntable of the servo turntable. The optical element surface shape inspection unit is arranged on the outer side of the X-axis linear displacement module near its central position, with the inspection head of the optical element surface shape inspection unit perpendicularly facing the X-axis linear displacement module. A Y-axis linear displacement module is disposed at the bottom of the optical element surface shape inspection unit, and a Z-axis linear displacement module is disposed at the bottom of the Y-axis linear displacement module. The bottom of the Z-axis linear displacement module is fixedly connected to the optical platform.

[0005] Furthermore, the optical platform is provided with a marble base, and the X-axis linear displacement module, the optical element surface shape detection unit, and the Z-axis vertical lifting platform are disposed on the marble base. The marble base is provided with a rectangular groove, and the X-axis linear displacement module is horizontally disposed in the rectangular groove.

[0006] Furthermore, the X-axis linear displacement module uses a linear slide with a stroke of 1200mm and a positioning accuracy of 1μm.

[0007] Furthermore, the optical element surface shape detection unit includes a Fizeau interferometer and a white light interferometer. The Fizeau interferometer has a Y-axis linear displacement module and a Z-axis linear displacement module at its bottom, and the white light interferometer has a Y-axis linear displacement module and a Z-axis linear displacement module at its bottom.

[0008] Preferably, the Z-axis linear displacement module adopts a Z-axis lifting platform, and the Y-axis linear displacement module adopts a ball screw type linear module. The ball screw type linear module includes a bottom panel, a first linear guide rail and a second linear guide rail arranged parallel to each other on the bottom panel, a top panel arranged on the sliders of the first linear guide rail and the second linear guide rail, a ball screw and a drive motor arranged between the first linear guide rail and the second linear guide rail, the ball screw is provided with a nut seat, the nut seat is connected to the top panel, the bottom panel is fixedly connected to the top surface of the Z-axis lifting platform, and the top panel is fixedly connected to the optical element surface shape detection unit.

[0009] Furthermore, the Z-axis lifting platform has a stroke of 60mm, and the Y-axis linear displacement module has a stroke of 110mm.

[0010] Furthermore, the protective cover is a rectangular cover with a central opening at the bottom, made of aluminum alloy. The surface of the protective cover is anodized and sandblasted. The side wall of the protective cover is provided with an observation window, which is made of tempered glass. The inner wall of the protective cover and the inner wall of the tempered glass are covered with a graphene composite light-absorbing film layer.

[0011] Preferably, the top wall of the protective cover has a hollow interlayer, and a serpentine pipe is provided inside the hollow interlayer. The two ends of the serpentine pipe are connected to an external water circulation device. A temperature sensor is provided inside the internal space formed by the protective cover on the optical platform.

[0012] Preferably, the optical platform used is the M-RS4000-510-18 optical platform.

[0013] The optical component surface inspection equipment designed using the above scheme has at least the following advantages compared to existing technologies: By using a servo turntable mounted on the X-axis linear displacement module, and then placing a tilting stage on top of that turntable, the servo turntable offers a larger load-bearing area and a more stable structural design. When used as the bottom support, it provides a more stable foundation for the tilting stage and the component under test. The tilting stage, located on the upper layer, has a relatively small mass, resulting in less impact from inertial forces and vibrations during its movement on the overall system. This reduces dynamic errors caused by excessive mass in the lower moving parts, thereby improving positional accuracy and angle control stability during the testing process.

[0014] Optical inspection is extremely sensitive to micro-vibrations, which can cause optical path deviation and image blurring, affecting the accuracy of surface defect detection. The optical platform itself has basic vibration resistance, and by setting a marble base on the optical platform, the natural damping structure of the marble can further absorb high-frequency micro-vibrations (such as equipment operation and environmental vibrations), forming a "double vibration resistance" effect and ensuring the stability of the displacement module during movement.

[0015] 3. By setting up a protective cover, it can suppress the effects of external environmental temperature, light and noise, thereby reducing the impact of the above factors on the surface inspection of optical components and improving the accuracy of the inspection. Attached Figure Description

[0016] The accompanying drawings, which are included in and form part of this specification, illustrate exemplary embodiments, features, and aspects of this disclosure together with the specification and serve to explain the principles of this disclosure.

[0017] Figure 1 This is a schematic diagram of the overall structure of the optical element surface inspection device disclosed in this utility model.

[0018] Figure 2 This is a schematic diagram of the optical platform disclosed in this utility model, which includes a marble base and an X-axis linear displacement module.

[0019] Figure 3 This is a schematic diagram of the X-axis linear displacement module and optical element support platform structure disclosed in this utility model.

[0020] Figure 4 This is an exploded view of the X-axis linear displacement module and optical element support platform structure disclosed in this utility model.

[0021] Figure 5 This is a schematic diagram of the optical element surface shape detection unit structure disclosed in this utility model.

[0022] Figure 6 This is a schematic diagram illustrating the structural principle of the ball screw linear module disclosed in this utility model.

[0023] The following are explanations of the reference numerals in the attached figures: 1. Optical platform; 2. X-axis linear displacement module; 201. Sliding stage; 3. Optical component carrier platform; 31. Servo turntable; 32. Tilt stage; 4. Optical component surface shape detection unit; 41. Fizeau interferometer; 42. White light interferometer; 401. Y-axis linear displacement module; 402. Z-axis linear displacement module; 4011. First linear guide rail; 4012. Second linear guide rail; 4013. Slider; 4014. Ball screw; 4015. Drive motor; 4016. Nut seat; 5. Protective cover; 6. Marble base; 601. Rectangular groove. Detailed Implementation

[0024] The technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are also within the scope of protection of this disclosure.

[0025] Please refer to Figures 1 to 6 This is a specific embodiment of an optical component surface inspection device disclosed in this solution, including an optical platform 1, an X-axis linear displacement module 2 disposed on the optical platform 1, an optical component support platform 3 disposed on the X-axis linear displacement module 2, and an optical component surface shape inspection unit 4 disposed on the optical platform 1. The optical platform 1 is provided with a protective cover 5 that encloses the X-axis linear displacement module 2, the optical component support platform 3, and the optical component surface shape inspection unit 4 therein. The optical component support platform 3 includes a sliding stage 2 disposed on the X-axis linear displacement module 2. The servo turntable 31 on the servo turntable 31 has a tilting stage 32 on its turntable. The optical element surface shape detection unit 4 is arranged on the outer side of the X-axis linear displacement module 2 near its center. The detection head of the optical element surface shape detection unit 4 is perpendicular to the X-axis linear displacement module 2. The bottom of the optical element surface shape detection unit 4 is provided with a Y-axis linear displacement module 401, and the bottom of the Y-axis linear displacement module 401 is provided with a Z-axis linear displacement module 402. The bottom of the Z-axis linear displacement module 402 is fixedly connected to the optical platform 1. Preferably, the optical platform 1 is a research-grade optical platform 1 from NEWPORT's M-RS4000 series, model M-RS4000-510-18 optical platform 1.

[0026] In this embodiment, a servo turntable 31 is installed on the X-axis linear displacement module 2, and a tilting stage 32 is installed on the servo turntable 31. The servo turntable 31 has a larger bearing area and a more stable structural design. When used as the bottom support, it can provide a more stable foundation for the tilting stage 32 and the component to be tested above. The tilting stage 32 is located on the upper layer and has a relatively small mass. The inertial force and vibration generated during its movement have a smaller impact on the overall system, which can reduce the dynamic error caused by the excessive mass of the moving parts at the bottom layer, thereby improving the position accuracy and angle control stability during the detection process.

[0027] Please refer to Figure 1 , Figure 2 Preferably, the optical platform 1 is provided with a marble base 6. The X-axis linear displacement module 2, the optical element surface shape detection unit 4, and the Z-axis vertical lifting platform are disposed on the marble base 6. The marble base 6 is provided with a rectangular groove 601, and the X-axis linear displacement module 2 is horizontally disposed within the rectangular groove 601. The optical platform 1 itself has basic vibration damping capabilities. On top of this, the marble base 6 is provided. Marble has natural damping structural characteristics, which can further absorb high-frequency micro-vibrations, such as equipment operation and environmental vibrations, forming a "double vibration damping" effect, ensuring the stability of the displacement module during movement.

[0028] Furthermore, the X-axis linear displacement module 2 adopts a linear slide with a stroke of 1200mm and a positioning accuracy of 1μm, preferably the RBLM series direct drive linear guide precision motion table of Beijing Ruibang Precision Control Technology Co., Ltd.

[0029] Furthermore, the optical element surface shape detection unit 4 includes a Fizeau interferometer 41 and a white light interferometer 42. The Fizeau interferometer 41 has a Y-axis linear displacement module 401 and a Z-axis linear displacement module 402 at its bottom, and the white light interferometer 42 also has a Y-axis linear displacement module 401 and a Z-axis linear displacement module 402 at its bottom. The Fizeau interferometer 41 is mainly used for measuring the surface shape of the optical element, while the white light interferometer 42 is mainly used for measuring the surface roughness of the optical element.

[0030] In this embodiment, preferably, the Z-axis linear displacement module 402 adopts a Z-axis lifting platform, which uses the RBZ-SG series precision Z-axis from Beijing Ruibang Precision Control Technology Co., Ltd., and the stroke of the Z-axis lifting platform is 60mm.

[0031] Please refer to Figure 5 , Figure 6Preferably, the Y-axis linear displacement module 401 adopts a ball screw 4014 type linear module. The ball screw 4014 type linear module includes a bottom panel, a first linear guide rail 4011 and a second linear guide rail 4012 arranged horizontally on the bottom panel, a top panel arranged on the slider 4013 of the first linear guide rail 4011 and the second linear guide rail 4012, a ball screw 4014 arranged between the first linear guide rail 4011 and the second linear guide rail 4012, and a drive motor 4015. The ball screw 4014 is provided with a nut seat 4016, which is connected to the top panel. The bottom panel is fixedly connected to the top surface of the Z-axis lifting platform. The top panel is fixedly connected to the optical element surface shape detection unit 4. The stroke of the Y-axis linear displacement module 401 is 110mm. The drive motor 4015 is a servo motor, which drives the rotation of the ball screw 4014. The ball screw 4014 has bearing seats at both ends. The output shaft of the servo motor is connected to the ball screw 4014 through a coupling. When the ball screw 4014 rotates, it drives the nut seat 4016 to move linearly along the Y-axis.

[0032] Furthermore, the protective cover 5 is a rectangular cover with a central opening at the bottom, made of aluminum alloy. The surface of the protective cover 5 is anodized and sandblasted. The side wall of the protective cover 5 is provided with an observation window, which is made of tempered glass. The inner wall of the protective cover 5 and the inner wall of the tempered glass are covered with a graphene composite light-absorbing film layer to ensure that the inside of the protective cover 5 does not reflect light.

[0033] In a preferred embodiment, the top wall of the protective cover 5 has a hollow interlayer containing a serpentine pipe. Both ends of the serpentine pipe are connected to an external water circulation device. A temperature sensor is installed within the internal space formed by the protective cover 5 on the optical platform 1, and the temperature inside the protective cover 5 is controlled by water circulation. The external water circulation device connected to the serpentine pipe ensures that the noise generated by the water circulation device does not affect the internal components of the testing equipment. This solution, by using the protective cover 5, suppresses external environmental temperature, light, and noise, reducing the impact of these factors on the surface testing of optical components and improving testing accuracy.

[0034] The parts not described in detail in this technical solution specification are obvious to those skilled in the art and can be supplemented and improved based on existing technical knowledge. At the same time, those skilled in the art should understand that the above embodiments are merely preferred embodiments of this utility model. For those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. An optical element surface inspection device, characterized in that, It includes an optical platform, an X-axis linear displacement module mounted on the optical platform, an optical element support platform mounted on the X-axis linear displacement module, and an optical element surface shape detection unit mounted on the optical platform. The optical platform is provided with a protective cover that encloses the X-axis linear displacement module, the optical element support platform, and the optical element surface shape detection unit. The optical element carrying platform includes a servo turntable mounted on the sliding table of the X-axis linear displacement module, and a tilting stage mounted on the turntable of the servo turntable. The optical element surface shape detection unit is arranged on the outer side of the X-axis linear displacement module near its center. The detection head of the optical element surface shape detection unit is perpendicular to the X-axis linear displacement module. The bottom of the optical element surface shape detection unit is provided with a Y-axis linear displacement module, and the bottom of the Y-axis linear displacement module is provided with a Z-axis linear displacement module. The bottom of the Z-axis linear displacement module is fixedly connected to the optical platform.

2. The optical element surface inspection device according to claim 1, characterized in that, The optical platform is provided with a marble base. The X-axis linear displacement module, the optical element surface shape detection unit, and the Z-axis vertical lifting platform are set on the marble base. The marble base is provided with a rectangular groove, and the X-axis linear displacement module is horizontally set in the rectangular groove.

3. The optical element surface inspection device according to claim 1, characterized in that, The X-axis linear displacement module uses a linear slide with a stroke of 1200mm and a positioning accuracy of 1μm.

4. The optical element surface inspection device according to claim 1, characterized in that, The optical element surface shape detection unit includes a Fizeau interferometer and a white light interferometer. The bottom of the Fizeau interferometer is provided with a Y-axis linear displacement module and a Z-axis linear displacement module, and the bottom of the white light interferometer is provided with a Y-axis linear displacement module and a Z-axis linear displacement module.

5. The optical element surface inspection device according to claim 4, characterized in that, The Z-axis linear displacement module uses a Z-axis lifting platform, and the Y-axis linear displacement module uses a ball screw type linear module. The ball screw type linear module includes a bottom panel, a first linear guide rail and a second linear guide rail arranged horizontally on the bottom panel, a top panel on the sliders of the first linear guide rail and the second linear guide rail, a ball screw and a drive motor arranged between the first linear guide rail and the second linear guide rail, the ball screw is provided with a nut seat, the nut seat is connected to the top panel, the bottom panel is fixedly connected to the top surface of the Z-axis lifting platform, and the top panel is fixedly connected to the optical element surface shape detection unit.

6. The optical element surface inspection device according to claim 5, characterized in that, The Z-axis lifting platform has a stroke of 60mm, and the Y-axis linear displacement module has a stroke of 110mm.

7. The optical element surface inspection device according to claim 1, characterized in that, The protective cover is a rectangular cover with a central opening at the bottom, made of aluminum alloy. The surface of the protective cover is anodized and sandblasted. The side wall of the protective cover is provided with an observation window, which is made of tempered glass. The inner wall of the protective cover and the inner wall of the tempered glass are covered with a graphene composite light-absorbing film layer.

8. The optical element surface inspection device according to claim 7, characterized in that, The protective cover has a hollow interlayer inside its top wall, and a serpentine pipe is installed inside the hollow interlayer. The two ends of the serpentine pipe are connected to an external water circulation device. A temperature sensor is installed in the internal space formed by the protective cover on the optical platform.

9. The optical element surface inspection device according to claim 1, characterized in that, The optical platform used is the M-RS4000-510-18 optical platform.

Images