Dual red light integrated semiconductor visual inspection light source device

Abstract

The utility model discloses a kind of double red light integrated semiconductor visual inspection light source device, including shell, dome shell cavity is opened in shell, shell one end is equipped with first mounting plate, first mounting plate is equipped with first red light source component, one end of first mounting plate is equipped with second mounting plate, second mounting plate one end is equipped with front end cover, second mounting plate is equipped with second red light source component, one end of front end cover is equipped with polarizing plate, the polarizing plate of dome shell cavity, first mounting plate, second mounting plate and front end cover of shell is respectively equipped with window, and the window of the polarizing plate of front end cover and the window of second mounting plate are equipped with window shell between window;The utility model provides a kind of double red light integrated semiconductor visual inspection light source device, the utility model realizes the curved surface uniform illumination of dome red light source+the plane metal layer reflection suppression of polarizing plate red light source+the structure miniaturization function of double red light compact integration.

Description

Technical Field

[0001] This utility model relates to the technical field of semiconductor vision inspection light source devices, and in particular to a semiconductor vision inspection light source device with dual red light integration. Background Technology

[0002] In the field of high-precision visual inspection of semiconductors, in order to meet the imaging requirements of different components, conventional red light source solutions mainly adopt the following technical approaches:

[0003] 1. Employs a single dome red light source technology: Achieves uniform illumination of curved components (such as BGA solder balls) through multi-angle diffused light, reducing shadow defects.

[0004] 2. Employ a single polarizing red light source technology: Use polarizing filters to suppress specular reflections on planar metal layers (such as lead frames) and avoid overexposure.

[0005] 3. Adopt a split-type combined red light source technology (i.e., use a single dome red light source and a single polarizing red light source placed in different positions for illumination): to take into account the detection requirements of curved surfaces and flat surfaces.

[0006] However, the above-mentioned light source solutions have the following drawbacks in the field of high-precision visual inspection of semiconductors:

[0007] A. Both light source scheme 1 and light source scheme 2 have the drawback of being used for a single purpose. Although light source scheme 1 ensures uniform illumination of the curved surface, it is easy to cause overexposure of the planar metal layer. Although light source scheme 2 can suppress reflection of the planar metal layer, it is easy to generate shadows in the curved surface area, resulting in low accuracy of curved surface detection.

[0008] B. While the split-type combined light source of the above-mentioned light source scheme 3 meets the detection requirements of both curved and flat surfaces, its bulky size due to physical structural limitations makes it unsuitable for installation in the compact cavity of semiconductor inspection machines (especially wafer inspection machines). (Furthermore, due to physical structural limitations, it is easily constrained by physical structural interference and installation position limitations, which can easily lead to physical blind spots, resulting in incomplete semiconductor inspection (i.e., the combined light source cannot cover some inspection dead zones)).

[0009] Therefore, there is an urgent need for a light source device that can simultaneously achieve uniform illumination of curved surfaces, suppression of reflections by a planar metal layer, and miniaturization of structure under the premise of single-band red light, so as to be suitable for the installation and testing of semiconductor equipment. Utility Model Content

[0010] The purpose of this invention is to overcome the above-mentioned defects in the prior art and provide a semiconductor visual inspection light source device with dual red light integration. It compactly integrates a dome red light source and a polarizing red light source into one unit, realizing the functions of uniform illumination of curved surfaces, suppression of reflection of planar metal layers, and miniaturization of structure. This makes it suitable for installation in semiconductor equipment and can be used to realize comprehensive and high-precision inspection of semiconductor curved surfaces and planar metal layers.

[0011] To achieve the above objectives, this utility model provides a semiconductor visual inspection light source device with dual red light integration, including a housing. A dome-shaped cavity is formed on the housing. A first mounting plate is mounted on one end of the housing. A first red light source component is mounted on the end of the first mounting plate near the dome-shaped cavity. A second mounting plate is mounted on one end of the first mounting plate. A front end cover is mounted on one end of the second mounting plate. A second red light source component is mounted on the end of the second mounting plate near the front end cover. A polarizing plate is mounted on the front end cover. Viewing windows are respectively formed on the dome-shaped cavity of the housing, the first mounting plate, the second mounting plate, and the polarizing plate of the front end cover. A viewing window shell is installed between the viewing window of the polarizing plate of the front end cover and the viewing window of the second mounting plate.

[0012] Preferably, one end of the viewing window housing is secured to the viewing window of the polarizing plate, and the other end is secured to the viewing window of the second mounting plate.

[0013] Preferably, the device also includes a mounting block installed at the bottom between the housing, the first mounting plate, the second mounting plate, and the front cover. A first power line and a second power line are respectively connected to one side of the mounting block. The first power line is electrically connected to the first red light source component, and the second power line is electrically connected to the second red light source component.

[0014] Preferably, the mounting block is fixed to the housing by bolts.

[0015] Preferably, the four corners of the housing, the first mounting plate, the second mounting plate, and the front cover are provided with insertion holes, and the insertion holes of the housing, the first mounting plate, the second mounting plate, and the front cover are fixed by insertion bolts.

[0016] Preferably, the viewing window of the dome cavity and the viewing window of the first mounting plate are circular.

[0017] Preferably, the first red light source assembly includes a plurality of first red LED beads surrounding the viewing window of the first mounting plate, and the plurality of first red LED beads are located inside the cavity of the dome shell.

[0018] Preferably, the viewing window of the second mounting plate and the front cover is square.

[0019] Preferably, the second red light source assembly includes a plurality of second red LED beads arranged around the viewing window of the second mounting plate.

[0020] Preferably, one end of the front cover has a slot, and the second mounting plate is snapped into the slot.

[0021] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0022] 1. This utility model is provided with:

[0023] Viewport: Used for camera equipment to capture and observe the semiconductor under test;

[0024] Dome red light source: Light is emitted through the first red light source component -> diffused through the dome cavity -> window of the first mounting plate -> window shell -> semiconductor under test, so as to achieve uniform illumination of the curved surface of the semiconductor under test, while avoiding the uniformity of the curved surface illumination caused by the dome red light source passing through the polarizing plate, and finally achieving high-precision detection of the curved surface of the semiconductor under test.

[0025] Red light source with polarizing surface: Light is emitted through a second red light source component -> polarizing plate -> semiconductor under test, so as to suppress the reflection of the planar metal layer of the semiconductor under test, and finally achieve high-precision detection of the planar metal layer of the semiconductor under test.

[0026] 2. In summary, the present invention provides a semiconductor visual inspection light source device with dual red light integration. The dome red light source structure and the polarizing surface red light source structure are compactly integrated into one unit. The dome red light source structure is not affected by the polarizing plate, realizing the functions of uniform illumination of curved surfaces, suppression of reflection of planar metal layers, and miniaturization of structure. Thus, it is suitable for the installation of semiconductor equipment and is used to realize comprehensive and high-precision detection of semiconductor curved surfaces and planar metal layers. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is an exploded structural diagram of a dual-red-light integrated semiconductor vision inspection light source device provided in an embodiment of this utility model;

[0029] Figure 2 This is a schematic diagram of the structure of a dual-red light integrated semiconductor vision inspection light source device provided in an embodiment of this utility model;

[0030] Figure 3 This is an exploded structural diagram of the housing and the first mounting plate provided in one of the embodiments of this utility model.

[0031] Figure 4 This is an exploded structural diagram of the housing and the first mounting plate provided in an embodiment of the present invention from another perspective;

[0032] Figure 5 This is an exploded structural diagram of the second mounting plate, window shell, and front cover provided in one of the embodiments of this utility model;

[0033] Figure 6 This is an exploded structural diagram of the second mounting plate, window shell, and front cover provided in an embodiment of the present invention from another perspective.

[0034] The diagram includes:

[0035] 1. Housing; 11. Dome-shaped housing cavity; 16. Viewing window; 17. First power cable; 18. Second power cable; 19. Insertion hole; 2. First mounting plate; 3. First red LED bead; 4. Second mounting plate; 5. Second red LED bead; 6. Front cover; 65. Slot; 7. Polarizing plate; 8. Viewing window housing; 9. Mounting block. Detailed Implementation

[0036] The technical solution of this embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiment is one embodiment of the present invention, and not all embodiments thereof. Based on this embodiment of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0037] Please see Figures 1 to 6 This utility model provides a dual-red light integrated semiconductor vision inspection light source device, including a housing 1, a dome cavity 11 formed on the housing 1, a first mounting plate 2 mounted on one end of the housing 1, a first red light source component mounted on the end of the first mounting plate 2 near the dome cavity 11, a second mounting plate 4 mounted on one end of the first mounting plate 2, a front cover 6 mounted on one end of the second mounting plate 4, a second red light source component mounted on the end of the second mounting plate 4 near the front cover 6, a polarizing plate 7 mounted on the front cover 6, and viewing windows 16 formed on the dome cavity 11, the first mounting plate 2, the second mounting plate 4, and the polarizing plate 7 of the front cover 6, respectively. A viewing window shell 8 is installed between the viewing window 16 of the polarizing plate 7 of the front cover 6 and the viewing window 16 of the second mounting plate 4.

[0038] One end of the viewing window housing 8 is secured to the viewing window 16 of the polarizing plate 7, and the other end is secured to the viewing window 16 of the second mounting plate 4. The viewing window housing 8 ensures that the dome-shaped red light source formed by the first red light source assembly passes through and prevents the dome-shaped red light source from passing through the polarizing plate 7, which would cause a decrease in its surface uniformity detection performance.

[0039] An embodiment of the present invention provides a semiconductor vision inspection light source device with dual red light integration, which further includes a mounting block 9 installed at the bottom between the housing 1, the first mounting plate 2, the second mounting plate 4 and the front cover 6. A first power line 17 and a second power line 18 are respectively connected to one side of the mounting block 9. The first power line 17 is electrically connected to the first red light source component, and the second power line 18 is electrically connected to the second red light source component.

[0040] Mounting block 9 is fixed to housing 1 by bolts.

[0041] The housing 1, the first mounting plate 2, the second mounting plate 4, and the front cover 6 each have an insertion hole 19 at one of their four corners. These insertion holes 19 are secured by insertion bolts. Specifically, bolts are inserted sequentially into the insertion holes 19 of the housing 1, the first mounting plate 2, the second mounting plate 4, and the front cover 6, and then secured to one end of each bolt with a nut, thereby fixing the housing 1, the first mounting plate 2, the second mounting plate 4, and the front cover 6.

[0042] The viewing window 16 of the dome cavity 11 and the viewing window 16 of the first mounting plate 2 are circular.

[0043] The first red light source assembly includes a plurality of first red LED beads 3 arranged around the viewing window 16 of the first mounting plate 2, and the plurality of first red LED beads 3 are located inside the cavity of the dome shell 11.

[0044] The viewing window 16 of the second mounting plate 4 and the front cover 6 is square.

[0045] The second red light source assembly includes several second red LED beads 5 arranged around the viewing window 16 of the second mounting plate 4.

[0046] The front cover 6 has a slot 65 at one end, and the second mounting plate 4 is snapped into the slot 65.

[0047] The working principle of a dual-red-light integrated semiconductor vision inspection light source device according to an embodiment of this utility model is as follows:

[0048] S1: Adjust the installation position: Place the camera device on one side of the viewing window 16 of the dome cavity 11 of the housing 1, and place the semiconductor to be tested on one side of the viewing window 16 of the front cover 6.

[0049] S2: Using a dome red light source: By controlling the first power line 17 -> the first red light source component to emit light -> the dome cavity 11 to diffuse -> the viewing window 16 of the first mounting plate 2 -> the viewing window shell 8 -> the semiconductor to be tested, uniform illumination of the curved surface of the semiconductor to be tested can be achieved. At the same time, the uniformity of the curved surface illumination is avoided from deteriorating due to the dome red light source passing through the polarizing plate 7, and finally high-precision detection of the curved surface of the semiconductor to be tested can be achieved.

[0050] S3: Using a polarized red light source: By controlling the second power line 18 -> the second red light source component to emit light -> the polarizing plate 7 -> the semiconductor to be tested, the reflection of the planar metal layer of the semiconductor to be tested is suppressed, and finally the high-precision detection of the planar metal layer of the semiconductor to be tested is achieved.

[0051] S4: Using a dome-shaped red light source + a polarized red light source, comprehensive and high-precision detection of the curved surface and planar metal layer of the semiconductor to be tested can be achieved.

[0052] The technical advantages of the dual-red-light integrated semiconductor vision inspection light source device according to an embodiment of this utility model are as follows:

[0053] 1. Compared with existing technologies such as single dome red light source technology, single polarized red light source technology, or split-type combined red light source technology, this utility model compactly integrates the dome red light source and the polarized red light source into one, realizing the functions of uniform illumination of curved surfaces, suppression of reflection of planar metal layers, and miniaturization of structure, thereby adapting to the installation of semiconductor equipment and enabling comprehensive and high-precision detection of semiconductor curved surfaces and planar metal layers.

[0054] Specifically, this is reflected in:

[0055] 11. The dome-shaped red light source improves uniform illumination of curved surfaces, reducing shadow residue to <3% for curved components such as BGA solder balls; while existing single-polarized red light source technologies have shadow residue >25%.

[0056] 12. The curved diffuse characteristics of the dome red light source are preserved through the window shell 8 to avoid the influence of the polarizing plate 7;

[0057] 13. By using a polarizing red light source, reflections from the planar metal layer are effectively suppressed, resulting in an overexposure rate of ≤5% in the planar metal layer area. In contrast, existing single-dome red light source technologies exhibit an overexposure rate >70% for the lead frame of the planar metal layer.

[0058] 14. Enhancement through a synergistic control method using a dome-shaped red light source and a polarizing red light source:

[0059] 141. Light Intensity Ratio Algorithm

[0060] The intensity Id of the dome's red light source and the intensity If of the polarizing surface's red light source are dynamically adjusted to satisfy 0.8 ≤ Id / If ≤ 1.2.

[0061] Surface defects: Id / If=1.2 (increases the detection rate of root cracks in solder balls by 30%)

[0062] Planar metal: Id / If=0.8 (Metal texture clarity improved to 90μm resolution)

[0063] It can adapt to the testing requirements of different packaging processes.

[0064] 142. Polarization suppression process

[0065] "Polarization design of red light source with polarization plane only: "

[0066] The analyzer at the camera end is orthogonal to the polarizer;

[0067] The dome-shaped red light source retains its non-polarized diffuse characteristics;

[0068] Compared to the dual polarization scheme (i.e., the dome red light source is combined with a polarizing plate 7 and a polarizing surface red light source), the light efficiency is improved by 50%.

[0069] 2. Compared with the existing dual-band light source (referring to the combination of red and blue light) for detecting curved and flat surfaces, the use of dual-band light source for detection is prone to color difference artifact areas, which require complex algorithm correction; while this utility model uses single-band dual red light closely integrated, which is simple to use, can effectively eliminate detection blind spots, avoid multi-wavelength crosstalk, and reduce the color difference artifact area by 100%.

[0070] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A semiconductor vision inspection light source device integrating dual red light, characterized in that, The device includes a housing (1), on which a dome cavity (11) is formed. A first mounting plate (2) is mounted on one end of the housing (1). A first red light source assembly is mounted on the end of the first mounting plate (2) near the dome cavity (11). A second mounting plate (4) is mounted on one end of the first mounting plate (2). A front cover (6) is mounted on one end of the second mounting plate (4). A second red light source assembly is mounted on the end of the second mounting plate (4) near the front cover (6). A polarizing plate (7) is mounted on the front cover (6). Viewing windows (16) are formed on the dome cavity (11), the first mounting plate (2), the second mounting plate (4), and the polarizing plate (7) of the front cover (6). A viewing window shell (8) is installed between the viewing window (16) of the polarizing plate (7) of the front cover (6) and the viewing window (16) of the second mounting plate (4).

2. The semiconductor visual inspection light source device with dual red light integration according to claim 1, characterized in that, One end of the viewing window housing (8) is fixed on the viewing window (16) of the polarizing plate (7), and the other end is fixed on the viewing window (16) of the second mounting plate (4).

3. The semiconductor visual inspection light source device with dual red light integration according to claim 1, characterized in that, It also includes a mounting block (9) installed at the bottom between the housing (1), the first mounting plate (2), the second mounting plate (4) and the front cover (6). The mounting block (9) is externally connected to a first power line (17) and a second power line (18) on one side. The first power line (17) is electrically connected to the first red light source component, and the second power line (18) is electrically connected to the second red light source component.

4. The semiconductor visual inspection light source device with dual red light integration according to claim 3, characterized in that, The mounting block (9) is fixed to the housing (1) by bolts.

5. The semiconductor visual inspection light source device with dual red light integration according to claim 1, characterized in that, The housing (1), the first mounting plate (2), the second mounting plate (4) and the front cover (6) are provided with insertion holes (19) at their four corners. The insertion holes (19) of the housing (1), the first mounting plate (2), the second mounting plate (4) and the front cover (6) are fixed by insertion bolts.

6. The semiconductor visual inspection light source device with dual red light integration according to claim 1, characterized in that, The viewing window (16) of the dome cavity (11) and the viewing window (16) of the first mounting plate (2) are circular.

7. The semiconductor visual inspection light source device with dual red light integration according to claim 1, characterized in that, The first red light source assembly includes a plurality of first red LED beads (3) surrounding the viewing window (16) of the first mounting plate (2), and the plurality of first red LED beads (3) are located inside the cavity of the dome shell cavity (11).

8. The semiconductor visual inspection light source device with dual red light integration according to claim 1, characterized in that, The viewing window (16) of the second mounting plate (4) and the front cover (6) is square.

9. The semiconductor visual inspection light source device with dual red light integration according to claim 1, characterized in that, The second red light source assembly includes a plurality of second red LED beads (5) arranged around the viewing window (16) of the second mounting plate (4).

10. The semiconductor visual inspection light source device with dual red light integration according to claim 1, characterized in that, The front cover (6) has a slot (65) at one end, and the second mounting plate (4) is snapped into the slot (65).

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