Magnetic type fixing clamp for conveniently replacing mask plate

Abstract

The utility model relates to the field of mask, concretely relates to a magnetic type fixing clamp convenient for replacing mask, including clamp seat, for placing mask, the middle part is equipped with the rectangular groove of being suitable for mask, the top surface of clamp seat is equipped with the limiting slot in four corners, the front and back and left and right of clamp seat are not equipped with the fixed mouth unevenly, the top surface of clamp seat is equipped with ring groove, no. 2 magnetic attraction ring is fixedly connected in the ring groove inside. Through being provided with the pressure frame with clamp seat and magnetic attraction ring, the quick positioning and dismounting of mask can be realized, convenient and fast operation, and through the connection between the fixed part and the fixed mouth and the connection between the anti -drop bolt and multiple card pieces, the stability of the clamp to the mask clamping fixation can be effectively improved, the magnetic force distribution is even through the annular magnetic attraction structure, the pressure is evenly applied in the mask non - graphic area through the pressure frame and buffer layer, avoids the local stress concentration, effectively prevents the deformation and damage of mask.

Description

Technical Field

[0001] This utility model relates to the field of photomasks, specifically to a magnetic fixing clamp that facilitates the replacement of photomasks. Background Technology

[0002] In semiconductor manufacturing, micro-nano fabrication, and some precision surface treatment processes, photomasks are often used to define patterns. The photomasks need to be precisely and stably fixed on the substrate or worktable.

[0003] Traditional mask fixing methods mostly use mechanical clamping, such as screw tightening or clip fixing. However, these methods require tightening multiple screws or operating multiple clips when changing masks, which is cumbersome, time-consuming, and affects production efficiency. At the same time, mechanical clamping may cause slight deformation or stress to the mask due to uneven force or excessive tightness, or even damage to the pattern area of ​​the mask, affecting processing accuracy. For R&D or small-batch production scenarios that require frequent mask changes, the inconvenience of operation is particularly prominent.

[0004] Therefore, it is necessary to invent a magnetic fixing clamp that facilitates the replacement of mask plates to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a magnetic fixing fixture for easy mask replacement. The mask is positioned by the cooperation between the pressure frame and the fixture seat. Initial positioning between the pressure frame and the fixture seat is achieved through the attraction of a first magnetic ring and a second magnetic ring. The pressure frame and the fixture seat are then fixed together by the connection between the limiting post and the limiting groove, as well as the fixing port and the fixing component. This invention solves the problems of cumbersome and time-consuming mask assembly and disassembly processes in existing technologies, which negatively impact production efficiency.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a magnetic fixing clamp for convenient mask replacement, comprising... A fixture base is used to place a mask. A rectangular groove adapted to the mask is opened in the middle. Limiting grooves are opened at the four corners of the top surface of the fixture base. Fixing openings are opened at the front, back, left and right sides of the fixture base. An annular groove is opened on the top surface of the fixture base. A second magnetic ring is fixedly connected inside the annular groove. A pressure frame, located on the upper part of the fixture base, is used to clamp and fix the mask plate in cooperation with the fixture base. Pull plates are fixedly connected to the left and right sides of the pressure frame. Limiting posts are fixedly connected to the four corners of the bottom surface of the pressure frame. The limiting posts are inserted into the limiting grooves. Fixing components are installed on the front, back, left and right sides of the bottom surface of the pressure frame. The fixing components are movably connected to the fixing ports. A first magnetic ring is fixedly connected to the bottom surface of the pressure frame. The first magnetic ring is movably connected to the ring groove. The first magnetic ring attracts a second magnetic ring. An auxiliary ring is fixedly connected to the bottom surface of the pressure frame. The limiting component is located at the lower part of the clamping base and is used to fix the connection between the pressure frame and the clamping base.

[0007] Preferably, the sidewall of the rectangular groove in the middle of the fixture seat is provided with a guide surface, the auxiliary ring abuts against the guide surface, and a buffer layer is fixedly connected to the bottom surface of the rectangular groove in the middle of the fixture seat.

[0008] Preferably, guide openings are provided on both the upper and lower sides of the fixing port.

[0009] Preferably, the fastener includes multiple elastic strips, and each of the multiple elastic strips has a locking flap fixedly connected to its bottom. The inner walls of the multiple locking flaps can form an ellipsoidal locking groove.

[0010] Preferably, the limiting component includes a mounting ring, and the top front, rear, left and right sides of the mounting ring are fixedly connected with anti-loosening bolts.

[0011] Preferably, the top of the anti-loosening device is ellipsoidal, and the top of the anti-loosening device engages with the slots formed inside the plurality of card flaps.

[0012] The technical effects and advantages provided by this utility model in the above technical solution are as follows: This utility model is equipped with a pressure frame, a clamp seat, and a magnetic ring, which enables rapid positioning and disassembly of the mask. The operation is convenient and quick. At the same time, by setting the connection between the fixing component and the fixing port, as well as the connection between the anti-loosening bolt and multiple clips, the stability of the clamp in holding and fixing the mask can be effectively improved. By setting the annular magnetic attraction structure, the magnetic force is evenly distributed. The pressure frame and the buffer layer apply pressure evenly to the non-graphic area of ​​the mask, avoiding local stress concentration and effectively preventing deformation and damage to the mask. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0014] Figure 1This is a three-dimensional structural diagram of the upper side of the overall device in this utility model; Figure 2 This is a schematic diagram of the overall lower three-dimensional structure of this utility model; Figure 3 This is a cross-sectional three-dimensional structural diagram of the pressure frame, clamp seat, limiting post, and limiting groove of this utility model; Figure 4 This is a cross-sectional three-dimensional structural diagram of the medium pressure frame, clamp seat, and magnetic ring of this utility model; Figure 5 This is a schematic diagram of the upper split three-dimensional structure of the positioning component, placement mechanism, and limiting component in this utility model; Figure 6 This is a three-dimensional structural diagram showing the upper part of the positioning component, placement mechanism, and limiting component in this utility model. Figure 7 In this utility model Figure 6 A magnified three-dimensional structural diagram at point A.

[0015] Legend: 1. Pressure frame; 12. Pull plate; 13. Limiting post; 14. Fixing component; 15. No. 1 magnetic ring; 16. Auxiliary ring; 2. Clamp seat; 22. Limiting groove; 23. Fixing port; 25. Ring groove; 26. No. 2 magnetic ring; 4. Limiting component; 41. Mounting ring; 42. Anti-loosening bolt; 211. Guide surface; 212. Buffer layer; 231. Guide port; 141. Elastic strip; 142. Clamping flap. Detailed Implementation

[0016] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0017] This utility model provides, for example Figures 1-3 A magnetic fixing fixture for easy mask replacement is shown, comprising a pressure frame 1, a fixture base 2, and a limiting member 4; The fixture 2 is used to place the mask plate. A rectangular groove adapted to the mask plate is opened in the middle to fix the tube of the mask plate. Limiting grooves 22 are opened at the four corners of the top surface of the fixture 2 for quick positioning with the limiting post 13. Fixing openings 23 are opened at the front, back, left and right sides of the fixture 2 for installation with the fixing member 14. An annular groove 25 is opened on the top surface of the fixture 2 for installation with the first magnetic ring 15. A second magnetic ring 26 is fixedly connected inside the annular groove 25. Both the first magnetic ring 15 and the second magnetic ring 26 are permanent magnets with opposite magnetic poles.

[0018] like Figures 4-6As shown, the side wall of the rectangular groove in the middle of the fixture 2 is provided with a guide surface 211, which makes it easier to disassemble and assemble the mask. The auxiliary ring 16 abuts against the guide surface 211. The bottom surface of the rectangular groove in the middle of the fixture 2 is fixedly connected with a buffer layer 212, which can be made of silicone. The upper and lower sides of the fixing port 23 are provided with guide ports 231, which are used to guide the multiple card flaps 142 to facilitate the disassembly and assembly of the fixing component 14.

[0019] A pressure frame 1 is located on the upper part of the clamping base 2 and is used to clamp and fix the mask plate in cooperation with the clamping base 2. Pull plates 12 are fixedly connected to the left and right sides of the pressure frame 1 to facilitate the assembly and disassembly of the pressure frame 1. Limiting posts 13 are fixedly connected to the four corners of the bottom surface of the pressure frame 1 to facilitate the positioning and guidance of the pressure frame 1. The limiting posts 13 are inserted into the limiting grooves 22. Fixing parts 14 are installed on the front, back, left and right sides of the bottom surface of the pressure frame 1 to facilitate the fixation between the pressure frame 1 and the clamping base 2. The fixing parts 14 are movably connected to the fixing port 23. A first magnetic ring 15 is fixedly connected to the bottom surface of the pressure frame 1. The first magnetic ring 15 is movably connected to the ring groove 25. The first magnetic ring 15 is attracted to the second magnetic ring 26. An auxiliary ring 16, made of rubber or other materials, is fixedly connected to the bottom surface of the pressure frame 1 to facilitate further positioning and protection of the mask plate.

[0020] like Figures 5-7 As shown, the fastener 14 includes multiple elastic strips 141, which can deform to a certain extent. Each elastic strip 141 has a locking flap 142 fixedly connected to its bottom, which is used to cooperate with the limiting of the fastener 14. The inner walls of the multiple locking flaps 142 can form an ellipsoidal locking groove.

[0021] The limiting component 4 is located at the lower part of the clamp seat 2 and is used to cooperate in the connection and fixation between the pressure frame 1 and the clamp seat 2. The limiting component 4 includes a mounting ring 41. The top front, back, left and right sides of the mounting ring 41 are fixedly connected with anti-loosening bolts 42. The whole can be made of rubber material with a certain hardness and capable of a certain degree of deformation. The top of the anti-loosening bolts 42 is ellipsoidal. The top of the anti-loosening bolts 42 engages with the grooves formed inside the multiple locking flaps 142, thereby restricting the position of the multiple locking flaps 142.

[0022] The working principle of this utility model is as follows: First, the mask is placed in the rectangular groove of the fixture base 2, with the lower part of the mask contacting the buffer layer 212. Then, the pressure frame 1 is installed on the upper part of the fixture base 2. During installation, the auxiliary ring 16 is inserted into the rectangular groove, and its side abuts against the guide surface 211, thus restricting the mask. Simultaneously, the limiting post 13 is inserted into the limiting groove 22, and the first magnetic ring 15 is engaged in the ring groove 25 and attracted to the second magnetic ring 26. During the process, the fastener 14 will be inserted into the fixing port 23 to further assist in the fixation between the pressure frame 1 and the clamp seat 2. After the fastener 14 has completely passed through the fixing port 23 and the limiting post 13 has been completely inserted into the limiting groove 22, the limiting member 4 will be installed at the lower part of the pressure frame 1, so that the anti-disengagement bolt 42 on the mounting ring 41 will be inserted into multiple locking flaps 142, so that the locking flaps 142 cannot deform when the pressure frame 1 is subjected to a pulling force away from the clamp seat 2, thereby ensuring the stability of the connection between the pressure frame 1 and the clamp seat 2.

[0023] When the mask needs to be replaced, first pull the mounting ring 41 away from the clamp seat 2, so that the anti-disengagement bolt 42 and the locking flaps 142 are deformed to a certain extent, so that the anti-disengagement bolt 42 can disengage from the multiple locking flaps 142. Then, pull the pressure frame 1 upward by the pull plate 12, so that it drives the fixing member 14 to move upward. The guide port 231 will assist the multiple locking flaps 142 to tighten, so that the fixing member 14 can disengage from the fixing port 23. Then, take the mask out of the clamp seat 2, and replace and install the new mask according to the above mask installation process.

[0024] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A magnetic clamp for easy mask replacement, characterized in that: include The fixture (2) is used to place the mask plate. A rectangular groove adapted to the mask plate is opened in the middle. Limiting grooves (22) are opened at the four corners of the top surface of the fixture (2). Fixing openings (23) are opened in the front, back, left and right parts of the fixture (2). A ring groove (25) is opened on the top surface of the fixture (2). A second magnetic ring (26) is fixedly connected inside the ring groove (25). A pressure frame (1) is set on the upper part of the clamping seat (2) and is used to clamp and fix the mask plate in cooperation with the clamping seat (2). Pull plates (12) are fixedly connected to the left and right sides of the pressure frame (1). Limiting posts (13) are fixedly connected to the four corners of the bottom surface of the pressure frame (1). The limiting posts (13) are inserted into the limiting grooves (22). Fixing parts (14) are installed on the front, back, left and right sides of the bottom surface of the pressure frame (1). The fixing parts (14) are movably connected to the fixing ports (23). A first magnetic ring (15) is fixedly connected to the bottom surface of the pressure frame (1). The first magnetic ring (15) is movably connected to the ring groove (25). The first magnetic ring (15) is attracted to the second magnetic ring (26). An auxiliary ring (16) is fixedly connected to the bottom surface of the pressure frame (1). The limiting member (4) is located at the lower part of the clamp seat (2) and is used to fix the connection between the pressure frame (1) and the clamp seat (2).

2. The magnetic fixing clamp for convenient mask replacement according to claim 1, characterized in that: The rectangular groove in the middle of the fixture seat (2) has a guide surface (211) on its side wall. The auxiliary ring (16) abuts against the guide surface (211). A buffer layer (212) is fixedly connected to the bottom surface of the rectangular groove in the middle of the fixture seat (2).

3. The magnetic fixing clamp for convenient mask replacement according to claim 1, characterized in that: Guide openings (231) are provided on both the upper and lower sides of the fixed opening (23).

4. A magnetic fixing clamp for convenient mask replacement according to claim 1, characterized in that: The fastener (14) includes multiple elastic strips (141), and each of the multiple elastic strips (141) has a locking flap (142) fixedly connected to its bottom. The inner walls of the multiple locking flaps (142) can form an ellipsoidal locking groove.

5. A magnetic fixing clamp for convenient mask replacement according to claim 4, characterized in that: The limiting component (4) includes a mounting ring (41), and anti-disengagement bolts (42) are fixedly connected to the top front, front back, left and right sides of the mounting ring (41).

6. A magnetic fixing clamp for convenient mask replacement according to claim 5, characterized in that: The top of the anti-loosening bolt (42) is ellipsoidal, and the top of the anti-loosening bolt (42) engages with the slots formed inside the multiple locking flaps (142).

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