A magnetic suspension molecular pump motor control program debugging tool

Abstract

The application discloses a magnetic suspension molecular pump motor control program debugging tool, which comprises a tool base, a motor main body, an encoder and a hysteresis load device. The motor main body comprises a motor shell, a stator and a rotor. The motor shell is fixed on the tool base. The stator is fixed in the motor shell. The rotor is arranged in the stator. The main shaft of the rotor is arranged on the two sides of the motor shell through non-magnetic bearings. The encoder is fixed on the tool base through an encoder seat and located at one end of the motor shell. The encoder is connected with the main shaft of the rotor to read the running parameters of the rotor and feed back the parameters to an external control system. The hysteresis load device is connected with the end of the main shaft of the rotor away from the encoder through a shaft coupling and used for applying adjustable load to the main shaft of the rotor. The magnetic suspension molecular pump motor control program debugging tool can eliminate magnetic suspension disturbance, reduce the development difficulty of the motor control program, and improve the debugging accuracy and efficiency.

Description

Technical Field

[0001] The embodiments of this utility model relate to the field of magnetic levitation molecular pump debugging technology. More specifically, this utility model relates to a debugging fixture for the motor control program of a magnetic levitation molecular pump. Background Technology

[0002] In high-end fields such as semiconductor manufacturing, aerospace, precision instruments, and nuclear industry, high vacuum and even ultra-high vacuum environments are core prerequisites for ensuring process precision, equipment reliability, and experimental accuracy. Magnetic levitation molecular pumps, as key equipment for achieving such vacuum environments, have gradually replaced traditional mechanical bearing molecular pumps, becoming the mainstream choice for high-end vacuum systems due to their advantages such as no mechanical wear, low vibration, long lifespan, high pumping speed, and wide operating pressure range. Their operational performance directly determines the production efficiency of downstream industries (such as the process stability of semiconductor wafer etching and vacuum coating), equipment lifespan (such as the continuous operation capability of aerospace vacuum testing equipment), and the accuracy of experimental data (such as vacuum environment control in precision physics experiments), holding an irreplaceable position in high-end manufacturing and scientific research.

[0003] As a high-vacuum generating device, the development of the control program for a magnetic levitation molecular pump mainly consists of two core parts: motor control algorithm development and magnetic bearing control program development. In existing technologies, if motor control program development is directly performed on the entire magnetic levitation molecular pump product, the motor operation will inevitably be affected by the magnetic field interference and mechanical disturbances of the magnetic bearing. This disturbance introduces additional variables, making it difficult to accurately pinpoint the root cause of problems during motor control program debugging. This not only increases the complexity of program development but may also prolong the development cycle and reduce debugging efficiency, failing to meet the requirements for rapid iteration and accurate verification of motor control algorithms. Utility Model Content

[0004] To address one or more of the technical problems mentioned above, this utility model provides a debugging tool for the control program of a magnetic levitation molecular pump motor, which can eliminate magnetic levitation disturbances, reduce the development difficulty of the motor control program, and improve debugging accuracy and efficiency.

[0005] This utility model provides a debugging fixture for the control program of a magnetic levitation molecular pump motor, comprising: a fixture base; a motor body, including a motor housing, a stator, and a rotor, wherein the motor housing is fixed on the fixture base, the stator is fixed inside the motor housing, the rotor is disposed inside the stator, and the two ends of the rotor's main shaft are disposed on both sides of the motor housing via non-magnetic bearings; an encoder, which is fixed on the fixture base via an encoder seat and located at one end of the motor housing, the encoder being linked with the rotor's main shaft to read rotor operating parameters and feed the parameters back to an external control system; and a hysteresis load device, which is connected to the end of the rotor's main shaft away from the encoder via a coupling, for applying an adjustable load to the rotor's main shaft.

[0006] In some embodiments, an encoder magnet is fitted onto one end of the rotor shaft near the encoder, and the encoder magnet forms a clearance fit with the detection end of the encoder.

[0007] In some embodiments, the gap between the encoder magnet and the encoder's detection end ranges from 0.5 to 1 mm.

[0008] In some embodiments, the non-magnetic bearing is a deep groove ball bearing.

[0009] In some embodiments, a cooling water channel is also formed inside the motor housing, and the cooling water channel is arranged around the outer peripheral wall of the stator.

[0010] In some embodiments, the cooling water circuit is constructed as a plurality of straight pipes formed in the wall of the motor housing, the plurality of straight pipes being connected to each other, each straight pipe being connected to the outer wall of the motor housing, and each straight pipe being fixed with a sealing screw at the connection point between the connection point and the outer wall.

[0011] In some embodiments, the inlet and outlet of the cooling water circuit are respectively located on the same side of the motor housing, and quick-connect fittings are installed at both the inlet and outlet for connecting to an external circulating cooling system.

[0012] In some embodiments, the encoder is an incremental photoelectric encoder, and its signal output terminal is electrically connected to an external control system via a shielded wire.

[0013] In some embodiments, the load torque adjustment range of the hysteresis load device is 0.5-5 N·m, and the hysteresis load device is provided with a rotary switch for adjusting the load torque.

[0014] In some embodiments, the coupling is a flexible coupling, with both ends of the coupling being interference-fitted with the main shaft of the rotor and the output shaft of the hysteresis load device, respectively.

[0015] The debugging fixture for the magnetic levitation molecular pump motor control program provided above can stably achieve the debugging of the motor control program, eliminate magnetic bearing disturbances, and the debugging results can be directly transferred to the magnetic levitation molecular pump product, meeting the need for rapid verification of the motor control algorithm. Attached Figure Description

[0016] The above and other objects, features, and advantages of the present invention will become readily understood by reading the following detailed description of exemplary embodiments with reference to the accompanying drawings. In the drawings, several embodiments of the present invention are shown by way of example and not limitation, and like or corresponding reference numerals denote like or corresponding parts, wherein:

[0017] Figure 1 This is a schematic diagram of the main structure of the debugging tool for the magnetic levitation molecular pump motor control program according to an embodiment of the present invention;

[0018] Figure 2 This is a top view of the debugging fixture for the control program of the magnetic levitation molecular pump motor according to an embodiment of the present invention.

[0019] Figure 3 for Figure 2 A cross-sectional view along the AA direction of the debugging fixture for the magnetic levitation molecular pump motor control program shown.

[0020] Figure 4 for Figure 1 The cross-sectional view along the BB direction of the debugging fixture for the magnetic levitation molecular pump motor control program shown. Detailed Implementation

[0021] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0022] Figure 1 and Figure 2 The structure of the debugging fixture 100 for the magnetic levitation molecular pump motor control program according to an embodiment of the present invention is shown. Figure 1 and Figure 2 and combined Figure 3As shown, the magnetic levitation molecular pump motor control program debugging fixture 100 includes: a fixture base 1; a motor body 2, which includes a motor housing 21, a stator 22, and a rotor 23. The motor housing 21 is fixed on the fixture base 1, the stator 22 is fixed inside the motor housing 21, and the rotor 23 is disposed inside the stator 22. The two ends of the main shaft of the rotor 23 are disposed on both sides of the motor housing 21 through non-magnetic bearings 24; an encoder 3, which is fixed on the fixture base 1 through an encoder seat 31 and located at one end of the motor housing 21. The encoder 3 is linked with the main shaft of the rotor 23 to read the operating parameters of the rotor 23 and feed the parameters back to the external control system; and a hysteresis load device 4, which is connected to the end of the main shaft of the rotor 23 away from the encoder 3 through a coupling 41, for applying an adjustable load to the main shaft of the rotor 23.

[0023] In this application, the electrical parameters of the stator 22 and rotor 23 of the magnetic levitation molecular pump motor control program debugging fixture 100 are consistent with the electrical parameters of the stator 22 and rotor 23 of the magnetic levitation molecular pump product. The structure of the stator 22 and rotor 23 removes the connection structure and positioning structure related to the magnetic bearing.

[0024] In practical use, the magnetic levitation molecular pump motor control program debugging fixture 100 according to this embodiment of the invention involves sequentially installing the motor body 2, encoder 3, and hysteresis load device 4 onto the fixture base 1. An external control system is established with the encoder 3, motor body, and hysteresis load device 4. A test command is input to the motor control program, starting the motor body 2. The encoder 3 collects the rotational speed and angular displacement data of the rotor 23's main shaft in real time and feeds it back to the control system. By adjusting the load of the hysteresis load device 4, for example, by sequentially setting three load conditions of 0.5 N·m, 2 N·m, and 5 N·m, the motor operating parameters displayed by the control system are observed to verify the program's adaptability to different loads.

[0025] With the above settings, the magnetic levitation molecular pump motor control program debugging fixture 100 according to the embodiment of this utility model can stably realize the debugging of the motor control program, eliminate magnetic bearing disturbance, and the debugging results can be directly transferred to the magnetic levitation molecular pump product, meeting the requirements for rapid verification of the motor control algorithm.

[0026] Please refer to Figure 3 In some embodiments, an encoder magnet 32 ​​is fitted on one end of the main shaft of the rotor 23 near the encoder 3, and the encoder magnet 32 ​​and the detection end of the encoder 3 form a clearance fit.

[0027] In some embodiments, the gap between the encoder magnet 32 ​​and the detection end of the encoder 3 ranges from 0.5 to 1 mm.

[0028] With the above settings, the encoder magnet 32 ​​can be accurately sensed by the encoder 3 detection end when it rotates or moves, thereby providing high-precision position or speed information, which helps to improve the resolution of the encoder 3 and ensure the accuracy of the measurement data.

[0029] In some embodiments, the non-magnetic bearing 24 is a deep groove ball bearing.

[0030] In this application, deep groove ball bearings (model 6205) are selected and installed at both ends of the main shaft of rotor 23. The inner ring of the bearing is interference-fitted with the main shaft of rotor 23, and the outer ring is transition-fitted with the bearing seat of motor housing 21, thereby ensuring smooth rotation of the main shaft of rotor 23 and avoiding radial runout.

[0031] Please refer to Figure 4 In some embodiments, a cooling water channel 25 is also formed inside the motor housing 21, and the cooling water channel 25 is arranged around the outer peripheral wall of the stator 22.

[0032] With the above settings, the external circulating cooling system is activated during the commissioning process, and the heat from the motor is removed through the cooling water circuit 25. In this way, the surface temperature of the motor housing 21 is monitored in real time (measured by a thermocouple sensor) to ensure that the temperature does not exceed 60°C, which can effectively prevent motor parameter drift.

[0033] Please continue to refer to Figure 4 In some embodiments, the cooling water channel 25 is constructed as a plurality of straight pipes formed in the wall of the motor housing 21, the plurality of straight pipes are connected to each other, each straight pipe is connected to the outer wall of the motor housing 21, and each straight pipe is fixed with a sealing screw 26 at the connection between the connection between the outer wall and the outer wall.

[0034] The above settings can reduce the difficulty of processing cooling water pipes.

[0035] Please continue to refer to Figure 4 In some embodiments, the inlet and outlet of the cooling water passage 25 are respectively opened on the same side of the motor housing 21, and quick-connect couplings 27 are installed at both the inlet and outlet. The quick-connect couplings 27 are used to connect to an external circulating cooling system.

[0036] In this application, both the inlet and outlet are equipped with G1 / 2 specification quick-connect couplings 27, which can be quickly connected to an external circulating cooling system. In this application, deionized water can be used as the coolant, with a circulation flow rate of 2L / min.

[0037] In some embodiments, encoder 3 is an incremental photoelectric encoder 3, and its signal output terminal is electrically connected to an external control system through a shielded wire.

[0038] In this application, the encoder 3 can be an incremental photoelectric encoder 3 (model E6B2-CWZ6C) with a resolution of 1000P / R. In this application, the encoder is fixed to the left end of the motor housing 21 by the encoder mount 31 (made of aluminum alloy). The signal output terminal of the encoder 3 is connected to the external PLC control system through a shielded wire, thereby realizing the real-time transmission of speed and direction signals.

[0039] In some embodiments, the load torque adjustment range of the hysteresis load device 4 is 0.5-5 N·m, and the hysteresis load device 4 is provided with a rotary switch for adjusting the load torque.

[0040] In this application, the hysteresis load device 4 can be an adjustable hysteresis brake (model HZD-5). In this application, the hysteresis load device 4 is equipped with a rotary switch, which can precisely adjust the load torque by turning the knob of the rotary switch.

[0041] In some embodiments, the coupling 41 is a flexible coupling 41, and the two ends of the coupling 41 are respectively interference-fitted with the main shaft of the rotor 23 and the output shaft of the hysteresis load device 4.

[0042] In this application, by interfering with the main shaft of the rotor 23 and the output shaft of the hysteresis load device 4 at both ends of the flexible coupling 41 (made of polyurethane), transmission backlash can be effectively avoided.

[0043] In some embodiments, the stator 22 is made of laminated silicon steel sheets, and its parameters are completely consistent with those of the stator 22 of the magnetic levitation molecular pump product. The rotor 23 is made of laminated silicon steel sheets of the same type, and the annular groove used for magnetic bearing positioning in the original product is removed, simplifying the structure of the rotor 23.

[0044] In some embodiments, the tooling base 1 may be made of Q235 steel plate. The tooling base 1 has 4 positioning holes. The motor body, encoder seat 31, and hysteresis load device 4 are all fixed to the tooling base 1 by M8 bolts. The positioning holes can be used to fix the tooling base 1 to the debugging workbench by expansion bolts to prevent the tooling from shifting during operation.

[0045] In the foregoing description of this application, unless otherwise expressly specified and limited, the terms "fixed," "installed," "connected," or "linked" should be interpreted broadly. For example, the term "linked" can refer to a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; or it can refer to the internal communication of two components or the interaction between two components. Therefore, unless otherwise expressly limited in this application, those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0046] Based on the above description of this application, those skilled in the art will also understand that the following terms used, such as "upper," "lower," "front," "rear," "left," "right," "length," "width," "thickness," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," "center," "longitudinal," "transverse," "clockwise," or "counterclockwise," are terms indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings of this application. They are only for the purpose of facilitating the explanation of the present invention and simplifying the description, and do not explicitly or implicitly suggest that the device or element involved must have the specific orientation, or be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms cannot be understood or interpreted as a limitation on the present invention.

[0047] Furthermore, the terms "first" or "second," etc., used in this application to refer to numbers or ordinal numbers are for descriptive purposes only and should not be construed as explicitly or implicitly indicating relative importance or specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, or more, unless otherwise explicitly specified.

[0048] While various embodiments of the present invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Many modifications, alterations, and alternatives will occur to those skilled in the art without departing from the spirit and intent of the present invention. It should be understood that various alternatives to the embodiments of the present invention described herein may be employed in the practice of the present invention. The appended claims are intended to define the scope of protection of the present invention and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A debugging fixture for the control program of a magnetic levitation molecular pump motor, characterized in that, include: Tooling base; The motor body includes a motor housing, a stator, and a rotor. The motor housing is fixed on the tooling base, the stator is fixed inside the motor housing, and the rotor is disposed inside the stator. The two ends of the rotor's main shaft are disposed on both sides of the motor housing via non-magnetic bearings. An encoder, which is fixed on the tooling base by an encoder mount and located at one end of the motor housing, is linked with the main shaft of the rotor to read rotor operating parameters and feed the parameters back to an external control system; A hysteresis load device, which is connected to the end of the rotor's main shaft away from the encoder via a coupling, is used to apply an adjustable load to the rotor's main shaft.

2. The debugging fixture for the control program of the magnetic levitation molecular pump motor according to claim 1, characterized in that, An encoder magnet is fitted onto one end of the rotor's main shaft near the encoder, and the encoder magnet forms a clearance fit with the encoder's detection end.

3. The debugging fixture for the control program of the magnetic levitation molecular pump motor according to claim 2, characterized in that, The distance between the encoder magnet and the detection end of the encoder is in the range of 0.5-1mm.

4. The debugging fixture for the control program of the magnetic levitation molecular pump motor according to any one of claims 1-3, characterized in that, The non-magnetic bearing is a deep groove ball bearing.

5. The debugging fixture for the control program of the magnetic levitation molecular pump motor according to any one of claims 1-3, characterized in that, The motor housing also contains cooling water channels, which are arranged around the outer peripheral wall of the stator.

6. The debugging fixture for the control program of the magnetic levitation molecular pump motor according to claim 5, characterized in that, The cooling water circuit consists of several straight pipes formed within the wall of the motor housing. These straight pipes are interconnected, and each straight pipe is connected to the outer wall of the motor housing. A sealing screw is fixed at the connection point between each straight pipe and the outer wall.

7. The debugging fixture for the control program of the magnetic levitation molecular pump motor according to claim 5, characterized in that, The inlet and outlet of the cooling water circuit are respectively located on the same side of the motor housing. Quick-connect couplings are installed at both the inlet and the outlet for connecting to an external circulating cooling system.

8. The debugging fixture for the control program of the magnetic levitation molecular pump motor according to any one of claims 1-3, characterized in that, The encoder is an incremental photoelectric encoder, and its signal output terminal is electrically connected to the external control system through a shielded wire.

9. The debugging fixture for the control program of the magnetic levitation molecular pump motor according to any one of claims 1-3, characterized in that, The load torque adjustment range of the hysteresis load device is 0.5-5 N·m, and the hysteresis load device is equipped with a rotary switch for adjusting the load torque.

10. The debugging fixture for the control program of the magnetic levitation molecular pump motor according to any one of claims 1-3, characterized in that, The coupling is a flexible coupling, and its two ends are respectively interference-fitted with the main shaft of the rotor and the output shaft of the hysteresis load device.

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