A super-fast response pressure type mass flow controller

By employing laminar flow elements and dual sensors in the pressure-type mass flow controller, combined with a stacked layout of the mounting base, the problem of slow response speed caused by excessive gas flow channel space is solved, thereby improving flow accuracy and response speed and meeting the high-precision process requirements of semiconductor manufacturing.

CN224553693UActive Publication Date: 2026-07-24CHANGZHOU GAOKAI ELECTRONICS CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
CHANGZHOU GAOKAI ELECTRONICS CO LTD
Filing Date
2025-08-21
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

The distributed layout of sensors, laminar flow unit devices, and valve control components in existing pressure-type mass flow controllers results in excessively large gas flow channel space, prolonging the pressure wave transmission time, causing slow system response speed, flow control delay, and making it difficult to meet the stringent requirements for flow stability in high-precision processes such as semiconductor manufacturing.

Method used

The system uses laminar flow components to convert the gas into a laminar flow state, and uses dual sensors to monitor the pressure before and after the laminar flow. The components are integrated in a stacked layout of the mounting base, which compresses the flow channel space, shortens the pressure wave transmission path, and improves the system response speed.

Benefits of technology

It ensures flow accuracy and improves system response speed, meeting the flow stability requirements of high-precision processes such as semiconductor manufacturing, and reducing process debugging time and production capacity loss.

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Abstract

The utility model belongs to mass flow controller technical field, concretely relates to a superfast response pressure type mass flow controller, including mounting seat, gas flow path that sets up on mounting seat, set up laminar flow spare on gas flow path, valve controller, first sensor of setting in valve controller one side and second sensor of setting below laminar flow spare, laminar flow spare is located valve controller right below, and second sensor with measurement hole on laminar flow spare intercommunication. The utility model's superfast response pressure type mass flow controller converts gas into laminar flow state through laminar flow spare and cooperates double sensor and monitors pressure before and after laminar flow respectively to guarantee flow precision, and mounting seat adopts stacked type layout and integrates each component to compress flow channel space and shorten pressure wave transmission path, improves system response speed.
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