Wafer inspection jig

Abstract

The utility model discloses a wafer inspection fixture relates to wafer inspection technical field, include: jig body, be provided with first annular step, second annular step and third annular step on the jig body, the utility model production and processing, set up into the size meeting different wafer according to demand respectively with first annular step, second annular step and third annular step, when using, can place wafer on first annular step, second annular step or third annular step, because the step supports from the bottom ring side of wafer, therefore wafer end face inside will not contact with jig, and the contact area of wafer and jig is small, therefore when operating, the possibility of scratching wafer end face is lower, and the application can adapt to the spacing of different size wafers, and the adaptability is strong.

Description

Technical Field

[0001] This utility model relates to the field of wafer inspection technology, specifically a wafer inspection fixture. Background Technology

[0002] A wafer is a silicon wafer used to fabricate silicon semiconductor circuits; its raw material is silicon. High-purity polycrystalline silicon is dissolved, doped with silicon crystal seeds, and then slowly pulled out to form a cylindrical single-crystal silicon ingot. After grinding, polishing, and slicing, the silicon crystal ingot is formed into a silicon wafer, or crystal.

[0003] After production (e.g., wafers after lamination), wafers need to be inspected to ensure a high yield rate. Current wafer inspection methods involve placing a piece of paper on a microscope platform, with the wafer facing the paper, and then inspecting it through a microscope. However, this method is prone to scratching the wafer's surface if it is dirty or contaminated.

[0004] In view of this, there is an urgent need for a wafer inspection fixture. Summary of the Invention

[0005] To address the problems existing in the prior art, this utility model solves the problem using the following technical structure.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A wafer inspection fixture includes: a fixture body, a circular first groove on the fixture body, a circular second groove in the fixture body within the first groove, the bottom surface of the second groove being lower than the bottom surface of the first groove, and the first groove forming a first annular step in the circumferential direction of the second groove;

[0008] The fixture body has a circular third groove inside the second groove. The bottom surface of the third groove is lower than the bottom surface of the second groove. The second groove forms a second annular step in the circumferential direction of the third groove.

[0009] The fixture body has a circular hole in the third groove, and the third groove forms a third annular step in the circumferential direction of the circular hole.

[0010] The second annular step is provided with several first hollow holes.

[0011] The first perforated hole extends from the outside of the third ring step to the inside of the first ring step.

[0012] The third annular step is provided with several second hollow holes.

[0013] There are two second hollow holes, each of which is connected to two different first hollow holes, and the two second hollow holes are connected to the circular hole.

[0014] The two second perforated holes are arranged opposite each other.

[0015] The fixture body is provided with two third hollow holes in the circumference, and the two third hollow holes are respectively connected to two different first hollow holes.

[0016] The two third hollow holes are arranged opposite each other.

[0017] The first annular step, the second annular step, and the third annular step are coaxially arranged.

[0018] The fixture body is made of antistatic material.

[0019] The above-described structure of this utility model can achieve the following beneficial effects:

[0020] During production and processing, the first, second, and third annular steps are respectively set to meet the size of different wafers as required. In use, the wafer can be placed on the first, second, or third annular steps. Since the steps support the wafer from the bottom ring side, the inner side of the wafer end face will not contact the fixture. The contact area between the wafer and the fixture is small, so the possibility of scratching the wafer end face during operation is lower. In addition, this application can adapt to the limiting of wafers of different sizes, and has strong adaptability. Attached Figure Description

[0021] Figure 1 This is a top view of this embodiment;

[0022] Figure 2 This is a side sectional view of the structure in this embodiment;

[0023] Figure 3 This is a top view used in this embodiment;

[0024] Figure 4 This is a top view of another usage method in this embodiment.

[0025] In the figure: 1. Fixture body; 2. First annular step; 3. Second annular step; 4. Round hole; 5. Third annular step; 6. First hollow hole; 7. Second hollow hole; 8. Third hollow hole. Detailed Implementation

[0026] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0027] It should be noted that the terms "comprising" and "having" and any variations thereof in the specification, claims and accompanying drawings of this utility model are intended to cover non-exclusive inclusion. For example, a process, method, apparatus, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products or devices.

[0028] The following is in conjunction with the appendix Figure 1-4 This application will be described in further detail.

[0029] refer to Figures 1-4 A wafer inspection fixture is shown, comprising: a fixture body 1, a circular first groove on the fixture body 1, a circular second groove in the fixture body 1 within the first groove, the bottom surface of the second groove being lower than the bottom surface of the first groove, and a first annular step 2 formed in the circumferential direction of the first groove and the second groove.

[0030] The fixture body 1 has a circular third groove in the second groove. The bottom surface of the third groove is lower than the bottom surface of the second groove. The second groove forms a second annular step 3 in the circumferential direction of the third groove.

[0031] The fixture body 1 has a circular hole 4 in the third groove, and the third groove forms a third annular step 5 in the circumferential direction of the circular hole 4.

[0032] Based on the above structure, during production and processing, the first annular step 2, the second annular step 3, and the third annular step 5 are respectively set to conform to the dimensions of different wafers as required. In use, the wafer can be placed on the first annular step 2 (e.g., ...). Figure 3 As shown in Figure A), the second annular step 3 or the third annular step 5 (as shown in Figure A). Figure 4 As shown in Figure B, since the steps (first annular step 2, second annular step 3 and third annular step 5) support the wafer from the bottom annular side, the inner side of the wafer end face will not contact the fixture. The contact area between the wafer and the fixture is small, so the possibility of scratching the wafer end face during operation is lower. In addition, this application can adapt to the limiting of wafers of different sizes and has strong adaptability.

[0033] like Figure 1 As shown, the second annular step 3 is provided with a number of first hollow holes 6, which saves the material cost of the fixture and reduces the weight of the fixture; the first hollow holes 6 extend from the outside of the third annular step 5 to the inside of the first annular step 2. The advantage of this design is that the wafer on the third annular step 5 can be taken out from the circumference through the first hollow holes 6, which is convenient for operation.

[0034] like Figure 1 As shown, the third annular step 5 is provided with several second hollow holes 7, which saves on the material cost of the fixture and reduces its weight. In this embodiment, there are two second hollow holes 7, which are respectively connected to two different first hollow holes 6 and are connected to the circular hole 4. The advantage of this design is that it allows robots to support the wafer from the bottom of the wafer on the third annular step 5 through the first hollow holes 6 and the second hollow holes 7 and remove the wafer. In addition, for ease of operation, the two second hollow holes 7 are arranged opposite each other.

[0035] like Figure 1 As shown, the fixture body 1 is provided with two third hollow holes 8 in the circumference. The two third hollow holes 8 are respectively connected to two different first hollow holes 6. In this way, the material cost of the fixture is saved and the weight of the fixture is reduced. It can also facilitate the robotic arm to support the wafer in the circumference or bottom of the wafer on the first annular step 2 or the second annular step 3 through the third hollow holes 8 and the first hollow holes 6, which makes it easy to remove the wafer. In addition, for ease of operation, the two third hollow holes 8 are arranged opposite each other.

[0036] A further optimization is that the first annular step 2, the second annular step 3, the third annular step 5, the first groove, the second groove, and the third groove are coaxially arranged.

[0037] A further optimization is that the fixture body 1 is made of antistatic material.

[0038] In summary, during production and processing, the first annular step 2, the second annular step 3, and the third annular step 5 are respectively set to meet the size of different wafers as required. During use, the wafer can be placed on the first annular step 2, the second annular step 3, or the third annular step 5. Since the steps (the first annular step 2, the second annular step 3, and the third annular step 5) support the wafer from the bottom annular side, the inner side of the wafer end face will not contact the fixture. The contact area between the wafer and the fixture is small, so the possibility of scratching the wafer end face (front or back) during operation is lower. Furthermore, this application can adapt to the limiting of wafers of different sizes, and has strong adaptability.

[0039] Furthermore, by setting the first hollow hole 6, the second hollow hole 7, and the third hollow hole 8, this application saves on the material cost of the fixture, reduces the weight of the fixture, and facilitates the handling of wafers on the fixture by a robotic arm or a human.

[0040] The above are merely preferred embodiments of this application, and the present invention is not limited to the above embodiments. It is understood that other improvements and variations that can be directly derived or conceived by those skilled in the art without departing from the spirit and concept of the present invention should be considered to be included within the protection scope of the present invention.

Claims

1. A wafer inspection fixture, characterized in that, include: The jig body (1) has a circular first groove and a circular second groove in the first groove. The bottom surface of the second groove is lower than the bottom surface of the first groove, and the first groove forms a first annular step (2) in the circumferential direction of the second groove. The fixture body (1) has a circular third groove in the second groove. The bottom surface of the third groove is lower than the bottom surface of the second groove. The second groove forms a second annular step (3) in the circumferential direction of the third groove. The fixture body (1) has a round hole (4) in the third groove, and the third groove forms a third annular step (5) in the circumferential direction of the round hole (4).

2. The wafer inspection fixture according to claim 1, characterized in that: The second annular step (3) is provided with several first hollow holes (6).

3. A wafer inspection fixture according to claim 2, characterized in that: The first perforated hole (6) extends from the outside of the third annular step (5) to the inside of the first annular step (2).

4. A wafer inspection fixture according to claim 2, characterized in that: The third annular step (5) is provided with several second hollow holes (7).

5. A wafer inspection fixture according to claim 4, characterized in that: There are two second hollow holes (7), and the two second hollow holes (7) are respectively connected to two different first hollow holes (6), and the two hollow holes (7) are connected to the round hole (4).

6. A wafer inspection fixture according to claim 5, characterized in that: The two second perforated holes (7) are arranged opposite each other.

7. A wafer inspection fixture according to claim 2, characterized in that: The fixture body (1) is provided with two third hollow holes (8) in the circumferential direction, and the two third hollow holes (8) are respectively connected to two different first hollow holes (6).

8. A wafer inspection fixture according to claim 7, characterized in that: The two third perforated holes (8) are arranged opposite to each other.

9. A wafer inspection fixture according to claim 1, characterized in that: The first annular step (2), the second annular step (3), and the third annular step (5) are coaxially arranged.

10. A wafer inspection fixture according to claim 9, characterized in that: The fixture body (1) is made of antistatic material.

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