Constraint mechanism and robot with multidirectional constraints

Abstract

The utility model provides a kind of restraint mechanism and manipulator with multidirectional restraint, comprising: push rod, movably arranged in the body of manipulator and can be moved along the direction of approaching or away from wafer;At least one push block, rotatably arranged in the push rod, with continuous inclined peripheral surface in axial taper structure;Wherein, when the continuous inclined peripheral surface contacts with the wafer edge, the restraint force is formed by the preset inclination angle of the peripheral surface and is decomposed into vertical component force and radial component force, the vertical component force exerts vertical pre-pressure to limit the vertical displacement of the wafer when clamping, and the radial component force limits the horizontal displacement of the wafer.The utility model avoids the jump phenomenon caused by impact force or the wafer position deviation caused by centrifugal force in high-speed conveying process, improves the stability and reliability of clamping, and ensures that the wafer maintains posture fixed and position accuracy in conveying process.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to a constraint mechanism and manipulator with multi-directional constraints. Background Technology

[0002] In semiconductor manufacturing, wafer transfer robots are the core equipment for automated wafer transport, and their clamping stability directly affects wafer yield and production efficiency. Currently, the mainstream wafer clamping methods mainly include two types: vacuum adsorption and mechanical clamping.

[0003] Vacuum adsorption uses negative pressure to adsorb onto the wafer surface, which can achieve rapid gripping, but it is easily affected by particle contamination on the wafer surface, affecting the stability of the adsorption force, and there is a risk of detachment during high-speed movement or sudden power outages.

[0004] Mechanical clamping directly contacts the wafer edge through a mechanical structure, avoiding contamination of the wafer surface, but its clamping stability is highly dependent on the structural design.

[0005] Existing mechanical clamping structures typically employ a rigid stop + unidirectional push rod design: a fixed stop is placed at the end of the robotic arm's finger to restrict the lateral displacement of the wafer, while a straight push rod applies clamping force on the other side. However, this type of structure has the following shortcomings: First, the push rod is mostly a single contact point or planar contact, with a limited contact area with the wafer edge, and uneven distribution of clamping force can easily lead to local stress concentration on the wafer, causing edge damage; second, it lacks an effective vertical constraint mechanism, which can easily cause "wafer jumping" (i.e., the wafer briefly detaches from the clamping surface) due to impact force at the moment of clamping (especially when the wafer collides with the stop), or cause the wafer position to shift due to centrifugal force during high-speed transport.

[0006] In view of this, it is necessary to propose a constraint mechanism and a robot with multi-directional constraints to solve the above problems. Utility Model Content

[0007] The purpose of this invention is to provide a constraint mechanism and a robotic arm with multi-directional constraints to solve the technical problems of wafer jumping due to impact force during clamping and wafer falling during transport due to lack of continuous vertical constraint.

[0008] This utility model provides a constraint mechanism with multi-directional constraints, comprising: The push rod is movably mounted on the body of the robot and can move in the direction of approaching or moving away from the wafer; At least one push block is rotatably disposed on the push rod, having an axially tapered structure and a continuously inclined circumferential surface. When the continuously inclined peripheral surface contacts the edge of the wafer, a constraint force is formed by the preset inclination angle of the peripheral surface and decomposed into a vertical component force and a radial component force. The vertical component force applies a vertical preload during clamping to limit the vertical displacement of the wafer, and the radial component force limits the horizontal displacement of the wafer.

[0009] In one possible embodiment, the push rod is provided with a support shaft corresponding to the push block, and the push block is rotatably sleeved on the support shaft. In one possible embodiment, the pusher is rotatably mounted on the support shaft via a bearing.

[0010] In one possible embodiment, the push block has a stepped mounting hole extending vertically through it, and the outer periphery of the bearing is engaged within the mounting hole.

[0011] In one possible embodiment, the support shaft includes a shaft portion and a stepped portion at the bottom end of the shaft portion, the bearing is sleeved on the shaft portion and placed on the stepped portion, and a gap is formed between the push block and the push rod through the stepped portion.

[0012] In one possible embodiment, the bearing is locked to the support shaft by a fastener, and the bearing clamping limit is located between the head of the fastener and the stepped portion. In one possible embodiment, the axial cross-section of the pusher is an isosceles trapezoid; and / or, The angle of inclination between the peripheral side of the pusher and the vertical direction is in the range of 5°-6°.

[0013] In one possible embodiment, it further includes: A slide rail is provided on the robot arm and its orientation is consistent with the moving direction of the push rod, and the push rod is slidably mounted on the slide rail; A drive assembly is connected to the push rod drive and is used to drive the push rod to slide along the extension direction of the slide rail. In one possible embodiment, the push rod is Y-shaped and has a pair of symmetrically arranged fork arms and a connecting arm located at the connection of the pair of fork arms. The end of the connecting arm away from the fork arms is slidably mounted on the slide rail. The push block is at least one pair, and each pair of push blocks is located at the end of a pair of fork arms away from the connecting arm.

[0014] This utility model also provides a robotic hand, including: a body, fingers, and a constraint mechanism with multi-directional constraints as in any of the above embodiments. The beneficial effects of the multi-directional constraint mechanism provided by this utility model are as follows: the continuously inclined circumferential surface is in line contact with the edge of the wafer, and the constraint force is formed by the preset inclination angle of the circumferential surface and decomposed into vertical and radial components. The vertical component applies vertical pre-pressure during clamping to limit the vertical displacement of the wafer, and the radial component limits the horizontal displacement of the wafer. This avoids wafer jumping due to impact force or wafer position shift due to centrifugal force during high-speed transmission, thereby improving the stability and reliability of clamping and ensuring that the wafer maintains a fixed posture and positional accuracy during the transmission process. Attached Figure Description

[0015] Figure 1 This is a perspective view of the robotic arm of this utility model.

[0016] Figure 2 This is a plan view of the robotic arm of this utility model.

[0017] Figure 3 This is a diagram showing the state of the robotic arm of this invention when it is holding a wafer.

[0018] Figure 4 This is a schematic diagram of the push rod and push block in the constraint mechanism with multi-directional constraints of this utility model.

[0019] Figure 5 This is a partial exploded view of the push block in the constraint mechanism with multi-directional constraints of this utility model.

[0020] Figure 6 This is a partial cross-sectional view of the push block in the constraint mechanism with multi-directional constraints of this utility model.

[0021] Figure 7 This is a cross-sectional view of the push block in the constraint mechanism with multi-directional constraints of this utility model.

[0022] Explanation of reference numerals in the attached drawings: 100, constraint mechanism; 110, push rod; 111, fork arm; 112, connecting arm; 120, push block; 121, peripheral side; 122, mounting hole; 1221, first vertical wall; 1222, second vertical wall; 1223, horizontal wall; 123, gap; 130, support shaft; 131, shaft portion; 132, step portion; 133, fixing hole; 140, bearing; 141, inner ring; 142, outer ring; 150, fastener; 151, head; 152, rod portion; 160, slide rail; 170, slide plate; 180, drive assembly; 200, body; 300, finger; 400, stop; 500, wafer. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0024] To address the problems existing in the prior art, embodiments of this utility model provide a constraint mechanism with multi-directional constraints, see [link to relevant documentation]. Figures 1 to 3 The constraint mechanism 100 includes a push rod 110 and at least one push block 120. The push rod 110 is movably disposed on the body 200 of the robot arm and is capable of moving in a direction close to or away from the wafer 500. At least one push block 120 is rotatably disposed on the push rod 110. The push block 120 has an axially tapering structure from top to bottom and has a continuously inclined circumferential surface 121.

[0025] When the continuously inclined peripheral surface 121 contacts the edge of the wafer 500, a constraint force is formed by the preset inclination angle of the peripheral surface 121 and decomposed into vertical and radial components. The vertical component applies a downward vertical preload during clamping, counteracting the upward impact force generated by the collision between the wafer 500 and the pusher block 120, limiting the vertical displacement of the wafer 500, and preventing the wafer 500 from temporarily detaching from the clamping surface due to impact force, thus avoiding wafer skipping. During high-speed transport, the vertical preload also resists the effect of centrifugal force, preventing the wafer 500 from shifting its position due to centrifugal force. The radial component limits the horizontal displacement of the wafer 500, ensuring that the wafer 500 maintains a stable position during clamping and preventing the wafer 500 from falling due to lack of continuous vertical constraint. The combination of the horizontal and vertical constraint mechanisms forms a multi-directional constraint on the wafer 500. The peripheral side 121 makes line contact with the edge of the wafer 500. This combination of line contact and multi-directional constraint makes the clamping force distribution more uniform, effectively avoids local stress concentration, reduces the risk of edge breakage of the wafer 500, ensures that the wafer 500 is more stable during clamping and transfer, reduces the risk of loosening and position deviation, and ensures that the wafer 500 maintains a fixed posture and positional accuracy during the transfer process.

[0026] The specific structure and configuration of pusher block 120 will be explained in detail below.

[0027] In one embodiment, see Figure 5 and Figure 6The push rod 110 is provided with a support shaft 130 corresponding to the push block 120, and the push block 120 is rotatably sleeved on the support shaft 130. The support shaft 130 provides a stable support for the push block 120, ensuring the stability of the push block 120 during rotation. Further, see Figure 5 and Figure 6 The push block 120 is rotatably mounted on the support shaft 130 via the bearing 140. The bearing 140 reduces the friction between the push block 120 and the support shaft 130, making the push block 120 rotate more smoothly.

[0028] In one embodiment, see Figure 6 and Figure 7 The push block 120 has a stepped mounting hole 122 that runs vertically through it, and the outer periphery of the bearing 140 is engaged in the mounting hole 122. The outer periphery of the bearing 140 is tightly engaged in the stepped mounting hole 122, ensuring accurate installation and positioning, and improving the stability of the structure.

[0029] Further, see Figure 5 and Figure 6 The bearing 140 includes an inner ring 141 and an outer ring 142. The inner ring 141 of the bearing 140 is sleeved on the support shaft 130, and the outer ring 142 of the bearing 140 is engaged within the wall of the mounting hole 122. The inner ring 141 and outer ring 142 of the bearing 140 are respectively mounted on the support shaft 130 and the mounting hole 122 to ensure that the push block 120 can rotate smoothly around the support shaft 130.

[0030] Furthermore, see Figure 6 and Figure 7 The mounting hole 122 has a wall comprising a cylindrical first vertical wall 1221 and a cylindrical second vertical wall 1222, and an annular horizontal wall 1223 perpendicularly connected between the first and second vertical walls 1221 and 1222. The diameter of the second vertical wall 1222 is larger than the diameter of the first vertical wall 1221. The top surface of the outer ring 142 of the bearing 140 rests on the horizontal wall 1223, and the outer circumferential surface of the outer ring 142 rests on the second vertical wall 1222, thereby securing the outer ring 142 of the bearing 140 within the wall of the mounting hole 122. The bearing 140 also serves to support the push block 120.

[0031] In one embodiment, see Figure 5 and Figure 6The support shaft 130 includes a shaft portion 131 and a stepped portion 132 located at the bottom end of the shaft portion 131. The diameter of the stepped portion 132 is larger than the diameter of the shaft portion 131. The bearing 140 is sleeved on the shaft portion 131 and placed on the stepped portion 132. The stepped portion 132 forms a gap 123 between the push block 120 and the push rod 110. This gap 123 can prevent the push block 120 from directly contacting and rubbing against the push rod 110, making the push block 120 rotate more smoothly.

[0032] Further, see Figure 5 and Figure 6 The bearing 140 is locked and fixed to the support shaft 130 by fasteners 150. The bearing 140 is clamped between the head 151 and the stepped portion 132 of the fastener 150. The fasteners 150 and the stepped portion 132 provide a limiting and fixing function for the bearing 140. The bearing 140 is detachably installed on the support shaft 130, which is convenient for installation and subsequent maintenance and replacement. The fasteners 150 include bolts, screws, etc.

[0033] Furthermore, see Figure 5 and Figure 6 The fastener 150 includes a head 151 and a rod portion 152 located at the bottom end of the head 151. The top end of the support shaft 130 is provided with a fixing hole 133. After the bearing 140 is sleeved on the shaft portion 131 and placed on the step portion 132, the top surface of the bearing 140 is flush with the top surface of the support shaft 130. The fastener 150 is inserted into the fixing hole 133 through the mounting hole 122, so that the rod portion 152 is threaded into the fixing hole 133. The head 151 of the fastener 150 is pressed against the top surface of the bearing 140 and the top surface of the support shaft 130, so that the bearing 140 is pressed between the head 151 and the step portion 132 of the fastener 150. In one specific embodiment, see Figures 5 to 7 The push block 120 is in the shape of an inverted frustum, and its axial cross section is an isosceles trapezoid. The push block 120 has an upper end face and a lower end face that are arranged opposite to each other, as well as a peripheral side face 121 located between the upper end face and the lower end face. The diameter of the upper end face is larger than the diameter of the lower end face, and the push block 120 as a whole is tapering from top to bottom.

[0034] In another specific embodiment, see Figure 7 The tilt angle α between the peripheral side 121 of the push block 120 and the vertical direction is in the range of 5°-6°. This tilt angle design can realize the progressive guiding constraint of the wafer 500, while ensuring structural stability and constraining the wafer 500 located at different support heights.

[0035] The following is a detailed explanation of the specific settings of push rod 110.

[0036] In one embodiment, see Figure 2The constraint mechanism 100 also includes a slide rail 160 and a drive assembly 180. The slide rail 160 is mounted on the robot arm, and its orientation is consistent with the movement direction of the push rod 110. The push rod 110 is slidably mounted on the slide rail 160. The drive assembly 180 is drivenly connected to the push rod 110 and is used to drive the push rod 110 to slide along the extension direction of the slide rail 160. Specifically, the drive assembly 180 is a cylinder, an electric telescopic rod, etc.

[0037] The push block 120 makes line contact with the edge of the wafer 500. Combined with the elastic preload of the retractable push rod 110, it can provide stable downward pressure throughout the entire transfer process. Even when the robot moves at high speed or changes its posture, it can still constrain the vertical displacement of the wafer 500, significantly reducing the risk of the wafer 500 falling. In one specific embodiment, see Figure 2 and Figure 4 The push rod 110 is Y-shaped and has a pair of symmetrically arranged fork arms 111 and a connecting arm 112 located at the connection of the pair of fork arms 111. The end of the connecting arm 112 away from the fork arms 111 is slidably mounted on the slide rail 160. There is at least one pair of push blocks 120 and each pair of push blocks 120 is located at the end of the pair of fork arms 111 away from the connecting arm 112.

[0038] Further, see Figure 2 The slide rails 160 are a pair and symmetrically arranged. The constraint mechanism 100 also includes a slide plate 170 with both ends sliding on the pair of slide rails 160 respectively. The end of the push rod 110 away from the push block 120 is located in the middle of the slide plate 170. The drive mechanism is drivenly connected to the slide plate 170, that is, the drive end of the drive assembly 180 is rigidly connected to the slide plate 170.

[0039] Furthermore, see Figure 2 The end of the connecting arm 112 away from the fork arm 111 is located in the middle of the slide plate 170.

[0040] This utility model also provides a robotic arm, see [link]. Figure 1 and Figure 2 The robotic arm includes a body 200, fingers 300, and a constraint mechanism 100 with multi-directional constraints as described in any of the above embodiments. Further, see Figure 1 and Figure 2 The slide rail 160 and drive assembly 180 are located on the body 200, and the push rod 110 extends to the finger 300.

[0041] Furthermore, see Figure 1 and Figure 2 The finger 300 is provided with multiple stops 400, which together form a support space for supporting the wafer 500.

[0042] The following is a detailed explanation of the wafer 500 clamping process of the robotic arm of this utility model.

[0043] Combination Figures 1 to 3 The wafer 500 is placed within the support space enclosed by multiple stops 400. The drive assembly 180 starts working, and the drive end of the drive assembly 180 extends. The drive end of the drive assembly 180 drives the slide plate 170 to slide along the length direction of the slide rail 160. The slide rail 160 limits the movement path. The slide plate 170 drives the push rod 110 to move towards the wafer 500, so that the push block 120 on the push rod 110 abuts against the wafer 500, applying vertical and radial constraint forces to the wafer 500 to constrain the wafer 500 to maintain a stable state during the transfer process, thereby ensuring that the wafer 500 maintains a fixed attitude and positional accuracy during the transfer process.

[0044] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0045] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0046] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0047] While the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as set forth in the claims. Furthermore, the utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains.

Claims

1. A constraint mechanism with multi-directional constraints, characterized in that, include: The push rod (110) is movably disposed on the body (200) of the robot and is capable of moving in a direction toward or away from the wafer (500); At least one push block (120) is rotatably disposed on the push rod (110), having an axially tapered structure and a continuously inclined circumferential surface (121). When the continuously inclined peripheral side surface (121) contacts the edge of the wafer (500), a constraint force is formed by the preset tilt angle of the peripheral side surface (121) and decomposed into a vertical component force and a radial component force. The vertical component force applies a vertical preload during clamping to limit the vertical displacement of the wafer (500), and the radial component force limits the horizontal displacement of the wafer (500).

2. The constraint mechanism with multi-directional constraints according to claim 1, characterized in that, The push rod (110) is provided with a support shaft (130) corresponding to the push block (120), and the push block (120) is rotatably sleeved on the support shaft (130).

3. The constraint mechanism with multi-directional constraints according to claim 2, characterized in that, The pusher (120) is rotatably mounted on the support shaft (130) via a bearing (140).

4. The constraint mechanism with multi-directional constraints according to claim 3, characterized in that, The push block (120) has a stepped mounting hole (122) that runs vertically through it, and the outer periphery of the bearing (140) is fitted into the mounting hole (122).

5. The constraint mechanism with multi-directional constraints according to claim 4, characterized in that, The support shaft (130) includes a shaft portion (131) and a stepped portion (132) located at the bottom end of the shaft portion (131). The bearing (140) is sleeved on the shaft portion (131) and placed on the stepped portion (132). The stepped portion (132) forms a gap (123) between the push block (120) and the push rod (110).

6. The constraint mechanism with multi-directional constraints according to claim 5, characterized in that, The bearing (140) is locked and fixed to the support shaft (130) by a fastener (150), and the bearing (140) is clamped between the head (151) of the fastener (150) and the stepped portion (132).

7. The constraint mechanism with multi-directional constraints according to any one of claims 1-6, characterized in that, The axial cross-section of the pusher block (120) is an isosceles trapezoid; and / or, The angle of inclination between the peripheral side (121) of the push block (120) and the vertical direction is in the range of 5°-6°.

8. The constraint mechanism with multi-directional constraints according to any one of claims 1-6, characterized in that, Also includes: A slide rail (160) is provided on the manipulator and its orientation is consistent with the moving direction of the push rod (110). The push rod (110) is slidably mounted on the slide rail (160). A drive assembly (180) is driven to connect with the push rod (110) and is used to drive the push rod (110) to slide along the extension direction of the slide rail (160).

9. The constraint mechanism with multi-directional constraints according to claim 8, characterized in that, The push rod (110) is Y-shaped and has a pair of symmetrically arranged fork arms (111) and a connecting arm (112) located at the connection of the pair of fork arms (111). The end of the connecting arm (112) away from the fork arms (111) is slidably mounted on the slide rail (160). There is at least one pair of push blocks (120), and each pair of push blocks (120) is located at the end of the pair of fork arms (111) away from the connecting arm (112).

10. A robotic arm, characterized in that, include: The body (200), the finger (300), and the constraint mechanism (100) with multidirectional constraints as claimed in any one of claims 1-9.

Images