A water replenishing device for a vacuum pump

Abstract

The utility model provides a kind of vacuum pump water replenishing device, it is related to vacuum pump technical field.The vacuum pump water replenishing device includes: with the water inlet pipe of cleaning water and the water suction pipe of vacuum pump;The water inlet pipe of cleaning water is used to and the water supply pipeline of external cleaning water intercommunication, and the water suction pipe of vacuum pump is used to and vacuum pump intercommunication;And with liquid level pipe's liquid level detection mechanism;Liquid level pipe is arranged in the side of box, and with the inside of box intercommunication;First liquid level meter is arranged on the upper portion of liquid level pipe, and third liquid level meter is arranged in lower portion;Wherein, water inlet solenoid valve is arranged on the water inlet pipe of cleaning water, and it is signal connection with first liquid level meter and third liquid level meter;When first liquid level meter sends high liquid level signal, water inlet solenoid valve is closed;When third liquid level meter sends low liquid level signal, water inlet solenoid valve is opened.The utility model avoids that the impact and damage caused to vacuum pump by the too large flow rate of cleaning water.

Description

Technical Field

[0001] This utility model relates to the field of vacuum pump technology, specifically a vacuum pump water supply device. Background Technology

[0002] A screw vacuum pump is a dry vacuum pump that uses meshing, non-contact screw rotors rotating in opposite directions within the stator cavity to continuously compress gas from the inlet to the outlet to obtain a vacuum. It is oil-free, frictionless, low-noise, and can pump condensable gases and small amounts of dust. It is widely used in chemical, pharmaceutical, vacuum drying, semiconductor, and lithium battery processes.

[0003] In existing technologies, polysilicon production requires drying and vacuuming after acid washing and rinsing with pure water. The cleaning machine uses vacuuming for the final drying process. During this process, the screw vacuum pump needs to be cleaned internally with pure water to prevent acidic moisture and impurities from adhering to the screw and causing damage. However, current screw vacuum pumps use pure water for cleaning, with the inlet pipe directly connected to a pure water supply pipe at a pressure exceeding 0.4 MPa. When the valve is opened, the cleaning water rushes into the pump chamber at excessive velocity. Over time, this impacts the internal waterproof seals of the screw vacuum pump. Furthermore, due to insufficient exhaust velocity, water splashes inside the pump, further weakening the seals and allowing water to enter the bearings and even the oil tank, causing serious damage to the screw vacuum pump. Utility Model Content

[0004] This invention addresses the problem in existing screw vacuum pumps where cleaning water rapidly enters the pump chamber at excessive velocity, impacting the internal waterproof seal and causing water to splash inside the pump, leading to water entering the bearing positions and even the oil tank, causing serious damage. The invention provides a vacuum pump water supply device that automatically adjusts the internal liquid level to control the flow rate of cleaning water entering the pump chamber, preventing excessive flow rate from impacting and damaging the pump chamber.

[0005] The technical solution adopted in this utility model is:

[0006] A vacuum pump water supply device, comprising:

[0007] The housing has at least a cleaning water inlet pipe and a vacuum pump extraction pipe; the cleaning water inlet pipe is used to connect with an external cleaning water supply pipe, and the vacuum pump extraction pipe is used to connect with a vacuum pump.

[0008] A liquid level detection mechanism includes at least a liquid level tube; the liquid level tube is disposed on the side of the tank and communicates with the interior of the tank; a first liquid level gauge is disposed at the upper part of the liquid level tube and a third liquid level gauge is disposed at the lower part of the liquid level tube;

[0009] The cleaning water inlet pipe is equipped with an inlet solenoid valve, which is signal-connected to both the first and third level gauges. When the first level gauge sends a high level signal, the inlet solenoid valve closes; when the third level gauge sends a low level signal, the inlet solenoid valve opens.

[0010] Furthermore, one end of the cleaning water inlet pipe that extends into the interior of the box is positioned inside the box near the top wall.

[0011] Furthermore, one end of the vacuum pump's water extraction pipe that extends into the box is positioned inside the box near the bottom wall.

[0012] Furthermore, the top wall of the housing includes a fixed plate and a movable plate; the cleaning water inlet pipe and the vacuum pump water extraction pipe are both installed on the fixed plate; the movable plate is hinged to the fixed plate on one side near the middle of the top wall of the housing, and a handle is provided on the movable plate.

[0013] Furthermore, the cleaning water inlet pipe includes a first pipe section, a second pipe section, and a third pipe section connected in sequence; the first pipe section is connected to an external cleaning water supply pipe and is arranged perpendicular to the top wall of the tank; the second pipe section is arranged parallel to the top wall of the tank, the water inlet solenoid valve is arranged on the second pipe section, and the third pipe section is arranged perpendicularly through the top wall of the tank.

[0014] Furthermore, the water inlet solenoid valve includes a first water inlet solenoid valve and a second water inlet solenoid valve.

[0015] Furthermore, a retaining ring is provided at the connection between the cleaning water inlet pipe and the tank body.

[0016] Furthermore, a second level gauge is provided on the level tube near the first level gauge.

[0017] Furthermore, the liquid level tube has an opening at the top and is positioned above the top wall of the tank.

[0018] Furthermore, a drain pipe is provided on the side wall of the box near the bottom, and a drain solenoid valve is provided on the drain pipe.

[0019] The beneficial effects of this utility model are:

[0020] 1. This utility model, by setting up a housing, connects to an external cleaning water supply pipe via a cleaning water inlet pipe and to the cleaning water inlet of a screw vacuum pump via a vacuum pump suction pipe, temporarily storing and buffering the cleaning water within the housing. Furthermore, the liquid level detection mechanism, with its level pipe and level gauge, monitors the liquid level while controlling the opening and closing of the inlet solenoid valve on the cleaning water inlet pipe. This keeps the liquid level within the housing within a certain range, ensuring a stable flow rate of the cleaning fluid delivered from the vacuum pump suction pipe to the vacuum pump, with minimal impact. This solves the problems in existing screw vacuum pumps where cleaning water rapidly enters the pump chamber at excessive velocity, impacting the internal waterproof seal and causing water to splash inside the pump, leading to water entering the bearings or even the oil tank and causing serious damage. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a three-dimensional schematic diagram of the water replenishment device according to an embodiment of the present utility model;

[0023] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0024] Figure 3 for Figure 1 Enlarged view of point B in the middle;

[0025] Figure 4 This is a cross-sectional view of the water replenishment device according to an embodiment of the present invention.

[0026] Reference numerals: 100-box body, 110-cleaning water inlet pipe, 111-first pipe section, 112-second pipe section, 113-third pipe section, 114-first inlet solenoid valve, 115-second inlet solenoid valve, 116-fixed ring, 120-vacuum pump water extraction pipe, 130-fixed plate, 140-moving plate, 142-handle, 160-drain pipe, 162-drain solenoid valve;

[0027] 200-Liquid level detection mechanism, 210-Liquid level tube, 220-First liquid level gauge, 230-Second liquid level gauge, 240-Third liquid level gauge, 250-Adjustment knob. Detailed Implementation

[0028] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0029] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the scope of this invention.

[0030] The embodiments of the utility model will now be described in detail with reference to the accompanying drawings.

[0031] Example 1

[0032] Existing screw vacuum pumps require the use of pure water to clean the internal components during the vacuuming process to prevent acidic moisture and impurities from adhering to the screw and causing damage. However, current screw vacuum pumps use pure water for cleaning, with the inlet pipe directly connected at a pressure exceeding 0.4 MPa. When the valve is opened, the cleaning water rushes into the pump chamber rapidly. Due to the excessive flow rate, prolonged operation can impact the internal waterproof seals of the screw vacuum pump. Furthermore, insufficient internal exhaust velocity causes water to splash inside the pump, further weakening the internal seals and allowing water to enter the bearing housings and even the oil tank, resulting in severe damage to the screw vacuum pump.

[0033] To address the aforementioned problems in the prior art, this embodiment provides a vacuum pump water supply device. This device connects the cleaning water inlet of a screw vacuum pump to an external cleaning water supply pipe. This device automatically adjusts the internal liquid level to control the flow rate of the cleaning water entering the screw vacuum pump chamber, preventing excessive flow velocity from causing impact and damage to the pump chamber. Please refer to [link to relevant documentation]. Figures 1-4 The vacuum pump water replenishment device mainly includes: a housing 100 and a liquid level detection mechanism 200, etc.

[0034] The tank 100 is mainly used to collect and temporarily store the cleaning water supplied from the cleaning water supply pipe. For example... Figure 1As shown, the housing 100 is roughly rectangular in shape. A cleaning water inlet pipe 110 and a vacuum pump extraction pipe 120 are installed on the top wall of the housing 100. The cleaning water inlet pipe 110 extends outside the housing 100 to connect with an external cleaning water supply pipe, allowing cleaning water to enter. The end of the cleaning water inlet pipe 110 that extends inside the housing 100 is positioned near the top wall inside the housing 100 to facilitate water replenishment and avoid pressure issues from excessive depth. An inlet solenoid valve is installed on the cleaning water inlet pipe 110. The end of the vacuum pump extraction pipe 120 extends outside the housing 100 to connect with the cleaning water inlet of the vacuum pump, allowing cleaning water to exit. The end of the vacuum pump extraction pipe 120 that extends inside the housing 100 is positioned near the bottom wall inside the housing 100 to facilitate the extraction of cleaning water from the bottom of the housing 100.

[0035] The liquid level detection mechanism 200 is mainly used to monitor the cleaning water level inside the tank 100 and to provide signal feedback when the water level reaches a specified height. The liquid level detection mechanism 200 mainly includes a liquid level tube 210 and a liquid level gauge. The liquid level tube 210 is roughly L-shaped and is located on the side of the tank 100. It passes through the bottom of the side wall of the tank 100 and communicates with the interior of the tank 100, so that the liquid level in the liquid level tube 210 is level with the liquid level in the tank 100. The liquid level gauge mainly includes a first liquid level gauge 220 and a third liquid level gauge 240, which are used to monitor the liquid level in the liquid level tube 210. The first liquid level gauge 220 is located at the upper part of the liquid level tube 210 and is close to the top wall of the tank 100. The third liquid level gauge 240 is located at the lower part of the liquid level tube 210 and is close to the bottom wall of the tank 100. Both the first liquid level gauge 220 and the third liquid level gauge 240 are connected to the inlet solenoid valve for signal transmission, so as to control the opening and closing of the inlet solenoid valve.

[0036] One specific working method of this embodiment is as follows:

[0037] During the operation of the vacuum pump, firstly, the inlet solenoid valve on the cleaning water inlet pipe 110 is opened, connecting the internal chamber of the housing 100 with the external cleaning water supply pipe. Relying on the negative pressure of the connected vacuum pump, cleaning water is drawn into the housing 100. Next, the cleaning water is buffered inside the housing 100 before being slowly drawn into the vacuum pump through the vacuum pump suction pipe 120 for cleaning. When the water level inside the housing 100 rises to a certain height, triggering the first level gauge 220 to send a high level signal, the inlet solenoid valve on the cleaning water inlet pipe 110 receives the high level signal and automatically... The system automatically shuts off, stopping the water inlet pipe 110 from supplying water, and the liquid level inside the tank 100 gradually decreases. When the water level inside the tank 100 drops to a certain height, triggering the third level gauge 240 to send a low level signal, the water inlet solenoid valve on the water inlet pipe 110 automatically opens upon receiving the low level signal, thus resuming water supply to the water inlet pipe 110, and the liquid level inside the tank 100 gradually rises. During the rise and fall of the liquid level inside the tank 100, the liquid level is controlled within a certain range, thus ensuring a stable flow rate of the cleaning fluid delivered from the vacuum pump suction pipe 120 to the vacuum pump and minimizing impact force.

[0038] In this embodiment, the vacuum pump water replenishment device is configured with a housing 100, connected to an external cleaning water supply pipe via a cleaning water inlet pipe 110, and connected to the cleaning water inlet of the screw vacuum pump via a vacuum pump suction pipe 120. The cleaning water is temporarily stored and buffered within the housing 100. In conjunction with the level detection mechanism 200's level pipe 210 and level gauge, the device monitors the liquid level while controlling the opening and closing of the inlet solenoid valve on the cleaning water inlet pipe 110. This keeps the liquid level within the housing 100 within a certain range, ensuring a stable flow rate of the cleaning fluid delivered to the vacuum pump via the vacuum pump suction pipe 120 and minimizing impact. This solves the problems in the prior art where cleaning water rapidly enters the pump chamber at excessive speed, impacting the internal waterproof seal, and splashing inside the screw vacuum pump, causing water to enter the bearing positions or even the oil tank, resulting in serious damage to the screw vacuum pump.

[0039] Furthermore, in this embodiment, the top wall of the housing 100 includes a fixed plate 130 on one side and a movable plate 140 on the other side. The fixed plate 130 is generally rectangular, and both the cleaning water inlet pipe 110 and the vacuum pump extraction pipe 120 are mounted on it. The movable plate 140 is also generally rectangular, and its side near the center of the top wall of the housing 100 is hinged to the fixed plate 130. This allows the top of the housing 100 to be opened and closed by rotating the movable plate 140, facilitating cleaning or replacement of internal components when needed. A semi-circular handle 142 is provided on the outward-facing side of the movable plate 140, making it easier for users to rotate it. The cleaning water inlet pipe 110 includes a first pipe section 111, a second pipe section 112, and a third pipe section 113 connected in sequence. The first pipe section 111 connects to an external cleaning water supply pipe and is perpendicular to the top wall of the housing 100. The second pipe section 112 connects the first pipe section 111 and the third pipe section 113, and is arranged parallel to the top wall of the housing 100. A water inlet solenoid valve is mounted on the second pipe section 112. The water inlet solenoid valve includes a first water inlet solenoid valve 114 and a second water inlet solenoid valve 115. The first water inlet solenoid valve 114 and the second water inlet solenoid valve 115 are backups of each other. They open simultaneously when water replenishment is needed and close simultaneously when water replenishment stops, preventing damage to one solenoid valve from affecting the operation of the entire water replenishment device. The third pipe section 113 is arranged vertically through the top wall of the housing 100. A retaining ring 116 is provided at the connection between the third pipe section 113 and the housing 100. Due to the presence of multiple solenoid valves, the cleaning water inlet pipe 110 is relatively heavy; the retaining ring 116 enhances the stability of the connection between the cleaning water inlet pipe 110 and the housing 100.

[0040] Furthermore, in the liquid level detection mechanism 200 of this embodiment, the top opening of the liquid level pipe 210 is positioned higher than the top wall of the tank 100, thereby preventing cleaning water from overflowing from the liquid level pipe 210. Additionally, a second liquid level gauge 230 is provided on the liquid level pipe 210 near the first liquid level gauge 220. The first liquid level gauge 220 and the second liquid level gauge 230 serve as backups for each other, thus preventing the water level inside the tank 100 from becoming too high and causing cleaning water to overflow due to the failure of one liquid level gauge.

[0041] Furthermore, in this embodiment, a drain pipe 160 is provided on the side wall of the housing 100 near the bottom, and a drain solenoid valve 162 is provided on the drain pipe 160. When the vacuum pump stops working, the cleaning water in the housing 100 can be discharged through the drain pipe 160 by opening the drain solenoid valve 162.

[0042] Furthermore, in this embodiment, the first inlet solenoid valve 114, the second inlet solenoid valve 115, and the drain solenoid valve 162 are all waterproof solenoid valves to prevent cleaning water from entering the solenoid valve and causing a short circuit or damage to the solenoid valve. Additionally, the first level gauge 220, the second level gauge 230, and the third level gauge 240 are all capacitive level gauges. The sensing copper plate on one side of the capacitive level gauge is attached to the outer wall of the level tube 210 to detect changes in liquid level. The capacitive level gauge contains a capacitance detection chip, a relay, and a relay drive element to generate a liquid level signal. Simultaneously, the capacitive level gauge is equipped with an adjustment knob 250, which can adjust the detection sensitivity of the capacitive level gauge to adapt to different needs.

[0043] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A vacuum pump water supply device, characterized in that, Include: The housing (100) has at least a cleaning water inlet pipe (110) and a vacuum pump suction pipe (120); the cleaning water inlet pipe (110) is used to connect with an external cleaning water supply pipe, and the vacuum pump suction pipe (120) is used to connect with a vacuum pump. The liquid level detection mechanism (200) has at least a liquid level tube (210); the liquid level tube (210) is located on the side of the housing (100) and communicates with the interior of the housing (100); a first liquid level gauge (220) is provided on the upper part of the liquid level tube (210) and a third liquid level gauge (240) is provided on the lower part. The cleaning water inlet pipe (110) is equipped with an inlet solenoid valve, which is signal-connected to both the first level gauge (220) and the third level gauge (240). When the first level gauge (220) sends a high level signal, the inlet solenoid valve closes; when the third level gauge (240) sends a low level signal, the inlet solenoid valve opens.

2. The vacuum pump water supply device as described in claim 1, characterized in that, The end of the cleaning water inlet pipe (110) that extends into the box body (100) is located inside the box body (100) near the top wall.

3. The vacuum pump water supply device as described in claim 1, characterized in that, The end of the vacuum pump water pipe (120) that extends into the box (100) is located inside the box (100) near the bottom wall.

4. The vacuum pump water supply device as described in claim 1, characterized in that, The top wall of the housing (100) includes a fixed plate (130) and a movable plate (140); the cleaning water inlet pipe (110) and the vacuum pump water extraction pipe (120) are both installed on the fixed plate (130); the movable plate (140) is hinged to the fixed plate (130) on one side near the middle of the top wall of the housing (100), and a handle (142) is provided on the movable plate (140).

5. The vacuum pump water supply device as described in claim 1, characterized in that, The cleaning water inlet pipe (110) includes a first pipe section (111), a second pipe section (112), and a third pipe section (113) connected in sequence; the first pipe section (111) is connected to the external cleaning water supply pipe and is set perpendicular to the top wall of the box (100); the second pipe section (112) is set parallel to the top wall of the box (100), the water inlet solenoid valve is set on the second pipe section (112), and the third pipe section (113) is set perpendicularly through the top wall of the box (100).

6. The vacuum pump water supply device as described in claim 1, characterized in that, The water inlet solenoid valve includes a first water inlet solenoid valve (114) and a second water inlet solenoid valve (115).

7. The vacuum pump water supply device as described in claim 1, characterized in that, A retaining ring (116) is provided at the connection between the cleaning water inlet pipe (110) and the box body (100).

8. The vacuum pump water supply device as described in claim 1, characterized in that, A second level gauge (230) is provided on the level tube (210) near the first level gauge (220).

9. The vacuum pump water supply device as described in claim 1, characterized in that, The liquid level tube (210) has an opening at the top and is positioned above the top wall of the tank (100).

10. The vacuum pump water supply device according to any one of claims 1-9, characterized in that, A drain pipe (160) is provided on the side wall of the box (100) near the bottom, and a drain solenoid valve (162) is provided on the drain pipe (160).

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